• Title/Summary/Keyword: Air Bearing Stage

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Design and Control of Ultra-precision Dual Stage with Air bearings and Voice coil motor for nm scanning system (나노 정밀도 스캐닝 용 공기베어링과 보이스 코일 모터의 초정밀 이중 스테이지 설계 및 제어)

  • Kim K.H.;Choi Y.M.;Kim J.J.;Lee M.G.;Lee S.W.;Gweon D.G.
    • Proceedings of the Korean Society of Precision Engineering Conference
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    • 2005.06a
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    • pp.1883-1886
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    • 2005
  • In this paper, a decoupled dual servo (DDS) stage for ultra-precision scanning system with large working range is introduced. In general, dual servo systems consist of a fine stage for short range and a coarse stage for long range. The proposed DDS also consists of a $XY\theta$ fine stage for handling and carrying workpieces and one axis coarse stage. Its coarse stage consists of air bearing guide system and a coreless linear motor with force ripple. The fine has four voice coil motors(VCM) as its actuator. According to a VCM's nature, there are no mechanical connections between coils and magnetic circuits. Moreover, VCM doesn't have force ripples due to imperfections of commutation components of linear motor systems - currents and flux densities. However, due to the VCM's mechanical constraints the working range of the fine is about $25mm^2$. To break that hurdle, the coarse stage with linear motors is used to move the fine about 500mm. Because of the above reasons, the proposed DDS can achieve higher precision scanning than other stages with only one servo. With MATLAB's Sequential Quadratic Programming (SQP), the VCMs are optimally designed for the highest force under conditions and constraints such as thermal dissipations due to its coil, its size, and so on. And for their movements without any frictions, guide systems of the DDS are composed of air bearings. To get precisely their positions, a linear scale with 5nm resolution are used for the coarse stage's motion and three plane mirror laser interferometers with 5nm for the fine's $XY\theta$ motions. With them, on scanning the two stages have same trajectories. The control algorithm is named Parallel method. The embodied ultra-precision scanning system has sub 100nm following error and in-positioning stability.

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Treatment of ASR from End-of-Life Vehicles by Air and Gravimetric Separation (廢自動車 ASR의 風力 및 比中選別에 의한 處理 硏究)

  • Lee, Hwa-Young;Oh, Jong-Kee
    • Resources Recycling
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    • v.14 no.2
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    • pp.3-9
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    • 2005
  • A study on the air and gravity separation has been performed for the removal of chlorine containing materials from ASR of end-of-life vehicles. The gravity separation was also conducted on waste plastics collected from ASR. In this work, ASR were previously shredded to pass through 8 mm sieve prior to separation tests and the gravity separation of waste plastics was conducted for three different particle sizes. The two-stage air classification was conducted with the range of air flow rate of 9~20 M$^3$/hr at first stage and 25~34 M$^3$/hr at second stage, respectively. The fraction of overflow product was remarkably increased in the 2nd stage air classification because of high air flow rate while that of underflow product obtained from 1st stage air classification was found to be 62~66%. From the results of gravity separation on waste plastics, it was also found that the amount of the float product was much greater than sink product. It is believed that the gravity separation may be used very efficiently for the removal of calorine bearing materials from waste plastics.

Reinforcement for Bearing Capacity of PRD Steel Pile at Mudstone Area (이암지역에 근입된 PRD강관말뚝의 지지력 보강)

  • Kong, Jin-Young;Kang, Hee-Jin;Chun, Byung-Sik
    • Proceedings of the KSR Conference
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    • 2007.05a
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    • pp.1760-1769
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    • 2007
  • The cut slope sliding which has been frequently encountered in Pohang area has been reported due to the rapid reduction of shear strength in mudstone after being exposed to the air. Mudstone has characteristics that it has high enough strength and stiffness in a dry condition, but the strength and stiffness decrease in a wet condition with groundwater infiltration. The case study in this paper shows that mudstone which had enough strength in a boring stage has lost the strength after installing PRD steel pipe pile inducing an insufficient bearing capacity, which has been ascertained by the static load test. Test construction has been performed to investigate the most favorable method for increasing a pile bearing capacity in mudstone with various methods such as MSG (Micro Silica Grouting) around the tip and side of a pile, the perimeter grouting combined with Micro pile reinforcement, and concrete filling after tip reinforcing grouting. From the test construction, MSG has been turned out to be the most favorable method for increasing a pile bearing capacity in mudstone, which has been confirmed by the static load test.

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Development of a Measuring Device for Coefficient of Friction between Connection Parts in Vehicle Head Lamps (자동차 헤드램프내 체결부품사이의 마찰계수 실험장치 개발)

  • Baek, Hong;Moon, Ji-Seung;Park, Sang-Shin;Park, Jong-Myeong
    • Tribology and Lubricants
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    • v.35 no.1
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    • pp.59-64
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    • 2019
  • When slipping occurs between two materials, the coefficients of friction must be considered because these values determine the overall efficiency of the machine or slip characteristics. Therefore, it is important to find the coefficient of friction between two materials. This paper focuses on obtaining the coefficient of friction between an aiming bolt and a retainer located in the headlamps of a vehicle. This bolt supports the headlamp, and if the bolt is loosened by external vibration, the angle of the light will change and block the vision of pedestrians or other drivers. In order to study these situations, the coefficient of friction between aiming bolts and retainers needs to be measured. In addition, the coefficient of friction of materials used in the headlamp should be obtained. To determine these two factors, a new device is designed for two cases: surface-surface contact and surface-line contact. To increase reliability of the results, the device is designed using an air-bearing stage which uses compressed air as lubricant to eliminate the friction of the stage itself. Experiments were carried out by applying various vertical forces, and the results show that the coefficient of friction can be measured consistently. The procedure for designing the device and the results are discussed.

Positioning control error of 2-Axis Stage for Diamond Turning Machine (DTM가공을 위한 2축 Stage의 정밀 이송특성연구)

  • Lee E.S.;Park J.J.;Lee M.K.
    • Proceedings of the Korean Society of Precision Engineering Conference
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    • 2005.06a
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    • pp.309-312
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    • 2005
  • DTM (Diamond Turning Machine) is using for ultra precision manufacturing such as, plastic lens die or aspherical optics. This study is on a design of precision 2-axis stage for DTM. We designed and manufactured a back lash free stage using different weights and measured the positioning accuracy using Interferometer. Also, the 2-D moving accuracy is measured using the high magnification CCD technique. Then, the stage is tested with the machining of spherical and aspherical lens in a DTM with air bearing spindle. It was shown that the back lash free stage is effective for improving the positioning accuracy. Also, positioning control errors in motion control board were able to be found using the proposed stages system.

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Micropositioning of a Linear Motion Table with Magnetic Bearing Suspension (자기 베어링으로 지지 되는 직선운동 테이블의 초정밀 위치제어에 관한 연구)

  • 김의석;안형준;장인배;한동철
    • Proceedings of the Korean Society of Precision Engineering Conference
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    • 1995.10a
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    • pp.466-469
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    • 1995
  • This paper presents a design and performance of the 6 D.O.F linear motion table with a magnetic bearing suspension. The linear positioning of the table with a 150mm stroke is driven by a brushless DC Linear motor and the other attitudes of the stage are controlled by the analog PD controller with magnetic bearing actuators. Each magnetic bearing unit which consists of 3 electromagnets, 3 capacitance probes and 3 backup bearings affords controlled forces by detecting the air gap between the probes and guideways. An integral type capacitance probe amplifier is equipped on the upper plate of the table so that the probe line to the probe amplifier can be shorter therefore the problems due to the stray capacitance and noise can be reduced. Form the pitch-yaw errormeasured by the autocollimator, the vertical and horizont straightness errors of the table are derived that they are maintained below 1.mu. m over 100mm stroke. The positioning accuracy of the linear motion is maintained below 2 .mu. m and the repeatability error is below 1 .mu. m

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Development of Advanced TurboBlowers Using High-Spped BLDC Motors and Foil Air Bearings (차세대 신개념 터보블로워의 세계최초 상품화 개발)

  • Oh, Jongsik;Lee, Heonseok
    • 유체기계공업학회:학술대회논문집
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    • 2002.12a
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    • pp.177-182
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    • 2002
  • In the paper, the development of high-speed industrial turbo blowers with foil air bearings is presented as a first successful commercialization in the world. Their target market is various from wastewater treatment to cement factory processes which require compressed air ranging between 0.6 and 0.8 bar gauge. Employing the state-of·the-art technology of the high-speed BLDC motors, the bump-type foil air bearings and the high- efficient turbo impellers/diffusers, so much compact, efficient and silent blower machines of a single stage are now available in the market, aiming to replace the existing inefficient, bulky and noisy ones, such as roots blowers. The first production lines are established fur 25,75 and 150 hp class blowers. Rotational speeds from about 20,000 to 80,000 rpm are realized directly from the high-speed BLDC motors without any gear boxes, and no lubrication oil is required. A brief introduction of design, manufacture and test results is presented fur mechanical, electrical and aerodynamic performance.

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Ultra high precision Dual stage system Using Air bearing and VCM for Nano level Scanning (VCM을 이용한 나노 정밀도 스캐닝 용 초정밀 이중 스테이지)

  • Kim Ki-Hyun;Gweon Dae-Gab;Choi Young-Man;Kim Dong-Min;Nam Byoung-Uk;Lee Suk-Won;Lee Moon-Gu
    • Journal of the Korean Society for Precision Engineering
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    • v.22 no.5 s.170
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    • pp.103-112
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    • 2005
  • This paper presents one-axis high precision scanning system and illustrates the design of modified $X-Y-{\theta}$ stage as a tracker using VCM and commercialized air bearings for it. The scanning system for 100nm resolution is composed of the 3-axis stage and one axis long stroke linear motor stage as a follower. In this study a previous proposed and presented structure of VCM for the fine stage is modified. The tracker has 3 DOF($X-Y-{\theta}$ motions by four VCM actuators which are located on the same plane. So 4 actuating forces are suggested and designed to create least pitch and roll motions. This article will show about the design especially about optimal design. The design focus of this fine stage is to have high acceleration to accomplish high throughput. The optimal design of maximizing acceleration is performed in restrained size. The most sensitive constraint of this optimal design is heat dissipation of coil. There are 5 design variables. Because the relationship between design variables and system parameters are quite complicated, it is very difficult to set design variables manually. Due to it, computer based optimal design procedure using MATLAB is used. Then, this paper also describes the procedures of selecting design variables for the optimal design and a mathematical formulation of the optimization problem. Based on the solution of the optimization problem, the final design of the stage is also presented. The results can be verified by MAXWELL. The designed stage has the acceleration of about 5 $m/s^{2}$ with 40kg total mass including wafer chuck and interferometer mirror. And the temperature of coil is increased $50^{\circ}C$. In addition, the tracker is controlled by high precision controller system with HP interferometer for it and linear scaler for the follower. At that time, the scanning system has high precision resolution about 5nm and scanning resolution about 40nm in 25mm/s constant speed

Dynamic Response of 50kW Turbo-Generator with Super Critical Rotor supported on a Squeeze Film Damper- Bearing (스퀴즈필름 댐퍼-베어링에 장착된 50kW 터보 제너레이터 초임계 로터의 동적응답)

  • 최상규;김영철;이동환
    • Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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    • 2001.05a
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    • pp.521-527
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    • 2001
  • The dynamic performance analyses and tests for a 50kW turbo-generator (KIMM-TG50) were carried out. The operating concept of this machine is that it gets the initial driving force from the built-in motor-generator until it reaches its self-sustaining speed of 40,000 rpm, and then the driving mode is changed to self-operating mode by the combustor installed between the centrifugal compressor and the turbine. Due to winding mistake of motor-generator, the system could go only up to 22000 rpm by the motor so that high pressure air externally fed into the turbine was utilized to get the system to run up to 62,000 rpm thereafter. The vibration data collected during the tests revealed that the first bending critical speed is in near 5,600 rpm as predicted in the design stage of the rotor-bearing system, and that there were no other identifiable critical speeds up until 62,000 rpm due to high damping from the squeeze film damper-bearings supporting the rotor. This paper presented some of the experimental results along with dynamic performance predictions made in the design stage as a part of progress being made.

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Development and Evaluation of Ultra-precision Desktop NC Turning Machine (초정밀 데스크탑 마이크로 NC 선반 개발 및 성능평가)

  • Ro, Seung-Kook;Park, Jong-Kweon;Park, Hyun-Duk;Kim, Yang-Keun
    • Journal of the Korean Society of Manufacturing Technology Engineers
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    • v.22 no.4
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    • pp.747-754
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    • 2013
  • This study introduces a recently designed desktop-sized NC turning system and its components. This machine is designed for the ultra-precise turning of parts with a diameter of 0.5-20 mm with minimum space usage for the machine. This study aims to achieve submicron-level accuracy of movements and good rigidity of the machine for precision machining using the desktop-sized machine. The components such as the main machine structure, air bearing servo spindle, and XZ stage with needle roller guides are designed, and the designed machine is built with a PC-based CNC controller. Its static and dynamic stiffness performances and positioning resolutions are tested. Through machining tests with single-crystal diamond tools, a form error less than $0.8{\mu}m$ and surface roughness (Ra) of $0.03{\mu}m$ for workpieces are obtained.