• Journal of the Korean Recycled Construction Resources Institute
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• v.2 no.1
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• pp.113-119
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• 2006

It is now established that more than two types of blended aggregate have beneficial effects on quality and supply of concrete in the long run. However, studies on blended aggregate have not widely been progressive and the evaluation method of its most favorable mixture proportion is still needed. Therefore this study investigated the most favorable mixture proportion through the physical experiment of fresh and hardened state's cement mortar, in response to three types of composite ratio, natural fine aggregate(Ns), crushed fine aggregate(Cs) and recycled fine aggregate(Rs). Test showed that increase of blending ratio of Ns and Cs improved fluidity of mot1ar. For the properties of compressive and flexural strength, mortar blending Ns and Cs properly, exhibited similar value to one using only Cs, while mortar mixing Rs showed lower strength value as less as 6% of control one. Mortar using only Rs exhibited the largest drying shrinkage value. In addition, even thought it is not a clear quantitative analysis, technical-imaging-skill presenting the most favorable mixture proportion 3-dimensionally is proposed in this research, in order to notify the proportion easily.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2004.07a
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• pp.243-246
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• 2004

W CMP 공정에서 abrasive 의 size 및 shape 에 따른 CMP 거동에 대해 관찰하였으며, 주요 제거 막질인 W 막질과 stopping layer 로 사용되는 Oxide 막질에 대한 압력(P)과 상대 속도(V) 영향성을 관찰하였다. CMP 제거량이 입자의 size 변화에 의존한다는 기존의 이론과는 달리 응집도(aggregate ratio) 변화가 주요 변수임을 밝혀 내었다. 한편, 각 막질에 대한 P,V 영향성 평가를 통해, 변형된 Prestonian equation 이 abrasive size 및 shape 에 상관없이 W 막질의 제거 거동을 설명하는데 중요한 역할을 수행함을 보였다. 그렇지만, W CMP 공정에서 stopping layer 로 사용되는 oxide 막질의 거동을 설명하는 데에는 어려움이 있었으며, 특히 P,V 에 의한 비선형적 removal rate(RR) 거동발생으로 인해 기존의 이론치와는 많은 차이를 나타내었다. 또한, abrasive size 와 shape 에 따라서도 복잡한 거동을 나타낸다.