• Proceedings of the Korean Society For Composite Materials Conference
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• 1999.11a
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• pp.134-138
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• 1999

For the stable operation of high speed aerostatic spindle, the low rotational inertia and high damping ratio of spindle shafts as well as high fundamental natural frequency are indispensable. Conventional steel spindles are not appropriate for very high speed operation because of their high rotational inertia and low damping ratio. In this study, the composite spindles with aerostatic bearing were designed and manufactured with carbon fiber/epoxy composite. The fundamental natural frequency of the composite spindle was evaluated through the modal testing.

• Tribology and Lubricants
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• v.24 no.1
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• pp.34-43
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• 2008

In this paper, an actively controlled aerostatic bearing is studied to overcome the defects of air bearing such as low stiffness and damping coefficients. The actively controlled aerostatic bearing is composed of aerostatic bearings, non-contact type of displacement sensors, piezoelectric actuators and controllers. The cylindrical capacitance sensor (CCS) is used as the displacement sensor. The reason for using CCS instead of the commercial gap sensor is that it can give us the pure error motion of the spindle because it removes the roundness error or the geometric errors in the spindle. The controller is designed by the state space equation and quadratic optimal control theory. The characteristic data of the actively controlled aerostatic bearing system in the frequency domain are presented and the stiffness and damping coefficients of the bearing are mentioned. This paper shows the possibility to reduce the motion error up to 6000 rpm.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2013.05a
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• pp.39-40
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• 2013

• Proceedings of the KSME Conference
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• 2004.04a
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• pp.1099-1104
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• 2004

As consumer in optics, electronics, aerospace and electronics industry grow, the demand for ultra precision aspherical surface lens increases higher. To enhance the precision and productivity of ultra precision aspherical surface micro lens, the following specification of ultra precision grinding system is required: the highest rotational speed of the grinder is 100,000rpm and its turning accuracy is $0.1{\mu}m$, positioning accuracy is $0.1{\mu}m$. The development process of the grinding system for the ultra precision aspherical surface micro lens for optoelectronics industry is introduced. In the work reported in this paper, an intelligent grinding system for ultra precision aspherical surface machining was designed by considering the factors affecting the surface roughness and profiles accuracy. An aerostatic form was adopted to build the spindle of the workpiece and the spindle of grinder and ultra precision LM guide way was adopted in this system.

• Journal of the Korean Society for Precision Engineering
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• v.32 no.2
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• pp.135-140
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• 2015

It is an important thing for a designer to simulate and predict the performance of a spindle and a rotary table. In addition to the general performance such as static stiffness, the error motion performance information is beneficial to the designer in many cases. However for an aerostatic bearing the fluid film physical status should be calculated in order to simulate those performances and the calculation time is another obstacle for a simple performance simulation. In this paper the investigation on experiment and simulation is performed in order to find a more effective simulation method for the rotational error motion.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.25 no.11
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• pp.1767-1776
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• 2001

For the stable operation of high speed air spindle, the low rotational inertia and high damping ratio of spindle shafts as well as high fundamental natural frequency are indispensable. Conventional steel spindles are net appropriate for very high speed operation because of their high rotational inertia and low damping ratio. In this study, a high speed spindle composed of carbon fiber epoxy composite shaft and steel flange was designed for maximum critical speed considering minimum static deflection and radial expansion due to bending load and centrifugal force during high speed relation. The stacking angle and the stacking thickness of the composite shaft and the adhesive bonding length of the 7teel flange were selected through vibrational analysis considering static and thermal loads due to temperature rise.

• Tribology and Lubricants
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• v.39 no.1
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• pp.28-34
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• 2023

Because of their cleanliness, low friction, and high stiffness, aerostatic bearings are used in numerous applications. Aerostic bearings that use porous materials as means of flow restriction have higher stiffness than other types of bearings and have been successfully applied as guide bearings, which have high motion accuracy requirements. However, the performances of porous bearings exhibit strong nonlinearity and can vary considerably depending on design parameters. Therefore, accurate prediction of the performance characteristics of porous bearings is necessary or their successful application. This study presents a porous bearing design and performance analysis for a spindle used in wafer polishing. The Reynolds and Darcy flow equations are solved to calculate the pressures in the lubrication film and porous busing, respectively. To verify the validity of the proposed analytical model, the calculated pressure distribution in the designed bearing is compared with that derived from previous research. Additional parametric studies are performed to determine the optimal design parameters. Analytical results show that optimal design parameters that obtain the maximum stiffness can be derived. In addition, the results show that cross-coupled stiffness increases with rotating speed. Thus, issues related to stability should be investigated at the design stage.

• Journal of the Korean Society for Precision Engineering
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• v.28 no.3
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• pp.285-291
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• 2011

The error motion of a machine tool spindle directly affects the surface errors of machined parts. The error motions of the spindle are not desired errors in the three linear direction motions and two rotating motions. Those are usually due to the imperfect of bearings, stiffness of spindle, assembly errors, external force or unbalance of rotors. The error motions of the spindle have been needed to be decreased to desired goal of spindle's performance. The level of error motion is needed to be estimated during the design and assembly process of the spindle. In this paper, the estimation method for the five degree of freedom (5 D.O.F) error motions of the spindle is suggested. To estimate the error motions of the spindle, waviness of shaft and bearings, external force model was used as input data. And, the estimation models are considering geometric relationship and force equilibrium of the five degree of the freedom. To calculate error motions of the spindle, not only imperfection of the shaft, bearings, such as rolling element bearing, hydrostatic bearing, and aerostatic bearing, but also driving elements such as worm, pulley, and direct driving motor systems, were considered.

• Design & Manufacturing
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• v.2 no.1
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• pp.33-38
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• 2008

As consumer in optics, electronics, aerospace and electronics industry grow, the demand for ultra precision aspherical surface lens increases higher. Precision turning with single-diamond tools has a long history of development for fabrication of optical quality surfaces since the advent of aerostatic rotary spindles and precise linear motion guide ways. To enhance the precision and productivity of ultra precision aspherical surface micro lens, the following specification of ultra precision grinding system is required: the highest rotational speed of the grinder is 100,000rpm and its turning accuracy is $0.1{\mu}m$, positioning accuracy is $0.1{\mu}m$. The development process of the grinding system for the ultra precision aspherical surface micro lens for optoelectronics industry is introduced. In the work reported in this paper, an intelligent grinding system for ultra precision aspherical surface machining was designed by considering the factors affecting the surface roughness and profiles accuracy. An aerostatic form was adopted to build the spindle of the workpiece and the spindle of grinder and ultra precision LM guide way was adopted in this system. And this paper deals with mirror grinding of an aspheric surface micro lens by resin bonded diamond wheel and spherical lens of BK7. It results was that a form accuracy of $0.6{\mu}m$ P-V and a surface roughness of $0.006{\mu}m$ Rmax.

• Proceedings of the KSME Conference
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• 2003.11a
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• pp.1793-1797
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• 2003

After the micro turning lathe was developed in the last year by AMR Laboratory in Yeungnam university, a micromilling machine is developed for micro/meso machining. This machine is integrated with PZT-driven micro-sliders, micro-linear encoders, aerostatic spindle which has maximum 150,000 rpm. It is applicable to milling and drilling of micro scale. This paper presents the possibility of micro/meso machining and characteristics of micro end milling process by using micro machine. A machining of micro parts using 0.2 mm flat end mill was achieved by micro-milling machine. Experimental results show the machining capability and positional accuracy of this machine is good enough for machining micro parts.