• Tribology and Lubricants
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• v.24 no.1
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• pp.34-43
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• 2008

In this paper, an actively controlled aerostatic bearing is studied to overcome the defects of air bearing such as low stiffness and damping coefficients. The actively controlled aerostatic bearing is composed of aerostatic bearings, non-contact type of displacement sensors, piezoelectric actuators and controllers. The cylindrical capacitance sensor (CCS) is used as the displacement sensor. The reason for using CCS instead of the commercial gap sensor is that it can give us the pure error motion of the spindle because it removes the roundness error or the geometric errors in the spindle. The controller is designed by the state space equation and quadratic optimal control theory. The characteristic data of the actively controlled aerostatic bearing system in the frequency domain are presented and the stiffness and damping coefficients of the bearing are mentioned. This paper shows the possibility to reduce the motion error up to 6000 rpm.

• Journal of the Korean Society for Precision Engineering
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• v.32 no.2
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• pp.135-140
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• 2015

It is an important thing for a designer to simulate and predict the performance of a spindle and a rotary table. In addition to the general performance such as static stiffness, the error motion performance information is beneficial to the designer in many cases. However for an aerostatic bearing the fluid film physical status should be calculated in order to simulate those performances and the calculation time is another obstacle for a simple performance simulation. In this paper the investigation on experiment and simulation is performed in order to find a more effective simulation method for the rotational error motion.

• Journal of the Korean Society for Precision Engineering
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• v.25 no.6
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• pp.134-142
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• 2008

In this paper, we propose a precise linear motion stage supported by magnetically preloaded air bearings. The eight aerostatic bearings with rectangular carbon porous pads were located only one side of vertical direction under the platen where four bearings are in both sides of horizontal direction as wrap-around-design, and this gives simpler configuration than which constrained by air bearings for all direction. Each of the magnetic actuators has a permanent magnet generating static magnetic flux far required preload and a coil to perturb the magnetic farce resulting adjustment of air- bearing clearance. The characteristics of porous aerostatic bearing are analyzed by numerical analysis, and analytic magnetic circuit model is driven for magnetic actuator to calculate preload and variation of force due to current. A 1-axis linear stage motorized with a coreless linear motor and a linear encoder was designed and built to verify this design concept. The load capacity, stiffness and preload force were examined and compared with analysis. With the active magnetic preloading actuators controlled with DSP board and PWM power amplifiers, the active on-line adjusting tests about the vertical, pitching and rolling motion were performed. It was shown that motion control far three DOF motions were linear and independent after calibration of the control gains.

• Wind and Structures
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• v.25 no.6
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• pp.507-535
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• 2017

In the strong wind shutdown state, the blade position significantly affects the streaming behavior and stability performance of wind turbine towers. By selecting the 3M horizontal axis wind turbine independently developed by Nanjing University of Aeronautics and Astronautics as the research object, the CFD method was adopted to simulate the flow field of the tower-blade system at eight shutdown positions within a single rotation period of blades. The effectiveness of the simulation method was validated by comparing the simulation results with standard curves. In addition, the dynamic property, aerostatic response, buckling stability and ultimate bearing capacity of the wind turbine system at different shutdown positions were calculated by using the finite element method. On this basis, the influence regularity of blade shutdown position on the wind-induced response and stability performance of wind turbine systems was derived, with the most unfavorable working conditions of wind-induced buckling failure of this type of wind turbines concluded. The research results implied that within a rotation period of the wind turbine blade, when the blade completely overlaps the tower (Working condition 1), the aerodynamic performance of the system is the poorest while the aerostatic response is relatively small. Since the influence of the structure's geometrical nonlinearity on the system wind-induced response is small, the maximum displacement only has a discrepancy of 0.04. With the blade rotating clockwise, its wind-induced stability performance presents a variation tendency of first-increase-then-decrease. Under Working condition 3, the critical instability wind speed reaches its maximum value, while the critical instability wind speed under Working condition 6 is the smallest. At the same time, the coupling effect between tower and blade leads to a reverse effect which can significantly improve the ultimate bearing capacity of the system. With the reduction of the area of tower shielded by blades, this reverse effect becomes more obvious.

• Journal of the Korean Society for Precision Engineering
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• v.21 no.7
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• pp.185-194
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• 2004

In order to analyze the motion errors of the aerostatic stage, it is necessary to consider the influence of the moment variation occurred inside the pads. In this paper, a motion error analysis method utilizing the transfer functions on the reaction force and moment is proposed, and general characteristics of the transfer functions are discussed. Calculated motion errors by the proposed method show good agreement with the ones calculated by Multi fad Method, which is considered the entire table as an analysis object. Also, by the introduction of the transfer function of motion errors, which represent the relationship between the spatial frequency components of the rail form error and motion errors, motional characteristics of the porous aerostatic stage can be generalized. In detail, the influence of the spatial frequencies is analyzed qualitatively, and the patterns of the insensitive frequencies which almost do not affect the linear motion error or angular motion error according to the rail length ratio and the number of the pad are verified. The relationship between the moment variation occurred inside the pads and the motion errors is also verified together.

• 연구논문집
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• s.34
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• pp.101-112
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• 2004

In order to analyze the motion errors of the aerostatic stage, it is necessary to consider the influence of the moment variation occurredinside the pads. In this paper, a motion error anaysis method utilizing the transfer functions on the reaction force and moment is proposed, and general characteristics of the transfer functions are discussed. Calculated motion errors by the proposed method show good agreement with the ones calculated by Multi Pad Method, which is considered the entire table as an analysis object. Also, by the introduction of the transfer function of motion errors, which represent the relationship between the spatial frequency components of the rail form error and motion errors, motional characteristics of the porous aerostatic stage can be generalized. In detail, the influence of the spatial frequencies is analyzed quantatively, and the patterns of the insensitive frequencies which almost do not affect the linear motion error or angular motion error according to the rail length ratio and the number of the pad are verified. The relationship between the moment variation occurred inside the pads and the motion errors is also verified together.

• Tribology and Lubricants
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• v.39 no.1
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• pp.28-34
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• 2023

Because of their cleanliness, low friction, and high stiffness, aerostatic bearings are used in numerous applications. Aerostic bearings that use porous materials as means of flow restriction have higher stiffness than other types of bearings and have been successfully applied as guide bearings, which have high motion accuracy requirements. However, the performances of porous bearings exhibit strong nonlinearity and can vary considerably depending on design parameters. Therefore, accurate prediction of the performance characteristics of porous bearings is necessary or their successful application. This study presents a porous bearing design and performance analysis for a spindle used in wafer polishing. The Reynolds and Darcy flow equations are solved to calculate the pressures in the lubrication film and porous busing, respectively. To verify the validity of the proposed analytical model, the calculated pressure distribution in the designed bearing is compared with that derived from previous research. Additional parametric studies are performed to determine the optimal design parameters. Analytical results show that optimal design parameters that obtain the maximum stiffness can be derived. In addition, the results show that cross-coupled stiffness increases with rotating speed. Thus, issues related to stability should be investigated at the design stage.

• Tribology and Lubricants
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• v.6 no.2
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• pp.60-67
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• 1990

최근 전자 및 광학 분야에 있어서의 눈부신 발전은 다면경 가공기나 초정밀 연삭기와 같은 초정밀 가공기계의 개발과 실용화에 힘입은 바 크다. 이러한 초정밀 가공기의 성능을 좌우하는 핵심 요소로서 추축계를 들수 있으며, 비교적 소형 경량의 공박물을 가공하는 기계의 주축용 베어링으로는 오일 베어링을 대신하여 공기 베어링이 점차 널리 사용되고 있다. 이러한 가공기에 많이 사용되는 외부 가압 공기 베어링은 동압 공기 베어링과는 달리, 외부에서 가압된 압축공기에 의하여 공기막을 형성하므로, 시동과 정지시 마멸이 없고 저속에서도 비교적 높은 하중 지지력을 얻을 수 있으며, 오일 베어링과 비교하여서는 발열이 적고 윤활제의 유출에 의한 오염의 위험이 없다는 특성외에 공기막에 의한 평균화 효과에 의하여 고정도의 운전이 가능하다는 장점이 있다. 본 연구에서는 점급기원의 가정하게 직접 수치해법을 사용하는 해석 프로그램을 작성하여, 무차원화된 설계 변수들에 대한 외부가압 공기베어링의 정$\cdot$동특성수들을 구하고자 한다.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.25 no.11
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• pp.1767-1776
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• 2001

For the stable operation of high speed air spindle, the low rotational inertia and high damping ratio of spindle shafts as well as high fundamental natural frequency are indispensable. Conventional steel spindles are net appropriate for very high speed operation because of their high rotational inertia and low damping ratio. In this study, a high speed spindle composed of carbon fiber epoxy composite shaft and steel flange was designed for maximum critical speed considering minimum static deflection and radial expansion due to bending load and centrifugal force during high speed relation. The stacking angle and the stacking thickness of the composite shaft and the adhesive bonding length of the 7teel flange were selected through vibrational analysis considering static and thermal loads due to temperature rise.

• Journal of the Korean Society for Precision Engineering
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• v.28 no.3
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• pp.285-291
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• 2011

The error motion of a machine tool spindle directly affects the surface errors of machined parts. The error motions of the spindle are not desired errors in the three linear direction motions and two rotating motions. Those are usually due to the imperfect of bearings, stiffness of spindle, assembly errors, external force or unbalance of rotors. The error motions of the spindle have been needed to be decreased to desired goal of spindle's performance. The level of error motion is needed to be estimated during the design and assembly process of the spindle. In this paper, the estimation method for the five degree of freedom (5 D.O.F) error motions of the spindle is suggested. To estimate the error motions of the spindle, waviness of shaft and bearings, external force model was used as input data. And, the estimation models are considering geometric relationship and force equilibrium of the five degree of the freedom. To calculate error motions of the spindle, not only imperfection of the shaft, bearings, such as rolling element bearing, hydrostatic bearing, and aerostatic bearing, but also driving elements such as worm, pulley, and direct driving motor systems, were considered.