• 제목/요약/키워드: Actuator Surface Method

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열풍동형 폴리실리콘 마이크로 액츄에이터의 제작 및 특성 분석 (Fabrication of thermally driven polysilicon micro actuator and its characterization)

  • 이종현
    • 한국정밀공학회:학술대회논문집
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    • 한국정밀공학회 1996년도 춘계학술대회 논문집
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    • pp.146-150
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    • 1996
  • A thermal micro actualtor has been fabricated using surface micromachining techniques. It consists of doped ploysilicon as a moving part and TEOS(Tetra Ethyl Ortho Silicate) as a sacrificial layer. The polysilicon was annealed for the reduction of residual stress which is the main cause to its deformation such as bending and buckling. And the newly developed HF VPE(vapor phase etching)process was also used as an effective release method for the elimination of sacrificaial layer. With noliquid involved during any of the steps for relasing, unlike other reported relase techniques, the HF VPE pocess has produced polysilicon microstructures with virtually no process-induced stiction problem. The actuation is incured by the thermal expasion due to current flow in active polysilicon cantilever, which motion is amplified bylever mechanism. The thickness of pllysilicon is 2 .mu. m and the length of active and passive polysilicon cantilever are 500 .mu. m, respectively. The moving distance of polysilicon actuator was experimentally conformed as large as 21 .mu. m at the input voltage level of 10 V and 50Hz square wave. These micro actuator technology can be utilized for the fabrication of MEMS (microlectromechanical system) such as microrelay, which requires large displacement or contact force but relatively slow response.

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위상-치수 최적화에 의한 마이크로 구동기 판 스프링의 설계 (Plate Spring Design of a Micro Actuator Using Topology-parameter Optimization)

  • 이종진;이호철;유정훈
    • 한국소음진동공학회논문집
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    • 제17권12호
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    • pp.1246-1253
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    • 2007
  • The recent issue of optical pickup actuators is to apply optical storage devices to mobile devices such as a cellular phone and PDA. It requires actuators to become smaller than conventional types. As the size becomes smaller, the magnetic force is reduced and the assembly of optical pickup actuators becomes more difficult. In addition, its dynamic characteristics are changed. In this paper, methods to improve magnetic forces and dynamic characteristics are suggested and the optimal result of the plate spring design is obtained. A diamond shape magnet and the fine pattern coil (FPC) are used to improve magnetic forces and damping elements are attached to decrease the peak magnitude of the mode instead of using structural damping, mostly for the purpose of improving the accuracy of the finite element simulation. To get more stable dynamic characteristics than conventional ones, a plate spring is applied to the optical pickup actuator and it is optimized with topology and parameter optimization to obtain the concept and the detail design, respectively.

M&S를 이용한 항공기용 통합형 전기식 구동장치의 동적 안전성 연구 (The study of dynamic safety using M&S for Integrated Electro-Mechanical Actuator installed on aircraft)

  • 이석규;이병호;이증;강동석;최관호
    • 한국소음진동공학회:학술대회논문집
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    • 한국소음진동공학회 2014년도 추계학술대회 논문집
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    • pp.36-41
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    • 2014
  • Electro-Mechanical Actuator installed on aircraft consists of a decelerator which magnifies the torque to rotate an axis connected with aircraft control surface, a control section which controls the motor assembly through receiving orders from cockpit and a motor assembly which rotates the decelerator. EMA controls aircraft attitued, position, landing, takeoff, etc. It is important part of a aircraft. Aircraft maneuvering make vibration of EMA. Vibration may cause the vibration fatigue. For that reason, it is necessary to analyze the system safety. In this paper, first EMA is modeled in finite element method and analyzed the response from input vibration. second EMA is tested and analyzed from modal experimental data. third EMA Fe model is updated and re analyzed. and EMA is verified safety with $3{\sigma}$ stress and S/N curves.

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솔레노이드 액추에이터의 비선형 동적응답에 대한 구조최적설계 (Structural Optimization for Nonlinear Dynamic Response of Solenoid Actuator)

  • 백석흠;김현수;장득열;이승범;권영석;노의동;이창훈
    • 한국자동차공학회논문집
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    • 제21권1호
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    • pp.113-120
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    • 2013
  • This paper proposes a design optimization approach for core of solenoid actuators by combining optimization techniques with the finite element method (FEM). A solenoid is an important element part which hydraulically controls a transmission system, etc. The demanded feature of the solenoid is that it performs an electromagnetic force output being constant regardless of the stroke and being proportional to coil current. The plunger compresses a spring with a minimum force of 12 N over an 1.7 mm travel. The orthogonal array, analysis of variance (ANOVA) techniques and response surface optimization, are employed to determine the main effects and their optimal design variables. The methodology is demonstrated as a optimization tool for the core design of a solenoid actuator.

압전재료 센서 액츄에이터를 이용한 자동차루프의 능동진동제어 (Active Vibration Control of An Automotive Roof using Piezoelectric Sensor and Actuator)

  • 문성진;김찬묵;강영규
    • 한국소음진동공학회:학술대회논문집
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    • 한국소음진동공학회 2004년도 추계학술대회논문집
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    • pp.834-839
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    • 2004
  • In this paper, we have studied on the active vibration control of an automotive roof in passenger car's structure using piezoelectric material as the actuator and sensor attached on the surface of the automotive roof, As a control algorithm, negative velocity feedback control method is used in the study and the position of the sensor is almost attached on the nearest position of maximum normal stresses occurring while the roof is vibrating due to disturbance or exciting, Also, the actuator is attached on the other side mostly collocated to the sensor. The optimum positions have the maximum stresses of the roof which have been found in the result of the finite element analysis using Nastran software, As the fundamental experiments, a beam and plate have also been implemented to verify the performance of vibration suppression. Finally the experiment of the roof has been carried out and The roof experiment has just given a possibility to an active vibration control of the automotive structure still not applied for passenger cars.

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보의 회전 및 진동제어를 위한 동적 모델 타당성 연구 (A Study on the Valid Dynamic Modeling for the Slewing and Vibration Suppression Control of Beam)

  • 곽문규;남상현
    • 소음진동
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    • 제11권2호
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    • pp.292-300
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    • 2001
  • This research is concerned with the validation of the modeling technique and controller design for slewing beam structures. When cantilever beam rotates about axes perpendicular to the undeformed beam's longitudinal axis, it experiences inertial loading. Hence, the beam vibrates from the initial stage of slewing. In this paper, the analytical model for a single slewing flexible beam with surface bonded piezoelectric sensor and actuator is developed using the Hamilton's principle with discretization by the assumed mode method. Comparisons with the theoretical model are made based upon the frequency responses and time responses. A new factor called the coupling coefficient is introduced to incorporate the discrepancies between the theoretical and experimental results. The slewing is achieved by applying the PID control, which is found to be less sensitive to vibrations. The vibrations are controlled by PPF controller, which is found to be effective in suppressing residual vibrations after slewing. The vibrations occurred during slewing is difficult to control because the piezoceramic actuator is not powerful enough to overcome inertial loadings.

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스마트 Hull 구조물의 모달 해석 및 진동 제어 (Modal Analysis and Vibration Control of Smart Hull Structure)

  • 손정우;최승복
    • 한국소음진동공학회:학술대회논문집
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    • 한국소음진동공학회 2008년도 춘계학술대회논문집
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    • pp.299-304
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    • 2008
  • Dynamic characteristics of smart hull structure are investigated and active vibration control performance is evaluated. Dynamic model of smart hull structure with surface bonded Macro-fiber Composite (MFC) actuators is established by analytical method. Equations of motion of the host hull structure are derived based on Donnell-Mushtari equilibrium equations for a thin cylindrical shell. A general model for the interaction between hull structure and MFC actuator is included in the dynamic model. Modal analysis is then conducted and mode shapes and corresponding natural frequencies are investigated. After constructing of the optimal control algorithm, active vibration control performance of the proposed system is evaluated. It has been shown that structural vibration can be reduced effectively with proper control input.

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스마트 Hull 구조물의 모달 해석 및 진동 제어 (Modal Analysis and Vibration Control of Smart Hull Structure)

  • 손정우;최승복
    • 한국소음진동공학회논문집
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    • 제18권8호
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    • pp.832-840
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    • 2008
  • Dynamic characteristics of smart hull structure are investigated and active vibration control performance is evaluated. Dynamic model of smart hull structure with surface bonded macro-fiber composite(MFC) actuators is established by analytical method. Equations of motion of the host hull structure are derived based on Donnell-Mushtari equilibrium equations for a thin cylindrical shell. A general model for the interaction between hull structure and MFC actuator is included in the dynamic model. Modal analysis is then conducted and mode shapes and corresponding natural frequencies are investigated. After constructing of the optimal control algorithm, active vibration control performance of the proposed system is evaluated. It has been shown that structural vibration can be reduced effectively with proper control input.

선인장 형태의 한국형 인공심장 내 3차원 혈류의 수치적 해석 (Numerical analysis of blood flow in the cactus type KTAH)

  • 박명수;고형종;민병구;심은보
    • 대한기계학회:학술대회논문집
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    • 대한기계학회 2002년도 학술대회지
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    • pp.695-696
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    • 2002
  • Three-dimensional blood flow in the sac of the KTAH(Korean total artificial heart) is simulated using fluid-structure interaction model. The aim of this study is to delineate the three-dimensional unsteady-blood flow in the sac of KTAH. Incompressible viscous flow is assumed for blood using the assumption of Newtonian fluid. The numerical method employed in this study is the finite element software called ADINA. Fluid-structure interaction model between blood and sac is utilized to represent the deformation of the sac by the rigid moving actuator. Three-dimensional geometry of cactus type KTAH is chosen for numerical model with prescribed pressure boundary condition on the sac surface. Blood flow is generated by the motion of moving actuator and strongly interacts with the solid material surrounding blood. High shear stress is observed mainly near the inlet and outlet of the sac.

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Modeling and fast output sampling feedback control of a smart Timoshenko cantilever beam

  • Manjunath, T. C.;Bandyopadhyay, B.
    • Smart Structures and Systems
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    • 제1권3호
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    • pp.283-308
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    • 2005
  • This paper features about the modeling and design of a fast output sampling feedback controller for a smart Timoshenko beam system for a SISO case by considering the first 3 vibratory modes. The beam structure is modeled in state space form using FEM technique and the Timoshenko beam theory by dividing the beam into 4 finite elements and placing the piezoelectric sensor/actuator at one location as a collocated pair, i.e., as surface mounted sensor/actuator, say, at FE position 2. State space models are developed for various aspect ratios by considering the shear effects and the axial displacements. The effects of changing the aspect ratio on the master structure is observed and the performance of the designed FOS controller on the beam system is evaluated for vibration control.