• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2004.11a
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• pp.275-278
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• 2004

Electro-Active Paper (EAPap) is attractive for EAP actuator due to its merit in terms of light weight, dry condition, large displacement output, low actuation voltage and low power consumption. The EAPap is based on cellulose paper, and is shown to involve primarily transport of ions in response to an external electric field. This actuating mechanism is similar to conductive polymer based actuators. For performance improvement of EAPap, hybrid actuators are tried. The actuators based on cellulose paper attached conducting polypyrrole, polyaniline and single wall carbon nanotube/polyaniline(emeraldine base) have been achieved by Electro chemical deposition and mechanical deposition of the polymers onto cellulose paper.

• Composites Research
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• v.27 no.1
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• pp.25-30
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• 2014

The actuation performance of an EADE (Electro-active dielectric elastomer) is studied as functions of thinner content, thickness and types of the dielectric elastomer such as natural (NR), acrylonitrile-butadiene (NBR), and silicon (KE-12) rubbers. With a decrease in elastomer thickness ($1{\rightarrow}0.5{\rightarrow}0.25{\rightarrow}0.1{\rightarrow}0.05$ mm) and an increase in thinner content ($0{\rightarrow}30{\rightarrow}50$ phr), the actuating displacement of KE-12 elastomer is increased, however their breakdown occurs at low voltage. For the same thickness (1 mm), the displacement of KE-12 elastomer shows a higher value (2.24 mm) compared to that of NR or NBR at the same applied voltage of 25 kV. The KE-12 has the lowest elastic modulus and the NBR has the highest one among the tested elastomers. However, the displacement of NBR elastomer is higher compared to that of NR because of high dielectric constant. It is found that the important factors of EADE actuator are a thickness, modulus and dielectric constant of the elastomer.

• Proceedings of the KIEE Conference
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• 1996.07c
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• pp.2004-2006
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• 1996

A thermally driven polysilicon micro actuator has been fabricated using surface micromachining techniques. It consists of P-doped polysilicon as a structural layer and TEOS (tetracthylorthosilicate) as a sacrificial layer. The polysilicon was annealed for the relaxation of residual stress which is the main cause to its deformation such as bending and buckling. And the newly developed HF VPE (vapor phase etching) process was also used as an effective release method for the elimination of sacrificial TEOS layer. The thickneas of polysilicon is $2{\mu}m$ and the lengths of active and passive polysilicon cantilevers are $500{\mu}m$ and $260{\mu}m$, respectively. The actuation is incurred by die thermal expansion due to the current flow in the active polysilicon cantilever, which motion is amplified by lever mechanism. The moving distance of polysilicon micro actuator was experimentally conformed as large as $21{\mu}m$ at the input voltage level of 10V and 50Hz square wave. The actuating characteristics are investigated by simulating the phenomena of heat transfer and thermal expansion in the polysilicon layer. The displacement of actuator is analyzed to be proportional to the square of input voltage. These micro actuator technology can be utilized for the fabrication of MEMS (microelectromechanical system) such as micro relay, which requires large displacement or contact force but relatively slow response.

• Proceedings of the Korean Society For Composite Materials Conference
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• 2001.05a
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• pp.126-129
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• 2001

LIPCA (LIghtweight Piezo-composite Curved Actuator) is an actuator device which is lighter than other conventional piezoelectric ceramic type actuator. LIPCA is composed of a piezoelectric ceramic layer and fiber reinforced light composite layers, typically a PZT ceramic layer is sandwiched by a top fiber layer with low CTE (coefficient of thermal expansion) and base layers with high CTE. LIPCA has curved shape like a typical THUNDER (thin-layer composite unimorph feroelectric driver and sensor), but it is lighter an than THUNDER. Since the curved shape of LIPCA is from the thermal deformation during the manufacturing process of unsymmetrically laminated lay-up structure, an analysis for the thermal deformation and residual stresses induced during the manufacturing process is very important for an optimal design to increase the performance of LIPCA. To investigate the thermal deformation behavior and the induced residual stresses of LIPCA at room temperature, the curvatures of LIPCA were measured and compared with those predicted from the analysis using the classical lamination theory. A methodology is being studied to find an optimal stacking sequence and geometry of LIPCA to have larger specific actuating displacement and higher force. The residual stresses induced during the cooling process of the piezo-composite actuators have been calculated. A lay-up geometry for the PZT ceramic layer to have compression stress in the geometrical principal direction has been designed.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2005.06a
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• pp.615-618
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• 2005

All over the world, many kinds of micro-actuators were already developed for various applications. The actuators are using various principles such as electromagnetic, piezoelectric and thermopneumatic etc. The most of the micro-actuators have been made using 2D based MEMS technology. In these actuators, it is difficult to drive 3-dimensional motion. This characteristic gives the limit of actuator application. However, micro-stereolithography technology has made it possible to fabricate freeform three-dimensional microstructures. In this technology, 2-dimensional micro-shape layer is cumulated on the other layers. This layer-by-layer process is the main principle to fabricate 3-dimensioal micro-structures. In this research, a micro-bellows actuator that is vertically moving was developed using the micro-stereolithography technology. When pressure was applied into the bellows, a non-contact actuating motion is generated. For actuation experiment, syringe pump and laser interferometer were used for applying pressure and measuring the displacement. Several hundreds micro-scale actuation was observed. And, to demonstrate the feasibility of proposed actuation principle, in this research, a micro-gripper was developed using half-bellows structure.

• Journal of the Korean Society for Precision Engineering
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• v.14 no.12
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• pp.153-159
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• 1997

A thermally-driven polysilicon microactuator has been fabricated using surface micromachining techniques. It consists of P-doped polysilicon as a structural layer and TEOS(tetraethylorthosilicate) oxide as a sacrificial layer. The polysilicon was annealed for the relaxation of residual stress which is the main cause to its deformation such as bending and buckling. And newly developed HF GPE(gas-phase etching) process was also employed to eliminate the troublesome stiction problem using anhydrous HF gas and CH$_{3}$OH vapor, and successfully fabricated the microactuators. The actuation is incurred by the thermal expansion due to the current flow in the active polysilicon cantilever, which motion is amplified by lever mechanism. The moving distance of polysilicon microactuator was experimentally conformed as large as 21 .mu. m at the input voltage level of 10V and 50Hz square wave. The actuating characteris- tics are also compared with the simulalted results considering heat transfer and thermal expansion in the polysilicon layer. This microactuator technology can be utilized for the fabrication of MEMS (microelectromechanical system) such as microrelay, which requires large displacement or contact force but relatively slow response.

• Journal of Biomedical Engineering Research
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• v.26 no.5
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• pp.257-264
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• 2005

This paper proposes an ionic polymer metal composite (IPMC) based artificial muscle to be applicable to the Myoelectric hand prosthesis. The IPMC consists of a thin polymer membrane with metal electrodes plated chemically on both faces, and it is widely applying to the artificial muscle because it is driven by relatively low input voltage. The control commands for the IPMC-based artificial muscle is given by electromyographic (EMG) signals obtained from human forearm. By an intended contraction of the human flexor carpi ulnaris and extensor carpi ulnaris muscles, we investigated the actuation behavior of the IPMC-based artificial muscle. To obtain higher actuation force of the IPMC, the single layered as thick as $800[{\mu}m]$ or multi-layered IPMC of which each layer can be as thick as $178[{\mu}m]$ are prepared. As a result, the bending force was up to the maximum 12[gf] from 1[gf] by actuating the single layered IPMC with $178[{\mu}m]$, but the bending displacement was reduced to 6[mm] from 30[mm]. The experimental results using an implemented IPMC control system show a possibility and a usability of the bio-mimetic artificial muscle.

• Smart Structures and Systems
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• v.15 no.6
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• pp.1601-1623
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• 2015

Electroactive polymers have attracted considerable attention in recent years due to their sensing and actuating properties which make them a material of choice for a wide range of applications including sensors, biomimetic robots, and biomedical micro devices. This paper presents an effective modeling strategy for nonlinear large deformation (small strains and moderate rotations) dynamic analysis of polymer actuators. Considering that the complicated electro-chemo-mechanical dynamics of these actuators is a drawback for their application in functional devices, establishing a mathematical model which can effectively predict the actuator's dynamic behavior can be of paramount importance. To effectively predict the actuator's dynamic behavior, a comprehensive mathematical model is proposed correlating the input voltage and the output bending displacement of polymer actuators. The proposed model, which is based on the rigid finite element (RFE) method, consists of two parts, namely electrical and mechanical models. The former is comprised of a ladder network of discrete resistive-capacitive components similar to the network used to model transmission lines, while the latter describes the actuator as a system of rigid links connected by spring-damping elements (sdes). Both electrical and mechanical components are validated through experimental results.

• Journal of Mechanical Science and Technology
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• v.20 no.11
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• pp.1914-1919
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• 2006

Recently, the microrobots powered by biological muscle actuators were proposed. Among the biological muscle actuators, frog muscle is well known as a good muscle actuator and has a large displacement, actuation forces and piezoelectric properties. Therefore, for the application of the biomimetic microrobot, this paper reports the electromechanical properties of frog muscle. First of all, the experimental setup has been established for measuring generative force of the frog muscle. Through the various electrical stimulating inputs to the frog muscle, we measured the contractile force of the frog muscle. From the measuring results, we found that the actuating contractile force responses of the frog muscle are determined by the amplitude, frequency, duty ratio, and wave form of the stimulation signal. This study will be beneficial for the development of the microrobot actuated by frog muscle.

• 정보저장시스템학회:학술대회논문집
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• 2005.10a
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• pp.171-176
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• 2005

In the information storage development, the trend of the storage device is to increase the recording density. Among such an effort, near-field probe recording is spotlighted as a method of high increasing recording density. For the successfully embodiment of storage device, the actuating mechanism of near-field probe is essentially designed. In this paper, we suggest the slider similar with conventional HDDs and design the slider using near- field probe for the purpose of applying the slider in order to control gap between probe and media. The most important object of slider design is to guarantee the flying ability and stability. For achievement of these design objects, we perform two step of optimal design process. The media is mod! eled as random displacement, which is only considered roughness of disk surface. The design slider is analyzed with dynamic state in assumed media. At this process, the optimal model is confirmed to stable flying stability.