• Title/Summary/Keyword: Active magnetic actuator

Search Result 50, Processing Time 0.027 seconds

An Electro-magnetic Air Spring for Vibration Control in Semiconductor Manufacturing (반도체 생산에서 진동 제어를 위한 전자기 에어 스프링)

  • Kim, Hyung-Tae;Kim, Cheol-Ho;Lee, Kang-Won;Lee, Gyu-Seop;Son, Sung-Wan
    • Transactions of the Korean Society for Noise and Vibration Engineering
    • /
    • v.20 no.12
    • /
    • pp.1128-1138
    • /
    • 2010
  • One of the typical problems in the precise vibration is resonance characteristics at low frequency disturbance due to a heavy mass. An electro-magnetic(EM) air spring is a kind of vibration control unit and active isolator. The EM air spring in this study aims at removing the low frequency resonance for semiconductor manufacturing. The mechanical and electronic parts in the active isolator are designed to operate under a weight of 2.5 tons. The EM spring is floated using air pressure in a pneumatic elastic chamber and actuated by EM levitation force. The actuator consists of a EM coil and a permanent magnetic plate which are installed inside of the chamber. An air mount was constructed for the experiment with a stone surface plate, 4 active air springs, 4 gap sensors, a DSP controller, and a multi-channel power amp. A PD control method and operating logic was applied to the DSP. Simulation using 1/4 model was carried out and compared with the experiments. The time duration and maximum peak at resonance frequency can be reduced sharply by the proposed system. The results show that the active system can avoid the resonance caused by the natural frequency of the passive system.

Magnetic attitude control of a satellite (지자기를 이용한 위성체의 자세제어)

  • 엄광섭;박동조
    • 제어로봇시스템학회:학술대회논문집
    • /
    • 1992.10a
    • /
    • pp.159-164
    • /
    • 1992
  • In this paper, the complex nonlinear dynamics of a satellite is obtained. And it is shown that several limitations exist when the magnetorquer is used as an active actuator to attitude control. Such limitations cause a delayed convergence of pitch and roll angle. The simulation results insure that the roll angle bias is dependent on the z axis spin rate. And a heuristic algorithm is applied to control the attitude libration through the computer simulations.

  • PDF

A Linear Motor Using a Magnetostrictive Actuator (자기변형 엑츄에이터를 이용한 선형모터)

  • Park Y.W.;Seok Y.T.
    • Proceedings of the Korean Society of Precision Engineering Conference
    • /
    • 2005.06a
    • /
    • pp.1841-1844
    • /
    • 2005
  • A linear motor makes a long stroke by accumulating short steps, which is based on the quasistatic deformation of a magnetostrictive material in a magnetic field. It's also called as inchworm effect. The application areas of linear motors are an adaptive and active optics, X-Y positioning, precision alignment, etc. It is found that control of the frequency and current inputs are all that is necessary to control the speed handling ability of the linear motor. In inchworm mode, linear speeds of up to $500{\mu}m/s$ are achieved resulting from the accumulation of $25{\mu}m$ steps at 1.4A.

  • PDF

An Experimental Study on the Prediction Control Technique for a Magnetic Bearing (자기베어링 예측 제어 기법의 실험적 연구)

  • Kim, Chae Sil;Jung, Hoon Hyung;Shin, Min Jae
    • Journal of the Korean Society for Precision Engineering
    • /
    • v.31 no.2
    • /
    • pp.99-104
    • /
    • 2014
  • Active vibration control methods are required in the high speed rotor systems supported by magnetic bearings. A prediction control technique is one of the control methods. Gain and phase angle are primarily chosen with analyzing the responses for a certain rotor speed. The feasibility of this technique has been reported for only analytical simulations. Therefore this paper constructs the test rig supported by ball bearings with a magnetic bearing type actuator and develops a prediction control system by using LabVIEW and Compact RIO. Finally as rotating speeds are modulated, the gains and phase angles for the speeds are determined with vibration control of the test rig. This leads that the prediction control technique may be applied to the rotor system with the magnetic bearing.

System Modeling and Robust Control of an AMB Spindle : Part I Modeling and Validation for Robust Control

  • Ahn, Hyeong-Joon;Han, Dong-Chul
    • Journal of Mechanical Science and Technology
    • /
    • v.17 no.12
    • /
    • pp.1844-1854
    • /
    • 2003
  • This paper discusses details of modeling and robust control of an AMB (active magnetic bearing) spindle, and part I presents a modeling and validation process of the AMB spindle. There are many components in AMB spindle : electromagnetic actuator, sensor, rotor, power amplifier and digital controller. If each component is carefully modeled and evaluated, the components have tight structured uncertainty bounds and achievable performance of the system increases. However, since some unknown dynamics may exist and the augmented plant could show some discrepancy with the real plant, the validation of the augmented plant is needed through measuring overall frequency responses of the actual plant. In addition, it is necessary to combine several components and identify them with a reduced order model. First, all components of the AMB spindle are carefully modeled and identified based on experimental data, which also render valuable information in quantifying structured uncertainties. Since sensors, power amplifiers and discretization dynamics can be considered as time delay components, such dynamics are combined and identified with a reduced order. Then, frequency responses of the open-loop plant are measured through closed-loop experiments to validate the augmented plant. The whole modeling process gives an accurate nominal model of a low order for the robust control design.

Active Vibration Control System Using Electromagnet Actuator (전자기 액츄애이터를 이용한 능동 진동제어시스템)

  • Lee, Joo-Hoon;Jeon, Jeong-Woo;Hwang, Don-Ha;Kang, Dong-Sik;Choi, Young-Kiu
    • Proceedings of the KIEE Conference
    • /
    • 2005.07d
    • /
    • pp.2809-2811
    • /
    • 2005
  • In this paper, we address an active vibration control system, which suppresses the vibration engaged by magnetically levitated stage. The stage system consists of a levitating platen with four permanent magnetic linear synchronous motors in parallel. Each motor generates vertical force for suspension against gravity and propulsion force horizontally as well. This stage can generate six degrees of freedom motion via the vertical and horizontal forces. In the stage system, which represents the settling-time critical system, the motion of the platen vibrates mechanically. We designed an active vibration control system for suppressing vibration due to the stage moving. The command feedforward with inertial feedback algorithm is used for solving stage system's critical problems. The components of the active vibration control system are accelerometers for detecting stage tables's vibrations, a digital controller with high precise signal converters, and electromagnetic actuators.

  • PDF

Design of Semi-Active Tendon for Vibration Control of Large Structures (대형 구조물의 진동제어를 위한 반능동형 댐퍼의 설계)

  • Kim, Saang-Bum;Yun, Chung-Bang;Gu, Ja-In
    • Proceedings of the Korean Society for Noise and Vibration Engineering Conference
    • /
    • 2000.11a
    • /
    • pp.282-286
    • /
    • 2000
  • In this paper, magneto-rheological(MR) damper is studied for vibration control of large infra structures under earthquake. Generally, active control devices need a large control force and a high power supply system to reduce the vibration effectively. Large and miss tuned control force may induce the dangerous situation such that the generated large control force acts to amplify the structural vibration. Recently, to overcome the weaknesses of the active control, the semi-active control method is suggested by many researchers. Semi-active control uses the passive control device of which the characteristics can be modified. Control force of the semi-active device is not generated from the actuator with power supply. It is generated as a dynamic reaction force of the device same as in the passive control case, so the control system is inherently stable and robust. Unlike the case of passive control, control force of semi-active control is adjusted depending on the measured response of the structure, so the vibration can be reduced more effectively against various unknown environmental loads. Magneto-rheological(MR) damper is one of the semi-active devices. Dynamic characteristics of the MR material can be changed by applying the magnetic fields. So the control of MR damper needs only small power. Response time of MR to the input voltage is very short, so the high performance control is possible. MR damper has a high force capacity so it is adequate to the vibration control of large infra structure. Because MR damper has a nonlinear property, normal control method used in active control may not be effective. Clipped optimal control, modified bang-bang control etc. have been suggested to MR damper by many researchers. In this study, sliding mode fuzzy control(SMFC) is applied to MR damper. Genetic algorithm is used for the controller tuning. To verify the applicability of MR damper and suggested algorithm, numerical simulation on the aseismic control is carried out. Simulation model is three-story building structure, which was used in the paper of Dyke, et al. The control performance is compared with clipped optimal control. The present results indicate that the SMFC algorithm can reduce the earthquake-induced vibration very effectively.

  • PDF

Development of the semi-active controlled variable damper system for passenger vehicles (승용차용 반능동형 가변댐퍼시스템의 개발)

  • 허승진;심정수;이광기;김홍석;황성호
    • Proceedings of the Korean Society for Noise and Vibration Engineering Conference
    • /
    • 1995.04a
    • /
    • pp.45-50
    • /
    • 1995
  • 본 연구에서는 기존에 널리 사용되고 있는 스카이훅 제어 알고리즘(skyhook control algorithm)[3]을 바탕으로 확장 개발된 모드 스카이훅 제어(mode skyhook control) 개념 및 주파수 감응식 제어(frequency dependent control)개념[4][5]을 실용화하기 위하여 응답속도가 20msec이하의 비교적 빠른 응답 속도를 갖는 전자기식 작동기 (electro-magnetic actuator)에 의해 가변되는 4단 반능동형 가변 댐퍼 시스템을 개발한 후, 다음과 같은 성능의 향상을 시험결과를 통하여 보이고자 한다. -저속에서의 승차감 향상과 고속에서의 주행 안정성 향상 -커브 주행 또는 급격한 핸들 작동시의 롤안정성 (rolling stability) 향상 -제동 및 급발진시의 차체 피칭 운동 방지 (anti-dive, anti-squat)

  • PDF

Method of Test for Combustion Instability and Control at Model Combustor of Supersonic Engine (초음속 엔진 모델 연소기에서의 연소불안정 및 제어 시험 기법)

  • Choi, Ho-Jin;Hwang, Yong-Seok;Jin, You-In;Park, Ik-Soo;Yoon, Hyun-Gull;Kang, Sang-Hun;Lee, Yang-Ji
    • Proceedings of the Korean Society of Propulsion Engineers Conference
    • /
    • 2009.05a
    • /
    • pp.111-115
    • /
    • 2009
  • The method of test for observing the combustion instability and controling the instability actively by using secondary injection of fuel through flame stabilizer was studied by constructing model combustor of supersonic engine. The frequency of combustion instability was detected by measuring the pressure of combustor using pressure sensor and by optical sensing of flame intensity. Electro-magnetic valve was adopted as actuator for active control and the characteristics of modulated fuel was studied by measured pressure of valve outlet and scattering signal of spray at secondary fuel injection.

  • PDF

Fabrication of Electrostatic Track-Following Microactuator for Hard Disk Drive Using SOI (SOI를 이용한 하드 디스크 드라이브용 정전형 트랙 추적 마이크로 액추에이터의 제작)

  • Kim, Bong-Hwan;Chun, Kuk-Jin;Seong, Woo-Kyeong;Lee, Hyo-Jung
    • Journal of the Institute of Electronics Engineers of Korea SD
    • /
    • v.37 no.8
    • /
    • pp.1-8
    • /
    • 2000
  • We have achieved a high aspect ratio track-following microactuator (TFMA) which is capable of driving 0.3 ${\mu}m$ magnetic head for hard disk drive (HDD). it was fabricated on silicon on insulator (SOI) wafer with 20 ${\mu}m$ trick active silicon and 2 ${\mu}m$ thick thermally grown oxide and piggyback electrostatic principle was used for driving TFMA. The first vibration mode frequency of TFMA was 18.5 kHz which is enough for a recording density of higher than 10 Gb/in$^2$. Its displacement was 1.4 ${\mu}m$ when 15 V dc bias plus 15 V ac sinusoidal driving input was applied and its electrostatic force was 50 N. The fabricated actuator shows 7.51 dB of gain margin and 50.98$^{\circ}$ of phase margin for 2.21 kHz servo-bandwidth.

  • PDF