• 대한전기학회:학술대회논문집
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• 대한전기학회 2005년도 제36회 하계학술대회 논문집 C
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• pp.1859-1861
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• 2005

The ZnO:Al thin films were prepared on glass by Facing Target Sputtering (FTS) system. We investigated electrical, optical, and structural properties of AZO thin film with sputtering current $0.1[A]{\sim}0.6[A]$. We obtained the lowest resistivity $2.3{\times}10^{-4}[{\Omega}-cm]$ at sputtering current 0.6[A] from the 4-point probe and the strong (002) peak at sputtering current 0.3[A] from the X-ray Diffractometer (XRD ). The optical transmittance of AZO thin films show a very high transmittance of $80{\sim}95%$ in the visible range and exhibit the absorption edge of about 350nm.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2009년도 제38회 동계학술대회 초록집
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• pp.178-178
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• 2010

We have deposited aluminum-doped ZnO thin films on borosilicate glass by atomic layer deposition. Diethylzinc (DEZ) and dimethylaluminum isopropoxide (DMAIP) were used as the metal precursor and the Al-dopant, respectively. Water was used as an oxygen source. DMAIP was successfully used as an aluminum precursor for chemical vapor deposition and ALD. All deposited films showed n-type conduction. The resistivity decreased to a minimum and then increased with increasing the aluminum content. The carrier concentration increased and the carrier mobility decreased with increasing the DMAIP to DEZ pulse ratio. The average optical transmittance was nearly 80 % in the visible part of the spectrum. The absorption edge moved to the shorter wavelength region with increasing the DMAIP to DEZ pulse ratio. Our results indicate that DMAIP is suitable for Al doping of ZnO films.

• 한국표면공학회:학술대회논문집
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• 한국표면공학회 2007년도 춘계학술발표회 초록집
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• pp.5-6
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• 2007

반투명 전도성 음극 (semi-transparent conducting cathode)인 Ba (x nm)/Au (20 nm)/ITO (100 nm)을 이용하여 전면발광 유기전계 발광 소자 (top-emitting organic light-emitting didodes, TEOLEDs)를 제작했다. Ba과 bis(8-quinolinolato)aluminum (III) ($Alq_3$) 계면의 전자구조는 엑스선 광전자 분광법 (X-ray photoelectron spectroscopy, XPS), 자외선 광전자 분광법 (ultraviolet photoelectron spectroscopy, UPS) 및 가까운 끝머리 엑스선 흡수 미세구조 (near-edge x-ray absorption fine structure, NEXAFS) 스펙트럼의 광 방출 특성을 통하여 조사되었다. $Alq_3$/Ba 계면 특성에 있어서 XPS와 NEXAFS 특성에 의하면, $Alq_3$ (10.0 nm) 위에 Ba이 연속적으로 증착됨에 따라 Ba으로부터 $Alq_3$로의 전자전달 (electron charge transfer) 특성은 꾸준희 증가된다. 그러나 Ba의 두께가 1.0 nm 이상 초과되면 Ba의 전자전달에 기인한 반응성때문에 $Alq_3$의 분자구조가 해리된다. 한편, 제작된 TEOLEDE의 전류-전압-휘도 곡선의 경우에서도 바륨의 증착 두께가 1.0 nm일 때 가장 우수한 구동특성을 나타냈다.

• Bulletin of the Korean Chemical Society
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• 제22권9호
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• pp.1015-1018
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• 2001

Vanadium oxide thin films with thickness of about 2000 $\AA$ have been prepared by radio frequency sputter deposition using a V2O5 target in a mixed argon and oxygen atmosphere with different Ar/O2 ratio ranging from 99/1 to 90/10. X-ray diffraction and X-ray absorption near edge structure spectroscopic studies show that the oxygen content higher than 5% crystallizes a stoichiometric V2O5 phase, while oxygen deficient phase is formed in the lower oxygen content. The oxygen content in the mixed Ar + O2 has a significant influence on electrochemical lithium insertion/deinsertion property. The discharge-charge capacity of vanadium oxide film increases with increasing the reactive oxygen content. The V2O5 film deposited at the Ar/O2 ratio of 90/10 exhibits high discharge capacity of 100 ${\mu}Ah/cm2-{\mu}m$ along with good cycle performance.

• Bulletin of the Korean Chemical Society
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• 제18권10호
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• pp.1082-1085
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• 1997

The Near-Edge X-ray Absorption Fine Structure (NEXAFS) technique and Differential Scanning Calorimetry (DSC) were utilized to investigate the reaction of CH4 and O2 on the MoO3/SiO2 catalyst. The NEXAFS results showed that the stoichiometry of the molybdenum oxide catalyst supported on silica was MoO3. MoO3 was reduced to MoO2 when the catalyst was exposed to CH4 at 773 K. NEXAFS results confirm that lattice oxygen is directly related to the process of CH4 oxidation which takes place on the surface of MoO3/SiO2 catalysts. DSC results show that the structure of MoO3 changes around 573 K and this structural change seems to improve the migration of oxygen in the lattice.

• Composites Research
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• 제24권1호
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• pp.1-9
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• 2011

본 논문에서는 복합재료 튜브를 이용한 고속 열차의 에너지 흡수장치에 대한 실험 및 수치 해석에 관한 연구를 수행하였다. 논문의 목적은 에너지 흡수장치에 대한 최적의 적층(lay-up) 형태를 알아내는 것으로, quasi static method를 이용한 네 가지 적층 형태에 대한 실험을 수행 하였다: $[0/45/90/-45]_4$, $[0]_{16}$, $[0/90]_8$, $[0/30/-30]_5$, 실험을 위해 초기 파괴 시작점을 생성하고, 일정 방향으로 진행되는 파괴를 만들기 위해 베벨 엣지(bevel edge)와 노치 엣지(notch edge)의 두 가지 트리거링 방법을 이용하였다. 저속 충돌실험 결과 $[0/45/90/-45]_4$의 적층 형태가 다른 방법과 비교해서 가장 좋은 에너지 흡수 결과를 보여주였다. 수치해석을 위해 LS-DYNA 프로그램의 변수 분석(parametric analysis)을 통해 가장 적합한 복합재료의 quasi static 실험 시뮬레이션 방법 연구를 수행하였다. 움직이는 벽이 복합재 튜브에 저속 충돌하는 모델을 가정하여 해석을 수행하였으며, 실험값과 수치해석 결과의 비교를 통해 비슷한 경향을 보임을 확인 하였다. 특히 TFAIL과 mass scaling factor를 조절하며 수행하는 변수 분석은 LS-DYNA에서 복합재 튜브의 quasi static 실험을 시뮬레이션 하는 능력과 한계를 보여준다.

• 한국표면공학회지
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• 제45권1호
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• pp.15-19
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• 2012

Tris(8-quinolinolato)aluminum(III); $Alq_3$ has been frequently used as an electron transporting layer in organic light-emitting diodes. Either Ba with a low work function or Au with a high work function was deposited on $Alq_3$ layer in vacuum. And then, the behaviors of electron transition at the $Alq_3$/Ba and $Alq_3$/Au interfaces were investigated by using the near edge x-ray absorption fine structure (NEXAFS) spectroscopy. In the each interface, the energy levels of unoccupied obitals were assigned as ${\pi}^*$(LUMO, LUMO+1, LUMO+2 and LUMO+3) and ${\sigma}^*$. And the relative intensities of these peaks were investigated. In an oxygen atom composing $Alq_3$ molecule, the relative intensities for a transition from K-edge to LUMO+2 were largely increased as Ba coverage (${\Theta}_{Ba}$, 2.7 eV) with a low work function was in-situ sequentially increased on $Alq_3$ layer. In contrast, the relative intensities for the LUMO+2 peak were reduced as Au coverage (${\Theta}_{Au}$, 5.1 eV) with a high work function were increased on $Alq_3$ layer. This means that the electron transition by photon in oxygen atom which consists in the unoccupied orbitals in $Alq_3$ molecule, largely depends on work function of a metal. Meanwhile, in the case of electron transition in a carbon atom, as ${\Theta}_{Ba}$ was increased on $Alq_3$, the relative intensity from K-edge to ${\pi}_1{^*}$ (LUMO and LUMO+1) was slightly decreased, and from K-edge to ${\pi}_2{^*}$ (LUMO+2 and LUMO+3) was somewhat increased. This rising of the energy state from ${\pi}_1{^*}$ to ${\pi}_2{^*}$ exhibits that electrons provided by Ba would contribute to the process of electron transition in the $Alq_3$/Ba interfaces. As shown in above observation, the analyses of NEXAFS spectra in each interface could be important as a basic data to understand the process of electron transition by photon in pure organic materials.

• Bulletin of the Korean Chemical Society
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• 제28권11호
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• pp.2089-2092
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• 2007

Tantalum-containing metal oxides, well known for their efficiency in water splitting and H2 production, have never been used in visible light driven photodecomposition of H2S and H2 production. The present work is an attempt in this direction and investigates their efficiency. A mixed metal oxide, ZnFe2Ta2O9, with the inclusion of Fe2O3 to impart color, was prepared by the conventional ceramic route in single- and double-calcinations (represented as ZnFe2Ta2O9-SC and ZnFe2Ta2O9-DC respectively). The XRD characterization shows that both have identical patterns and reveals tetragonal structure to a major extent and a minor contribution of orthorhombic crystalline system. The UV-visible diffuse reflection spectra demonstrate the intense, coherent and wide absorption of visible light by both the catalysts, with absorption edge at 650 nm, giving rise to a band gap of 1.9 eV. Between the two catalysts, however, ZnFe2Ta2O9-DC has greater absorption in almost the entire wavelength region, which accounts for its strong brown coloration than ZnFe2Ta2O9-SC when viewed by the naked eye. In photocatalysis, both catalysts decompose H2S under visible light irradiation (λ ≥ 420 nm) and produce solar H2 at a much higher rate than previously reported catalysts. Nevertheless, ZnFe2Ta2O9-DC distinguishes itself from ZnFe2Ta2O9-SC by exhibiting a higher efficiency because of its greater light absorption. Altogether, the tantalum-containing mixed metal oxide proves its efficient catalytic role in H2S decomposition and H2 production process also.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2013년도 제45회 하계 정기학술대회 초록집
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• pp.220-220
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• 2013

Surface-normal transmission electro-absorption modulator (EAM) are attractive for high-definition (HD) three-dimensional (3D) imaging application due to its features such as small system volume and simple epitaxial structure [1,2]. However, EAM in order to be used for HD 3D imaging system requires uniform modulation performance over large area. To achieve highly uniform modulation performance of EAM at the operating wavelength of 850 nm, it is extremely important to remove the GaAs substrate over large area since GaAs material has high absorption coefficient below 870 nm which corresponds to band-edge energy of GaAs (1.424 eV). In this study, we propose and experimentally demonstrate a transmission EAM in which highly selective backside etching methods which include lapping, dry etching and wet etching is carried out to remove the GaAs substrate for achieving highly uniform modulation performance. First, lapping process on GaAs substrate was carried out for different lapping speeds (5 rpm, 7 rpm, 10 rpm) and the thickness was measured over different areas of surface. For a lapping speed of 5 rpm, a highly uniform surface over a large area ($2{\times}1\;mm^2$) was obtained. Second, optimization of inductive coupled plasma-reactive ion etching (ICP-RIE) was carried out to achieve anisotropy and high etch rate. The dry etching carried out using a gas mixture of SiCl4 and Ar, each having a flow rate of 10 sccm and 40 sccm, respectively with an RF power of 50 W, ICP power of 400 W and chamber pressure of 2 mTorr was the optimum etching condition. Last, the rest of GaAs substrate was successfully removed by highly selective backside wet etching with pH adjusted solution of citric acid and hydrogen peroxide. Citric acid/hydrogen peroxide etching solution having a volume ratio of 5:1 was the best etching condition which provides not only high selectivity of 235:1 between GaAs and AlAs but also good etching profile [3]. The fabricated transmission EAM array have an amplitude modulation of more than 50% at the bias voltage of -9 V and maintains high uniformity of >90% over large area ($2{\times}1\;mm^2$). These results show that the fabricated transmission EAM with substrate removed is an excellent candidate to be used as an optical shutter for HD 3D imaging application.

• 한국안광학회지
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• 제10권3호
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• pp.193-203
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• 2005

Zn-나프텐산염을 출발 원료로 사용하고 스핀코팅 - 열분해법을 이용하여 실리카 유리 위에 c축으로 배향된 나노 결정질 ZnO 박막을 제조하였다. X-선 회절 분석을 행한 결과, 모든 시편에서 ZnO (002) 피크만이 관찰되었으며, 박막의 열처리 온도가 증가함에 따라 (002) 피크 강도가 증가하였다. 박막의 표면 미세 구조는 매우 균질하였으며, 입자들 간의 응집은 관찰되지 않았다. 박막의 topology를 주사형 탐침 현미경으로 분석한 결과에 따르면, 실리카 기판 자체의 불균질한 표면 특성과 ZnO 입자의 c축 배향 특성에 의한 것으로 보이는 3차원적인 입자성장이 모든 열처리 온도 영역에 대해 박막의 표면에서 관찰되었다. 고배향된 박막들 중에서 $800^{\circ}C$로 열처리한 박막의 표면이 가장 균질한 특성을 나타내었다. 박막의 가시영역에서의 투과율은 $1000^{\circ}C$로 열처리한 박막을 제외하고 모든 박막에 있어서 80% 이상의 투과율을 나타냈으며, 380~400nm 영역에서 날카로운 absorption edge가 나타났다. 흡수피크를 이용하여 계산된 오든 박막의 에너지 밴드 캡은 ZnO 단결정 및 다른 연구자들에 의해 보고된 박막과 같은 영역에 존재하였다. 본 연구에서 제조된 ZnO 박막들 중에 치밀한 입자 성장과 균질한 표면 특성을 보이는 $600^{\circ}C{\sim}800^{\circ}C$로 열처리된 박막은 UV차단성 투명전도막 및 렌즈 등의 광학소자에 실질적인 응용이 기대 된다.