• Tribology and Lubricants
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• 제39권6호
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• pp.250-255
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• 2023

This study applies various surface patterns to minimize material loss in construction equipment that is subject to severe wear due to sand, such as the wear-resistant steel plates of dump trucks or the teeth of excavators. The relationship between surface morphology and wear behavior is investigated using PLA+ polymer to observe the effect of the surface pattern. Five types of samples - smooth, concave, convex, wavy concave, and wavy convex designs - are created using a 3D printer. A wear experiment is conducted for a duration of 3 h using 6.5 kg of abrasive particles. The mass loss of the samples after the experiment is measured to assess the extent of wear. Additionally, the surface morphology of the samples before and after the experiment is analyzed using SEM and confocal microscopy. The study results reveal that the smooth design exhibits the highest wear loss, whereas the concave and wavy concave designs show relatively lower wear loss. The convex and wavy convex designs exhibit varying contact areas with the abrasive particles depending on the surface pattern, resulting in different levels of wear. Furthermore, a comparison between the experimental results and DEM simulations confirms the observed wear trends. This study reveals the relationship between wear damage according to surface pattern shape and is expected to be of substantial help in the analysis of wear and tear on agricultural and heavy equipment.

• 한국표면공학회지
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• 제34권6호
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• pp.575-584
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• 2001

Erosion due to abrasive particles contained in gas streams from boilers has been emerged as a significant problem in the coal fired power plants. Particle erosion accounted for approximately 50% of boiler failures and especially flyash erosion was responsible for 20~30% of emergency boiler shutdowns. Particularly, because of the high ash loading and high velocity, most erosion occurs in the boiler tubes and economiser tube bank where the direction of the gas stream changes to $180^{\circ}$ .In this study, a high temperature particle erosion tester was used to evaluate erosion rate in a simulated environment. The erosion parameters such as erosion temperature, particle impact angle, particle velocity and various particle size were changed. Flyash is the combustion product of the pulverized coal, where size is ranging from 1 to $200\mu\textrm{m}$. Flyash composed of mainly SiO$_2$, $A1_2$$_O3$, and $Fe_2$$O_3$has dense spherical particles and irregular particles containing numerous pores and cavities. From the erosion tests at various conditions, the maximum erosion was experienced at impact angles of $30^{\circ}$ to $60^{\circ}$ In addition, erosion rate increased in proportional to velocity and temperature. And from the observation of the eroded surfaces, it was also concluded that 304 stainless steel was mainly eroded by extrusion-forging at high impact angle ($90^{\circ}$) and by microcutting mechanism at low impact angles ($30^{\circ}$ and $45^{\circ}$).

• 한국재료학회:학술대회논문집
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• 한국재료학회 2011년도 추계학술발표대회
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• pp.24.2-24.2
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• 2011

Ru is used as a bottom electrode capacitor in dynamic random access memories (DRAMs) and ferroelectric random access memories (FRAMs). The surface of the Ru needs to be planarized which is usually done by chemical mechanical polishing (CMP). Ru CMP process requires chemical slurry consisting of abrasive particles and oxidizer. A slurry containing NaIO4 and alumina particles is already proposed for Ru CMP process. However, the stability of the slurry is critical in the CMP process since if the particles in the slurry get agglomerated it would leave scratches on the surface being planarized. Thus, in the present work, the stability behavior of the slurry using a suitable anionic polyelectrolyte is investigated. The parameters such as slurry pH, polyelectrolyte concentration, adsorption time and the sequence of addition of chemicals are optimized. The results show that the slurry is stable for longer time at an optimized condition. The polishing behavior of the Ru using the optimized slurry is also investigated.

• 한국주조공학회지
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• 제13권3호
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• pp.238-247
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• 1993

Microstructure, hardness and wear characteristics of $SiC_p/Al-6.5wt%Si-1.7wt%Mg$ alloy composites fabricated by the method of rheo-compocasting and hot pressing are investigated in this study. The dispersion of SiC particles in the composites is homogeneous and the hardness improves as additional amount increases. The wear amount of the matrix metal increases highly as wear rates increase, for the wear mechanism changes from adhesive wear to melt wear, and the matrix metal was coated on the surface of revolving disc and its weight increases. In the 5vol% composites, Fe is adhered on the surface of specimen by the projection of the dispersed hard SiC particles which have net-work structure and the coating layer is about $300{\mu}m$. But in the composite more than 20vol%, the wear amount of composite decreases because the SiC particles which have superior hardness, wear resistance and heat resistance properties resist wear, the abrasive wear turn out predominant wear mechanism and so the wear amount of revolving disc increases.

• 대한기계학회논문집A
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• 제25권10호
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• pp.1535-1540
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• 2001

This study presents the possibility of scratch reduction on wafer in CMP by applying the ultrasonic and megasonic energy into the slurry which might contain large abrasive particles. Experiments were conducted to verify the dispersion ability of agglomerated particles by applying ultrasonic, megasonic waves and analyze the particle distribution of used slurry in case, of sonic energy assisted or none. And the dispersion stability of megasonic waves was investigated through the experiment of stability of the dispersed slurry, Finally, to confirm that the distribution of particles in slurry by ultrasonic waves was actually related to scratches on wafer when CMP was done, tungsten blanket wafer was processed, by CMP to compare and investigate scratches on wafer.

• Journal of Welding and Joining
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• 제18권5호
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• pp.105-111
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• 2000

The wear behavior of thermal sprayed AlSiMg-40TiC composite coatings were studied as a function of load and sliding velocity under unlubricated conditions. Experiments were performed using a block-on-ring(WC-6wt%/Co, Hv 1500) type. The tests were carried out a various load(30∼ 125.5N) and sliding velocity(0.5∼2.0m/s). Three wear rate regions were observed in the AlSiMg-40TiC composite coatings. The wear rate in region I at low load (less then 8N( were less than 1×{TEX}$10^{-5}${/TEX}㎣/m. Low wear rates in region I resulted from the load-bearing capacity of TiC particles. The transition from region I to II occurred when the applied load exceeded the fracture and pull-out strength of the particles. The TiC fractured particles trapped between the specimen and the counterface acted as third-body abrasive wear. The subsurface layer worn surface in region II was composed of the mechanically mixed layer (MML). The wear rate increase abruptly above a critical load (region III). The high wear rate in region III was induced by frictional temperature and involves massive surface damage.

• 한국결정성장학회지
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• 제25권1호
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• pp.27-31
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• 2015

내화물은 슬래그 등과의 화학반응뿐만 아니라 입자 충돌이나 마찰에 의한 물리적인 마모도 일어난다. 그러나 내화물의 에로젼에 의한 마모에 대해서는 거의 알려져 있지 않다. 본 실험에서는 내화도가 1300과 $1500^{\circ}C$인 캐스터블에 대해서 SiC 마모입자의 입사 각도에 따른 마모량의 변화를 분석하였다. 그 결과 최대 마모량을 나타내는 각도는 입자가 내화물에 수직으로 부딪힐 때가 아니라 $60{\sim}75^{\circ}$로 입사될 때인 것을 알았다. 또한 내화물의 기공률이 에로젼 마모에 가장 큰 영향을 미치는 것으로 생각되었다.

• 한국해양공학회지
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• 제17권1호
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• pp.55-60
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• 2003

The effect of size and volume fraction of ceramic particles, with sliding velocity on the wear properties were investigated for the metal matrix composites fabricated by the pressureless infiltration process. The metal matrix composites exhibited about 5.5 - 6 times the wear resistance compared with AC8A alloy at high sliding velocity, and by increasing the particle size and decreasing the volume fraction, the wear resistance was improved. The wear resistance of metal matrix composites and AC8A alloy exhibited different aspects. Wear loss of AC8A alloy increased with sliding velocity, linearly : whereas, metal matrix composites indicated more wear loss than AC8A alloy at the slow velocity region. However, a transition point of wear loss was found at the middle velocity region, which shows the minimum wear loss. Further, wear loss at the high velocity region exhibited nearly the same value as the slow velocity region. In terms of wear mechanism, the metal matrix composites generally exhibited abrasive wear at slow to high sliding velocity； however, AC8A alloy showed abrasive wear at low sliding velocity and adhesive and melt wear at high sliding velocity.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2004년도 하계학술대회 논문집 Vol.5 No.2
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• pp.1296-1299
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• 2004

MIM capacitor has been investigated for the next generation DRAM. Conventional poly-Si bottom electrode cannot satisfy the requirement of electrical properties and comparability to the high k materials. New bottom electrode material such as ruthenium has been suggested in the fabrication of MIM structure capacitor. However, the ruthenium has to be planarized due to the backend scalability. For the planarization CMP has been widely used in the manufacture of integrated circuit. In this research, ruthenium thin film was Polished by CMP with cerium ammonium nitrate (CAN)base slurry. HNO3 was added on the CAN solution as an additive. In the various concentration of chemical and alumina abrasive, ruthenium surface was etched and polished. After static etching and polishing, etching and removal rate was investigated. Also microroughness of surface was observed by AFM. The etching and removal rate depended on the concentration of CAN, and HNO3 accelerated the etching and polishing of ruthenium. The reasonable removal rate and microroughness of surface was achieved in the 1wt% alumina slurry.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 1997년도 추계학술대회 논문집
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• pp.969-972
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• 1997

Ultrasonic machining technology has been developed over recent years for he manufacture of cost-effective and quality-assured precision parts for several industrial application such as optics, semiconductors, aerospace, and automobile application. The past decade has seen a tremendous in the use of ceramic in structural application. The excellent thermal, chemical and wear resistance of these material can be realized because of recent improvement in the overall strength and uniformity of advanced ceramics. Ultrasonic machining, in which abrasive particles in slurry with water are presented to the work surface in the presence of an ultrasonic-vibrating tool, is process which should be of considerable interest, as its potential is not limited by he electrical or chemical characteristics of the work material, making it suitable for application to ceramics. In order to improve the currently used ultrasonic machining using ultrasonic energy, technical accumulation is needed steadily through development of exciting device of ultrasonic machine composed of piezoelectric vibrator and horn. This paper intends to further the understanding of the basic mechanism of ultrasonic machining for brittle material and ultrasonic machining of ceramics based in the fracture-mechanic concept has been analyzed.