• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2003.07a
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• pp.50-53
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• 2003

CMP (chemical mechanical polishing) process remained to solve several problems in deep sub-micron integrated circuit manufacturing process. especially consumables (polishing pad, backing film, slurry, pad conditioner), one of the most important components in the CMP system is the slurry. Among the composition of slurries (buffer solution, bulk solution, abrasive particle, oxidizer, inhibitor, suspension, antifoaming agent, dispersion agent), the abrasive particles are important in determining polish rate and planarization ability of a CMP process. However, the cost of abrasives is still very high. So, in order to reduce the high COO (cost of ownership) and COC (cost of consumables) in this paper, we have collected the silica abrasive powders by filtering after subsequent CMP process for the purpose of abrasive particle recycling. And then, we have studied the possibility of recycle of reused silica abrasive through the analysis of particle size and hardness. Also, we annealed the collected abrasive powders to promote the mechanical strength of reduced abrasion force. Finally, we compared the CMP characteristics between self-developed KOH-based silica abrasive slurry and original slurry. As our experimental results, we obtained the comparable removal rate and good planarity with commercial products. Consequently, we can expect the saving of high cost slurry.

• Proceedings of the Korean Society of Machine Tool Engineers Conference
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• 1998.03a
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• pp.40-52
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• 1998

Among the non-traditional machining methods, Abrasive waterjet machining process shows big promise in drilling difficult-to-machine materials due to its numerous advantages such as absence of heat affect zone and thermal distortion. Acoustic emission signal technique is used to understand about material removal mechanisms during abrasive waterjet drilling process. More information about the drilling process is derived through frequency decomposition of auto regressive moving average modeling representing acoustic emission signals.

• Tribology and Lubricants
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• v.25 no.6
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• pp.404-408
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• 2009

In this paper, the relationship between the material removal rate and the interfacial mechanical properties at particle-surface contact situation, which can be seen in an abrasive machining process using micro/nano-sized particles, was discussed. Friction and stiffnesses were measured experimentally on an atomic force microscope (AFM) by using colloidal probes which have a silica colloid particle in place of tip to simulate a particle-flat surface contact in an abrasive machining process. From the experimental investigation and theoretical contact analysis, the interfacial contact properties such as lateral stiffness of contact, friction, the material removal rate were presented with respect to some of material surfaces and the relationship between the properties as well.

• Journal of the Korean Society for Precision Engineering
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• v.27 no.8
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• pp.91-97
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• 2010

Micro-abrasive Jet Machining is one of the new technology which enables micro-scale machining on the surface of high brittle materials. In this technology it is very important to fabricate a mask that prevents excessive abrasives not to machine un-intend surface. Our previous work introduced the micro-stereolithography technology for the mask fabrication. And is good to not only planar material but also for non-planar materials. But the technology requires a 3 dimensional mask CAD model which is perfectly matched with the surface topology of parent material as an input. Therefore there is strong need to develop an automated modeling technology which produce adequate 3D mask CAD model in fast and simple way. This paper introduces a fast and simple mask modeling algorithm which represents geometry of models in voxel. Input of the modeling system is 2D pattern image, 3D CAD model of parent material and machining parameters for Micro-abrasive Jet Machining. And the output is CAD model of 3D mask which reflects machining parameters and geometry of the parent material. Finally the suggested algorithm is implemented as software and verified by some test cases.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.17 no.10
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• pp.1041-1048
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• 2004

Chemical mechanical polishing (CMP) process was studied in terms of tribology in this paper. CMP performed by the down force and the relative motion of pad and wafer with slurry is typically tribological system composed of friction, wear and lubrication. The piezoelectric quartz sensor for friction force measurement was installed and the friction force was detected during CMP process. Various friction signals were attained and analyzed with the kind of pad, abrasive and abrasive concentration. As a result of experiment, the lubrication regime is classified with ηv/p(η, v and p; the viscosity, relative velocity and pressure). The characteristics of friction and material removal mechanism is also different as a function of the kind of abrasive and the abrasive concentration in slurry. Especially, the material removal per unit distance is directly proportional to the friction force and the non~uniformity has relation to the coefficient of friction.

• Journal of the Korean Ceramic Society
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• v.44 no.9
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• pp.510-516
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• 2007

After observing the alkali-silica reaction of the mortar that contains glass abrasive sludge, when evaluating it by a mineral or chemical point of view, it contained reactive silica $(59{\sim}67%)$ and $R_20$ elements $(4.3{\sim}9.8%)$. Also, when evaluated by the mortar bar method, an addition of 5 wt% of CRT glass abrasive sludge is judged harmless. However when adding more, there appear severe contractions, thus carefulness is needed while using. Less than 0.10% of expansion was measured when adding up to 30wt% of flat glass abrasive sludge. However, after 30 days of the measurement, more than 0.1% rate of expansion was measured when adding more than 5 wt%. Therefore, more detailed experiments are needed in case of more than 5 wt%.

• Journal of the Speleological Society of Korea
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• no.70
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• pp.45-50
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• 2006

The magnetic polishing is the useful method to finish using magnetic power of magnet. This method is one of precision polishing techniques and has an aim of the clean technology using for the pure of gas and inside of the clean pipe for transportation. The magnetic abrasive polishing method is not so common for machine that it is not spreaded widely. There are rarely researcher in this field because of non-effectiveness of magnetic abrasive. Therefore, in this paper deals with development of the magnetic abrasive using worthless mineral. In this development, abrasive grain WA and GC used to resin bond fabricated low temperature. And magnetic material was fabricated from the worthless mineral which were closed into 200 mesh grit type. The XRD analysis result show that only WA and GC abrasive and worthless mineral crystal peaks detected which explains resin bond was not any more chemical reaction. From SEM analysis it is found that WA and GC abrasive and worthless mineral were strong bonding with each other by bond.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2009.06a
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• pp.743-744
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• 2009

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2007.06a
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• pp.239-240
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• 2007

• Journal of the Korean Society for Heat Treatment
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• v.20 no.2
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• pp.72-77
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• 2007

Abrasive wear between piston ring face and cylinder liner is an extremely unpredictable and hard-to-reproduce phenomenon that significantly decreases engine performance. Wear by abrasion are forms of wear caused by contact between a particle and solid material. Abrasive wear is the loss of material by the passage of hard particles over a surface. From the pin-on-disk test, particle dent test and scuffing test, abrasive wear characteristics of diesel engine cylinder liner-piston ring have been investigated. Pin-on-disk test results indicate that abrasive wear resistance is not simply related to the hardness of materials, but is influenced also by the microstructure, temperature, lubricity and micro- fracture properties. In particle dent test, dent resistance stress decreases with increasing temperature. From the scuffing test by using pin-on-disk tester, scuffing mechanisms for the soft coating and hard coating were proposed and experimentally confirmed.