• 한국공작기계학회:학술대회논문집
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• 한국공작기계학회 1996년도 추계학술대회 논문
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• pp.138-143
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• 1996

The 3-dimensional complex parts which construct automobile and aerospace parts are very difficult to polish by traditional polishing method. Abrasive flow machining is useful to polish an internal or external surface of the 3-dimensional shape part. In this paper media flow between workpiece and tooling part has been simulated and the charateristics of abrasive flow machining process have been analyzed according to various machining conditions by calculating the material removal and surface roughness.

• 마이크로전자및패키징학회지
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• 제10권3호
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• pp.67-71
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• 2003

실리콘 주괴(ingot)에서 실리콘 웨이퍼를 제조할 때 사용되는 슬러리는 SiC 연마재와 절삭유를 포함한다. 실리콘 웨이퍼 제조 시 생긴 폐슬러지에서 SiC 연마재와 절삭유는 분리되어 재활용된다. 본 연구는 폐슬러지 Si 분말에 C분말을 혼합하여 SiC를 합성하는 것에 관한 것이다. 다양한 크기의 SiC 분말과 휘스커가 제조되었으며 기존의 휘스커의 크기보다 작은 나노미터 크기의 휘스커도 발생하였다. 일반적으로 휘스커는 금속 불순물을 첨가하여 제조되는데, 본 연구에서 나노미터 크기의 휘스커 발생은 폐슬러지에 첨가되어있는 미세한 크기의 금속불순물의 영향으로 판단된다.

• 한국지구물리탐사학회:학술대회논문집
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• 한국지구물리탐사학회 2003년도 Proceedings of the international symposium on the fusion technology
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• pp.637-641
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• 2003

Abrasive powders were recovered from electrical industry sludge by simple physical separation for their recycling. The raw electrical industry sludge was filter pressed, dried, dispersed and then classified by air classifier at various conditions. The three kinds of particles with different particle size distribution were classified by controlling rotor speed and air volumes of the classifier. The recovered abrasive powders, which are classified at 5,000,9000 and 13,000 rpm of rotor speed, are almost same properties to raw pumice, garnet and rouge powders, respectively. The results of particle size analysis, X-ray diffraction and SEM observation show that the recovered powders can be reused as an abrasive powders.

• 한국기계가공학회지
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• 제4권1호
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• pp.7-12
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• 2005

An internal finishing process by the application of magnetic abrasive finishing has been developed as a new technology to obtain a fine inner surface of pipe. In this paper, another method of magnetic abrasive machining in which the N and S magnetic poles are vibrated and a workpiece is rotated only is tried in a non-ferromagnetic pipe(SUS304), and its finishing characteristics is experimently investigated by various effective factors such as vibrating frequency and amplitude. From the experimental results, it is found that the vibration effects of magnetic poles on the finishing characteristics are large in internal finishing.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 1995년도 춘계학술대회 논문집
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• pp.97-101
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• 1995

This paper describes a new surface finishing process which uses magnetic abrasive polishing. This is applied to automatic finishing of die & mold surface. Nowadays, most of die & mold meanufaturing procedures have been automated by the introduction of NC machine tool and CAD/CAM system. But the surface finishing of die & mold must be done by hand work of well-skilled workers. Though many attempts were tried in the past 15 years to eliminate this hand work, the automatic finishing of die & mold surface with 3D curvature has not been achieved yet. New magnetic abrasive finishing process is thought as one of the possible methods for the automation of 3D surface finishing. In order to improve the grindability of the method, ultra-high speed and 5-axis machining was introduce. The magnetic abrasive polishing which has adopted these methods was confirmend to improve the efficiencyof die & mold surface finishing.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2002년도 추계학술대회 논문집
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• pp.206-209
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• 2002

The fixed abrasive pad(FAP) has been introduced in chemical mechanical polishing(CMP) field recently. In comparison with the general CMP which uses the slurry including abrasives, FAP takes advantage of planarity. resulting from decreasing pattern selectivity and defects such as dishing due to the reduction of abrasive concentration especially. This paper introduces the manufacturing technique of $Al_2$O$_3$-FAP using hydrophilic polymers with swelling characteristic in water and explains the self.texturing phenomenon. It also focuses on the chemical effects on tungsten film and the FAP is evaluated on the removal rate as a function of chemicals such as oxidizer, catalyst, and acid. The removal rate is achieved up to 1000A1min as about 70 percents of the general one. In the future. the research has a plan of the advanced FAP and chemicals in tungsten CMP considering micro-scratch, life-time, and within wafer non-uniformity.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2002년도 추계학술대회 논문집
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• pp.227-230
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• 2002

New polishing technique for small parts has been tried out using the principle of particle electromechanics. Common fine abrasives such as alumina, diamond, silicon carbide are dielectric materials which are polarized under an electric field, and a non-uniform electric field makes abrasive particles translate along the field line. Using this principle, We make abrasive particles aggregate in the vicinity of the micro tool which is fir the surface finishing of a small part without contact with it. The behavior of particles is optically measured, and the machined depth of glass is examined.

• 한국정밀공학회지
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• 제15권6호
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• pp.48-57
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• 1998

Abrasive waterjet(AWJ)은 가공시 열에 의한 가공경화가 없기 때문에 유리, 세라믹, 타이타늄및 금속복합재료와 같은 난삭재의 가공기술로 사용이 증가되었다. Acoustic emission(AE)신호에 의한 AWJ 세라믹 drilling가공시 On-Line Monitoring의 가능성이 고찰되었다. 기계 적인 물성이 서로 상이한 3종류의 세라믹이 본 연구에서 사용되었으며, AE신호는 AWJ drilling의 깊이를 monitoring하는데 유용함을 알 수 있었고 또한 세라믹의 material removal mechanisms을 규명하였다.

• 수산해양기술연구
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• 제46권4호
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• pp.495-502
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• 2010

The effect of load and sliding speed on abrasive wear characteristics of glass fiber/polyurethane (GF/PUR) composites were investigated at ambient temperature by pin-on-disc friction test. The friction coefficient, cumulative wear volume and surface roughness of these materials against SiC abrasive paper were determined experimentally. Experimental results showed that the surface roughness of the GF/PUR composites was increased as applied load was higher in wear test. The cumulative wear volume tended to increase nonlinearly with increase of sliding distance and depended on applied load and sliding speed for these composites. It could be verified by scanning electric microscopy (SEM) photograph of surface tested that major failure mechanisms were lapping layers, ploughing, delamination, deformation of resin and cracking.

• 한국자동차공학회논문집
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• 제13권2호
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• pp.118-126
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• 2005

Abrasive waterjet (AWJ) cutting is an emerging technology for precision cutting of difficult-to-machining materials with the distinct advantages of no thermal effect, high machinability, high flexibility and small cutting forces. This paper investigated theoretical and experimental cutting characteristics associated with abrasive waterjet cutting of quartz GE214. It is shown that the proper variations of several cutting parameters such as waterjet cutting pressure, cutting speed and cutting depth improve the roughness on workpiece surfaces produced by AWJ cutting. From the experimental results by AWJ cutting of quartz GE214, the optimal cutting conditions to improve the surface roughness and precision were proposed and discussed.