• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2003년도 제5회 학술대회 논문집 일렉트렛트 및 응용기술연구회
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• pp.109-112
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• 2003

Recently, CMP (Chemical mechanical polishing) technology has been widely used for global planarization of multi-level interconnection for ULSI applications. However, COO (cost of ownership) and COC (cost of consumables) were relatively increased because of expensive slurry. In this paper, we have studied the possibility of recycle of reused silica slurry in order to reduce the costs of CMP slurry. Also, we have collected the silica abrasive powders by filtering after subsequent CMP process for the purpose of abrasive particle recycling. And then, we annealed the collected abrasive powders to promote the mechanical strength of reduced abrasion force. Finally, we compared the CMP characteristics between self-developed KOH-based silica abrasive slurry and original slurry. As our experimental results, we obtained the comparable removal rate and good planarity with commercial products. Consequently, we can expect the saving of high cost slurry.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2005년도 춘계학술대회 논문집
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• pp.1175-1178
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• 2005

Brittle materials, especially single-crystal silicon wafer, are widely used for sensors, IC industry, and MEMS applications. e general machining process of crack easy materials is by chemical agents, but it is hazardous and time consuming. Also, it is difficult to get high aspect ratio micro structure. As an alternative tool, an AJM(Abrasive jet machining) is promising method in terms of high aspect ratio and production cost. In this study, to get more precise detail compared to general AJM, photo polymer mask, SU-8, used in photolithography was applied in AJM. Process parameters such as abrasive diameter, air pressure, nozzle diameter, flow rate of abrasive in AJM and a variety of conditions in spin coating were decided. Finally, micro channel and mixer was fabricated to see the efficiency of the AJM with photo polymer mask.

• 한국생산제조학회지
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• 제25권1호
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• pp.83-88
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• 2016

Because of the increasing tool cost for cutting hard-to-cut materials, abrasive water jet (AWJ) milling recently has been regarded as a potential alternative machining method. However, it is difficult to control the depth and width of cut in AWJ milling because they vary depending on many AWJ cutting parameters. On 27 conditions within a limited range of pressure, feed rate, and abrasive flow rate, AWJ cutting was conducted on titanium, and depth profiles were measured with a laser sensor. From the depth profile data, depth and width of cut were acquired at each condition. The relationships between depth and parameters and between width and parameters were derived through regression analysis. The former can provide proper cutting conditions and the latter the proper pick feed necessary to generate a milled surface. It is verified that pressure mostly affects depth, whereas abrasive flow rate mostly affects width.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2006년도 추계학술대회 논문집 Vol.19
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• pp.380-381
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• 2006

Chemical mechanical polishing (CMP) technology has been widely used for global planarization of multi-level interconnection for ULSI applications. However, the cost of ownership and cost of consumables are relatively high because of expensive slurry. In this paper, we studied the mixed abrasive slurry (MAS). In order to save the costs of slurry, the original silica slurry was diluted by de-ionized water (DIW). And then, $ZrO_2$, $CeO_2$, and $MnO_2$ abrasives were added in the diluted slurry in order to promote the mechanical force of diluted slurry. We have also investigate the possibility of mixed abrasive slurry for the oxide CMP application.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2004년도 하계학술대회 논문집 Vol.5 No.2
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• pp.1312-1315
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• 2004

Chemical Mechanical Polishing is referred to as a three body tribological system, because it includes two solids in relative motion and the slurry. On the assumption that the abrasives between the pad and the wafer could be a major reason of not only the friction force but also material removal during polishing. The friction force generated by the abrasives was inspected with the change of abrasive size and concentration in this paper. The variation of coefficient of friction with abrasive concentration and size could result from the condition of contact and load balance between wafer and abrasives carried by pad asperity. The simulation was performed in this paper and compared with the result of experiment. The material removal rate also estimated with abrasive concentration and size increasement.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 1997년도 추계학술대회 논문집
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• pp.915-918
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• 1997

An internal finishing process by the application of magnetic abrasive machining has been developed as a new technology to obtain a fine inner surface of pipe. In this paper, an abrasive circulation system was designed and manufactured. As a result, it was found that a fine inner surface abrasive of pipe was available by the use of this machining methods. The basic machining characteristics of pin-type magnetic tools were analyzed experimentally. In addition, the experimental results show that we can realize that pin-type magnetic tools have more machining efficiency than iron particles as magnetic tools.

• 대한기계학회논문집A
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• 제35권8호
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• pp.899-904
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• 2011

본 연구는 마이크로 머시닝을 적용한 유동채널가공에서 버의 발생과 제거에 관한 연구이다. AISI316 스테인리스강의 마이크로 유동채널가공은 마이크로 밀링과 자기 디버링을 결합하여 실시하였다. 먼저 마이크로 밀링으로 유동채널을 가공하였고, 가공조건에 따라 마이크로 채널주변에 미소 버가생성됨을 확인하였다. 미소 버를 제거하기 위해서 자기 디버링을 행하였다. AISI316 스테인리스강은 비자성체로 자기연마에 큰 영향을 미치는 자속밀도가 매우 낮은 금속이다. 본 연구에서는 공작물의 자속밀도를 향상시키기 위해서 자기 테이블을 개발하여 이를 자기연마 디버링에 적용하였고, 주사전자현미경(SEM)과 표면형상기로 자기 디버링에 의한 버의 제거효과를 측정하였다.

• 한국정밀공학회지
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• 제27권7호
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• pp.79-86
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• 2010

The environment-friendly abrasive materials of starch series has a wide range of application value such as deburring of plastic injection products, paint exfoliation and surface treatment of painted products and polishing, etc. In this study, an experiment of paint exfoliation was performed by using the environment-friendly abrasive materials made of cheap starch, and its performance was reviewed. By adjusting the grit size of abrasive materials, nozzle pressure, nozzle feed and number of nozzle repetition, paint could be exfoliated effectively. In this experiment, it was found that the most suitable condition was grit size 0.75~1.0 mm, nozzle pressure 0.4 MPa, nozzle feed 5 mm/min and number of processing repetition 2 times.

• 한국세라믹학회지
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• 제44권9호
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• pp.510-516
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• 2007

After observing the alkali-silica reaction of the mortar that contains glass abrasive sludge, when evaluating it by a mineral or chemical point of view, it contained reactive silica $(59{\sim}67%)$ and $R_20$ elements $(4.3{\sim}9.8%)$. Also, when evaluated by the mortar bar method, an addition of 5 wt% of CRT glass abrasive sludge is judged harmless. However when adding more, there appear severe contractions, thus carefulness is needed while using. Less than 0.10% of expansion was measured when adding up to 30wt% of flat glass abrasive sludge. However, after 30 days of the measurement, more than 0.1% rate of expansion was measured when adding more than 5 wt%. Therefore, more detailed experiments are needed in case of more than 5 wt%.

• Maxillofacial Plastic and Reconstructive Surgery
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• 제40권
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• pp.12.1-12.5
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• 2018

Background: Subcutaneous emphysema refers to swelling caused by the presence of air or gas in the interstices of loose connective tissue. In the head and neck area, it may follow the fascial planes and is characterized by sudden swelling, crepitus on palpation, infrequent pain, and air emboli on radiography. It usually occurs as a complication in dental treatment. Some reports have described subcutaneous emphysema caused by dental procedures; however, severe emphysema related to peri-implantitis after treatment has not been documented. Accordingly, the current report describes a rare case of subcutaneous cervical emphysema resulting from the use of an air-powder abrasive device to treat peri-implantitis. Case presentation: Based on a review of the existing literature and the present case, nine cases of subcutaneous emphysema due to air-powder abrasive device have been reported. In most cases, the emphysema resolved over time after treatment with prophylactic antibiotics; among these, two were related to peri-implantitis management. Conclusion: Considering the frequent use of air-powder abrasive devices to treat peri-implantitis, the potential risk of iatrogenic emphysema related to this procedure needs to be addressed more extensively.