• Proceedings of the Korean Vacuum Society Conference
• /
• 2012.02a
• /
• pp.285-285
• /
• 2012

본 논문에서는 HBr, O2 gas를 사용하여 나노급 반도체 디바이스에 응용되는 실리콘 트렌치 패턴의 건식 식각시 중요한 인자중의 하나인 RIE (Reactive Ion Etching) Lag현상에 관하여 연구하였다. 실험에서 사용된 식각 장치는 유도 결합 플라즈마(Inductively Coupled Plasma) 식각 장치로써, Source Power및 기판에 인가되는 Bias power 모두 13.56 MHz로 구동되는 장치이며, Source Power와 Bias Power 각각에 펄스 플라즈마를 인가할 수 있도록 제작 되어있다. HBr과 O2 gas를 사용한 트렌치 식각 중 발생하는 식각 부산물인 SiO는 프로파일 제어에 중요한 역할을 함과 동시에, 표면 산화로 인해 Trench 폭을 작게 만들어 RIE lag를 심화시킨다. Br은 실리콘을 식각하는 중요한 라디칼이며, SiO는 실리콘과 O 라디칼의 반응으로부터 형성되는 식각 부산물이다. SiO가 많으면, 실리콘 표면의 산화가 많이 진행될 것을 예측할 수 있으며, 이에 따라 RIE lag도 나빠지게 된다. 본 실험에서는 Continuous Plasma와 Bias Power의 펄스, Source Power의 펄스를 각각 적용하고, 각각의 경우 Br과 SiO 라디칼의 농도를 Actinometrical OES (Optical Emission Spectroscopy) tool을 사용하여 비교하였다. 두 라디칼 모두 Continuous Plasma와 Bias Power 펄스에 의해서는 변화가 없는 반면, Source Power 펄스에 의해서만 변화를 보였다. Source Power 값이 증가함에 따라 Br/SiO 라디칼 비가 증가함을 알 수 있었고, 표면 산화가 적게 형성됨을 예측할 수 있다. 이 조건의 경우, Continuous Plasma대비 Source Power 펄스에 의하여 RIE lag가 30.9 %에서 12.8 %로 현격히 개선된 결과를 얻을 수 있었다. 또한, 식각된 실리콘의 XPS 분석 결과, Continuous Plasma대비 Source Power 펄스의 경우 표면 산화층이 적게 형성되었음을 확인할 수 있었다. 따라서, 본 논문에서는 식각 중 발생한 Br과 SiO 라디칼을 Source Power펄스에 의한 제어로 RIE lag를 개선할 수 있으며, 이러한 라디칼의 변화는 Actinometrical OES tool을 사용하여 검증할 수 있음을 보여준다.

• Journal of the Korean Institute of Telematics and Electronics
• /
• v.25 no.9
• /
• pp.1115-1124
• /
• 1988

A two-dimensional systolic array for fast Fourier transform, which has a regular and recursive VLSI architecture is presented. The array is constructed with identical processing elements (PE) in mesh type, and due to its modularity, it can be expanded to an arbitrary size. A processing element consists of two data routing units, a butterfly arithmetic unit and a simple control unit. The array computes FFT through three procedures` I/O pipelining, data shuffling and butterfly arithmetic. By utilizing parallelism, pipelining and local communication geometry during data movement, the two-dimensional systolic array eliminates global and irregular commutation problems, which have been a limiting factor in VLSI implementation of FFT processor. The systolic array executes a half butterfly arithmetic based on a distributed arithmetic that can carry out multiplication with only adders. Also, the systolic array provides 100% PE activity, i.e., none of the PEs are idle at any time. A chip for half butterfly arithmetic, which consists of two BLC adders and registers, has been fabricated using a 3-um single metal P-well CMOS technology. With the half butterfly arithmetic execution time of about 500 ns which has been obtained b critical path delay simulation, totla FFT execution time for 1024 points is estimated about 16.6 us at clock frequency of 20MHz. A one-PE chip expnsible to anly size of array is being fabricated using a 2-um, double metal, P-well CMOS process. The chip was layouted using standard cell library and macrocell of BLC adder with the aid of auto-routing software. It consists of around 6000 transistors and 68 I/O pads on 3.4x2.8mm\ulcornerarea. A built-i self-testing circuit, BILBO (Built-In Logic Block Observation), was employed at the expense of 3% hardware overhead.

• The Journal of Korean Institute of Communications and Information Sciences
• /
• v.38A no.4
• /
• pp.303-309
• /
• 2013

A low power 6-bit flash ADC that uses an input voltage range detection algorithm is described. An input voltage level detector circuit has been designed to overcome the disadvantages of the flash ADC which consume most of the dynamic power dissipation due to comparators array. In this work, four digital input voltage range detectors are employed and each input voltage range detector generates the specific clock signal only if the input voltage falls between two adjacent reference voltages applied to the detector. The specific clock signal generated by the detector is applied to turn the corresponding latched comparators on and the rest of the comparators off. This ADC consumes 68.82mW with a single power supply of 1.2V and achieves 4.9 effective number of bits for input frequency up to 1MHz at 500 MS/s. Therefore it results in 4.75pJ/step of Figure of Merit (FoM). The chip is fabricated in 0.13-um CMOS process.

• Journal of the Korea Institute of Information and Communication Engineering
• /
• v.9 no.8
• /
• pp.1741-1748
• /
• 2005

In this paper, we describe VLSI design and performance evaluation of OCB-AES crytographic algorithm that simulataneously provides privacy and authenticity. The OCB-AES crytographic algorithm sovles the problems such as long operation time and large hardware of conventional crytographic system, because the conventional system must implement the privancy and authenticity sequentially with seqarated algorithms and hardware. The OCB-AES processor with area-efficient modular offset generator and tag generator is designed using IDEC Samsung 0.35um standard cell library and consists of about 55,700 gates. Its cipher rate is about 930Mbps and the number of clock cycles needed to generate the 128-bit tags for authenticity and integrity is (m+2)${\times}$(Nr+1), where m and Nr represent the number of block for message and number of rounds for AES encryption, respectively. The OCB-AES processor can be applicable to soft cryptographic IP of IEEE 802.11i wireless LAN and Mobile SoC.

• Proceedings of the Korean Institute of Navigation and Port Research Conference
• /
• v.2
• /
• pp.3-8
• /
• 2006

The next decade promises drastic improvements and additions to global navigation satellite systems (GNSS). Plans for GPS modernization include a civilian code measurement on the L2 frequency and a new L5 signal at 1176.45 MHz. Current speculations indicate that a fully operational constellation with these improvements could be available by 2013. Simultaneously, the Galileo Joint Undertaking is in the development and validation stages of introducing a parallel GNSS called Galileo. Galileo will also transmit freely available satellite navigation signals on three frequencies and is scheduled to be fully operational as early as 2008. In other words, a dual system receiver (e.g., GPS+GALILEO) for general users can access six civil frequencies transmitted by at least fifty eights navigation satellites in space. The advent of GALILEO and the modernization of GPS raise a lot of attention to the study of the compatibility and interoperability of the two systems. A number of performance analyses have been conducted in a global scale with respect to availability, reliability, accuracy and integrity in different simulated scenarios (such as open sky and urban canyons) for the two systems individually and when integrated. Therefore, the scope of this article aims at providing the technical benefits analysis for Taiwan specifically in terms of the performance indices mentioned above in a local scale, especially in typical urban canyon scenarios. The conclusions gained by this study will be applied by the Land Survey Bureau of Taiwanese as the guideline for developing future GNSS tracking facilities and dual GNSS processing module for precise surveying applications in static and kinematic modes.

• Journal of radiological science and technology
• /
• v.32 no.2
• /
• pp.169-175
• /
• 2009

This study examined 40 healthy volunteers had been tested for their gallbladder (GB) volume and wall thickness by a real time ultrasonography before and after a meal. The results are as follows : 1. The mean values of GB volume were 47.40. (SD 9.05) for male, 35.72. (SD 8.30) for female. 2. The mean value of wall thickness of GB was 2.3 mm (SD 0.3, male, SD 0.5, female). 3. The mean ejection-fraction rates of GB result in 67.20% for male, 63.95% for female. 4. The values of GB volume had significant negative correlations (v = -.487, p < .000, male, v = -.509, p < .000, female) within 4 hours after a meal and significant positive correlations (v = .434, p < .000, male, v = .440, p < .000, female) afterward. 5. The wall thicknesses of GB were significant positive correlations (t = .310, p < .002, male, t = .116, p < .246, female) within 3 hours after a meal and significant negative correlations (t = -.288, p < .010, male, t = -.126, p < 7.10, female) afterward. 6. The relationship between volume and wall thickness of GB showed significant negative correlation.

• Radiation Oncology Journal
• /
• v.8 no.1
• /
• pp.85-93
• /
• 1990

A series of 25 patients with residual, recurrent, and unresectable gastric cancer received various combination of surgery, radiotherapy (RT), chemotherapy (CT), and hyperthermia (HT). They were placed into 7 categories; 1) CT and HT-14 patients; 2) RT and HT-15 patients; 3) surgery, RT and HT-2 patients; 4) surgery, RT, HT and CT-1 patient; 5) RT, HT and CT -1 patient; 6) RT and CT-1 patient; 7) RT alone-1 patient. Three patients had curative resection. 21 patients received irradiation with tightly contoured portals to spare as much small bowel, kidney and marrow as possible. Hyperthermia was applied regionally once or twice a week for 23 patients using 8 MHz radiofrequency capacitive heating device (Thermotron RF-8). HT was given approximately 30 min after RT 7 patients were treated with CT: 4 patients received HT and concomitant Mitomycin-C; 3 patients received HT and sequential 5-FU+Adriamycin+Mitomycin-C. There was not any treatment related deaths. There was also no evidence of treatment related problems with liver, kidney, stomach, or spinal cord except only one case of transient diabetic ketoacidosis. The tumor response was evaluable in 22 patients. None achieved complete remission.11 ($50\%$) achieved partial remission. The response rate was correlated with total radiation dose and achieved maximum temperature. 9 of 14 ($64\%$) received more than 4000 cGy showed partial remission; especially, all 3 patients received more than 5500 cGy achieved partial response.8 of the 12 patients ($67\%$) who achieved maximal temperature more than $41^{\circ}C$ showed partial response in comparing with $25\%$ (2 of 8 patients, below $41^{\circ}C$). The numbers of HT, however, was not correlated with the response. 3 of the 25 patients ($12\%$) remain alive. The one who was surgically unresectable and underwent irradiation alone is in progression of the disease with distant metastases. The remaining two patients with curative resection are alive with free of disease, 24 and 35 months, respectively. The median survival by response are 11.5 months in responders and 4.6 months in non-responders.

• Physical Therapy Korea
• /
• v.10 no.1
• /
• pp.15-27
• /
• 2003

Therapeutic ultrasound is commonly applied for deep heating in physical therapy setting. However, it is difficult to determine the exact application dosage and to confirm the immediate heating effect. Microwave Radio-Thermometer (MRT) can measure the temperature by the electromagnetic energy in the microwave region of the object that emits above absolute zero temperature. MRT was used for early diagnosis of breast cancer since it was not harmful, non-invasive, and non-ionizing to the human body. The purposes of this study were to investigate how accurately 1.1 GHz RTM (RES Ltd. Russia) measures the change of average temperature in the tissue, and to determine the depth of temperature change measurement. Therapeutic ultrasound was applied (continuous wave for 5 minutes, 1 MHz, intensity of 1.5 $W/cm^2$ [in vitro] and 1.0 $W/cm^2$ [in vivo]) in four different conditions: (1) 30 cases of in vitro specimen of pork, (2) 30 cases of in vitro specimen of pork ankle joint, (3) 10 cases of in vivo canine thigh, and (4) 30 cases of in vivo human body. Intraclass Correlation Coeffients (ICC[3,1]) between average needle probe thermometer below surface and MRT temperature was revealed as followed: (1) Before ultrasound application ICCs ranges above .8 in specimen of pork (15 mm underneath the skin) and above .82 in specimen of pork ankle joint (10~30 mm underneath the skin). (2) After ultrasound application ICCs ranges above .7 in both specimens of pork and pork ankle joint. (3) Before ultrasound application ICCs ranges above .8 in canine thigh (20 mm underneath the skin). (4) After ultrasound application ICCs ranges above .82 in canine thigh. The temperature of the human body increased significantly with the mean of $15^{\circ}C$ in muscle tissue and with the mean of $3.5^{\circ}C$ in joint (p<.00). It was revealed that the average depth of temperature measurement of the tissue by MRT was in between 10 and 35 mm, and determined that the proper temperature measurement band was $36.5{\sim}37.0^{\circ}C$.

• Journal of the Korea Institute of Information and Communication Engineering
• /
• v.25 no.11
• /
• pp.1627-1634
• /
• 2021

This paper introduces a low-power compact ADC circuit for analog Convolutional filter for low-power neural network accelerator SOC. While convolutional neural network accelerators can speed up the learning and inference process, they have drawback of consuming excessive power and occupying large chip area due to large number of multiply-and-accumulate operators when implemented in complex digital circuits. To overcome these drawbacks, we implemented an analog convolutional filter that consists of an analog multiply-and-accumulate arithmetic circuit along with an ADC. This paper is focused on the design optimization of a low-power 8bit SAR ADC for the analog convolutional filter accelerator We demonstrate how to minimize the capacitor-array DAC, an important component of SAR ADC, which is three times smaller than the conventional circuit. The proposed ADC has been fabricated in CMOS 65nm process. It achieves an overall size of 1355.7㎛², power consumption of 2.6㎼ at a frequency of 100MHz, SNDR of 44.19 dB, and ENOB of 7.04bit.

• The Proceeding of the Korean Institute of Electromagnetic Engineering and Science
• /
• v.8 no.2
• /
• pp.37-55
• /
• 1997

최근 선진국가들에서는 전자파 장애 증후군에 관심이 집중되고 있는데, 전자파에 장기 노출 되는 인구에서 뇌암이나 유방암, 백혈병 등의 발생률이 높다는 보고(Kolmodin-Hedman 등, 1988 ; Demers등, 1991)가 있어서 전자제품의 생산업체는 물론이고 사용자에 대해서도 불안한 관심사가 되 어 있다. 전자파가 생체에 미치는 영향은 열적 효과와 비열적 효과에 의한 것으로 구분된다. Microwave는 약 300MHz에서 300GHz 사이(파장 1m에서 1mm사이)의 주파수를 가지는 전자파로서 이온의 운동이나 쌍극자분자(dipole molecule)들을 진동시키므로서 조직에 열이 발생한다. 열이 과도하게 발생하면 세포 단백질이 응고하게 되는 등 일반적으로 생각할 수 있는 고열로 인한 여러 가지 유해환경이 조직 에 조성될 수 있다. 실제로 고전압의 전자파에 노출된 안구의 수정체에 백내장 등의 병변이 발생한 것 으로 보고된 바 있다(Adey,1981). 일반적으로 전자파의 생체에 대한 작용으로는 이렇듯 조직에 흡수 되는 전자파의 에너지에 의한 열작용이 지배적인 것으로 생각되어 왔다. 그러나 초저주파역대(Extre- mely low frequency, EMF)의 변조 및 펄스파 등의 영향에 관해서도 조직의 온도상승으로는 설명할 수 없는 현상이 보고된 바 있다. 이러한 비열적 효과가 신경계에 끼치는 영향에 대해서는 혈액뇌관문 의 투과성 변화(Oscar와 Hawkins, 1977), 뇌종양 발생, 칼슘대사 이상 및 신경전달물질에 대한 영향 등이 주장(Anderson, 1993)되고 있으나 아직 그 분명한 기전이 밝혀져 있지 않은 상태이다. 또한 그 영향의 평가에 서도 일정한 기준이나 지표가 정해지지 않은 실정이다. 그러므로 신경계에 대한 대체적인 소개와 더불어 전자기파의 영향에 대한 이제까지의 보고를 종합 하고 향후 연구의 방향을 소개하고자 한다.> 이온이 공동 첨가제로 더 적합하다.u(30 .angs. )/CoFe(35 .angs. )/NiO(800 .angs. ) 구조를 갖는 spin-valve 박막은 극대 MR비 6.3%, 유효자기장감응도 약 0.5(%/Oe)를 보여 spin-valve head 재료로 적합함을 알 수 있었다.다.다.다.는 각각 148 meV .angs. $^{2}$, 103.8 meV .angs. $^{2}$와 1.77 * $10^{-6}$ erg/cm, 0.67 * $10^{-6}$ erg/cm 였다.다.자 노인들을 영주권자와 귀화 시민권자의 구분없이 하나의 집단으로 간주하고 분석해 왔던 것을 볼 때, 앞으로의 연구는 이론적으로나 방법론적으로 시민권의 유무가 주거형태에 끼치는 영향도 함께 고려해야 할 것이다.에 나타난 인도의 영향은 여성복식과 남성복식에 있어서 서로 유사점과 차이점이 보이는데, 인도의 영향이 여성복식에 있어서 그 빈도가 더 높고, 종류가 더 다양함을 볼 수 있다. 여성복식에 있어서는 12가지의 다양한 인도복식스타일이 나타났으며, 그중 가장 많이 보이는 스타일은 Indian Shirt/Blouse/Smock/ Dress이며, 그 뒤를 이어 Madras, Indian lowery등을 볼 수 있다. 남성복식애 나타난 7가지의 스타일 중에는 Madras가 가장 빈도가 높으며 그외의 스타일들은 그 빈도가 매우 낮음을 볼 수 있다. 인도의 영향의 정도 (Attribution Categories) 있어서는 여성과 남성복식 모두에 있어서 인도에서 직접 수입된(originated) item이 각각 전체의 90%와 81%를 차지하여, 인도복식의 영향은 받았으나 미국내에서 제작된(attributed and connotated) item 보다 휠씬 더 많은 수를 보였다. 인도복식스타일이 가장