• Journal of the Korean Society for Precision Engineering
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• v.29 no.10
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• pp.1110-1118
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• 2012

In this study, for reducing the residual vibration in high speed motion control stage, an improved 5th order polynomial motion profile was developed. When a stage is moving, the current through the motor coils has the same profile of input motion profile of acceleration, therefore the characteristics of the acceleration input profile directly affect on the performance of the amplifier that includes the current control loop. Commonly low cost amplifier and motor has a narrow current control bandwidth, therefore the proposed algorithm was designed based on this practical constraint. Simulation and experimental results showed that the proposed algorithm clearly has low residual vibration characteristics than conventional 5th order polynomial motion profile on the same drive condition.