• 한국정밀공학회지
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• 제32권2호
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• pp.127-133
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• 2015

The error motion of a machine tool spindle directly affects the surface errors of machined parts. Those are usually due to the imperfectness of bearings, stiffness of spindle, assembly errors, external force or unbalance of rotors. The error motions of the spindle have been needed to be decreased to desired goal of spindle's performance. The level of error motion is needed to be estimated during the design and assembly process of the spindle. In this paper, the estimation method for the five degree of freedom (5 D.O.F) error motions for rotary units such as a spindle and rotary table are suggested. To estimate the error motions of the rotary unit, waviness of bearings and external force model were used as input data. The estimation model considers geometric relationship and force equilibrium of the five degree of the freedom motions.

• 한국생산제조학회지
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• 제22권4호
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• pp.735-739
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• 2013

The error motion of a machine tool spindle directly affects the surface errors of machined parts. Spindle motion errors such as three translational motions and two rotational motions are undesirable. These are usually due to the imperfectness of bearings, stiffness of spindle, assembly errors, and external force or unbalance of rotors. The error motions of the spindle need to be reduced for achieving the desired performance. Therefore, the level of error motion needs to be estimated during the design and assembly process of the spindle. In this study, an estimation method for five degree-of-freedom (5 DOF) error motions for a spindle with an angular contact ball bearing is suggested. To estimate the error motions of the spindle, the waviness of the inner-race of bearings and an external force model were used as input data. The estimation model considers the geometric relationship and force equilibrium of the five DOFs. To calculate the error motions of the spindle, not only the imperfections of the shaft and bearings but also driving elements such as belt pulley and direct driving motor systems are considered.

• 반도체디스플레이기술학회지
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• 제6권4호
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• pp.23-27
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• 2007

Rotary stages in semiconductor, display industry and many other fields require challenging accuracy to perform their functions properly. Especially, Axis of rotation error on rotary system is significant; such as the spindle error motion of the aligner, wire bonder and inspector machine which result in the poor quality products. To evaluate and improve the performance of such precision rotary stage, undesired movements on the other 5 degrees of freedom of the rotary stage must be measured and analyzed. In this paper, we have measured the three translations and two tilt motions of the worm gear type spindle with high precision capacitive sensors. To obtain the radial error motion, we have used Donaldson's reversal technique. And the axial components of the spindle tilt error motion can be obtained accurately from the axial direction outputs of sensors by Estler face motion reversal technique. Further more we have designed and developed the sensor mounting jig with standard cylinder for reversal method.

• 한국정밀공학회지
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• 제28권3호
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• pp.285-291
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• 2011

The error motion of a machine tool spindle directly affects the surface errors of machined parts. The error motions of the spindle are not desired errors in the three linear direction motions and two rotating motions. Those are usually due to the imperfect of bearings, stiffness of spindle, assembly errors, external force or unbalance of rotors. The error motions of the spindle have been needed to be decreased to desired goal of spindle's performance. The level of error motion is needed to be estimated during the design and assembly process of the spindle. In this paper, the estimation method for the five degree of freedom (5 D.O.F) error motions of the spindle is suggested. To estimate the error motions of the spindle, waviness of shaft and bearings, external force model was used as input data. And, the estimation models are considering geometric relationship and force equilibrium of the five degree of the freedom. To calculate error motions of the spindle, not only imperfection of the shaft, bearings, such as rolling element bearing, hydrostatic bearing, and aerostatic bearing, but also driving elements such as worm, pulley, and direct driving motor systems, were considered.

• 제어로봇시스템학회:학술대회논문집
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• 제어로봇시스템학회 1992년도 한국자동제어학술회의논문집(국내학술편); KOEX, Seoul; 19-21 Oct. 1992
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• pp.632-637
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• 1992

Recently many dynamics control algorithms using robot dynamic equation have been proposed. One of them, Kawato's feedback error learning scheme requires neither an accurate model nor parameter estimation and makes the robot motion closer to the desired trajectory by repeating operation. In this paper, the feedback error learning algorithm is implemented to control a robot system, 5 DOF revolute type movemaster. For this purpose, an actuator dynamic model is constructed considering equivalent robot dynamics model with respect to actuator as well as friction model. The command input acquired from the actuator dynamic model is the sum of products of unknown parameters and known functions. To compute the control algorithm, a parallel processing computer, transputer, is used and real-time computing is achieved. The experiment is done for the three major link of movemaster and its result is presented.