• Title/Summary/Keyword: 4-parameters model

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GPU Based Feature Profile Simulation for Deep Contact Hole Etching in Fluorocarbon Plasma

  • Im, Yeon-Ho;Chang, Won-Seok;Choi, Kwang-Sung;Yu, Dong-Hun;Cho, Deog-Gyun;Yook, Yeong-Geun;Chun, Poo-Reum;Lee, Se-A;Kim, Jin-Tae;Kwon, Deuk-Chul;Yoon, Jung-Sik;Kim3, Dae-Woong;You, Shin-Jae
    • Proceedings of the Korean Vacuum Society Conference
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    • 2012.08a
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    • pp.80-81
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    • 2012
  • Recently, one of the critical issues in the etching processes of the nanoscale devices is to achieve ultra-high aspect ratio contact (UHARC) profile without anomalous behaviors such as sidewall bowing, and twisting profile. To achieve this goal, the fluorocarbon plasmas with major advantage of the sidewall passivation have been used commonly with numerous additives to obtain the ideal etch profiles. However, they still suffer from formidable challenges such as tight limits of sidewall bowing and controlling the randomly distorted features in nanoscale etching profile. Furthermore, the absence of the available plasma simulation tools has made it difficult to develop revolutionary technologies to overcome these process limitations, including novel plasma chemistries, and plasma sources. As an effort to address these issues, we performed a fluorocarbon surface kinetic modeling based on the experimental plasma diagnostic data for silicon dioxide etching process under inductively coupled C4F6/Ar/O2 plasmas. For this work, the SiO2 etch rates were investigated with bulk plasma diagnostics tools such as Langmuir probe, cutoff probe and Quadruple Mass Spectrometer (QMS). The surface chemistries of the etched samples were measured by X-ray Photoelectron Spectrometer. To measure plasma parameters, the self-cleaned RF Langmuir probe was used for polymer deposition environment on the probe tip and double-checked by the cutoff probe which was known to be a precise plasma diagnostic tool for the electron density measurement. In addition, neutral and ion fluxes from bulk plasma were monitored with appearance methods using QMS signal. Based on these experimental data, we proposed a phenomenological, and realistic two-layer surface reaction model of SiO2 etch process under the overlying polymer passivation layer, considering material balance of deposition and etching through steady-state fluorocarbon layer. The predicted surface reaction modeling results showed good agreement with the experimental data. With the above studies of plasma surface reaction, we have developed a 3D topography simulator using the multi-layer level set algorithm and new memory saving technique, which is suitable in 3D UHARC etch simulation. Ballistic transports of neutral and ion species inside feature profile was considered by deterministic and Monte Carlo methods, respectively. In case of ultra-high aspect ratio contact hole etching, it is already well-known that the huge computational burden is required for realistic consideration of these ballistic transports. To address this issue, the related computational codes were efficiently parallelized for GPU (Graphic Processing Unit) computing, so that the total computation time could be improved more than few hundred times compared to the serial version. Finally, the 3D topography simulator was integrated with ballistic transport module and etch reaction model. Realistic etch-profile simulations with consideration of the sidewall polymer passivation layer were demonstrated.

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Two Dimensional Size Effect on the Compressive Strength of Composite Plates Considering Influence of an Anti-buckling Device (좌굴방지장치 영향을 고려한 복합재 적층판의 압축강도에 대한 이차원 크기 효과)

  • ;;C. Soutis
    • Composites Research
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    • v.15 no.4
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    • pp.23-31
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    • 2002
  • The two dimensional size effect of specimen gauge section ($length{\;}{\times}{\;}width$) was investigated on the compressive behavior of a T300/924 $\textrm{[}45/-45/0/90\textrm{]}_{3s}$, carbon fiber-epoxy laminate. A modified ICSTM compression test fixture was used together with an anti-buckling device to test 3mm thick specimens with a $30mm{\;}{\times}{\;}30mm,{\;}50mm{\;}{\times}{\;}50mm,{\;}70mm{\;}{\times}{\;}70mm{\;}and{\;}90mm{\;}{\times}{\;}90mm$ gauge length by width section. In all cases failure was sudden and occurred mainly within the gauge length. Post failure examination suggests that $0^{\circ}$ fiber microbuckling is the critical damage mechanism that causes final failure. This is the matrix dominated failure mode and its triggering depends very much on initial fiber waviness. It is suggested that manufacturing process and quality may play a significant role in determining the compressive strength. When the anti-buckling device was used on specimens, it was showed that the compressive strength with the device was slightly greater than that without the device due to surface friction between the specimen and the device by pretoque in bolts of the device. In the analysis result on influence of the anti-buckling device using the finite element method, it was found that the compressive strength with the anti-buckling device by loaded bolts was about 7% higher than actual compressive strength. Additionally, compressive tests on specimen with an open hole were performed. The local stress concentration arising from the hole dominates the strength of the laminate rather than the stresses in the bulk of the material. It is observed that the remote failure stress decreases with increasing hole size and specimen width but is generally well above the value one might predict from the elastic stress concentration factor. This suggests that the material is not ideally brittle and some stress relief occurs around the hole. X-ray radiography reveals that damage in the form of fiber microbuckling and delamination initiates at the edge of the hole at approximately 80% of the failure load and extends stably under increasing load before becoming unstable at a critical length of 2-3mm (depends on specimen geometry). This damage growth and failure are analysed by a linear cohesive zone model. Using the independently measured laminate parameters of unnotched compressive strength and in-plane fracture toughness the model predicts successfully the notched strength as a function of hole size and width.

The Comparison of Existing Synthetic Unit Hydrograph Method in Korea (국내 기존 합성단위도 방법의 비교)

  • Jeong, Seong-Won;Mun, Jang-Won
    • Journal of Korea Water Resources Association
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    • v.34 no.6
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    • pp.659-672
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    • 2001
  • Generally, design flood for a hydraulic structure is estimated using statistical analysis of runoff data. However, due to the lack of runoff data, it is difficult that the statistical method is applied for estimation of design flood. In this case, the synthetic unit hydrograph method is used generally and the models such as NYMO method, Snyder method, SCS method, and HYMO method have been widely used in Korea. In this study, these methods and KICT method, which is developed in year 2000, are compared and analyzed in 10 study areas. Firstly, peak flow and peak time of representative unit hydrograph and synthetic unit hydrograph in study area are compared, and secondly, the shape of unit hydrograph is compared using a root mean square error(RMSE). In Nakayasu method developed in Japan, synthetic unit hydrograph is very different from peak flow, peak time, and the shape of representative unit hydrograph, and KICT method(2000) is superior to others. Also, KICT method(2000) is superior to others in the aspects of using hydrologic and topographical data. Therefore, Nakayasu method is not a proper in hydrological practice. Moreover, it is considered that KICT model is a better method for the estimation of design flood. However, if other model, i.e. SCS method, Nakayasu method, and HYMO method, is used, parameters or regression equations must be adjusted by analysis of real data in Korea.

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The Effects of Nuclear Factor-κB Decoy Oligodeoxynucleotide on Lipopolysaccharide-Induced Direct Acute Lung Injury (리포다당질로 인한 직접성 급성폐손상에서 Nuclear Factor-κB Decoy Oligodeoxynucleotide의 효과)

  • Kim, Je Hyeong;Yoon, Dae Wui;Jung, Ki Hwan;Kim, Hye Ok;Ha, Eun Sil;Lee, Kyoung Ju;Hur, Gyu Young;Lee, Sung Yong;Lee, Sang Yeub;Shin, Chol;Shim, Jae Jeong;In, Kwang Ho;Yoo, Se Hwa;Kang, Kyung Ho
    • Tuberculosis and Respiratory Diseases
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    • v.67 no.2
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    • pp.95-104
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    • 2009
  • Background: The pathophysiologic mechanisms of early acute lung injury (ALI) differ according to the type of primary insult. It is important to differentiate between direct and indirect pathophysiologic pathways, and this may influence the approach to treatment strategies. NF-$\kappa$B decoy oligodeoxynucleotide (ODN) is a useful tool for the blockade of the expression of NF-$\kappa$B-dependent proinflammatory mediators and has been reported to be effective in indirect ALI. The purpose of this study was to investigate the effect of NF-$\kappa$B decoy ODN in the lipopolysaccharide (LPS)-induced direct ALI model. Methods: Five-week-old specific pathogen-free male BALB/c mice were used for the experiment. In the preliminary studies, tumor necrosis factor (TNF)-$\alpha$, interleukine (IL)-6 and NF-$\kappa$B activity peaked at 6 hours after LPS administration. Myeloperoxidase (MPO) activity and ALI score were highest at 36 and 48 hours, respectively. Therefore, it was decided to measure each parameter at the time of its highest level. The study mice were randomly divided into three experimental groups: (1) control group which was administered 50 ${\mu}L$ of saline and treated with intratracheal administration of 200 ${\mu}L$ DW containing only hemagglutinating virus of Japan (HVJ) vector (n=24); (2) LPS group in which LPS-induced ALI mice were treated with intratracheal administration of 200 ${\mu}L$ DW containing only HVJ vector (n=24); (3) LPS+ODN group in which LPS-induced ALI mice were treated with intratracheal administration of 200 ${\mu}L$ DW containing 160 ${\mu}g$ of NF-$\kappa$B decoy ODN and HVJ vector (n=24). Each group was subdivided into four experimental subgroups: (1) tissue subgroup for histopathological examination for ALI at 48 hours (n=6); (2) 6-hour bronchoalveolar lavage (BAL) subgroup for measurement of TNF-$\alpha$ and IL-6 in BAL fluid (BALF) (n=6); (3) 36-hour BAL subgroup for MPO activity assays in BALF (n=6); and (4) tissue homogenate subgroup for measurement of NF-$\kappa$B activity in lung tissue homogenates at 6 hours (n=6). Results: NF-$\kappa$B decoy ODN treatment significantly decreased NF-$\kappa$B activity in lung tissues. However, it failed to improve the parameters of LPS-induced direct ALI, including the concentrations of tumor necrosis factor-$\alpha$ and interleukin-6 in BALF, myeloperoxidase activity in BALF and histopathologic changes measured by the ALI score. Conclusion: NF-$\kappa$B decoy ODN, which has been proven to be effective in indirect models, had no effect in the direct ALI model.

Live Load Distribution in Prestressed Concrete I-Girder Bridges (I형 프리스트레스트 콘크리트 거더교의 활하중 분배)

  • Lee, Hwan-Woo;Kim, Kwang-Yang
    • Journal of the Computational Structural Engineering Institute of Korea
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    • v.21 no.4
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    • pp.325-334
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    • 2008
  • The standard prestressed concrete I-girder bridge (PSC I-girder bridge) is one of the most prevalent types for small and medium bridges in Korea. When determining the member forces in a section to assess the safety of girder in this type of bridge, the general practice is to use the simplified practical equations or the live load distribution factors proposed in design standards rather than the precise analysis through the finite element method or so. Meanwhile, the live load distribution factors currently used in Korean design practice are just a reflection of overseas research results or design standards without alterations. Therefore, it is necessary to develop an equation of the live load distribution factors fit for the design conditions of Korea, considering the standardized section of standard PSC I-girder bridges and the design strength of concrete. In this study, to develop an equation of the live load distribution factors, a parametric analysis and sensitivity analysis were carried out on the parameters such as width of bridge, span length, girder spacing, width of traffic lane, etc. As a result, the major variables to determine the size of distribution factors were girder spacing, overhang length and span length in case of external girders. For internal adjacent girders, the determinant factors were girder spacing, overhang length, span length and width of bridge. For internal girders, the factors were girder spacing, width of bridge and span length. Then, an equation of live load distribution factors was developed through the multiple linear regression analysis on the results of parametric analysis. When the actual practice engineers design a bridge with the equation of live load distribution factors developed here, they will determine the design of member forces ensuring the appropriate safety rate more easily. Moreover, in the preliminary design, this model is expected to save much time for the repetitive design to improve the structural efficiency of PSC I-girder bridges.

Temporal and Spatial Characteristics of Sediment Yields from the Chungju Dam Upstream Watershed (충주댐 상류유역의 유사 발생에 대한 시공간적인 특성)

  • Kim, Chul-Gyum;Lee, Jeong-Eun;Kim, Nam-Won
    • Journal of Korea Water Resources Association
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    • v.40 no.11
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    • pp.887-898
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    • 2007
  • A physically based semi-distributed model, SWAT was applied to the Chungju Dam upstream watershed in order to investigate the spatial and temporal characteristics of watershed sediment yields. For this, general features of the SWAT and sediment simulation algorithm within the model were described briefly, and watershed sediment modeling system was constructed after calibration and validation of parameters related to the runoff and sediment. With this modeling system, temporal and spatial variation of soil loss and sediment yields according to watershed scales, land uses, and reaches was analyzed. Sediment yield rates with drainage areas resulted in $0.5{\sim}0.6ton/ha/yr$ excluding some upstream sub-watersheds and showed around 0.51 ton/ha/yr above the areas of $1,000km^2$. Annual average soil loss according to land use represented the higher values in upland areas, but relatively lower in paddy and forest areas which were similar to the previous results from other researchers. Among the upstream reaches, Pyeongchanggang and Jucheongang showed higher sediment yields which was thought to be caused by larger area and higher fraction of upland than other upstream sub-areas. Monthly sediment yields at the main outlet showed same trend with seasonal rainfall distribution, that is, approximately 62% of annual yield was generated during July to August and the amount was about 208 ton/yr. From the results, we could obtain the uniform value of sediment yield rate and could roughly evaluate the effect of soil loss with land uses, and also could analyze the temporal and spatial characteristics of sediment yields from each reach and monthly variation for the Chungju Dam upstream watershed.

Habitat Quality Analysis and Evaluation of InVEST Model Using QGIS - Conducted in 21 National Parks of Korea - (QGIS를 이용한 InVEST 모델 서식지질 분석 및 평가 - 21개 국립공원을 대상으로 -)

  • Jang, Jung-Eun;Kwon, Hye-Yeon;Shin, Hae-seon;Lee, Sang-Cheol;Yu, Byeong-hyeok;Jang, Jin;Choi, Song-Hyun
    • Korean Journal of Environment and Ecology
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    • v.36 no.1
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    • pp.102-111
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    • 2022
  • Among protected areas, National Parks are rich in biodiversity, and the benefits of ecosystem services provided to human are higher than the others. Ecosystem service evaluation is being used to manage the value of national parks based on objective and scientific data. Ecosystem services are classified into four services: supporting, provisioning, regulating and cultural. The purpose of this study is to evaluate habitat quality among supporting services. Habitat Quality Model of InVEST was used to analyze. The coefficients of sensitivity and habitat initial value were reset by reflecting prior studies and the actual conditions of protected areas. Habitat quality of 21 national parks except Hallasan National Park was analyzed and mapped. The value of habitat quality was evaluated to be between 0 and 1, and the closer it is to 1, the more natural it is. As a result of habitat quality analysis, Seoraksan and Taebaeksan National Parks (0.90), Jirisan and Odaesan National Parks (0.89), and Sobaeksan National Park (0.88) were found to be the highest in the order. As a result of comparing the area and habitat quality of 18 national parks except for coastal-marine national parks, the larger the area, the higher the overall habitat quality. Comparing the value of habitat quality of each zone, the value of habitat quality was high in the order of the park nature preservation zone, the park nature environmental zone, the park cultural heritage zone, and the park village zone. Considering both the analysis of habitat quality and the legal regulations for each zone of use, it is judged that the more artificial acts are restricted, the higher the habitat quality. This study is meaningful in analyzing habitat quality of 21 National Parks by readjusting the parameters according to the situation of protected areas in Korea. It is expected to be easy to intuitively understand through accurate data and mapping, and will be useful in making policy decisions regarding the development and preservation of protected areas in the future.

Inspiratory Flow Rate for the Evaluation of Bronchodilator in Patients with COPD (만성폐쇄성폐질환 환자에서 기관지확장제 흡입에 대한 흡기환기지표의 반응)

  • Baik, Jae-Joong;Park, Keon-Uk;Chung, Yeon-Tae
    • Tuberculosis and Respiratory Diseases
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    • v.42 no.3
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    • pp.342-350
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    • 1995
  • Background: Although there are improvements of clinical symtoms after bronchodilator inhalation in COPD patients, it has been noted that there was no increase of $FEV_1$ in some cases. $FEV_1$ did not reflect precisely the improvement of ventilatory mechanics after bronchodilator inhalation in these COPD patients. The main pathophysiology of COPD is obstruction of airway in expiratory phase but in result, the load of respiratory system is increased in inspiratory phase. Therefore the improvement of clinical symptoms after bronchodilator inhalation may be due to the decrease of inspiratory load. So we performed the study which investigated the effect of bronchodilator on inspiratory response of vetilatory mechanics in COPD patients. Methods: In 17 stable COPD patients, inspiratory and expiratory forced flow-volume curves were measured respectively before bronchodilator inhalation. 10mg of salbutamol solution was inhaled via jet nebulizer for 4 minutes. Forced expiratory and inspiratory flow-volume curves were measured again 15 minutes after bronchodilator inhalation. Results: $FEV_1$, FVC and $FEV_1$/FVC% were $0.92{\pm}0.34L$($38.3{\pm}14.9%$ predicted), $2.5{\pm}0.81L$($71.1{\pm}21.0%$ predicted) and $43.1{\pm}14.5%$ respectively before bronchodilator inhalation. The values of increase of $FEV_1$, FVC and PIF(Peak Inspiratory Flow) were $0.15{\pm}0.13L$(relative increase: 17.0%), $0.58{\pm}0.38\;L$(29.0%) and $1.0{\pm}0.56L$/sec(37.5%) respectively after bronchodilator inhalation. The increase of PIF was twice more than $FEV_1$ in average(p<0.001). The increase of PIF in these patients whose $FEV_1$ was not increased after bronchodilator inhalation were 35.0%, 44.0% and 55.5% respectively. Conclusion: The inspiratory parameter reflected improvement of ventilatory mechanics by inhaled bronchodilater better than expiratory parameters in COPD patients.

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Effects of Colpomenia sinuosa Extract on Serum Lipid Level and Bone Formation in Ovariectomized Rats (불레기말 추출물이 난소를 절제한 갱년기 장애 모델의 혈청 지질 변화 및 골 형성에 미치는 영향)

  • Lee, Juyeong;Kim, Bokyung;Park, Mi-Hwa;Choi, Kyung-Ha;Kong, Changsuk;Lee, Sang-Hyeon;Kim, Yuck Yong;Yu, Ki Hwan;Kim, Mihyang
    • Journal of the Korean Society of Food Science and Nutrition
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    • v.45 no.4
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    • pp.492-500
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    • 2016
  • In this study, the effects of Colpomenia sinuosa (CS) extract on serum lipid level and bone formation in an ovariectomized animal model were investigated. Twenty four nine-week old female Sprague-Dawley rats were randomly assigned to four groups: sham-operated rats (SHAM), ovariectomized control rats (OVX-CON), and ovariectomized rats supplemented with CS extract at 50 mg/kg bw (OVX-CS50) or 200 mg/kg bw (OVX-CS200). Three OVX groups were surgically ovariectomized while the SHAM group was sham-operated. CS extract was orally administrated at 1 mL per day. Analysis of serum lipid contents found that the total cholesterol, triglyceride, and low density lipoprotein cholesterol levels in the OVX-CON group were higher than those in the SHAM group. Notably, upon administration of CS extract after ovariectomy, triglyceride levels tended to significantly decrease. In addition, platelet aggregation ability decreased in groups treated with CS extract compared to the OVX-CON group. Serum alkaline phosphatase activity as an indicator of bone formation was lower in the CS extract group compared to the OVX-CON group. Collagen contents in bone and cartilage were reduced by ovariectomy, whereas the CS extract-supplemented groups exhibited higher concentrations in bone. According to these results, CS extract improved serum lipid parameters and osteogenesis in ovariectomized rats.

Effect of Thyroid Hormone on the Ischemia-Reperfusion Injury in the Canine Lung (갑상선 호르몬이 잡견 폐장의 허혈-재관류 손상에 미치는 영향)

  • 김영태;성숙환
    • Journal of Chest Surgery
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    • v.32 no.7
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    • pp.637-647
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    • 1999
  • Background: Ischemia-reperfusion injury is one of the major contributing causes of early graft failure in lung transplantation. It has been suggested that triiodothyronine (T3) may ameliorate ischemia-reperfusion injury to various organs in vivo and in vitro. Predicting its beneficial effect for ischemic lung injury, we set out to demonstrate it by administering T3 into the in situ canine ischemia-reperfusion model. Material and Method: Sixteen adult mongrel dogs were randomly allocated into group A and B. T3 $(3.6\mug/kg)$ was administered before the initiation of single lung ischemia in group B, whereas the same amount of saline was administered in group A. Ischemia was induced in the left lung by clamping the left hilum for 100 minutes. After reperfusion, various hemodynamic parameters and blood gases were analyzed for 4 hours while intermittently clamping the right hilum in order to allow observation of the injured left lung function. Result: Arterial oxygen partial pressure $(PaO_2)$ decreased 30 minutes after reperfusion and recovered gradually thereafter in both groups. In group B the decrease of $PaO_2$ was less marked than in group A. The recovery of $PaO_2$ was faster in group B than in group A. The differences between the two groups were statistically significant from 30 minutes after reperfusion $(125\pm34$ mmHg and $252\pm44$ mmHg, p<0.05) until the end of the experiment $(178\pm42$mmHg and $330\pm37$ mmHg, p<0.05). The differences in the arterial carbon dioxide pressure, airway pressure and lung compliance showed no statistical significance. The malondialdehyde (MDA) level, measured from the tissue obtained 240 minutes after reperfusion, was lower in group B $(0.40\pm0.04\mu$M) than in group A $(0.53\pm0.05\mu$M, p<0.05). The ATP level of group B $(0.69\pm0.07\mu$M/g) was significantly higher than that of group A $(0.48\pm0.07\mu$M/g, p<0.05). The microscopic exami nation revealed varying degrees of injury such as perivascular neutrophil infiltration, capillary hemorrhage and interstitial congestion. There were no differences in the microscopic findings between the two groups. CONCLUSION T3 has beneficial effects on the ischemic canine lung injury including preservation of oxygenation capacity, less production of lipid peroxidation products and a higher level of tissue ATP. These results suggest that T3 is effective in pulmonary allograft preservation.

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