• Title/Summary/Keyword: 4탐침법

Search Result 60, Processing Time 0.03 seconds

The Fabrication and Characteristics of RTD(Resistance Thermometer Device) for Micro Thermal Sensors (마이크로 열 센서용 측온저항체 온도센서의 제작 및 특성)

  • Chung, Gwiy-Sang;Hong, Seog-Woo
    • Journal of Sensor Science and Technology
    • /
    • v.9 no.3
    • /
    • pp.171-176
    • /
    • 2000
  • The physical and electrical characteristics of MgO and Pt thin-films on it, deposited by reactive sputtering and rf magnetron sputtering, respectively, were analyzed with annealing temperature and time by four-point probe, SEM and XRD. Under annealing conditions of $1000^{\circ}C$ and 2 hr, MgO thin-film had the properties of improving Pt adhesion to $SiO_2$ and insulation without chemical reaction to Pt thin-film, and the sheet resistivity and the resistivity of Pt thin-film deposited on it were $0.1288\;{\Omega}/{\square}$ and $12.88\;{\mu}{\Omega}{\cdot}cm$, respectively. We made Pt resistance pattern on $SiO_2$/Si substrate by lift-off method and fabricated thin-film type Pt-RTD(resistance thermometer device) for micro thermal sensors by Pt-wire, Pt-paste and SOG(spin-on-glass). In the temperature range of $25{\sim}400^{\circ}C$, the TCR value of fabricated Pt-RTD with thickness of $1.0{\mu}m$ was $3927\;ppm/^{\circ}C$ close to the Pt bulk value. Resistance values were varied linearly within the range of measurement temperature.

  • PDF

The design and characteristic of the TiNx optical film for ARAS coating (ARAS용 TiNx 광학박막의 설계제작과 특성연구)

  • Park, Moon-Chan;Jung, Boo-Young;Hwangbo, Chang-Kwon
    • Journal of Korean Ophthalmic Optics Society
    • /
    • v.6 no.2
    • /
    • pp.31-35
    • /
    • 2001
  • The anti-reflective anti-static(ARAS) optical film Was designed using conducting layer $TiN_x$ by Essential Macleod program. From this results, [air ${TiN_x{\mid}SiO_2{\mid}$ glass] two layer shows wide-band AR coating in the wavelength range of 450~700 nm. The $TiN_x$ thin films were prepared on the glass substrate by RF(radio-freqency) magnetron sputtering apparatus from a Ti target in agaseous mixture of argon and nitrogen with the thickness of 7~10 nm. For the films obtained, the chemical binding energy of the films was investigated by x-ray photoelectron spectroscopy(XPS) in order to analyze the chemical nature and composition of the films. In addition, we investigated the relationship between the surface resistance and the chemical nature the sheet resistance and XPS depth profiling the chemical binding of the films.

  • PDF

Development of a Formic Acid Fuel Cell Anode by Multi-layered Bismuth Modification (Bismuth를 이용한 다층구조의 개미산 연료전지 연료전극 개발)

  • Kwon, Youngkook;Uhm, Sunghyun;Lee, Jaeyoung
    • Korean Chemical Engineering Research
    • /
    • v.46 no.4
    • /
    • pp.697-700
    • /
    • 2008
  • The underpotential deposited Bi on Pt($Bi_{upd}/Pt$) anode for formic acid fuel cells (FAFCs) was developed using multi-layered preparation method for better electrocatalytic utilization of Pt. The electron probe microanalysis (EPMA) result indicated that $Bi_{upd}$ remains through the catalyst layer during stability test. In performance test, the multilayered $Bi_{upd}$ on Pt black showed superior performance by approximately 200 mV at current density of $150mA/cm^2$ compared with PtRu black anode catalyst. Based on preparation condition of $Bi_{upd}/Pt$ black, carbon supported $Bi_{upd}/Pt/C$ electrode was prepared and it showed enhanced performance and stability.

Preparation and Current-Voltage Characteristics of Well-Aligned NPD (4,4' bis[N-(1-napthyl)-N-phenyl-amino] biphenyl) Thin Films (분자배열된 4,4' bis[N-(1-napthyl)-N-phenyl-amino] biphenyl 증착박막 제조와 전기적 특성)

  • Oh, Sung;Kang, Do-Soon;Choe, Youngson
    • Applied Chemistry for Engineering
    • /
    • v.17 no.6
    • /
    • pp.591-596
    • /
    • 2006
  • Topology and molecular ordering of NPD(4,4'-bis-[N-(1-naphthyl)-N-phenyl-amino]biphenyl) thin films deposited under magnetic field with post-deposition annealing were investigated. NPD was deposited onto ITO glass substrates via thermal evaporation process in vacuum. It is of great importance for highly oriented organic/metal films to have improved device performances such as higher current density and luminance efficiency. AFM (Atomic Force Microscope) and XRD (X-Ray Diffraction) analyses were used to characterize the topology and structure of oriented NPD films. The multi-source meter was used to observe the current-voltage characteristics of the ITO (Indium-Tin Oxide) / NPD (4,4'bis[N-(1-napthyl)-N-phenyl-amino]-biphenyl) / Al (Aluminum) device. While NPD thin films deposited under magnetic field were not molecularly well aligned according to the XRD results, the films after post-deposition annealing at $130^{\circ}C$ were well-oriented. AFM images show that NPD thin films deposited under magnetic field had a smoother surface than those deposited without magnetic field. The current-voltage performance of NPD thin films was improved due to the enhanced electron mobility in the well-aligned NPD films.

SNU 1.5MV Van de Graaff Accelerator (IV) -Fabrication and Aberration Analysis of Magnetic Quadrupole Lens- (SNU 1.5MV 반데그라프 가속기 (IV) -자기 4극 렌즈의 제작과 수차의 분석-)

  • Bak, H.I.;Choi, B.H.;Choi, H.D.
    • Nuclear Engineering and Technology
    • /
    • v.18 no.1
    • /
    • pp.1-8
    • /
    • 1986
  • A magnetic quadrupole doublet was fabricated for use at the pre-target position of SNU 1.5MV Van de Graaff accelerator and then its optical characteristics were measured and analysed. The physical dimensions are: pole length 180mm, aperture radius 25mm, pole tip radius 28.75mm. Material for poles and return yokes is carbon steel KS-SM40C. Coils have 480 turns per one pole and air-cooling is adopted. Applying the d.c. current 2.99$\pm$0.03A to the lens, and using the Hall probe, magnetic field elements $B_{\theta}$ , $B_{\gamma}$, were measured at the selected Points along each coordinate direction r,$\theta$, z. From the area integration and orthogonal polynomial fitting for the measured data, the magnetic Field gradient G=566.3$\pm$2.1 gauss/cm at lens center, the effective length L=208.3$\pm$1.44mm along the lens axis have been obtained. The harmonic contents were determined up to 20-pole from the generalized least squares fitting. The results indicate that sextupole/quadrupole is below 1.4$\pm$0.9% and all the other multipoles are below 0.5% in the region within 18mm radius at the center of lens.

  • PDF

A Study of Copper Production Techniques at the Archaeological Site in Gwanbukri, Buyeo in the 6th and 7th Centuries (6~7C 부여 관북리 유적의 동 생산기법 연구)

  • Lee, Ga Young;Cho, Nam Chul
    • Journal of Conservation Science
    • /
    • v.36 no.3
    • /
    • pp.162-177
    • /
    • 2020
  • Research was conducted to characterize the copper production and smelting process with 11 copper smelting by-products (copper slag and copper crucible) excavated from the NA and LA areas at the Gwanbuk-ri archeological site in Buyeo. Scanning electron microscopy-energy dispersive spectroscopy, wavelength dispersive X-ray fluorescence, X-ray diffraction, and Raman microspectroscopy were employed in the analysis. The research results reveal that the copper slag from Gwanbuk-ri contained silicate oxide, magnetite, fayalite, and delafossite, which are typical characteristics of crucible slag and refined slag. The outward appearance and microstructure of the slag were grouped as follows: 1. glassy matrix + Cu prill, 2. glassy matrix + Cu prill + magnetite, 3. silicate mineral matrix + Cu prill, 4. crystalline (delafossite and magnetite) + amorphous (Cu prill), 5. magnetite + fayalite, and 6. slag from slag. The copper slags from Guanbuk-ri were found to contain residues of impurities such as SiO2, Al2O3, CaO, SO4, P2O5, Ag2O, and Sb2O3 in their microstructure, and, in some cases, it was confirmed that copper, tin and lead are alloys. These results indicate that refining of intermediate copper(including impurities) and refining of alloys of copper(including impurities) - tin and refining of copper(including impurities) - tin - lead took place during the copper production process at Gwanbuk-ri, Buyeo.

A Study on the Formation fo Epitaxial $CoSi_2$ Thin Film using Co/Ti Bilayer (Co/Ti이중박막을 이용한 $CoSi_2$에피박막형성에 관한 연구)

  • Kim, Jong-Ryeol;Bae, Gyu-Sik;Park, Yun-Baek;Jo, Yun-Seong
    • Korean Journal of Materials Research
    • /
    • v.4 no.1
    • /
    • pp.81-89
    • /
    • 1994
  • Ti film of lOnm thickness and Co film of 18nm thickness were sequentially e-heam evaporated onto Si (100) substrates. Metal deposited samples were rapidly thermal-annt.aled(KTA) in thr N1 en vironment a t $900^{\circ}C$ for 20 sec. to induce the reversal of metal bilayer, so that $CoSi_{2}$ thin films could be formed. The sheet resistance measured by the 4-point probe was 3.9 $\Omega /\square$This valur was maintained with increase in annealing time upto 150 seconds, showing high thermal stab~lity. Thc XRII spectra idrn tified the silicide film formed on the Si substrate as a $CoSi_{2}$ epitaxial layer. The SKM microgr;iphs showed smooth surface, and the cross-sectional TKM pictures revealed that the layer formed on the Si substrate were composed of two Co-Ti-Si alloy layers and 70nm thick $CoSi_{2}$ epl-layer. The AES analysis indicated that the native oxide on Si subs~rate was removed by TI ar the beginning of the RTA, and Ihcn that Co diffused to clean surface of Si substrate so that epitaxial $CoSi_{2}$ film could bt, formed. In thc rasp of KTA at $700^{\circ}C$. 20sec. followed by $900^{\circ}C$, 20sec., the thin film showed lower sheet resistance, but rough surface and interface owing to $CoSi_{2}$ crystal growth. The application scheme of this $CoSi_{2}$ epilayer to VLSI devices and the thermodynarnic/kinetic mechan~sms of the $CoSi_{2}$ epi-layer formation through the reversal of Co/Ti bdayer were discussed.

  • PDF

Fabrication and Electromechanical Behaviors of a SWNT/PANi Composite Film Actuator (탄소나노튜브/도전성폴리머 복합재 엑츄에이터의 제조 및 특성실험)

  • Zhang, Shuai;Kim, Cheol
    • Composites Research
    • /
    • v.19 no.5
    • /
    • pp.7-11
    • /
    • 2006
  • The improved SWNTs/PANi composite actuator films applicable to an artificial muscle were fabricated successfully using a new process of manufacture that consists of 90% pure single-walled carbon nanotubes (SWNT) and chemical polymerization. PANi is electrically conducting polyaniline polymer. The conductivities of the composite SWNTs/PANi film-type actuators and the pure PANi films fabricated were measured as 56.15 S/cm and 17.38 S/cm, respectively, by the 4-prove method. The conductivity of the composite actuator is 3.2 times higher than the pure PANi film. The fabricated composite actuator showed higher conductivity than any other similar ones. The quality of samples was investigated by an electron scanning microscope (SEM). To measure the actuating strains, a specially designed beam balance apparatus was developed and strains of the composite actuators was measured by a laser displacement sensor subjected to electric currents. During the operation, the sample was soaked in the $NaNO_3$ solution and the sine-wave voltage in the range of $+1V{\sim}-1V$ was applied. The length of the composite actuator changed from $l_0=12.690$ mm to $l_1=12.733$ so that the change of length was l=0.043 mm and the strain was 0.34 %. This is a very high strain for this kind of a composite actuator. Other result reported by Tahhan showed 0.23 % strain, so that the present result is improved by 48%.

Measurements of Void Concentration Parameters in the Drift-Flux Model (상대유량 모델내의 기포분포계수 측정에 관한 연구)

  • Yun, B.J.;Park, G.C.;Chung, C.H.
    • Nuclear Engineering and Technology
    • /
    • v.25 no.1
    • /
    • pp.91-101
    • /
    • 1993
  • To predict accurately the thermal hydraulic behavior of light water reactors during normal or abnormal operation, the accurate estimation of the void distribution is required. Up to date, many techniques for predicting void fraction of two-phase flow systems have been suggested. Among these techniques, the drift-flux model is widely used because of its exact calculation ability and simplicity. However, to get more accurate prediction of void fraction using drift-flux model, slip and flow regime effects must be considered more properly In the drift-flux method, these two effects are accounted for by two drift-flux parameters ; $C_{o}$ and (equation omitted). At earlier stage, $C_{o}$ is measured in a circular tube. In this study, $C_{o}$ is experimentally determined by measuring local void fraction and vapor velocity distribution in a rectangular subchannel having 4 heating rods which simulates nuclear subchannels. The measurements are peformed with two-electrical conductivity probes which are known to be adequate for measuring local parameters. The experiments are performed at low flow rate and the system pressure less than 3 atmo spheric pressure. In this experiment, (equation omitted), is not measured, but quoted from well-known empirical correlation to formulate $C_{o}$. Finally, $C_{o}$ is expressed as a function of channel averaged void fraction. fraction.

  • PDF

The Characteristics of Pt Micro Heater Using Aluminum Oxide as Medium Layer (알루미늄산화막을 매개층으로 이용한 백금 미세발열체의 특성)

  • Chung, Gwiy-Sang;Noh, Sang-Soo;Choi, Young-Kyu;Kim, Jin-Han
    • Journal of Sensor Science and Technology
    • /
    • v.6 no.5
    • /
    • pp.400-406
    • /
    • 1997
  • The electrical and physical characteristics of aluminum oxide and Pt thin films on it, deposited by reactive sputtering and DC magnetron sputtering, respectively, were analyzed with increasing annealing temperature($400{\sim}800^{\circ}C$) by four point probe, SEM and XRD. Under $600^{\circ}C$ of annealing temperature, aluminum oxide had the properties of improving Pt adhesion to $SiO_{2}$ and insulation without chemical reaction to Pt thin films and the resistivity of Pt thin films was improved. But these properties of aluminum oxide and Pt thin films on it were degraded over $700^{\circ}C$ of annealing temperature because aluminum oxide was changed into metal aluminum and then reacted to Pt thin films deposited on it. The thermal characteristics of Pt micro heater were analyzed with Pt-RTD integrated on the same substrate. In the analysis of properties of Pt micro heater, active area was smaller size, Pt micro heater had better thermal characteristics. The temperature of Pt micro heater with active area, $200{\mu}m{\times}200{\mu}m$ was up to $400^{\circ}C$ with 1.5watts of the heating power.

  • PDF