• Journal of the Korean Society for Precision Engineering
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• v.17 no.1
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• pp.129-137
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• 2000

In this paper, a new method of noncontact measurement has been developed for a 3 dimensional topography in semiconductor wafer, implementing a new optical probe based on the precision defocus measurement. The developed technique consists of the new optical probe, precision stages, and the measurement/control system. The basic principle of the technique is to use the reflected slit beam from the specimen surface, and to measure the deviation of the specimen surface. The defocusing distance can be measured by the reflected slit beam, where the defocused image is measured by the proposed optical probe, giving very high resolution. The distance measuring formula has been proposed for the developed probe, using the laws of geometric optics. The precision calibration technique has been applied, giving about 10 nanometer resolution and 72 nanometer of four sigma uncertainty. In order to quantitize the micro pattern in the specimen surface, some efficient analysis algorithms have been developed to analyse the 3D topography pattern and some parameters of the surface. The developed system has been successfully applied to measure the wafer surface, demonstrating the line scanning feature and excellent 3 dimensional measurement capability.

• Korean Journal of Microbiology
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• v.32 no.4
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• pp.258-263
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• 1994

Genomic Southern hybridization of Frankia EuIKl strain, a nitrogen fixing symbiont of Elaeagnus umbellate root nodules, with nifH,D of K. pneumoniae as a probe, showed that 3.2 Kb and 5.5 Kb of BamHI fragments and 15 Kb PstI fragment were strongly hybridized with the probe, indicating nifH,D are located on these fragments. Using the same probe, one clone(pEuNIF) was isolated from the genomic library constructed into pWE15 cosmid vector by colony hybridization. The 3.2 Kb and 5.5 Kb BamHI fragments of this clone were hybridized with the same probe and this result corresponds to the genomic Southern hybridization data. However, using nifH of Frankia FaCl strain as a probe, only the 3.2 Kb BamHI fragment showed hybridization signal. Amino acid sequence deduced from nucleotide sequence of 3' terminus of the 3.2 Kb and 5' terminus of the 5.5 Kb fragments showed that the former was highly homologous with that of ArI3 nifD from 182nd to 240th amino acids, while the latter was from 241st to 282nd amino acids. These results show that nifH and partial nifD sequences are located on the 3.2 Kb fragment and residual sequences of nifH on the 5.5 Kb fragment which is contiguous to the 3.2 Kb fragment.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.11 no.8
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• pp.613-619
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• 1998

Ultrasonic probes of 400kHz, 1MHz were fabricated using PZT-5Z plates. Epoxy was used for backing layer materials onthe plates. Nondestructive Test was carried using these probes. Pulse lobe width of impulse response was reduced 15.4% compare 1MHz with 400kHz and 96.6% compare 3MHz with 400kHz. The attenuation in aluminum was 2.05[dB/m] at 400kHz, 4/91[dB/m] at 1MHz, 7.35[dB/m] at 3HMz. Hole detection error of the first hole was 22.4% at 1HMz, 9.% at 3HMz, The second hole 11.6% at 1HMz, 4.7% at 3HMz. In the result of experiment of the hole detection error and resolution, 3HMz probe was the best among them.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2002.05a
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• pp.195-198
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• 2002

Demand for high precision measurement of large area is increasing in many industrial fields. White-light Scanning Interferometer(WSI) is a well-known method for 3D profile measurement. However WSI has some limitations in a measurement range because of the sensing mechanism. Therefore, in this paper we use a heterodyne laser interferometer to get over the limitations of a short measurement range in WSI, We suggest a new WSI system combined with heterodyne laser interferometer. This system is aimed at eliminating Abbe error with measuring the focus point directly. With the use of triggering functionality of WSI, we can use this system as a probe of a precision stage such as a probe of CMM. The suggested system gives a repeatability of 87 nm in the absolute distance measurement test under the laboratory environment.

• Journal of the Institute of Electronics Engineers of Korea SC
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• v.48 no.1
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• pp.24-30
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• 2011

We have developed a hand-held probe for an ophthalmic OCT system. The hand-held probe for imaging was designed to be compact and portable. The cornea and retinal images were acquired by replacing the objective lens at the front of the probe. To verify the performance of the hand-held OCT probe, we acquired two dimensional OCT image of the rat eye in vivo and reconstructed three dimensional rat eye rendering images. In vivo 3D OCT images were showed distinct structural information in the posterior and anterior chamber with minimal motion artifacts. Thereby, OCT imaging speed is suitable for an dynamic in vivo experiment.

• Journal of the Korea Academia-Industrial cooperation Society
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• v.19 no.10
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• pp.324-329
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• 2018

This study examined the effects of the contact position and structure of the test probe on its signal transmission characteristics. The contact position in the operating of the test probe was considered and then divided into the plunger inner contact and barrel inlet contact. The high frequency performance of the test probes was investigated for both contact positions. The signal transmission characteristics of the test probes with the structures of double, single, and out-spring was also analyzed. The insertion and return losses were calculated using the HFSS and the characteristic impedance of the test probes was analyzed using a Q3D simulation. The insertion loss of the barrel inlet contact was smaller than that of the plunger inner contact. The contact position of the test probe may result in a change in the high frequency performance. The out-spring probe has better frequency characteristics at -1 dB insertion loss and -10 dB return loss. The double probe and single probe have the same characteristic impedance with $30.8{\Omega}$. On the other hand, the out-spring probe has an impedance of $47.1{\Omega}$. The out-spring probe is closer to $50{\Omega}$ than the other probes and then shows higher signal transmission characteristics. The out-spring probe has superior high-frequency characteristics and is expected to be suitable for high-speed applications.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2003.06a
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• pp.1581-1584
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• 2003

This paper proposed efficient manufacturing system using OMM(on-machine measurement) system and OMM operating S/W based 3D modeler. A Developed program connected tool machine with RS232C. It is composed two operating system that touch probe operating and laser displacement sensor operating system. A program for touch probe possible measure considered inspection feature and CAD data. The laser operating program is used inspection for profile. very small hole using installed feature data. This system is applied manufacturing line of mold(cavity, core) also verification of efficiency manufacturing process that production, reduction machining error of each process

• Proceedings of the Korean Institute of Information and Commucation Sciences Conference
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• 2007.06a
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• pp.565-568
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• 2007

In this paper, we designed and fabricated a broadband probe with a double-ridged waveguide for broadband near-field measurements. An exponentially tapered ridge in the rectangular waveguide and a novel waveguide transition were used for broadband impedance matching. The probe has broadband characteristics and its measured impedance bandwidth is approximately 123% (4.17:1) in the range 12.0-50 GHz for standing wave ratios (SWR) < 3.0. The peak radiation gain range and nominal radar cross-section (RCS) are 5.7-14.3 dBi. The performance of this probe was verified using the measured results and is in good agreement with the simulated results.

• The Journal of Korean Institute of Electromagnetic Engineering and Science
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• v.21 no.7
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• pp.831-841
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• 2010

The conventional vertical probe has the thin and long signal path that makes transfer characteristic of probe worse because of the S-shaped structure. So we propose the new vertical probe structure that has branch springs in the S-shaped probe. It makes closed loop when the probe mechanically connects to the electrode on a wafer. We fabricated the proposed vertical probe and measured the transfer characteristic and mechanical properties. Compared to the conventional S-shaped vertical probe, the proposed probe has the overdrive that is 1.2 times larger and the contact force that is 2.5 times larger. And we got the improved transfer characteristic by 1.4 dB in $0{\sim}10$ GHz. Also we developed the simulation model of the probe card by using full-wave simulator and the simulation result is correlated with measurement one. As a result of this simulation model, the cantilever probe and PCB have the worst transfer characteristic in the probe card.

• The Journal of the Acoustical Society of Korea
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• v.13 no.5
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• pp.40-50
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• 1994

In this paper, the sensitivity compensation method for three-dimensional acoustic intensity probe in the higher frequency range has been studied. The measurement error in the higher frequency range is generated from the phase mismatch between microphone's signals of the probe. If the wavelength of sound signal measured is less than those of the distance between microphones of the probe, that is, the higher frequency of the sound signal, the bigger measurement error is generated. In this study, we proposed the compensation methods for one-dimensional acoustic intensity probe with two-microphones, and the efficiency of those methods were investigated by numerical calculation of computer. It was most effective method to compensate the phase mismatch between microphone for the acoustic intensity probe was investigated for the sound estimated. and the efficiency of this method in a three-dimensional probe was investigated for the sound wave travelling in the arbitrary direction by numerical calculation of computer. In this result, the efficiency was proved that, for the measurement error of 1dB or less with the three-dimensional probe of 60mm space, the frequency should be less than 1.2kHz without the error compensation method, but the frequency increased up to 2.8kHz with the error compensation method.