• Proceedings of the Korean Vacuum Society Conference
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• 2015.08a
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• pp.61.1-61.1
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• 2015

Nanoscale semiconductor plasma processing has become one of the most challenging issues due to the limits of physicochemical fabrication routes with its inherent complexity. The mission of future and emerging plasma processing for development of next generation semiconductor processing is to achieve the ideal nanostructures without abnormal profiles and damages, such as 3D NAND cell array with ultra-high aspect ratio, cylinder capacitors, shallow trench isolation, and 3D logic devices. In spite of significant contributions of research frontiers, these processes are still unveiled due to their inherent complexity of physicochemical behaviors, and gaps in academic research prevent their predictable simulation. To overcome these issues, a Korean plasma consortium began in 2009 with the principal aim to develop a realistic and ultrafast 3D topography simulator of semiconductor plasma processing coupled with zero-D bulk plasma models. In this work, aspects of this computational tool are introduced. The simulator was composed of a multiple 3D level-set based moving algorithm, zero-D bulk plasma module including pulsed plasma processing, a 3D ballistic transport module, and a surface reaction module. The main rate coefficients in bulk and surface reaction models were extracted by molecular simulations or fitting experimental data from several diagnostic tools in an inductively coupled fluorocarbon plasma system. Furthermore, it is well known that realistic ballistic transport is a simulation bottleneck due to the brute-force computation required. In this work, effective parallel computing using graphics processing units was applied to improve the computational performance drastically, so that computer-aided design of these processes is possible due to drastically reduced computational time. Finally, it is demonstrated that 3D feature profile simulations coupled with bulk plasma models can lead to better understanding of abnormal behaviors, such as necking, bowing, etch stops and twisting during high aspect ratio contact hole etch.

• Korean Journal of Remote Sensing
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• v.24 no.2
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• pp.205-211
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• 2008

The river management in Korea had been focused on line based 2D spatial data for the developing river management application system. In this study, the polygon based 3D spatial data such as aerial photos and satellite images were selected and used through comparing their resolution levels for the river environment management. In addition, 1m detailed DEM (Digital Elevation Model) was constructed to implement the real topography information around river so that the damage area scale could be extracted for flood disaster. Also, the social environment thematic maps such as a cadastral map or land cover map could be used to verify the real damage area scale by overlay analysis on aerial photos or satellite images. The construction of these spatial data makes possible to present the real surface information and extract quantitative analysis to support the scientific decision making for establishing the river management policy. For the further study, the lidar surveying data will be considered as the very useful data by offering the real height information of riverbed as the depth of river so that flood simulation can give more reality.

• Spatial Information Research
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• v.20 no.4
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• pp.29-36
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• 2012

The low-carbon freight transportation system was introduced due to increase traffic congestion cost and carbon-dioxide for global climate change according to expanding city logistics demands. It is necessary to create 3D-based road network map for representing realistic road geometry with consideration of fuel consumption and carbon emissions. This study propose that 3D road network model expressed to realistic topography and road structure within trunk road for intercity freight through overlaying 2D-based transport-related thematic map and 1m-resolution DEM. The 3D-based road network map for the experimental road sections(Pyeongtaek harbor-Uiwang IC) was verified by GPS/INS survey and fuel consumption simulation. The results corresponded to effectively reflect realistic road geometry (RMSE=0.87m) except some complex structure such as overpass, and also actual fuel consumption. We expect that Green-based freight route planning and navigation system reflected on 3D geometry of complex road structure will be developed for effectively resolving energy and environmental problems.

• Geophysics and Geophysical Exploration
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• v.13 no.4
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• pp.397-406
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• 2010

Resistivity method is a practical and effective geophysical technique to detect leakage zones in embankment dams. Generally, resistivity survey conducted along the crest assumes that the embankment dam has a 2D structure. However, the 3D topography of the embankment distorts significantly resistivity data measured on anywhere of the dam. This study evaluates the influence from 3D effects created by specific dam geometry and effects of water level fluctuations through the 3D finite element modeling technique. Also, a comparison between different locations of survey line are carried out, and topographic correction technique is developed for the resistivity data obtained along the embankment dam. Furthermore, using synthetic resistivity data for an embankment dam model with leakage zone, detectability of leakage zones is estimated through 2.5D inversion.

• Journal of Korean Tunnelling and Underground Space Association
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• v.25 no.1
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• pp.13-26
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• 2023

Recently, as the development of underground spaces has become active due to rapid urbanization and population density, interest in the ground behavior according to the construction of underground spaces is increasing. In large cities with high population density and many buildings, ground subsidence has a great impact on structures and there may be a risk of collapse, so the analysis of ground behavior due to underground construction is essential. Previous studies have been conducted on the subsidence pattern of the surface and the deformation of the tunnel when constructing the tunnel, but analysis has rarely been conducted by using actual topographic information. Therefore, this study analyzed the difference in ground behavior between the actual topography and the flat topography. As a result, it was confirmed that ground settlement occurs at higher elevations, such as in mountainous topography, and when the numerical analysis is performed considering topographical information, the crown settlement of the tunnel is up to about approx. It showed a difference of 10 mm, and it was found that the sensitivity was less in the case of displacement of tunnel wall compared to the crown settlement and ground settlement. The numerical analysis considering the actual GIS-based topographic information presented in this study can be used to obtain more accurate surface subsidence data to understand the behavior of the upper structure due to tunnel excavation.

• Journal of Korean Ophthalmic Optics Society
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• v.17 no.3
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• pp.265-272
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• 2012

Purpose: To compare the results on myopia correction with reverse geometry lenses, effects of wearing reverse geometry lenses were evaluated for the children with low-level and high-level myopia. Methods: The research investigated the corrective effects of having worn reverse geometry lenses for one week, one month, three months and six months on a total of thirty-six persons (sixty-two eyes) between the ages of seven and fifteen, divided into three groups by the degree of their myopia; nineteen eyes(Group One) with myopia of -2.00 D and under, twenty-eight eyes(Group Two) with myopia between -2.25 D and -4 D, and fifteen eyes(Group Three) with myopia of -4.25 D and above; as shown by changes in uncorrected vision and the degree of refraction in the corneal topography, and tested for statistical similarity among the pursued results. Results: After wearing reverse geometry lenses, Group One showed an improvement in vision of 0.5, from 0.45 to 0.95, after one week, and improvements to 0.91 after one month and 1.02 after three months but, after six months, the group's vision regressed to 0.95. Group Two showed an improvement in vision of 0.43, from 0.34 to 0.77, after one week of wearing and to 0.91 after one month, to 0.97 after three months and this was statistically maintained through the remainder of six months. Group Three showed an improvement in vision of 0.55, from 0.15 to 0.7, after wearing for one week, to 0.87 after one month and to 0.91 after three months but saw a regression to 0.86 after six months. The average Sim K (simulated keratometry reading) value for Group One started from $42.84{\pm}1.17D$ and decreased to $41.48{\pm}0.98D$ after one week of wearing and continued declining through three months before increasing during the remainder of six months. Group Two began from $42.91{\pm}1.57D$ and recorded $41.78{\pm}1.58 D$ after one week, continuing the decline through three months before increasing during the remainder of six months. Group Three began at $42.64{\pm}1.64D$ and showed its Sim K value decrease to $40.77{\pm}1.20D$ after one week of wearing, increase after one month and decrease after three months and continue the decline through the remainder of six months. Conclusions: From the results of this study, wearing reverse geometry lenses had myopia-correcting effects after one week of wearing. Although there were variations in the time for such effect to take place but myopia-correcting effects were evident in all test groups.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2000.06a
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• pp.1528-1532
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• 2000

The conventional optics and near field optics are compared numerically in the view points of the spot size and propagation characteristics. The decaying characteristics of near field light require the optics to access the object within several tens of nanometers. Therefore the gap control is one of the main issues in the near field optics area. In this paper the gap control is done by using the shear force of the NF(Near Field) probe and the characteristics are examined. The probe is modeled as a 2'nd order mass-spring-damper system driven by a harmonic force. The primary cause of the decrease in vibration amplitude is due to the damping force - shear force - between the surface and the probe. Using the model, damping constant and resonance frequency of the probe is calculated as a function of probe-sample distance. Detecting the amplitude and phase shift of the NF probe attached to the high Q-factor piezoelectric tuning fork, we can control the position of the NF probe about 0 to 50nm above the sample. The feedback signal to regulate the probe-sample distance can be used independently for surface topography imaging. 3-D view of the shear force image of a testing sample with the period of $1{\mu}m$ will be shown.

• Journal of the Korean GEO-environmental Society
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• v.16 no.8
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• pp.45-49
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• 2015

Using 2D numerical analysis that covers the largest section of the dam body, a process is generally performed when evaluating its stability against seepage. The quantity of seepage is first obtained by assuming that its bottom topography is in the simple form of a rectangle, it is then calculated by reflecting its sectional shape during this process of analyzing the seepage quantity. Considering that various forms of dams are being constructed on various types of ground, thanks to more recent technological advances, it is judged more appropriate to draw a conclusion by means of the results on reflecting the realistic shape and topographical conditions of the dam body through 3D numerical analysis. Therefore, this study intends to present a method designed to carry out safety management by evaluating the correct quantity of water leakage that passes only through the dam body, having excluded other factors that include the amount of rainfall through the 3D FEM analysis.

• Journal of the Korean Society of Manufacturing Process Engineers
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• v.1 no.1
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• pp.79-88
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• 2002

High speed machining system have been used in industrial because it is effective to a material manufacturing with various shape. Recently the end-milling processing is needed the high-precise technique with good surface roughness and rapid time in aircraft, automobile part and molding industry. Therefore this study proposed to decide best manufacturing cutting condition for surface roughness and rapid manufacturing tune by using computer Image processing system and 3D modelling. Until the 16,000 rpm, the surface roughness is decreased rapidly, but it is not over that. The 22,000 rpm is the spindle speed with the optimum surface in the high speed end-milling. In the case of the feed rate with 2,000 mm/mm and 8,000 mm/mm, the surface roughness is better than 4,000 mm/min and 6,000 mm/min. By using the 3D modelling, it is effectively represented shape characteristics of working surface m high speed end-milling.

• Geophysics and Geophysical Exploration
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• v.22 no.3
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• pp.99-106
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• 2019

Resistivity method has been used for the dam safety inspection and, for the convenience of fieldwork, two-dimensional (2D) resistivity data has been usually measured along the dam crest. However, since the dam has three-dimensional (3D) structure, 2D resistivity survey along the dam crest violates 2D assumption and 3D effects caused by 3D topography and material properties in the dam distort the inversion result of 2D resistivity data acquired along the dam crest. Furthermore, it is really hard to evaluate the 3D structure of the dam and 3D leakage pathway using 2D resistivity survey because 2D resistivity survey can provide only 2D resistivity section beneath the survey line. In this study, 3D resistivity survey was conducted at a dam in Korea. By comparing the results from 3D and 2D resistivity surveys, merit and demerits of 3D survey were investigated. Finally, it was confirmed that 3D survey can provide more accurate information about the dam status and 3D leakage pathway compared to the 2D survey. Therefore the 3D resistivity survey should be actively expanded for more accurate dam safety inspection even though more time and expense are required.