• 제목/요약/키워드: 3D Inspection Equipment

검색결과 42건 처리시간 0.041초

대시야 백색광 간섭계를 이용한 Flip Chip Bump 3차원 검사 장치 (Flip Chip Bump 3D Inspection Equipment using White Light Interferometer with Large F.O.V.)

  • 구영모;이규호
    • 한국지능시스템학회논문지
    • /
    • 제23권4호
    • /
    • pp.286-291
    • /
    • 2013
  • 대시야 백색광간섭계(WSI ; White Light Scanning Interferometer)를 이용하여, Flip Chip Bump 검사 공정에 적용하는 것을 목적으로 한 인라인 형태의 플립칩 범프 3차원 검사 장치를 개발한다. 여러 서브스트레이트에 있는 플립칩 범프 높이 측정 결과와 이에 의한 동일한 여러 범프에 대한 반복성 측정 실험 결과를 제시한다. 테스트 벤치에서의 실험 결과와 개발된 플립칩 범프 3차원 검사 장치에서의 실험 결과를 비교하였으며 진동의 영향이 감소되어 개선된 반복성 실험 결과를 얻을 수 있었다. 플립칩 범프 3차원 검사 장치의 검사성능을 평가할 수 있는 기준을 제시한다.

대시야 백색광 간섭계를 이용한 3차원 검사 장치 개발 (Development of 3D Inspection Equipment using White Light Interferometer with Large F.O.V.)

  • 구영모;이규호
    • 한국지능시스템학회논문지
    • /
    • 제22권6호
    • /
    • pp.694-699
    • /
    • 2012
  • 반도체 검사 공정에 적용하기 위한 대시야 백색광간섭계(WSI ; White Light Scanning Interferometer)를 사용한 반도체 검사 결과를 본 논문에서 제시한다. 각 서브스트레이트에 있는 동일한 여러 범프에 대한 3D 데이터 반복성 측정 실험 결과를 제시한다. 각 서브스트레이트의 모든 범프에 대한 3D 데이터 반복성 측정 실험 결과를 제시한다. 반도체 검사 공정에서 3D 데이터 검사를 고속으로 달성하기 위해 대시야 백색광간섭계를 사용한 반도체 검사는 매우 중요한 의미를 갖는다. 인라인 고속 3D 데이터 검사기 개발에 본 논문이 크게 기여할 수 있다.

반도체 테스트 핸들러 픽커 검사장비 프레임에 대한 구조 및 피로해석 (Structure and Fatigue Analyses of the Inspection Equipment Frame of a Semiconductor Test Handler Picker)

  • 김영춘;김영진;국정한;조재웅
    • 한국산학기술학회논문지
    • /
    • 제15권10호
    • /
    • pp.5906-5911
    • /
    • 2014
  • 요즈음 생산되는 반도체의 제품이 제대로 작동하는지, 낮은 습도 또는 높은 온도에서 잘 견디는가를 검사하는 패키지 조립 및 검사 공정이 현장에 많이 있다. 또한 검사공정에서 사용되고 있는 반도체 테스트 핸들러 픽커 검사장비가 있는데, 본 연구에서는 CATIA 프로그램을 이용하여 3D 모델링하였으며, ANSYS 프로그램을 이용하여 반도체 테스트 핸들러 픽커 검사장비 프레임의 모델에 대하여 3가지 피로하중에 대한 해석을 하였다. 해석 결과로서 Case 1과 Case 2 모두 프레임의 가운데에서 최대 변형량이 발생하고 불규칙 피로 하중들 중에서 가장 하중의 변동이 심한 'SAE bracket history'가 가장 불안정하고 'Sample history'가 가장 안정함을 보이고 있다. 본 연구의 피로 해석 결과는 반도체 테스트 핸들러 픽커 검사장비 프레임의 파손방지 및 내구성을 검토함으로서 그 프레임의 설계에 효율적으로 활용이 될 수 있다.

중수로 칼란드리아 내장품 원격 육안검사 기술 개발 (Development of Remote Visual Inspection Technology for Calandria & Internal of CANDU NPP)

  • 이상훈;진석홍;문균영
    • 한국압력기기공학회 논문집
    • /
    • 제6권1호
    • /
    • pp.72-77
    • /
    • 2010
  • During the period of reinforcement work for the licensing renewal of CANDU NPP, the fuel channels, Calandria tubes and feeders of CANDU Reactor are replaced. The remote visual inspection of Calandria internal is also performed during the period of reinforcement work. This period is a unique opportunity to inspect the inside of the Calandria. The visual inspection for the Calandria vessel and its internals of Wolsong NPP Unit 1 was performed by Nuclear Engineering & Technology Institute(NETEC) of KHNP. To perform this inspection, NETEC developed equipment applied new technology such as the synchronization of 3D CAD, automatic alignment and control system. The inspection confirmed that the Calandria integrity of Wolsong NPP Unit 1 is perfect.

  • PDF

부화소 정밀도를 가지는 3차원 BGA 검사 알고리즘 (A 3D BGA Inspection Algorithm with Subpixel Accuracy)

  • 김정훈;박성한;심영석
    • 대한전자공학회:학술대회논문집
    • /
    • 대한전자공학회 1999년도 추계종합학술대회 논문집
    • /
    • pp.507-510
    • /
    • 1999
  • Inspection of BGAs presents several challenges for modem measurement equipment. No only must these systems be fast and accurate, they must deal with the special challenges presented by very small shiny metal spheres. For accurate measurement, we propose an algorithm which fits for estimating the accurate ball height using 2-D curve-fitting algorithm. The real boundary between two adjacent pixels and the real ball diameter are measured with subpixel accuracy Experimental results show that the proposed method calculates the ball height and diameter with subpixel accuracy and is robust in local noise with low measurement error.

  • PDF

Geometric and structural assessment and reverse engineering of a steel-framed building using 3D laser scanning

  • Arum Jang;Sanggi Jeong;Hunhee Cho;Donghwi Jung;Young K. Ju;Ji-sang Kim;Donghyuk Jung
    • Computers and Concrete
    • /
    • 제33권5호
    • /
    • pp.595-603
    • /
    • 2024
  • In the construction industry, there has been a surge in the implementation of high-tech equipment in recent years. Various technologies are being considered as potential solutions for future construction projects. Building information modeling (BIM), which utilizes advanced equipment, is a promising solution among these technologies. The need for safety inspection has also increased with the aging structures. Nevertheless, traditional safety inspection technology falls short of meeting this demand as it heavily relies on the subjective opinions of workers. This inadequacy highlights the need for advancements in existing maintenance technology. Research on building safety inspection using 3D laser scanners has notably increased. Laser scanners that use light detection and ranging (LiDAR) can quickly and accurately acquire producing information, which can be realized through reverse engineering by modeling point cloud data. This study introduces an innovative evaluation system for building safety using a 3D laser scanner. The system was used to assess the safety of an existing three-story building by implementing a reverse engineering technique. The 3D digital data are obtained from the scanner to detect defects and deflections in and outside the building and to create an as-built BIM. Subsequently, the as-built structural model of the building was generated using the reverse engineering approach and used for structural analysis. The acquired information, including deformations and dimensions, is compared with the expected values to evaluate the effectiveness of the proposed technique.

자동차 차체부품 CO2용접설비 전수검사용 비전시스템 개발 (Development of a Vision System for the Complete Inspection of CO2 Welding Equipment of Automotive Body Parts)

  • 김주영;김민규
    • 센서학회지
    • /
    • 제33권3호
    • /
    • pp.179-184
    • /
    • 2024
  • In the car industry, welding is a fundamental linking technique used for joining components, such as steel, molds, and automobile parts. However, accurate inspection is required to test the reliability of the welding components. In this study, we investigate the detection of weld beads using 2D image processing in an automatic recognition system. The sample image is obtained using a 2D vision camera embedded in a lighting system, from where a portion of the bead is successfully extracted after image processing. In this process, the soot removal algorithm plays an important role in accurate weld bead detection, and adopts adaptive local gamma correction and gray color coordinates. Using this automatic recognition system, geometric parameters of the weld bead, such as its length, width, angle, and defect size can also be defined. Finally, on comparing the obtained data with the industrial standards, we can determine whether the weld bead is at an acceptable level or not.

CAD 데이터 및 엑스레이 CT이미지 비교를 통한 다이캐스팅 부품의 내부 결함 검사방법 (Internal Defects Inspection of Die-cast Parts via the Comparison of X-ray CT Image and CAD Data)

  • 홍경택;심재홍
    • 반도체디스플레이기술학회지
    • /
    • 제17권1호
    • /
    • pp.27-34
    • /
    • 2018
  • Industrially, die-casting products are formed through casting, and so the methods to inspect the defects inside them are very restrictive. External inspection methods including visual inspection, sampling judgment, etc. enables researchers to inspect possible external defects, but x-ray inspection equipment has been generally used to inspect internal ones. Recently, they have been also applying three-dimensional internal inspections using CT equipment. However, they have their own limitations in applying to the use of industrial inspection due to limited detection size and long calculation time. To overcome the above problems, this paper has suggested a method to inspect internal defects by comparing the CAD data of the product to be inspected with the 3D data of the CT image. In this paper, we proposed a method for fast and accurate inspection in three dimensions by applying x-ray inspection to find internal defects in industrial parts such as aluminum die casting products. To show the effectiveness of the proposed method, a series of experiments have been carried out.

항공기용 추적레이더 시험을 위한 시험장비의 설계 및 제작 (A Design and Fabrication of Test Equipment for Airborne Tracking Radar Test)

  • 윤승구;박승욱;권준범;정만식
    • 한국군사과학기술학회지
    • /
    • 제20권3호
    • /
    • pp.352-361
    • /
    • 2017
  • This paper proposes a design and fabrication of the test equipment that is implemented as a part of the airborne tracking radar inspection under the environment of indoor simulation. This test equipment provides controlling the operation status of airborne tracking radar and replicating the velocity and range information of target by generating a variety of target signal. This is mainly composed of radar operation controller, target signal generator, horn antenna driving devices. Radar operation controller is able to perform the controlling of radar operation mode and monitoring in real time by serial communication. Target signal generator is generated doppler signal and range delayed signal using virtual target of RF-band. Horn antenna driving devices perform a role of target simulating exercise. In the end, the performance is demonstrated using experiment results of test equipment for airborne tracking radar.