• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2000.04a
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• pp.125-128
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• 2000

ZnO thin films on silicon substrates have been deposited by pulsed laser deposition technique(PLD). A Nd:YAG laser was used with the wavelength of 355 nm. In order to investigate the effect of oxygen post-annealing treatment on the property of ZnO thin films, deposited film has been annealed at the substrate temperature of $440^{\circ}C$. After post-annealing treatment in the oxygen ambient, the stoichiometry of ZnO film has been characterized be improved which results in higher UV emission intensity of photoluminescence.

• Proceedings of the KIEE Conference
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• 1997.07d
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• pp.1226-1228
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• 1997

펄스 레이저 증착법을 이용하여 MgO 기판 위에 YBCO 박막을 c 축으로 성장시켰다. 이를 위하여 다양한 두께의 YBCO 박막을 여러 온도에서 증착시킴으로서 두께와 온도에 따른 YBCO 박막의 방향성을 조사하였다. 레이저원으로는 Nd:YAG 레이저의 355 nm의 파장을 이용하였으며, 증착시 기판온도는 $700^{\circ}C$와 $750^{\circ}C$에서 박막의 두께를 $3,000{\AA}$, $10,000{\AA}$, $20,000{\AA}$ 등으로 변화시켜 증착하였다. 이렇게 증착되어진 박막의 표면은 SEM으로 관촬되어졌으며, Raman Spectrascopy로 박막을 분석하였고, XRD를 사용하여 그 박막의 배향성을 연구하였다. 본 논문에서는 이와 같은 분석과 연구를 통하여 증착되어진 다성분 박막의 배향성이 기판온도와 박막두께에 따라 민감하게 변화함을 체계적으로 분석하였으며, 그 결과 기판온도와 박막 두께에 따른 YBCO 박막의 a 축, c 축 성장의 의존성을 확인하였다.

• Proceedings of the Korean Society for Technology of Plasticity Conference
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• 2004.05a
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• pp.237-240
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• 2004

In this study, we have developed a new $UV(\lambda=355nm)$ laser micromachining technology by direct ablation method without masks. This technology allows that 3D micro parts can be fabricated rapidly and efficiently with a low price. And it has a benefit of reducing fabricating process simply. Due to micro parts' fabrication, such technologies need the control of XYZ stages with high precision, the design of optical devices to maintain micron spot sizes of laser beam and the control technology of laser focus. Also, we have fabricated a micro-channel through the developed laser micromachining technology and verified it through the results.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2003.06a
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• pp.612-615
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• 2003

Maskless laser patterning process is developed using 3rd harmonic Diode Pumped Solid State Laser with near visible wavelength of 355 nm. Photo-sensitive curable polymer is irradiated by UV laser and developed using polymer solvent to obtain quasi-3D patterns. We performed basic experiments for the various process conditions such as laser power, writing speed, laser focus, and polymer optical property to gain the optimal conditions. Experimentally, the patterns of trapezoidal shape were manufactured into dimension of 8${\mu}{\textrm}{m}$ width and 5.4${\mu}{\textrm}{m}$ height. This process could be applied to fabricate a single mode waveguide without expensive mask projection method.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2003.06a
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• pp.608-611
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• 2003

In this paper, laser direct micromaching is developed to fabricate micro patterns using UV laser ( λ$_3$= 355 nm). Experimentally, laser beam paths mainly influences the surface shape quality. Thus. we proposed laser beam path generator by extracting shape data in a blueprint worked through CAD modeler and using genetic algorithm that considers the characteristics of laser beam. The results show that various shapes of micro patterns could be manufactured using proposed method in this paper.

• Proceedings of the KIEE Conference
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• 2008.07a
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• pp.1264-1265
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• 2008

PLD 방법으로 undoped ZnO박막을 성장 온도별로 성장하여 박막의 광학적 특성이 변화되는 것을 관찰하였다. undoped ZnO박막은 $Al_2O_3(0001)$기판을 이용하였고, pulsed laser deposition(PLD)을 이용하여 증착을 하였다. 이때 파장이 355nm인 Nd:YAG 레이저를 이용하였고 레이저의 에너지 밀도는 1.4 $J/cm^2$ 이었다. 구조적 광학적 특성을 관측하기 위하여 XRD, SEM, PL 등을 측정하였다. PL 측정 결과 성장 온도가 증가함에 따라 undoped ZnO박막의 광학적 특성이 좋아지는 것을 관찰할 수 있었다. XRD 측정 결과도 온도별 FWHM과 intensity ratio가 점차 좋아지는 것을 볼 수 있었다.

• Proceedings of the Korean Institute of Information and Commucation Sciences Conference
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• 2003.10a
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• pp.352-355
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• 2003

비자성이며 비전도성의 물리적 성질을 갖는 자연산 퀄쯔(quartz)와 용암석 스코리아를 대상으로 마그네타이징 처리를 하여 분석하였다. 마그네타이징 처리를 위하여 강력한 기계화학적 분쇄 반응을 시켰으며, 분쇄 반응시 알코올계의 솔벤트를 반응 용매로 사용하였다. 퀄쯔와 스코리아의 마그네타이징 처리에서 비교적 비중이 큰 퀄쯔의 경우와 비중이 작은 스코리아의 경우에도 분쇄된 분말이 물에 뜨는 것을 확인할 수 있으며, 친유성으로 기름에 대한 흡착 성질이 우수함을 확인하였다. 자연산 퀄쯔와 함께 스코리아를 바탕물질로 하여 기계-화학적 반응 기술로 고 분산성 흡착반응에 의한 고분자 물잘 생성을 유도하여 나노복합체를 제조하였다. 반응의 처리조건과 적용과정에 따라서 기계-화학적 반응을 통하여 얻어진 물질은 자기적 성질과 유전체 및 전기적 성질을 동시에 나타낸다. 부착성 융합 복합물질의 특징을 고려하여 시그니토마그네틱스(Segneto-magnetics)로 분류되는 합성분말은 특히 유류성분에 대하여 높은 흡착성을 가지며, 강한 자기적 성질을 띄는 10-50 nm 두께의 하나 또는 그 이상의 이질적 융합 화합물 층이 석영이나 수정체의 표면에 합성되어 특유의 자기, 전기적 성질을 나타낸다.

• Proceedings of the KIEE Conference
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• 1999.11d
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• pp.888-890
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• 1999

ZnO thin films on (001) sapphire substrates have been deposited by pulsed laser deposition using a Nd:YAG laser with the wavelength of 355 nm at an oxygen pressure of 350 mTorr. In order to investigate the effect of the substrate temperature on the properties of ZnO thin films, the experiment has been performed at various substrate temperatures in the range of $200^{\circ}C$ to $700^{\circ}C$. According to XRD, (002) textured ZnO films of high crystalline quality have been obtained by pulsed laser deposition technique. However, the intensity of UV emission is mostly depending on the stoichiometry of ZnO films.

• Proceedings of the Korean Society of Laser Processing Conference
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• 2006.06a
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• pp.97-100
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• 2006

Picosecond (ps) laser micro-machining has emerged as an attractive method of fabricating high-precision microstructures, especially in metals. In this paper, a metallic mold for diffraction gratings is fabricated with a mode-locked 12 ps $Nd:YVO_4$ laser. Laser pulses with a wavelength of 355nm are irradiated on the surface of NOK 80, a mold material, to generate line patterns. In order to minimize the line width, laser power is set just above the ablation threshold of NOK 80. Results show that the spectrum from the fabricated mold is good enough for some industrial application.

• The Transactions of the Korean Institute of Electrical Engineers C
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• v.49 no.2
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• pp.103-106
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• 2000

ZnO is a wide-bandgap II-IV semiconductor and has a variety of potnetial applications. ZnO exhibits good piezoelectric, photoelectric and optical properties, and is a good candidate for an electroluminescence device. ZnO films have been deposited on (001) sapphire by PLD technique. Nd:YAG pulsed laser was operated at a wavelength of $\lambda=355nm$. The ZnO films were deposited at oxygen pressures from base to 500 mTorr. The substrate temperatures was increased from $200^{\circ}C\; to\;700^{\circ}C$ films showed strong UV emission by increasing the partial oxygen pressure. We have investigated the relationship between partial oxygen pressure and the intensity of UV emission.