• Proceedings of the Korean Society of Precision Engineering Conference
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• 2012.10a
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• pp.179-180
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• 2012

• Transactions of Materials Processing
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• v.13 no.3
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• pp.273-278
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• 2004

This paper subscribes the measurement system that can position the target to measure by moving 2-axis stage, which is controlled by the data from image processing technique. The high resolution camera and lens are used in measurement of micro mechanical part, but the region of measurement is very small. It is necessary the re-positioning to measure several regions in one part. The system described in this paper has the accuracy with about $0.9\mu\textrm{m}$ resolution per one pixel and can be applied to measure micro mechanical part.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2003.06a
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• pp.1207-1210
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• 2003

This paper deals with experiments for dynamic characteristics and performance evaluation of the 3-axis fine positioning stage developed in [1]. The features of the developed fine positioning stage are the long stroke due to the magnetically preloaded PZT actuators, the minimum motion crosstalk due to the use of a ball contact mechanism and the compact design. The dynamic characteristics of the actuator and the stage are tested with the preload changed in order to validate the actuator and the stage design. Performance evaluation is also made for the PZT actuators as well as the stage positioning accuracy. Experimental results show that the developed stage is accurate enough to be used for nanometer positioning.

• Korean Journal of Optics and Photonics
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• v.32 no.2
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• pp.49-54
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• 2021

In this paper, we design and construct the equipment to manufacture large-diameter optical fiber end caps, which are the core parts of high-power fiber lasers, and we fabricate large-diameter optical fiber end caps using the home-made equipment. This equipment consists of a CO2 laser as a fusion-splice heat source, a precision stage assembly for transferring the position of a large-diameter optical fiber and an end cap, and a vision system used for alignment when the fusion splice is interlocked with the stage assembly. The output of the laser source is interlocked with the stage assembly to control the output, and the equipment is manufactured to align the polarization axis of the large-diameter polarization-maintaining optical fiber with the vision system. Optical fiber end caps were manufactured by laser fusion splicing of a large-diameter polarization-maintaining optical fiber with a clad diameter of 400 ㎛ and an end cap of 10×5×2 ㎣ (W×D×H) using home-made equipment. Signal-light insertion loss, polarization extinction ratio, and beam quality M2 of the fabricated large-diameter optical fiber end caps were measured to be 0.6%, 16.7 dB, and 1.21, respectively.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2013.05a
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• pp.389-390
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• 2013

• Journal of the Korean Society of Manufacturing Process Engineers
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• v.19 no.8
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• pp.81-87
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• 2020

A stable rotational-to-linear motion transformation structure using a driving mechanism with 2 degrees of freedom was developed for an orthogonal mechanism to prevent the interference of each axis in 2D motion. In this mechanism, a step motor was used for precise position control. This structure was developed to maneuver workparts in micro particle blast machining experiments. To determine the real-time performance of micro particle blast machining, the control, input, and output were operated simultaneously and precise position control was implemented, using a timer interrupt with multiple execution codes. The two step motors obtained precise position control by removing backlash with a ball-screw mechanism. The device has menu-type control codes for user-friendliness, and real-time sequence control was simultaneously adopted for user control input.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2005.06a
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• pp.1871-1874
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• 2005

The direct write FIB technology has several advantages over contemporary micro-machining technology, including better feature resolution with low lateral scattering and capability of maskless fabrication. Therefore, the application of FIB technology in micro fabrication has become increasingly popular. In recent model of FIB, however the feeding system has been a very coarse resolution of about a few ${\mu}m$. Our research is the development of nano stage of 200mm strokes and 10nm resolutions. Also, this stage should be effectively operating in ultra high vacuum of about $1x10^{-7}$ torr. This paper presents the discussion and results of CAE of the 2 axes stages. we have estimated the stable static and dynamic characteristics for dual servo system. Therefore the 2 axes stages developed and future work are introduced at the end of the paper.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.28 no.10
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• pp.1541-1548
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• 2004

A nano-stage simulation tool is developed for an advanced E-beam lithography system. Even if piezo-actuators are believed to be compatible fer the E-beam lithograpy system it is difficult to predict their characteristics due to their nonlinearities such as hysteresis and creep. In this paper, the nonlinear properties are modeled for a piezo-actuator by considering the voltage range and speed variations. The hysteresis is described as the first order differential equation with 24 sets of parameters and the creep is modeled as a time-dependent logarithmic function with 2 sets of a parameter. A two-axis nano stage with piezo-actuators are investigated for realizing nano scale motions. The characteristics of flexure guide mechanisms are analyzed based on the finite element method using the ANSYS software. The simulation tool for the nano stage is constructed by using the RecurDyn software. The dynamic response of the nano stage is obtained in simulations and compared with the experimental data.

• Journal of the Korean Society for Precision Engineering
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• v.23 no.1 s.178
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• pp.129-135
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• 2006

In this study, a two-axis ultra-precision stage driven by piezoelectric elements is presented. The stage has a flexure-type parallel linear guide mechanism consisting of quad-symmetric simple parallel linear springs and quad-symmetric double compound linear springs. While the simple parallel linear springs guide the linear motion of a moving plate in the stage, the double compound linear springs follow the motion of the simple parallel linear spring as well as compensate the parasitic motions caused by the simple parallel linear springs. The linear springs are designed by rectangular beam type flexures that are deformed by bending deflection rather than axial extension, because the axial extension is smaller than the bending deflection at the same force. The designed guide mechanism is analyzed by finite element method(FEM). Then two-axis parallel linear stage is implemented by the linear guide mechanism combined with piezoelectric elements and capacitance type displacement sensors. It is shown that the manufactured ultra-precision stage achieves 3 nm of resolution in x- and y-axis within 30 ${\mu}m$ of operating range.

• Proceedings of the Korea Crystallographic Association Conference
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• 2002.11a
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• pp.36-36
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• 2002

To Establish of standard technique of length measurent in 2D plane, we develope AFM system. The XY scanner scans the sample only in XY plane, while the Z scanner scans the specimen only in Z-direction. Cantilever tip is controlled to has constant height relative to speciman surface by feedback of PSPD signal. To acquire high accuracy, Z-axis measuring sensor will be added.(COXI or others). In this paper we design XYZ stage suitable for this AEM system. For XY stage, single module parallel-kinnematic flexure stage is used which has high orthogonality and minimum out-of-plane motion. To obtain best performance optimal design is performed. For XY stage, to be robust about parasitic motion optimal design of maximizing Z and tilt stiffness is performed under the constraint of motion range and stage size. And for Z stage, optimal design of maximizing 1st resonant frequency is performed. Because if resonant frequency is get higher, scan speed is improved. So it makes reduce the error by sensor drift. Resultly XYZ stage each have 1st natural frequency of 115㎐, 201㎐, 2.66㎑ and range 109㎛, 110㎛, 12㎛.