• 제목/요약/키워드: 17inch

검색결과 86건 처리시간 0.041초

반도체 미세 패턴 식각을 위한 EPD 시스템 개발 및 연구 (The Develop and Research of EPD system for the semiconductor fine pattern etching)

  • 김재필;황우진;신유식;남진택;김홍민;김창은
    • 대한안전경영과학회지
    • /
    • 제17권3호
    • /
    • pp.355-362
    • /
    • 2015
  • There has been an increase of using Bosch Process to fabricate MEMS Device, TSV, Power chip for straight etching profile. Essentially, the interest of TSV technology is rapidly floated, accordingly the demand of Bosch Process is able to hold the prominent position for straight etching of Si or another wafers. Recently, the process to prevent under etching or over etching using EPD equipment is widely used for improvement of mechanical, electrical properties of devices. As an EPD device, the OES is widely used to find accurate end point of etching. However, it is difficult to maintain the light source from view port of chamber because of contamination caused by ion conflict and byproducts in the chamber. In this study, we adapted the SPOES to avoid lose of signal and detect less open ratio under 1 %. We use 12inch Si wafer and execute the through etching 500um of thickness. Furthermore, to get the clear EPD data, we developed an algorithm to only receive the etching part without deposition part. The results showed possible to find End Point of under 1 % of open ratio etching process.

수중 방사선 모니터링 시스템의 성능평가를 위한 수중 내 최소검출가능농도 산출 (Evaluation of Minimum Detectable Activity for Underwater Radiation Monitoring System)

  • 박장근;정성희;오대민;문진호
    • 방사선산업학회지
    • /
    • 제17권3호
    • /
    • pp.219-224
    • /
    • 2023
  • A high-efficiency underwater radiation monitoring system, HydroGamma, has been developed for detecting 137Cs and 131I in the event of waterborne radiation contamination. The system consists of a 3-inch NaI (Tl) detector, solar panels for power supply, data acquisition and transmission modules, and batteries. HydroGamma also includes a 40K calibration source for remote performance evaluation and energy calibration. In this study, some simulations and experiments were carried out to evaluate the minimum detectable activities (MDA) of HydroGamma. We installed the HydroGamma at Tapjeongho Lake in Nonsan-si and acquired background data since MDA is calculated based on the experimental background data. The results show that the minimum detectable activities for 137Cs and 131I were 1.78Bq L-1 and 1.81Bq L-1, respectively even though the gamma rays emitted from 40K(1,460 keV) affect the minimum detectable activities for them.

경희대학교 망원경을 이용한 SL-9의 목성 충돌 후 충돌 흔적 진화 관측 연구 (STUDY OF THE EVOLUTION OF SL-9 IMPACT SITES ON JUPITER WITH THE KYUNGHEE UNIVERSITY 30 INCH TELESCOPE)

  • 손동훈;송유미;이서구;진호;김갑성;김상준
    • Journal of Astronomy and Space Sciences
    • /
    • 제12권2호
    • /
    • pp.204-215
    • /
    • 1995
  • 경희대학교 천문대에서는 1994년 7월 17일부터 9월 3일에 걸쳐 CCD카메라와 R 필터를 장착한 구경 76cm 광학 망원경을 이용하여 슈메이커-레비(SL-9)해성의 목성 충돌 흔적을 관측하였다. 관측된 모든 화상 자료에 대하여 각 충돌 흔적을 가려내고, 충돌 흔적의 자전 주기와 이동 속도, 크기를 계산하였다. 그 결과 A,C, E, G, H, K, L, Q1, W, G그룹 등의 충돌 흔적이 관측되었음을 알았다. G, L 충돌 흔적들을 통해 구한 System II에 대한 이동 속도는 -0.8m/s에서 8.8m/s의 값을 나타냈으며, 자전 주기는 $9^h55^m39.4^s\pm34^s$였다. 비교적 큰 G와 L충돌 흔적의 길이는 최초 관측시 각각 $1.95\times10^4km,2.20\times10^4km$였다. 또한 충돌 흔적이 진화해 가는 모습을 통해 충돌 흔적의 분산에 대하여 조사하였다.

  • PDF

분자선 에피성장법으로 성장된 ZnSe/GaAs의 특성 (Property of molecular beam epitaxy-grown ZnSe/GaAs)

  • 김은도;손영호;조성진;황도원
    • 한국결정성장학회지
    • /
    • 제17권2호
    • /
    • pp.52-56
    • /
    • 2007
  • 본 연구에서는 초고진공(UHV, ultra high vacuum) 분자선 에피성장(MBE, molecular beam epitaxy) 시스템을 제작하여, ZnSe/GaAs[001]을 증착하였고, 증착된 박막의 특성을 SEM(scanning electron microscopy), AFM(atomic force microscopy)으로 조사하여, 분자층 단위의 조밀하고 균일한 표면특성을 보이고 있음을 확인할 수 있었다 XRD(x-ray diffractometer)를 이용하여, GaAs[001]기판의 XRD peak 위치와 ZnSe 박막의 XRD peak 위치가 각자 일치함을 확인할 수 있었다. PL(photoluminescence)로는 대략 437nm에서 발광하는 것이 관측되었으며, 2인치 ZnSe 박막의 PL mapping을 측정하였다.

UTILIZATION OF FULL FAT SOYBEAN IN POULTRY DIETS II. BROILER

  • Cheva-Isarakul, B.;Tangtaweewipat, S.
    • Asian-Australasian Journal of Animal Sciences
    • /
    • 제8권1호
    • /
    • pp.89-95
    • /
    • 1995
  • The efficient use as a protein source for poultry of full fat soybean (FFSB) treated under various processes, i. e. steaming under pressure 40 lbs/sq. inch for 5, 10 or 15 minutes or roasting in a baking oven at $180^{\circ}C$ for 20, 30 or 40 minutes or extruding was compared with that of soybean meal. Eight hundred straight run broiler chicks (AA 707) were randomly allotted into 8 treatments of 4 replicates, fed with, rations containing either kind of the above mentioned FFSB for 6 weeks (Wks 1-7). The protein content of the diets for chicks during 1-3, 3-6 and 6-7 weeks of age was 21, 19 and 17% respectively. The result revealed that steaming can destroy 76-92% of the trypsin inhibitor activity (TlA) in soybean, particularly that at 15 minutes, while roasting can get rid of only 13-28% TlA. Chicks fed roasted FFSB had an enlarged pancreas and showed inferior performances to the steaming and the extrusion products. Steaming should be at least 10-15 minutes in order to obtain the comparable performances to those of the extrusion or of the soybean meal. The extruded FFSB showed the best feed conversion ratio. This might be due to the very fine particle of the product.

변조전달함수 방법에서 엣지 장치 설정에 대한 각도 최적화 평가 (Evaluation of Angle Optimization on Edge Test Device Setting in Modulation Transfer Function)

  • 민정환;정회원
    • 대한방사선기술학회지:방사선기술과학
    • /
    • 제43권1호
    • /
    • pp.15-21
    • /
    • 2020
  • This study was purpose to evaluation of Modulation Transfer Function in Measurements by using the International electrotechnical commission standard(IEC 62220-1) which were edge device each angle by using edge method. In this study was Aero(Konica, Japan) image receptor which is a indirect Flat panel detector(FPD) was used. The size of matrix 1994 × 2430 (14"× 17" inch) which performed 12 bit processing and pixel pitch is 175 ㎛. The results of shown as MTF measurements at IEC standard. The amount of data seemed reasonable and at an MTF value of 0.1 the spatial frequencies were 2.56 cycles/mm at an angle of 2.4°. MTF value of 0.5 the spatial frequencies were 1.32 cycles/mm at an angle of 2.4°. This study were to evaluate MTF by setting each angle 2.0°~2.8° degrees the most effective optimal edge angle and to suggest the quantitative methods of measuring by using IEC.

고휘도용 프리즘 도광판의 설계 및 실물평가에 대한 연구 (The Study of High-Brightness Prism Patterned Light Guide Plate)

  • 한정민;오영식;배경운;김연호;임영진
    • 한국전기전자재료학회:학술대회논문집
    • /
    • 한국전기전자재료학회 2004년도 춘계학술대회 논문집 디스플레이 광소자분야
    • /
    • pp.161-164
    • /
    • 2004
  • 본 연구에서는 고휘도 백라이트에 있어서 일반적으로 휘도 향상을 위해서 사용하는 프리즘 혹은 편광프리즘 등의 고가의 기능성 광학시트를 사용하지 않고, 확산시트만을 사용하여 고성능의 BLU 를 제조할 수 있는 핵심부품으로서 프리즘 도광판에 대해서 연구하였다. 고휘도 프리즘 도광판을 구현하는 방법으로 먼저, 광학적으로 시뮬레이션을 통해서 가능성을 검증하고, 기본적인 광학구조의 설계를 수행한 후, 이를 stamper 방식의 사출성형으로 실물을 구현하여 설계의 재현성을 확인하는데 역정을 두었다. 실험결과, 17 inch, 두께 8 mm 사양의 모니터용 도광판에 있어서, 고휘도 BLU를 구현하기 위해서 도광판 밑면과 윗면에 프리즘 구조를 부가한 도광판의 경우에 기존의 인쇄형 도광판보다 약 20%의 휘도향상 효과를 확인할 수 있었으며, 향후 확산시트만을 사용한 고휘도 백라이트로의 응용가능성을 검증할 수 있었다.

  • PDF

The Quality Investigation of 6H-SiC Crystals Grown by a Conventional PVT Method with Various SiC Powders

  • Yeo, Im-Gyu;Lee, Tae-Woo;Lee, Won-Jae;Shin, Byoung-Chul;Choi, Jung-Woo;Ku, Kap-Ryeol;Kim, Young-Hee
    • Transactions on Electrical and Electronic Materials
    • /
    • 제11권2호
    • /
    • pp.61-64
    • /
    • 2010
  • In this paper, we investigate the quality difference of SiC crystals grown by a conventional physical vapor transport method using various SiC powders. While the growth rate was revealed to be dependent upon the particle size of the SiC powder, the growth rate of SiC bulk crystals grown using SiC powder with a smaller particle size (20 nm) was definitely higher than those using lager particle sizes with $0.1-0.2\;{\mu}m$ and $1-10\;{\mu}m$, respectively. All grown 2 inch SiC single crystals were proven to be the polytype of 6H-SiC and the carrier concentration levels of about $10^{17}\;cm^3$ were determined from Hall measurements. It was revealed that the particle size and process method of SiC powder played an important role in obtaining a good quality, high growth rate, and to reduce growth temperature.

Comparison of Optical Characteristics between CCFL and EEFL in Direct-type Backlight Unit

  • Han, Jeong-Min;Han, Jin-Woo;Seo, Dae-Shik
    • Transactions on Electrical and Electronic Materials
    • /
    • 제8권6호
    • /
    • pp.268-273
    • /
    • 2007
  • In this study, It was studied about the luminance characteristics of 17 inch direct-type back light using EEFL(external electrode fluorescent lamp) and CCFL(cold cathode fluorescent lamp). The EEFL has a long life time because the electrode is installed outside of lamp. And it is produced in lower price than conventional CCFL. Moreover, it does not need process of installing internal electrode. However, the EEFL technology has several problems such as difficulty of designing driving inverter and preventing this phenomenon along the skin of lamps. We suggested two types of backlight unit for LCD TV application using the EEFL and the CCFL. We found optimized optical design parameters. We set the optical variation parameters such as lamp height, lamp distance, total thickness, and angles of inner walls. We achieved 7580 nits of center luminance, 82% of luminance uniformity by using 20 lamps of the EEFL and 7297 nits of center luminance, 78% of luminance uniformity by using 16 lamps of the CCFL.

Ultra High Luminance and Luminous Efficacy MFFL (Mercury-free Flat Fluorescent Lamp) for Scanning Backlights of LCD TVs

  • Seo, In-Woo;Jung, Jae-Chul;Oh, Byung-Joo;Whang, Ki-Woong
    • 한국정보디스플레이학회:학술대회논문집
    • /
    • 한국정보디스플레이학회 2009년도 9th International Meeting on Information Display
    • /
    • pp.231-234
    • /
    • 2009
  • In order to realize the high luminance and luminous efficacy MFFLs for LCD backlights, we optimized the phosphor profile to enlarge the surface area. The MFFL with the new phosphor profile shows a very wide luminance range from 2,600 to 17,000 nit with the corresponding luminous efficacy from 66 to 32.5 lm/W. The results were obtained with the color coordinate of the phosphor to be around (0.25, 0.23). And the single cell is expanded into a multi-structured configuration to realize a 32 inch-sized lamp by a simple repetition of the single cells, and a new driving scheme is proposed for an adaptive local dimming and scanning drive using dual auxiliary electrodes and bipolar drive scheme. Especially the ultra high luminance and luminous efficacy results suggest the duty time of illumination of the backlight unit can be significantly reduced.

  • PDF