• 유체기계공업학회:학술대회논문집
• /
• 2006.08a
• /
• pp.493-496
• /
• 2006

Rarefied gas flows through two-dimensional micro channels are studied numerically for the performance optimization of a nanomembrane-based Knudsen compressor. The effects of the wall temperature distributions on the thermal transpiration flow patterns are examined. The flow has a pumping effect, and the mass flow rates through the channel are calculated. The results show that a steady one-way flow is induced for a wide range of the Knudsen number. The DSMC(direct simulation Monte Carlo) method with VHS(variable hard sphere) model and NTC(no time counter) techniques has been applied in this work to obtain numerical solutions.

• Proceedings of the Korea Society for Energy Engineering kosee Conference
• /
• 1999.11a
• /
• pp.57-60
• /
• 1999

순환유동층 보일러는 연소로 (상승관: riser)내에 공기를 고속으로 주입하여 비말동반되는 고체입자를 사이클론에서 포집 하여 재주입하는 유동층을 이르는 것으로, 난류유동층(turbulent fluidized bed), 고속유동층(fast fluidized bed) 그리고 희박상 유동(dilute phase flow) 영역에서 조업이 이루어진다. 순환유동층은 비교적 높은 기체 유속에서 조업이 이루어지기 때문에 고체입자의 혼합 및 비산 그리고 재순환이 격렬하게 이루어지고, 기-고체간 접촉효율 및 전열계수가 높아 전체적인 처리량 및 효율이 좋은 장점을 가지고 있다.(중략)

• Proceedings of the Korean Vacuum Society Conference
• /
• 2012.08a
• /
• pp.98-98
• /
• 2012

최고진공도 10-10 mbar, 배기속도 2500 L/s를 구현할 대용량 복합 분자펌프(TMP) 설계를 위한 3차원 유동해석을 실시하였다. 진공도가 10-5 mbar 이상이 되는 고진공도에서는 Knudsen 수가 102~107에 이르러 분자간 충돌을 거의 무시할 수 있게 되며, 이때의 유체해석 방법으로서는 통상 희박기체 해석법으로 많이 쓰이는 Direct Simulation Monte Carlo (DSMC) 방법이나 Continuum fluid에 대한 Navier-Stokes 해석보다, 충돌이 없는 분자의 자유운동을 모사하는 Monte Carlo 방법이 더 적합할 수 있다. 본 연구에서는 다단계 rotor와 stator로 구성되는 복합분자 내 유동장에 Monte Carlo 해석법을 적용하여 유동해석을 실시하였다. 해석 방법의 타당성을 확인하기 위해 동일한 형상에 대해 Navier-Stokes 해석과 DSMC 해석을 병행하였다. 각각의 수치적 해석에서 공통적으로, TMP의 성능에 지배적인 영향을 미치는 설계변수는 rotor-stator의 날개각임이 확인되었고, 이 설계변수들의 최적값을 다양한 3차원 유동해석을 통해 도출하였다. 해석결과는 펌프설계에 적용되어 펌프 성능시험결과를 통해 확증된다.

• Proceedings of the Korean Vacuum Society Conference
• /
• 2013.08a
• /
• pp.105.2-105.2
• /
• 2013

배기속도 2500 L/s, 최고진공도 10-10 mbar의 구현을 목표로 하는 대용량 복합 분자펌프 설계를 위한 3차원 유동해석을 실시하였다. 진공도가 10-5 mbar 이상이 되는 고진공도에서는 Knudsen 수가 102 이상이 되어러 분자간 충돌을 거의 무시할 수 있게 되며, 이때의 유체해석 방법으로서는 통상 희박기체 해석법으로 많이 쓰이는 Direct simulation Monte Carlo 방법보다, 충돌이 없는 분자의 자유운동을 모사하는 Monte Carlo 방법이 더 적합할 수 있다. 본 연구에서는 다단계 rotor와 stator로 구성되는 복합분자 내 유동장에 Monte Carlo 해석법을 적용하여 유동해석을 실시하였다. 다양한 변수의 조합에 대한 수치적 해석에서, 복합분자펌프의 성능에 영향을 미치는 중요한 설계변수는 rotor-stator의 날개각, 유동방향 회전축의 두께 변화 등, 진행방향 분자의 모멘텀에 직접적인 영향을 미치는 변수들임이 확인되었다.

• Proceedings of the Korean Vacuum Society Conference
• /
• 2010.08a
• /
• pp.22-22
• /
• 2010

배기속도 2500 L/s, 최고진공도 $10^{-10}$ mbar를 구현할 대용량 복합 분자펌프 설계를 위한 3차원 유동해석을 실시하였다. 진공도가 $10^{-5}$ mbar 이상이 되는 고진공도에서는 Knudsen 수가 $10^2{\sim}10^7$에 이르러 분자간 충돌을 거의 무시할 수 있게 되며, 이때의 유체해석 방법으로서는 통상 희박기체 해석법으로 많이 쓰이는 Direct simulation Monte Carlo 방법보다, 충돌이 없는 분자의 자유운동을 모사하는 Monte Carlo 방법이 더 적합하게 된다. 본 연구에서는 다단계 rotor와 stator로 구성되는 복합분자 내 유동장에 Monte Carlo 해석법을 적용하여 유동해석을 실시하였다. 먼저 2차원 해석을 실시하여 분자펌프의 성능에 중요한 영향을 미치는 설계변수들을 도출하고, 이 설계변수들의 최적값을 다양한 3차원 유동해석을 통해 도출하였다. 해석결과는 펌프설계에 적용되어 펌프 성능시험결과를 통해 확증된다.

• Journal of the Korean Society for Aeronautical & Space Sciences
• /
• v.31 no.2
• /
• pp.1-9
• /
• 2003

In the present study, a 3-D Parallel DSMC method in developed on unstructured meshes for the efficient simulation of rarefied gas flows. Particle tracing between cells in achieved based on a linear shape function extended to three dimensions. For high parallel efficiency, successive domain decomposition is applied to achieve load balancing between processors by accounting for the number of particles. A particle weighting technique is also adopted to handle flows containing gases of significantly dirrerent number densities in the same flow domain. Application is made for flow past a 3-D delta wing and the result is compared with that from experiment and other calculation. Flow around a rocket payload at 100km altitude is also solved and the effect of plume back flow from the nozzle in studied.

• Transactions of the Korean Society of Mechanical Engineers B
• /
• v.21 no.4
• /
• pp.509-517
• /
• 1997

Results of flat plate compressible boundary layer calculation, based on discrete formulation of DSMC method, are presented in low Mach number and low Knudsen number range. The free stream is a uniform flow of pure nitrogen at various Mach numbers in low pressures (i.e. rarefied gas). Complete thermal accommodation and diffuse molecular reflections are used as the wall boundary condition, replacing unreal no-slip condition used in continuum calculations. In the discrete formulation of DSMC method, there is no need to use ad hoc assumptions on transport properties like viscosity and thermal conductivity, instead viscosity is calculated from values of other field variables (velocity and shear stress). Also the results are compared with existing self-similar continuum solutions. In all Mach number cases computed, velocity slip is most pronounced in regions near the leading edge where continuum formulation renders the solution singular. As the boundary layer develops further downstream, velocity slips asymptote to values that are between 10 to 20% of the magnitude of free stream velocity. When the free stream number density is reduced, so the gas more rarefied, the velocity slip increases as expected.

• Journal of the Korean Society for Aeronautical & Space Sciences
• /
• v.32 no.8
• /
• pp.12-19
• /
• 2004

Low-speed gas flows around a micro-scale flat plate are investigated using a kinetic theory analysis. The Boltzmann equation simplified by a collision model is solved by means of a finite difference approximation with the Discrete Ordinate method. Calculations are made for flows around a 5% flat plate with a finite length of 20 microns. The results are compared with those from the Information Preservation method and a continuum approach with slip boundary conditions. It is shown that three different approaches predict a similar basic flow patterns, while the results from the present method are more accurate than those from the other two methods in details.

• Transactions of the Korean Society of Mechanical Engineers B
• /
• v.26 no.10
• /
• pp.1406-1418
• /
• 2002

The direct simulation Monte Carlo(DSMC) method is employed to calculate the etch rate on Al wafer. The etchant is assumed to be Cl$_2$. The etching process of an Al wafer in a helicon plasma etcher is examined by simulating molecular collisions of reactant and product. The flow field inside a plasma etch reactor is also simulated by the DSMC method fur a chlorine feed gas flow. The surface reaction on the Al wafer is simply modelled by one-step reaction: 3C1$_2$+2Allongrightarrow1 2AIC1$_3$. The gas flow inside the reactor is compared for six different nozzle locations. It is found that the flow field inside the reactor is affected by the nozzle locations. The Cl$_2$ number density on the wafer decreases as the nozzle location moves toward the side of the reactor. Also, the present numerical results show that the nozzle location 1, which is at the top of the reactor chamber, produces a higher etch rate.

• Proceedings of the KSME Conference
• /
• 2000.04b
• /
• pp.625-630
• /
• 2000

Numerical and experimental investigations are peformed for the rarefied gas flows in pumping channels of a helical-type drag pump. Modern turbomolecular pumps include a drag stage in the discharge side, operating roughly in $10^{-2}{\sim}10Torr$. The flow occurring in the pumping channel develops from the molecular transition to slip flow traveling downstream. Two different numerical methods are used in this analysis: the first one is a continuum approach in solving the Navier-Stokes equations with slip boundary conditions, and the second one is a stochastic particle approach through the use of the direct simulation Monte Carlo(DSMC) method. The flow in a pumping channel is three-dimensional(3D), and the main difficulty in modeling a 3D case comes from the rotating frame of reference. Thus, trajectories of particles are no longer straight lines. In the Present DSMC method, trajectories of particles are calculated by integrating a system of differential equations including the Coriolis and centrifugal forces. Our study is the first instance to analyze the rarefied gas flows in rotating frame in the presence of noninertial effects.