• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2008.06a
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• pp.112-112
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• 2008

최근 Ruthenium (Ru) 은 높은 화학적 안정성, 누설전류에 대한 높은 저항성, 저유전체와의 높은 안정성 등과 같은 특성으로 인해 금속층-유전막-금속층 캐패시터의 하부전극으로 각광받고 있다. 또한 Cu와의 우수한 Adhesion 특성으로 인해 Cu 배선에서의 Cu 확산 방지막으로도 주목받고 있다. 그러나 이렇게 형성된 Ru 하부전극의 각 캐패시터간의 분리와 평탄화를 위해서는 CMP 공정이 도입이 필요하다. 이러한 CMP 공정에 공급되는 Slurry 에는 부식액, pH 적정제, 연마입자 등이 첨가되는데 이때 연마입자가 응집하여 Slurry의 분산 안전성 저하에 영향을 줄수 있다. 이로 인해 응집된 Slurry는 Scratch와 Delamination 과 같은 표면 결함을 유발할 수 있으며, Slurry의 저장 안정성을 저하시켜 Slurry의 물리적 화학적 특성을 변화시킬 수 있다. 그리하여 본 연구에서는 Ru CMP Slurry에서의 Surfactant와 같은 분산 안정제에 따른 Surface tension, Zeta potential, Particle size, Sedimentation의 분석을 통해 Slurry 안정성에 대한 영향을 살펴보았다. 그 결과 pH9 조건의 31ppm Dispersant 농도에서 50%이상의 Sedimentation 상승효과를 얻을 수 있었다. 또한 선택된 Surfactant가 첨가된 Ru CMP Slurry를 제조하여 Ru wafer의 Static etch rate, Passivation film thickness 와 Wettability를 비교해 보았다. 그리고 CMP 공정을 실시하여 Ru의 Removal rate와 TEOS에대한 Selectivity를 측정해 보았다.

• Journal of the Korea Academia-Industrial cooperation Society
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• v.14 no.1
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• pp.493-498
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• 2013

The production of synthetic polymer compounds and ethanolamine (ETA, a pH control agent used in nuclear power plants) generates effluent that pollutes water. This study focused on the development of chemicals for the treatment of effluent and processes to reduce the COD level due to the presence of organic materials via physicochemical treatment. It was found that a mixed coagulant of $FeCl_2$ and $MgCl_2$ (1:1) was the most effective in treating effluent and reducing the COD level. When the mixed coagulant was injected into effluent including organic materials, the COD level was reduced by more than 80%.

• Journal of Korean Society of Environmental Engineers
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• v.22 no.12
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• pp.2227-2238
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• 2000

The interfacial features of suspension system made of $CaCO_3$ particles have been investigated for the purpose of designing its effective treatment process. For the examination of variation of electrokinetic potential as a function of pH. the value of potential was observed to shift in the negative direction, which was thought to be due to the adsorption of hydroxide ion on the particle surface. Adsorption of surfactant on suspended particles resulted in the change of surface charge and shift in electrokinetic potential, which was dependent upon the sign of head charge and concentration of surfactant. Addition of inorganic salts affected stability of suspension greatly and sedimentation rate of suspension was influenced by the electric valence and amount of ions produced by dissolution of inorganic coagulants. DLVO theory made it possible to construct a energy profile diagram and a close correlation was found between experimental result and theoretically derived consequences. Non-specific adsorption of indifferent electrolyte resulted in the compression of electrical double layer and specific adsorption induced the shift of IEP and PZC in the opposite direction.

• KSCE Journal of Civil and Environmental Engineering Research
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• v.29 no.5C
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• pp.217-228
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• 2009

In case of application of electrophoresis method for leakage restoration of waste impoundment, main points of consideration were to evaluate the mobility of clay particles by electrophoretic force and capacity of leakage repair in leachate electrolyte system contained with various chemical species. However, the flocculation phenomena of clay particles induced by electrochemical interaction between various chemical species and clay particles would cause the big problems in electrophoresis method. Therefore, a series of laboratory tests such as one-dimensional electrophoresis and gravitational experiments were carried out in order to identify the specific chemical species affected flocculation of clay particles and the range of chemical concentration in leachate. In addition, the characteristics of clay particle behavior with chemical species and concentration range in leachate were analized using the concept of the settling velocity, zeta potential, and electrophoretic velocity.

• Journal of Korean Society of Environmental Engineers
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• v.22 no.11
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• pp.2025-2036
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• 2000

A physicochemical process called ultra rapid coagulation(URC) was applied as a pilot scale to recover eutrophicated lake water at Inkyung Lake located on-campus in Inha university. The URC was uniquely designed to completely remove the presence of phosphorus up to 95%, which in turn leading to lessen the level of eutrophication of lake. For a pilot test of period, the lake was restored showing Carlson's Trophic State Index(TSI) of mesotrophic state which accounts for the reduction of total phosphorus and chlorophyll-a down to approximately 55 from 70 and 73, respectively. A residual presence of aluminum and additional coagulants in the effluent was tested for their potential effects on Photobacterium phosphoreum. The effect concentration ($EC_{50}$-15 min) observed in the effluent revealed that the bioactivity of Photobacterium phosphoreum was not influenced by the residual presence of coagulants. After the pilot test of period, the lake was consequently restored as a mesotrophic state in obtaining the second grade of lake water quality. The URC may be further applied for restoration of greater scale of lake in eutrophication.

• Journal of Wetlands Research
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• v.15 no.1
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• pp.1-8
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• 2013

A pilot scale coagulation system, which has a function of physicochemical treatment, was developed to treat Combined sewer overflows(CSOs). This coagulation system requires evaluation of optimum design factors whether it has reflected those of lab scale system, moreover, the pilot scale system can be evaluated differently according to the characteristics of influent CSOs even though it has reflected lab scale's design factors. We conducted an experiment using lab scale system that could treat $1m^3$ of CSOs in a day, and also pilot-scale system with $100m^3/day$ CSOs flowed into the Cheongju sewage treatment plant. Therefore the aim of this study is to evaluate a hydraulic similarity between the design factors of pilot scale and those of lab scale coagulation system, and to evaluate feasibility of the coagulation system for the CSOs treatment with optimum operation conditions. From the result of pilot-test, we drew the optimum operation factors of in line mixer and flocculator having similarities with those of lab scale system as well as the optimum coagulant dose. Finally we confirmed that the coagulation system has feasibility to treat the CSOs with high removal efficiency.

• Proceedings of the Membrane Society of Korea Conference
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• 2004.05b
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• pp.115-118
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• 2004

축산폐수에 대한 방류수 수질기준 항목에 COD의 추가 및 질소와 인의 기준이 강화(1999년)됨에 따라 많은 축산폐수처리시설의 보강과 새로운 기술도입이 요구되고 있다. 따라서 대부분의 공공처리시설에서는 질소 및 인을 제거하기 위하여 2차 처리단계에서 무산소조(탈질조)와 호기성(포기조)를 연계한 생물학적 질소제거를 실시하고, 최종처리단계에서 응집제 투입에 의한 응집ㆍ침전공정후 모래여과 또는 활성탄 흡착공정에 의한 인과 색도제거 하는 등, 생물학적 처리 및 물리ㆍ 화학적 처리시설이 추가적으로 보완ㆍ적용단계에 있다.(중략)

• Proceedings of the Korean Society of Coastal and Ocean Engineers Conference
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• 2003.08a
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• pp.222-226
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• 2003

대부분의 경우에 하구의 미세-점착성 퇴적물은 보통 무기성 광물과 유기물 및 생화학물의 혼합체이며, 광물 입자들은 주로 점토와 실트로 구성되어 있다. 이러한 혼합체의 침식특성은 사질성 퇴적물과는 달리 입자간의 응집현상에 의한 의해 크게 영향을 받으며, 응집강도는 광물질 구성, 입경분포, 유기물 함량 등으로 묘사되는 퇴적물 자체의 물리ㆍ화학적 기본특성에 따라 크게 변화하고 (Mea, 1986), 특히 저면 퇴적물의 침식 여부는 흐름 전단응력에 의한 저면퇴적물의 저항력 즉, 저면전단강도의 상대적 크기의 차이에 좌우되므로, 그 침식 특성은 저면전단강도 흑은 저면밀도로 묘사되는 저면특성에 따라 크게 변화한다(황규남 등, 2003). 또한 각 해역마다 저면 퇴적물은 퇴적물 공급원, 수동학적 조건, 생태학적 조건 등이 모두 다른 상태에서 형성된 퇴적층이므로, 저면 퇴적물의 기본특성 및 저면특성은 "site- specific" 한 성격을 갖는다. (중략)

• Polymer(Korea)
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• v.31 no.6
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• pp.461-468
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• 2007

In order to understand the structure of the existing aggregate in the nanocomposite, which has been prepared with polyester and trisilanolisobutyl polyhedral oligomeric silsesquioxane(TBPOSS), laser light scattering(LLS) and SEM-EDS were applied to its 1,1,1,3,3,3-hexafluoro-2-propanol solution and original sample, respectively. Although aggregate particles appeared as spherical shape of the average diameter of 120 nm in SEM image, they were not microgels but almost linear copolymer chains ($M_w=2.3{\times}10^6\;g/mol$) alternating 320 molecules of TBPOSS with polyester subchains. It has been microphase-separated from the matrix polyester due to the difference of chemical composition. As the matrix, polyester chain of $M_w=4.0{\times}10^4\;g/mol$ had averagely 2.5 molecules of TBPOSS per chain. It is also found that about 93% of total TBPOSS molecules existed in matrix phase and the residual 7% in spherically aggregated phase.

• Applied Chemistry for Engineering
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• v.7 no.1
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• pp.118-128
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• 1996

N-methyl, N-butyl and N,N-dibutyl chitosan derivatives were prepared by Schiff's base formation and hydrogenation in aqueous media. Furthermore quaternization of the chitosan derivatives was performed in N-methyl-2-pyrrolidone using methyl iodide to obtain water soluble cationic polyelectrolytes. It was confirmed that O-alkylation was occured as well as selective N-alkylation in these reactions. Chitosan and chitosan derivatives with quaternary ammonium iodide showed high flocculation power as the cationic flocculant. When tested on paper mill waste water, they showed high flocculation power, independing of pH range. The flocculation power was increased as the N-alkyl chain length was increased. Among them, N-butyl dimethyl chitosan ammonium iodide showed better flocculation power than chitosan. But, N,N-dibutyl-N-methyl chitosan ammonium iodide showed less flocculation powre than chitosan itself.