• Proceedings of the Korean Vacuum Society Conference
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• 2013.02a
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• pp.493-493
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• 2013

에싱(Ashing)공정을 위한 원격 유도 결합 플라즈마(remote ICP)에서 플라즈마 균일도를 향상하는 연구를 진행하였다. 본 연구에서는 고균일도 플라즈마 발생을 위해 단면적이 다른 2개의 반응 용기를 각각 상부와 하부에 설치하여 각각의 반응 용기 외곽에 방전 코일이 위치하도록 구성하였다. 0.7~1 Torr 공정 압력 범위의 질소와 산소 혼합 기체에서 2,500 W 전력을 인가하였고, 임피던스 정합회로로부터 각각 병렬로 연결된 방전 코일에 전력이 분배되어 인가된다. 에싱 공정을 위한 플라즈마 균일도를 분석하기 위해 Wafer의 위치에서 부유 탐침법을 적용하여 중심부에서 외곽부로 지름축 위치를 변화시키며 플라즈마 밀도와 전자온도를 측정하고, 공정 조건에 따른 에싱율(Asing Rate)을 측정하였다. 동일한공정 조건에서 하나의 방전 코일을 이용한 경우의 플라즈마 균일도 대비 이중 코일 구조를 이용한 경우 플라즈마 균일도가 크게 향상됨을 보였다. 이는 상부의 유도코일이 wafer 위치에서 주로 지름방향 중심부의 플라즈마 밀도에 기여하고, 하부의 유도코일은 주로 외곽의 플라즈마 밀도에 기여해서 나타나는 현상이다. 공정용 장비에서 플라즈마 균일도의 개선으로 공정 수율을 증가 시키는 효과를 기대할 수 있다.

• Journal of the Korean Chemical Society
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• v.29 no.3
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• pp.220-225
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• 1985

An attempt was made to determine some trace metals in highly concentrated samples using micro sampling technique in flame atomic absorption spectrophotometry. Major instrumental parameters and optimun analytical conditions investigated were the measuring time of instrument (the speed of electronics), sample volume, burner height, aspiration rate, and fuel to oxidant ratio. Advantages of the present technique are not only rapid, simple, and sensitive with good precision but also capability of analyzing small volume of sample and ability to handle highly concentrated samples without serious burner clog-up problem compared to conventional flame atomic absorption.

• The Transactions of the Korean Institute of Electrical Engineers P
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• v.53 no.2
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• pp.65-69
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• 2004

This paper calculates and gives the analysis of electron swarm transport coefficients as described electric conductive characteristics of pure Ar, pure $SiH_4$, Ar-$SiH_4$ mixture gases($SiH_4$-0.5%, 2.5%, 5%) over the range of E/N = 0.01~300[Td], P = 0.1, 1, 5.0 [Torr] by Monte Carlo the backward prolongation method of the Boltzmann equation using computer simulation without using expensive equipment. The results have been obtained by using the electron collision cross sections by TOF, PT, SST sampling, compared with the experimental data determined by the other author. It also proved the reliability of the electron collision cross sections and shows the practical values of computer simulation. Electron swann parameters in argon were drastically changed by adding a small amount of mono-silane. The electron drift velocity in these mixtures showed unusual behaviour against E/N. It had negative slope in the medium range of E/N, yet the slope was not smooth but contained a small hump. The longitudinal diffusion coefficient also showed a corresponding feature in its dependence on E/N. A two-tenn approximation of the Boltzmann equation analysis and Monte Carlo simulation have been used to study electron transport coefficients.

• Proceedings of the Korean Society of Propulsion Engineers Conference
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• 2012.05a
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• pp.31-34
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• 2012

Numerical simulations of the steady and unsteady state were conducted for a coaxial swirl injector with Kerosene fuel. Non-premixed equilibrium model based on chemical equilibrium assumption was used as turbulence-chemistry interaction model. As an equations of state, SRK(Soave-Redlich-Kwong) EOS was applied to deal with the behavior of real fluid in a high pressure condition. Through the steady and unsteady computations, mean values of steady and time-averaged unsteady state were compared on the temperature and OH mass fraction and it was shown that the flame structure of steady state was different to that of time-averaged unsteady state.

• Journal of Korean Society of Environmental Engineers
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• v.29 no.9
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• pp.1027-1034
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• 2007

This research was focused on the selective separation of $CO_2$ or $CH_4$ from mixture of these gases, by controlling the size of pore or pore gate. Pitch based activated carbon fibers(ACF) were used as adsorbents. The size of pore gate was controlled by the molecule having similar size to that of pore opening. After the adsorption of adsorbate on pore surface, planar molecules such as benzene and naphthalene covered the pore gate. The slow release of adsorbate from the pores covered by planar molecules makes apertures between planar molecules covering pore gate and this structure can be fixed by rapid pyrolysis. The control of pore gate using benzene as covering molecules could not accomplished due to the simultaneous volatilization of benzene and adsorbate$(CO_2)$ caused by similar temperatures of benzene volatilization and adsorbate desorption. Therefore we replaced benzene with naphthalene looking for the stability at a $CO_2$ desorption temperature. The naphthalene molecule was adsorbed on the ACF up to 15% of ACF weight and showed no desorption until $100^{\circ}C$, indicating that the molecule could be used as a good cover molecule. Naphthalene could cover almost all the pore gate, reducing BET surface area from 753 $m^2/g$ to 0.7 $m^2/g$. A mixed gas$(CO_2:CH_4=50:50)$ was adsorbed on the naphthalene treated OG-7A ACF. The amount of $CO_2$ adsorption increased with total pressure, whileas thai of $CH_4$ was not so much influenced on the pressure, indicating that $CO_2$ made more compounds on the ACF surface along with total pressure increase. The most $CO_2$ and the least $CH_4$ were adsorbed in the condition of 0.4 atm, resulting in the highly pure $CH_4$ left in ACF.

• The KIPS Transactions:PartD
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• v.13D no.7 s.110
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• pp.985-996
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• 2006

As the internet technologies develop, the geographic information system environment is changing to the web-based service. Since geospatial information of the existing Web-GIS services were developed independently, there is no interoperability to support diverse map formats. In spite of the same geospatial information object it can be used for various proposes that is duplicated in GIS separately. It needs intelligent strategies for optimal replica selection, which is identification of replication geospatial information objects. And for management of replication objects, OMG, GLOBE and GRID computing suggested related frameworks. But these researches are not thorough going enough in case of geospatial information object. This paper presents a model of location service, which is supported for optimal selection among replication and management of replication objects. It is consist of tree main services. The first is binding service which can save names and properties of object defined by users according to service offers and enable clients to search them on the service of offers. The second is location service which can manage location information with contact records. And obtains performance information by the Load Sharing Facility on system independently with contact address. The third is intelligent selection service which can obtain basic/performance information from the binding service/location service and provide both faster access and better performance characteristics by rules as intelligent model based on rough sets. For the validity of location service model, this research presents the processes of location service execution with Graphic User Interface.

• Economic and Environmental Geology
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• v.41 no.1
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• pp.15-32
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• 2008

The hydrochemical and isotopic (stable isotopes and noble gas isotopes) analyses for hot spring waters, cold groundwaters and surface water samples from the Seokmodo hot spring area of the Ganghwa province were carried out to characterize the hydrogeochemical characteristics of thermal waters and to interpret the source of thermal water and noble gases and the geochemical evolution of hot spring waters in the Seokmodo geothermal system. The hot spring waters and groundwaters show a weakly acidic condition with the pH values ranging from 6.42 to 6.77 and 6.01 to 7.71 respectively. The outflow temperature of the Seokmodo hot spring waters ranges from $43.3^{\circ}C\;to\;68.6^{\circ}C$. Relatively high values of the electrical conductivities which fall between 60,200 and $84,300{\mu}S/cm$ indicate that the hot spring waters were mixed with seawater in the subsurface geothermal system. The chemical compositions of the Seokmodo hot spring waters are characterized by Na-Ca-Cl water type. On the other hand, cold groundwaters and surface waters can be grouped into three types such as the Na(Ca)-$HCO_3$, Na(Ca)-$SO_4$ and Ca-$HCO_3$ types. The ${\delta}^{18}O\;and\;{\delta}D$ values of hot spring waters vary from -4.41 to -4.47%o and -32.0 to -33.5%o, respectively. Cold groundwaters range from -7.07 to -8.55%o in ${\delta}^{18}O$ and from -50.24 to -59.6%o in ${\delta}D$. The oxygen and hydrogen isotopic data indicate that the hot spring waters were originated from the local meteoric water source. The enrichments of heavy isotopes ($^{18}O\;and\;^2H$) in the Seokmodo hot spring waters imply that the thermal water was derived from the diffusion Bone between fresh and salt waters. The ${\delta}^{34}S$ values ranging from 23.1 to 23.5%o of dissolved sulfate are very close to the value of sea water sulfate of ${\delta}^{34}$S=20.2%o in this area, indicating the origin of sulfate in hot springs from sea water. The $^3H/^4He$ ratio of hot spring waters varies from $1.243{\times}10^{-6}\;to\;1.299{\times}10^{-6}cm^3STP/g$, which suggests that He gas in hot spring waters was partly originated from a mantle source. Argon isotopic ratio $(^{40}Ar/^{36}Ar=298{\times}10^{-6}cm^3STP/g)$ in hot spring waters corresponds to the atmospheric value.

• Korean Journal of Crystallography
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• v.6 no.1
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• pp.1-13
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• 1995

Cr:A12O3 and Ti:A12O3 single crystals were grown by Czochralski method, and the effects of crystal growth parameters such as pulling rate, rotation rate, dopant and growth atmosphere on crystal quality were investigated. And spectroscopic properties including lasing efficiency were also measured. Single crystals, sized of 20mm in diameter and 100-135mm in length, were successfully grown from the seed of <001> direction. With the doping level of 0.5w/o Cr2O3, pulling rate 2.0mm/hr, rotation rate of 30rpm and inert atmosphere by nitrogen gas, high quality crystals of Cr:A12O3 were grown. While in case of Ti:A12O3 crystals, high quality crystals were grown under the conditions of the doping level of 0.25w/o TiO2, pulling rate of 1.5mm/hr, rotation rate of 30rpm and reducing atmosphere by hydrogen - nitrogen mixed gas. It was confirmed that Cr3+ ion which maintains its ionoc valence during growth easily de-bubbled than Ti4+ ion which changes its valence, Fe3+ ion also has do-bubbling effect to Ti:A12O3 crystal and the reducing atmosphere by 90% N2 - 10% H2 mixed gas gave effective result on the changing of Ti4+ to Ti3+ and de-bubbling. As a result of spectroscopic measurements of Cr:A12O3 crystal, 4A2 →4F2 and 4F1 absorption transitions and E →4A2(R1) and 2A →4A2(R2) fluorenscence transitions were confirmed. And it was measured that wavelengths of laser R1 and R2 transitions were 696±5nm and 692±5nm respectively, line width of these transitions were 12A, and life-time of fluorenscence was 152μsec. In case of Ti:A12O3 crystals, it was confirmed that absortion transition of 4T2→4E and fluorescence transition of 4E→4T2 with wide range of 650-1050nm was occured. And 147μsec of life-time of fluorescence, 125.4 of figure of merit and 9% of laser efficience were also measured.

• Clean Technology
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• v.21 no.3
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• pp.184-190
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• 2015

Most of LNT catalysts use noble metals such as Pt for low temperature NO_x oxidation but there is an economic weakness. For the purpose of overcoming this, this study is to develop DeNO_x catalyst for LNT excluding PGM (platinum group metal) such as Pt, Pd, Rh, etc. To do so, Al/Co/Ni catalyst selected as a preliminary test is used to study fundamental property and NO_x’s conversion according to calcined temperature. Ultimately, that is, Al/Co/Ni mixed metal oxide which does not use PGM is selected and physicochemical characterization is performed by way of XRD, EDS, SEM, BET and ramp test and NO_x conversion is also analyzed. This study shows that all samples consist of mixed oxides of spinel structure of Co₂AlO₄ and NiAl₂O₄ and have enough pore volume and size for redox. But as a result of NH₃-TPD test, it is desired that calcined temperature needs to be maintained at 700 ℃ or lower. Also only samples which are processed under 500 ℃ satisfied NO and NO_x conversion simultaneously through ramp test. Based on this study’s results, optimum calcined temperature for Al/Co/Ni=1.0/2.5/0.3 mixed metal oxide catalyst is 500 ℃.

• Journal of the Korean Chemical Society
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• v.21 no.4
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• pp.293-303
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• 1977

Cellulosic organic solid wastes such as bark and sawdust, and filter papers as a pure cellulose were pyrolyzed at $300^{\circ}C$ under nitrogen current and mixed current of nitrogen and air. Amounts of condensates collected in air, water, and dry ice-acetone cooling traps, noncondensable gases, and carbonized residues were surveyed. The components of volatile liquids condensed in dry ice-acetone trap were separated by means of gas chromatograph and identified by retention times and syringe reactions. Pyrolysis under nitrogen current produced 13.4∼29.6${\%}$ of tar, 0.01∼0.12${\%}$ of aqueous liquids, 0.24∼1.43${\%}$ of volatile liquids, 9.84∼42.41${\%}$ of noncondensable gases, and 44.0∼65.81${\%}$ of carbonized residues. Pyrolysis under mixed current decreased tar and condensable liquids, but increased noncondensable gases.Volatile liquids collected under nitrogen current separated into the same 19 components by Porapak Q column regardless of the materials and only difference among materials was relative amounts of components. Volatile liquids collected under mixed current separated into six components and mainly lower molecular weight compounds such as methanol and formaldehyde were produced. According to the retention times and syringe reactions, methanol, formaldehyde, acetone, acetaldehyde, acetic acid, and three other compounds presumably containing hydroxyl group in the molecular structure were identified out of 19 compounds.