• Transactions of the Korean Society of Mechanical Engineers
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• v.13 no.5
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• pp.862-874
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• 1989

A phase evil method and spectrum analysis were instrument error which is originated from measurement system and the form error of standard specimens. An instrument with a rotating table supported by an air bearing is calibrated using standard specimens. The phase of standard specimens was measured 12 times on the rotating table with rotating 30 in turn and its measurement magnification was set by 100000 times. As a result of data analysis of all the observations, read out at each of 144 orientations(per 2.5) from recorded datafiles, the error of the performance of the instrument and those of the standard specimens are evaluated and a systematic deviation of the instrument is determined. In the particular instrument used in the present experiment, the deviation of the instrument is determined with the accuracy of 15nm and those of standard specimens with the accuracy of 23, 13 n, respectively. The reproducibility of the instrument is investigated, too. If the instrument is calibrated by using the above standard specimens, then the accuracy of the measurement of roundness error can be improved to about 15nm.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.36 no.2
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• pp.195-201
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• 2012

According to many customers' requests, optical measurement module (OMM) applications using automatic measuring devices to measure the machined part rapidly on a machine tool have increased steeply. Touch trigger probes are being used for job setup and feature inspection as automatic measuring devices, and this makes quality checking and machining compensation possible. Therefore, in this study, the use of touch trigger probes for accurate measurement of the machined part has been studied and a macro program for a hole measuring cycle has been developed. This hole is the most common feature to be measured, but conventional methods are still not free from measuring error. In addition, the eccentricity change of the least square circle was simulated according to the roundness error in a hole measurement. To evaluate the reliability of this study, the developed hole-measuring program was executed to measure the hole plate on the machine and verify the roundness error in the eccentricity simulation result.