• Proceedings of the KIEE Conference
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• 2007.10a
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• pp.271-272
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• 2007

In heterodyne laser interferometer, we use a phase difference between two beams to calculate target's length. However, there exist an nonlinearity error when measuring length in nanoscale. It is caused from frequency-mixed problem of two polarized beams, called cross talks. This fact limits the usefulness of an laser interferometer. To compensate the error, we propose a WLS(weighted least square) algorithm, which will reduce nonlinearity error and make a better optimization in heterodyne laser interferometer.

• Transactions of the Korean Society of Mechanical Engineers
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• v.17 no.12
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• pp.3115-3123
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• 1993

This paper presents a real-time correction method of the movemont errors of a translatory precision machine axis. This method is a null-balances technique in which two plane mirrors are used to generate an interferometric fringe pattern utilizing the optical principles of TwymanGreen interferometry. One mirror is fixed on a reference frame, while the other is placed on the machine axis being supported by three piezoelectric actuators. From the fringe pattern, one translatory and two rotational error components of the machine axis are simultaneously detected by using CCD camera vision and image processing techniques. These errors are then independently suppressed by activating the peizoelectric actuators by real-time feedback control while the machine axis is moving. Experimental results demonstrate that a machine axis can be controlled with movement errors less than 10 nm in vertical straightness, 0.1 arcsec in pitch, and 0.06 arcsec in roll for 50mm travel by adopting the real-time correction method.

• Korean Journal of Optics and Photonics
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• v.8 no.2
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• pp.161-164
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• 1997

A new hybrid, heterodyne, fiber-optic electric field sensor scheme is presented. In this scheme, a dual polarization, dual frequency, stabilized He-Ne laser is used for the light source of the interferometer, Probe beam is delivered to the sensor head using polarization maintaining fiber. In the sensor head, $LiTaO_3$ electro-optic crystal is used for sensing element. Phase retardation is induced on the dual frquency, dual polarization probe beam due to applied electric field across the crystal. Induced phase retardation is demodulated by in-phase and quadrature demodulation technique. In this way, we can obtain optimum sensitivity for electric field measurement regardless a quasi-static phase difference between two polarization components.