• Proceedings of the Korean Society of Precision Engineering Conference
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• 2004.05a
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• pp.139-139
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• 2004

나노테크놀로지의 발전과 함께, 간섭계를 이용한 정밀 계측의 중요성이 더욱 더 높아지고 있다. 본 방법은, 간섭성을 가진 레이저의 파장을 계측의 척도로서 기준 평면으로 사용되는 참조면에 대한 상대 측정에 의해, 3차원 형상을 계측하는 것이다. 고로, 본 논문에서는 간섭계를 이용한 계측에서 고정밀도를 실현하기 위해서는 참조면의 교정이 중요하다는 기본적인 생각을 기초로, 참조면 오차(참조면의 이상적 평면으로부터의 차이)를 주로, 광학 부품에 의한 파면의 왜곡 등을 포함한 간섭계 시스템의 계통 오차를 결정하는 방법을 검토한다.(중략)

• Journal of the Korean Society for Precision Engineering
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• v.22 no.5 s.170
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• pp.63-71
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• 2005

When an almost flat surface under test is measured by an interferometer, the measurement result is largely influenced by systematic errors that include geometrical errors of a reference flat surface. To determine the systematic errors of the interferometer by the conventional method that is called the three flat method, we must take the reference flat surface out from the interferometer and measure it. Because of difficulties to set the reference flat surface to the interferometer exactly and quickly, this method is not practical. On the other hand, the method that measures a surface under test with some shifts in the direction being perpendicular to the optical axis of the interferometer is studied. However, the parasitic pitching, rolling and up-down movement caused by the above shifts brings serious error to the measurement result, and the algorithm by which the influences can be eliminated is not still established. In this paper, we propose the self-calibration algorithm for determining the systematic errors that include geometrical errors of a reference flat surface by several rotation shifts and a linear shift of general surface under test, and verify by a numerical experiment that this algorithm is useful for determining the systematic errors.