• Proceedings of the Materials Research Society of Korea Conference
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• 2009.11a
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• pp.29.1-29.1
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• 2009

반도체 공정에서의 금속 배선 공정은 매우 중요한 공정 중 하나이다. 기존에 사용되던 알루미늄이 한계에 다다르면서, 대체 재료로 사용되고있는 구리는 낮은 비저항, 높은 열전도도, 우수한 electromigration(EM)저항특성 등을 바탕으로 차세대 nano-scale집적회로의 interconnect application에 적합한 금속재료로서 각광받고 있다. Electroplating을 위한 구리 seed layer CVD 공정은 타 공정에 비해 step coverage가 우수한 막을 증착할 수 있어 고집적 소자의 구현이 가능하다. 본 연구에 이용된 2가 전구체 Cu(dmamb)2는 높은 증기압과 높은 활성화 에너지를 가짐으로서 열적안정성 및 보관안정성이 우수하며, 플루오르를 함유하지 않아 친환경적이다. 구리 증착 전 기판에 plasma 처리를 하면 표면 morphology가 변함에 따라 표면 에너지가 변화하고, 이는 구리의 2차원 성장에 유리하게 작용할 것으로 여겨진다. Plasma의 조건변화에 따른 기판의 morphology 변화 및 성막된 구리의 특성 변화를 분석하였다.

• Journal of the Korean Ceramic Society
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• v.26 no.5
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• pp.601-608
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• 1989

Electrical properties of ZrF4-based heavy metla fluoride glasses were measured by the ac complex impedance method. The effects of alkali and chloride ions addition into fluoro zirconate glasses on the electrical conductivity were examined. The electrical conductivities of fluoride glasses show Arrhenian behavior in the temperature range of the experiment and were decreased by the addition of sodium fluoride up to 15mol%. Mixed alkali substitution resulted in conductivity minimum at intermediate composition which is commonly observed as mixed alkali effect' in alkali oxide glasses. Chloride ion substituted for fluoride ion was found to lower the conductivity.

• Proceedings of the Materials Research Society of Korea Conference
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• 2003.03a
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• pp.210-210
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• 2003

휘스커상의 뮬라이트의 생성온도와 속도는 출발물질로 사용되는 알루미나와 실리카의 화학적 순도, 입자크기 그리고 결정형태에 의존하며, 알루미나와 실리카의 조성비에 따라 생성되는 뮬라이트의 형태가 변한다. 각 원료에 대한 반응성을 관찰하기 위하여 출발원료인 Al(OH)$_3$, 비정질 SiO$_2$, AlF$_3$를 혼합 각각 단일조성과 2상 및 3상의 원료를 혼합 분쇄하여 분무건조한 조립분말을 5$0^{\circ}C$ 구간으로 나누어 상온에서 130$0^{\circ}C$까지 튜브 로에서 열처리하였다. Al(OH)$_3$와 AlF$_3$를 단독으로 열처리하였을 경우에는 안정한 상태로 열처리가 진행되었으나, 혼합하였을 경우에는 40$0^{\circ}C$ 이상의 온도에서 서서히 반응하였다. 각 온도구간에서 열처리한 시편은 미세구조 관찰과 상분석을 통하여 플루오르 토파즈와 휘스커상의 뮬라이트의 생성을 관찰하였으며, 생성된 휘스커 뮬라이트는 조립의 형상을 원형대로 보존하였으며, 조립의 강도를 측정하기 위하여, 초음파 분산기와, 초음파 Homgeniger를 이용하여 처리한 결과 대부분 원래의 형상을 유지하였다.

• Textile Coloration and Finishing
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• v.25 no.1
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• pp.30-36
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• 2013

Swelling and subsequent deformation of membranes by water wetting are regarded as a prime drawback of hydrophilic polyurethane breathable film. Fluoroalkylated surface was prepared by reacting the film with hexamethylene diisocyanate(HDI) and 2-perfluorohexyl ethanol. IR spectra and XPS results showed that the fluoroalkyl group was successfully introduced to the film surface with hexamethylene linkage. Water contact angle was increased from $68.7^{\circ}$ up to $144.2^{\circ}$ with the degree of fluoroalkylation. Decrease in water-vapor permeability was minimized even for the film of highest fluoroalkylation.

• YAKHAK HOEJI
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• v.44 no.6
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• pp.505-510
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• 2000

The synthesis of pentahydroindanoisoquinoline (4) compound has been achieved via the cyclization of 2-(N-benzylamino)-5,6-difluoro-1-indanol (10a, 10b), which was prepared by condensation and reduction of 2-amino-1-indanol and benzaldehyde in ethanol. The stereochemistry of $H_{6a}$ and $H_{11b}$ of 9,10-difluoro-5,6,6a,7,11b-pentahydroindano[2,1-c]isoquinoline (4) was the trans B/C ring fusion.

• Transactions of the Korean hydrogen and new energy society
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• v.18 no.4
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• pp.446-451
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• 2007

Physicochemical properties of carbon nanofibers were evaluated as a supercacitor electrode materials could store electrochemical energy reversibly. A capacitance of carbon nanofiber electrode was increased gradually, depending on the PVDF binder ratio. A feasibility of EDLC electrode was estimated with specific surface area measurement by BET method and mesopore structure of carbon nanofiber surface could be explained electrochemical absorption-desorption in aqueous electrolyte. PVDF 5 wt.% ratio in electrode was observed a suitable binder amount by CV result.

• Journal of the Korean Chemical Society
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• v.16 no.4
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• pp.219-228
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• 1972

Geochemical investigation of river waters and reservoirs in Seoul city on fluorine contents were conducted between June in 1969 and February in 1970. Fluorine contents of most river waters and reservoirs in Seoul city were between 0.09 and 0.32 mg/l. It was found that fluorine contents of Han River and rivers running through the outskirt of the city were relatively less than those of the river waters running through the residential areas and the industrial areas. Fluorine contents were less seasonally variable than chlorine ones. Some implications of those results were discussed in detail.

• Journal of the Korean Ceramic Society
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• v.22 no.3
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• pp.29-34
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• 1985

The IR spectra of he heavy metal fluoride glasses showed peaks at $1, 400cm^{-1}$ or $1, 100cm^{-1}$ due to metal oxyfluoride impurities. The intensity of this band and hence the oxide impurity content of the glass could be reduced considerably by the use of reactive atmosphere melting under $CCl_4$ In comparison with the fundamental IR absorption band of heavy metal oxides the oxide impurity bands observed in the heavy metal fluoride glasses are multiphonon bands due to a 2-phonon absorption process. The envelope of the a vs. v curve beyond thue fundamental region shows the exponential fall off of a with increasing v-typical of intrinsic multiphonon absorption. In the multiphonon region the amount of structure is intermediate between that observed for covalent solids and that for ionic solids.

• Textile Coloration and Finishing
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• v.11 no.1
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• pp.25-33
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• 1999

PET fabric was grafted with $CF_4$ or $C_2F_6$ plasmas generated by glow discharge. The water repellency of plasma-treated fabrics were evaluated with contact angle meter. The change in surface morphologies was observed by SEM, and the change of surface chemical characteristics were analyzed by FT-IR, ESCA and microchemical analysis technique. The results obtained are as follows : 1) The contact angle of plasma-treated fabric was over $150^\circ{C}$. 2) It was observed by SEM that the surface of treated substrate was over coated with thin film formed by the fluorocarbon plasma treatment. 3) According to ESCA analysis, there were prevailing -CHF-, $-CF_2$- and a little $-CF_3$ components on fluorocarbon plasma treated substrate. -CHF- and $-CF_2$- components were reduced by washing, and $-CF_2$- component was recovered by heat treatment. 4) In consideration of quantitative analysis of fluorine and F/C ratio by ESCA, we found that fluorination reached to the inner of substrate.

• Proceedings of the Korean Vacuum Society Conference
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• 2011.02a
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• pp.191-191
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• 2011

반도체 공정은 매우 복잡한 가스를 사용하기 때문에 여러가지 물질이 생성될 수 있다. 특히 플루오르계열 가스는 응축되어 부식성 물질로 변하여 펌프에 영향을 줄 수 있다. 이렇게 좋지 않은 조건을 만들지 않기 위해서 모든 가스들은 원래 상태로 이동하여 나오는 것이 가장 이상적이다. 그러나 챔버에서 반응하지않은 가스는 펌프로 오게 되면 온도와 압력이 달라져서 응축과 화학반응에 의해서 다른 부가물을 만들고, 이것들은 이러한 반도체 공정을 가능하게 하는 진공펌프에 영향을 주어서 고장을 일으킨다. 이러한 펌프에서 부가물을 채취하였다. 그리고 각 공정에서 생성되는 부가물을 분석하기 위하여 FT-IR, XRD, SEM(EDS), XRF분석법을 사용하였다. 이러한 분석법으로 부가물을 규명하고, 생성 원인을 규명하여 펌프의 성능 향상과 개선을 해보고자 한다.