• Proceedings of the Korean Fiber Society Conference
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• 1996.10a
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• pp.322-324
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• 1996

• Proceedings of the Korean Vacuum Society Conference
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• 2009.08a
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• pp.246-246
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• 2009

• Journal of the Korean Chemical Society
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• v.27 no.1
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• pp.73-75
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• 1983

• Journal of the Korean Chemical Society
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• v.40 no.12
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• pp.756-759
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• 1996

• Journal of the Institute of Electronics and Information Engineers
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• v.52 no.5
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• pp.206-213
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• 2015

An omni-directional, graded-index and textured ZnO nanorods with $MgF_2$ anti-reflective(AR) coating films for the electro optical tracking system(EOTS) by e-beam evaporation method are presented. we achieved that the graded index structure can minimize image tracking interference of EOTS which is comparable to a general AR coating films. Optimized ZnO nanorods with $MgF_2$ AR coating films lead to decreasing Fresnel reflection by gradient refractive index. According to our experiment results, ZnO nanorods with $MgF_2$ AR coating films can be used for various electro optical system to improve the optical performance.

• Proceedings of the Materials Research Society of Korea Conference
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• 2009.11a
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• pp.29.2-29.2
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• 2009

구리는 낮은 비저항, 높은 열전도도, 우수한 electromigration(EM)저항특성 등을 바탕으로 차세대 nano-scale집적회로의 interconnect application에 적합한 금속재료로서 각광받고 있다. copper interconnect는 damascene process 를주로 이용하는데 CVD를 이용하면 step coverage가우수한 seed layer얻을 수 있어 고집적 소자의 구현이 가능하다. 최근에 비 균등화 반응(disproportionationreaction)을 이용하여 고 순도 구리박막을 제조하기위해 $\beta$-diketonate Cu(I) Lewis-base의 전구체를 많이 이용하는데 그중에서 hexafluoroacetylacetonate(hfac)Cu(I)vinyltrimethylsilane (VTMS)가 널리 이용되고 있다. 그러나 (hfac)Cu(I)(VTMS) 또는 유사계열의 전구체들은 열적안정성및 보관안정성이 부족하여 실제 양산공정에 적합하지 못한 단점이 있었다. 본 연구에 이용된 2가 전구체Cu(dmamb)2는 높은 증기압($70^{\circ}C$, 0.9torr)을 가지며 종래에 주로 이용하던 1가 전구체 (hfac)Cu(VTMS)에 비해 높은 활성화 에너지(~113 kJ/mol)를가짐으로서 열적안정성 및 보관안정성이 우수하다. 다른 한편으로 2가전구체는 안정성이 우수한 만큼 낮은 증기압을 극복하기 위해 리간드에 플루오르를 주로 치환하여 증기압을 높이는데 플루오르는 성장하는 박막의 접착력을약하게 하는 단점을 가진다. 하지만 본 연구에 사용된 Cu(dmamb)2는 리간드에 플루오르를 포함하지 않으며, 따라서 고품질의 박막을 용이한성장환경에서 제조할 수 있는 장점들을 제공한다. 비활성가스 분위기에서 2가전구체는 열에너지에 의해 리간드의 자가환원에따라 금속-리간드 분해가 발생한다. 하지만 수소분위기에서는수소가 환원제로 작용하여 리간드의 분해를 용이하게 하는 특징을 가지며 따라서 비활성분위기일 때 비해 낮은 성장온도를 가진다. 또한 수소는 잔류하는 리간드 및 불순물과 결합하여 휘발성화학종들을 생성하여 고순도의 구리박막제조를 가능하게한다.

• Applied Chemistry for Engineering
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• v.7 no.1
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• pp.51-58
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• 1996

The rearrangement of [(ethoxycarbonyl)phenylaminomethyl]phenylcarbamic acid ethyl esters(N-benzyl compounds) to methylenediphenyldiurethanes(MDU) in sulfuric acid, sulfuric acid-absolute ethanol solvent system, and sulfuric acid-nitrobenzene solvent system, and boron trifluoride at $90^{\circ}C$ was studied. The production of MDU was the highest in sulfuric acid-nitrobenzene system giving 64% MDU yield, of which 58% was 4,4'-MDU. The simultaneous condensation of EPC and formaldehyde and rearrangement to MDU were studied in the presence of different amounts of sulfuric acid, trifluoroacetic acid, and boron trifluoride at $70^{\circ}C$. Though 17mmol of sulfuric acid with 30mmol of EPC produced the highest MDU, the MDU yield was much lower than that from separate condensation and rearrangement reaction.

• Journal of the Korean Chemical Society
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• v.23 no.3
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• pp.132-135
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• 1979

The thermal decomposition of a dilute mixture of 1,1,2,2,-$C_2H_2F_4$ in argon has been investigated in a single-pulse shock tube between 1146 and $1232^{\circ}K$ at total reflected shock pressures of about 3000 torr. Under these conditions the reaction proceeds exclusively by the molecular elimination of hydrogen fluoride. It has been found that the asymmetric isomer with the fully fluorinated ${\alpha}$-carbon requires the higher activation energy which may be attributed to the difference in atomic charge densities between isomers. The rate constant ratio is given by $log(k_1/k_2) = -0.069 {\pm} 0.021 ＋(1388{\pm}113) / 2.303RT$ in good agreement with previous independent studies.

• Journal of the Korea Academia-Industrial cooperation Society
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• v.6 no.1
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• pp.58-63
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• 2005

PTFE (polytetrafluoroethylene) thin films were prepared from the pellets of the graphite doped PTFE via pulsed laser ablation with 1064 nm Nd:YAG laser. The graphite powder converts the absorbed photon energy into thermal energy which is transmitted to nearby PTFE. The PTFE is decomposed by thermal process. The deposited films were transparent and crystalline. SEM (scanning electron microscopy) and AFM (atomic force microscopy) analyses indicated that the film surface morphology changed to fibrous structure with increasing thickness. The fluorine to carbon ratios of the film were 1.7 and molecular axis was parallel with (100) Si-wafer substrate. These results obtained by XPS (X-ray photoelectron spectroscopy), FTIR (fourier transform infrared spectroscopy) and XRD (X-ray diffraction).

• Applied Chemistry for Engineering
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• v.10 no.2
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• pp.190-195
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• 1999

The thermal pyrolysis of chlorodifluoromethane (R22) for producting tetrafluoroethylene (TFE) has been studied using the tubular reactor designed by the authors. The reaction temperature over $600{\sim}850^{\circ}C$, residence time over 0.005~0.6 sec, and steam/R22 ratio 3 to 30 were varied through experiments to analyze the effect of these variables on the conversion of R22 and selectivity for TFE. We have provided the guidelines for the optimal operation and design for the pyrolysis reactor. With increasing the dilution ratio, not only the conversion of R22 but also the selectivity for TFE increase. The optimum range of reaction temperature was $700{\sim}750^{\circ}C$ and the residence time 0.07~0.1 sec. In the kinetic study, first order rate equation was fitted well with the experimental data. This indicates that the main reaction step is a $CF_2$ generation from R22 pyrolysis. The range of activation energy for the rate constant was obtained 44.7~48 kcal/mol.