• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2012년도 추계학술대회 논문집
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• pp.535-536
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• 2012

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2010년도 춘계학술대회 논문집
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• pp.541-542
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• 2010

• 한국정밀공학회지
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• 제33권7호
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• pp.579-586
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• 2016

This paper describes kinematic analysis of a 6-degrees-of-freedom (DOF) ultra-precision positioning stage based on a flexure hinge. The stage is designed for processes which require ultra-precision and high load capacities, e.g. wafer-level precision bonding/assembly. During the initial design process, inverse and forward kinematic analyses were performed to actuate the precision positioning stage and to calculate workspace. A two-step procedure was used for inverse kinematic analysis. The first step involved calculating the amount of actuation of the horizontal actuation units. The second step involved calculating the amount of actuation of the vertical actuation unit, given the the results of the first step, by including a lever hinge mechanism adopted for motion amplification. Forward kinematic analysis was performed by defining six distance relationships between hinge positions for in-plane and out-of-plane motion. Finally, the result of a circular path actuation test with respect to the x-y, y-z, and x-z planes is presented.

• 한국정밀공학회지
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• 제23권1호
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• pp.129-135
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• 2006

In this study, a two-axis ultra-precision stage driven by piezoelectric elements is presented. The stage has a flexure-type parallel linear guide mechanism consisting of quad-symmetric simple parallel linear springs and quad-symmetric double compound linear springs. While the simple parallel linear springs guide the linear motion of a moving plate in the stage, the double compound linear springs follow the motion of the simple parallel linear spring as well as compensate the parasitic motions caused by the simple parallel linear springs. The linear springs are designed by rectangular beam type flexures that are deformed by bending deflection rather than axial extension, because the axial extension is smaller than the bending deflection at the same force. The designed guide mechanism is analyzed by finite element method(FEM). Then two-axis parallel linear stage is implemented by the linear guide mechanism combined with piezoelectric elements and capacitance type displacement sensors. It is shown that the manufactured ultra-precision stage achieves 3 nm of resolution in x- and y-axis within 30 ${\mu}m$ of operating range.

• 한국정밀공학회지
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• 제24권12호
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• pp.88-94
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• 2007

A flexure hinge-based compliant stage driven by stack-type piezoelectric elements has high precision motion but small operational range due to the characteristics of the piezoelectric element. Since the common flexure hinges can be broken by excessive deflection when the displacement is amplified by a high amplification ratio, a flexure hinge mechanism for large deflection is required. A cartwheel-type flexure hinge has an advantage of larger deflection compared with the common flexure hinges. This study presents a rotation stage with cartwheel-type flexure hinges driven by a stack-type piezoelectric element. The characteristics and the performance of the rotation stage are described by the terms of principal resonance frequency, amplification ratio of rotational displacement, maximum rotational displacement and block moment, in which the terms are analyzed by geometric parameters of the rotation stage. The analyzed results will be used as the guideline of the design of the rotation stage.

• 한국군사과학기술학회지
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• 제19권4호
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• pp.476-482
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• 2016

In this study, a method using single Wheatstone bridge flexure has been presented to measure hinge moment acting on control surfaces of wind tunnel models. The structural simplicity of the flexure reduces difficulty regarding gauging and wire-routing, and also makes it feasible to install flexures even inside thin wings. Some flexures were designed and fabricated under typical aerodynamic loads in wind tunnel test, and the strains on the flexure according to applied loads were compared with the result of the analysis by finite element method. The relation between applied loads and output signals showed good linearity, and the standard deviation on the residual errors from linear equation obtained by least square method was within 1.0 % of the maximum design moments. In addition, the FEM analysis on the thickness of load-connecting part of the flexure showed that the sensitivity was improved as the thickness became thin as much as desired to avoid buckling.

• 한국군사과학기술학회지
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• 제25권6호
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• pp.561-571
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• 2022

An optical mirror assembly is an opto-mechanically coupled system as the optical and mechanical behaviors interact. In the assembly, a flexure mount attached to an optical mirror should be flexible in the radial direction, but rigid for the remaining degrees of freedom for supporting the mirror rigidly and suppressing the wavefront error of the optical mirror. This work presents an optimal design of the flexure mount using topology optimization with thermal stress constraint. By simplifying the optical mirror assembly into finite shell elements, topology optimization model was built for efficient design and good machinability. The stress at the boundary between the optical mirror and the mount together with the first natural frequency were applied as constraints for the optimization problem, while the objective function was set to minimize the strain energy. As a result, we obtained the optimal design of the flexure mount yielding the improved wavefront error, proper rigidity, and machinability.

• 한국광학회:학술대회논문집
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• 한국광학회 2003년도 하계학술발표회
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• pp.272-273
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• 2003

링레이저 자이로스코프(Ring Laser Gyroscope-이하 RLG)는 비행기, 유도무기, 선박, 지상무기 등의 관성항법장치(Inertial Navigation System)에 사용되는 각속도 센서로서 항체의 위치와 자세 정보를 제공하는 핵심 구성품 중의 하나이다. 각속도 검출 원리는 삼각형 또는 사각형의 공진기에 He과 Ne을 혼합한 이득매질을 사용하여 서로 반대방향으로 회전하는 두 개의 레이저 빔을 발생시켜서 Sagnac 효과에 의해 외부의 회전 입력을 받을 때 서로 다른 광 경로의 차이로 인한 두 빔의 간섭으로 회전각을 검출한다. (중략)

• 한국광학회지
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• 제21권5호
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• pp.214-223
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• 2010

30 cm 급 항공용 반사 망원경계에서 외부 환경 및 내부 진동에 의해 발생하는 주 반사경의 광학적인 성능 저하를 최소화하기 위하여 주 반사경의 광기계 설계를 수행 하였다. 플렉셔를 포함한 주 반사경의 해석을 위한 경계조건으로는 광학면의 수직과 수평 방향의 중력에 의한 변형과 온도 변화 ${\pm}1^{\circ}C$에 의한 열 변형을 고려하였다. 반사경의 기계적인 변형은 NX 5 I-DEAS를 사용하여 해석 하였다. 최적화된 경량화 반사경과 플렉셔의 중력에 의한 광학면의 형상 변형은 RMS surface error 16 nm 이하로 초기 설계 목표값을 만족하였다. 온도 변화 ${\pm}1^{\circ}C$에 의한 광학면의 형상 변형과 assembly load에 의한 광학면의 형상 변형은 매우 작은 값으로 주 반사경의 변형에 영향을 주지 않음을 확인하였다.

• 대한기계학회논문집A
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• 제32권8호
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• pp.693-700
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• 2008

The primary mirror system in a satellite camera is an opto-mechanically coupled system for a reason that optical and mechanical behaviors are intricately interactive. In order to enhance the opto-mechanical performance of the primary mirror system, opto-mechanical behaviors should be thoroughly investigated by using various analysis procedures such as elastic, thermo-elastic, optical and eigenvalue analysis. In this paper, optimal design of the bipod flexure mounts for high opto-mechanical performance is performed. Optomechanical performances considered in this paper are RMS wavefront error under the gravity and thermal loading conditions and 1st natural frequency of the mirror system. The procedures of the flexure mounts design based on design of experiments and statistics is as follows. The experiments for opto-mechanical analysis are constructed based on the tables of orthogonal arrays and analysis of each experiment is carried out. In order to deal with the multiple opto-mechanical properties, MADM (Multiple-attribute decision making) is employed. From the analysis results, the critical design variables of the flexure mounts which have dominant influences on opto-mechanical performance are determined through analysis of variance and F-test. The regression model in terms of the critical design variables is constructed based on the response surfaceanalysis. Then the critical design variables are optimized from the regression model by using SQP algorithm. Opto-mechanical performance of the optimal bipod flexure mounts is verified through analysis.