• Title/Summary/Keyword: 플라즈마 진단

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A Semiconductor Etching Process Monitoring System Development using OES Sensor (OES 센서를 이용한 반도체 식각 공정 모니터링 시스템 개발)

  • Kim, Sang-Chul
    • Journal of the Korea Society of Computer and Information
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    • v.18 no.3
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    • pp.107-118
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    • 2013
  • In this paper, we developed the semiconductor monitoring system for the etching process. Around the world, expert companies are competing fiercely since the semiconductor industry is a leading value-added industry that produces the essential components of electronic products. As a result, many researches have been conducted in order to improve the quality, productivity, and characteristics of semiconductor products. Process monitoring techniques has an important role to give an equivalent quality and productivity to produce semiconductor. In fact, since the etching process to form a semiconductor circuit causes great damage to the semiconductors, it is very necessary to develop a system for monitoring the process. The proposed monitoring system is mainly focused on the dry etching process using plasma and it provides the detailed observation, analysis and feedback to managers. It has the functionality of setting scenarios to match the process control automatically. In addition, it maximizes the efficiency of process automation. The result can be immediately reflected to the system since it performs real-time monitoring. UI (User Interface) provides managers with diagnosis of the current state in the process. The monitoring system has diverse functionalities to control the process according to the scenario written in advance, to stop the process efficiently and finally to increase production efficiency.

Mycoplasma pneumoniae-induced Stevens-Johnson syndrome without skin manifestations (마이코플라즈마 감염에 의한 피부 병변을 동반하지 않은 Stevens-Johnson 증후군 1예)

  • Choi, Sun-Hee;Lee, Yu-Min;Rha, Yeong-Ho
    • Clinical and Experimental Pediatrics
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    • v.52 no.2
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    • pp.247-250
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    • 2009
  • Stevens-Johnson syndrome (SJS) presents with widespread blisters, erythematous or purpuric macules, and one or more mucous membrane erosions. Various etiologic factors, including infection, vaccination, drug administration, systemic diseases, physical agents, and food have been implicated as causes of SJS. Mycoplasma pneumoniae is the most common infectious agent to cause SJS in children. In recent literature, M. pneumoniae-induced SJS with mucositis that lacks the typical target lesions has been described. We report a case of a 6-year-old boy with swelling, peeling of the lips, and red eyes with photosensitivity. On physical examination, he showed severe oral mucositis and conjunctivitis with no evidence of skin lesions. Mycoplasma antibody, which was positive with titers of more than 1:2,560. For patients presenting with fever and mucositis of unknown origin, M. pneumoniae should be considered.

Development and Experiments of the Low Power Hall Thruster for STSAT-3 (과학기술위성 3호 탑재를 위한 저전력 홀 추력기 개발 및 시험)

  • Lee, Jong-Sub;Seo, Mi-Hui;Seon, Jong-Ho;Choe, Won-Ho
    • Proceedings of the Korean Society of Propulsion Engineers Conference
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    • 2009.11a
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    • pp.298-302
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    • 2009
  • Low power Hall thruster is under development as one of the core technologies for STSAT-3. The Hall thruster has several advantages such as its simple structure, high thrust density and specific impulse etc. Development target values deduced by analyzing requirements are consumed electrical power, thrust, thrust efficiency, and specific impulse of < 300 W, > 10 mN, ~ 35%, and > 1000 s, respectively. In order to achieve the target specifications, two prototype Hall thrusters were developed and compared. To date, thrust and efficiency are 11 mN and 37% under the total power of 290 W with 0.97 mg/s Xe propellent supply.

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Presumptive Diagnosis of Mycoplasma pneumoniae Pneumonia in Children (소아에서 마이코플라즈마 폐렴의 예기적 진단)

  • Lee, Chang Eon;Park, Su Jin;Kim, Won Duck
    • Journal of Yeungnam Medical Science
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    • v.29 no.2
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    • pp.89-95
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    • 2012
  • Background: As Mycoplasma pneumoniae pneumonia has increased in Korea, its relevance to infants, toddlers, and adolescents has magnified as well as. However, it is difficult to perform the serological test and PCR test routinely for diagnosis in actual clinical practice. Thus, the authors conducted this study to help clinicians do presumptive diagnosis of Mycoplasma pneumoniae pneumonia using clinical, radiological, and hematological findings. Methods: The study population consisted of 224 children between 1 month and 14 years old, hospitalized for radiographically confirmed pneumonia. Patients were divided into two groups of 100 children with Mycoplasma pneumoniae pneumonia, as diagnosed using the ELISA method. Groups with negative result in Mycoplasma IgM antibody test were classified into the viral group (98 patients with respiratory virus) and the bacterial group (46 patients with the bacteria detected in the blood sputum culture or antibiotic treatment except macrolide improved the patient's condition). These groups were compared and analyzed using clinical, hematological, and radiographic differences and scoring system. Results: Clinical, hematological, and radiographic characteristics of Mycoplasma pneumoniae pneumonia have shown the intermediate level results between bacterial pneumonia and viral pneumonia. In terms of scoring system, the mean score of Mycoplasma pneumoniae pneumonia was 4.23, which was the intermediate level between bacterial pneumonia (mean score=6.67) and viral pneumonia (mean score=1.48). Conclusion: Results suggest that the combination of the scoring system information can increase the accuracy in the diagnosis even if they may have difficulties on diagnosis, because clinical manifestations, hematological, and radiographic findings are nonspecific.

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A Case of Blastomycosis after Traveling around Non-Endemic Area (비 유행지역 여행 후 발생한 분아균증 1례)

  • Seo, Chang Gyun;Seo, Young Woo;Park, Hun Pyo;Choi, Won Il;Beom, Han Seung;Kwon, Kun Young;Suh, Soo Ji;Jeon, Young June
    • Tuberculosis and Respiratory Diseases
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    • v.58 no.6
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    • pp.619-623
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    • 2005
  • Blastomycosis is a systemic pyogranulomatous disease that is caused by a thermally dimorphic fungus, Blastomyces dermatitidis. it's the disease is endemic in the south-eastern and south central states of the USA, which border the Mississippi and Ohio Rivers, the mid-western states and Canadian provinces bordering the Great Lakes as well as in a small area of New York and Canada adjacent to the St. Lawrence River. We encountered a case of blastomycosis, representing as a pulmonary manifestation after traveling around a nonendemic area and report it with a brief review of the relevant literature.

Study on Electron Temperature Diagnostic and the ITO Thin Film Characteristics of the Plasma Emission Intensity by the Oxygen Gas Flow (산소 유량별 플라즈마 방출광원 세기에 따른 전자온도 진단과 산화주석박막 특성연구)

  • Park, Hye Jin;Choi, Jin-Woo;Jo, Tae Hoon;Yun, Myoung Soo;Kwon, Gi-Chung
    • Journal of the Korean institute of surface engineering
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    • v.49 no.1
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    • pp.92-97
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    • 2016
  • The plasma has been used in various industrial fields of semiconductors, displays, transparent electrode and so on. Plasma diagnostics is critical to the uniform process and the product. We use the electron temperature of the various plasma parameters for the diagnosis of plasma. Generally, the range of the electron temperature which is used in a semiconductor process used the range of 1 eV to 10 eV. The difference of electron temperature of 0.5 eV has a influence in plasma process. The electron temperature can be measured by the electrical method and the optical method. Measurement of electron temperature for various gas flow rates was performed in DC-magnetron sputter and Inductively Coupled Plasma. The physical properties of the thin film were also determined by changing electron temperatures. The transmittance was measured using the integrating sphere, and wavelength range was measured at 300 ~ 1100 nm. We obtain the thin film of the mobility, resistivity and carrier concentration using the hall measurement system. As to the electron temperature increase, optical and electrical properties decrease. We determine it was influenced by the oxygen flow ratio and plasma.

The Study of Plasma Display Panel for Digital Radiography Detector (플라즈마 디스플레이 판넬의 디지털 방사선 검출기 적용을 위한 연구)

  • Cho, Sung-Ho;Kang, Sang-Sik;Cha, Byung-Ryul;Kim, So-Yeong;Choi, Chi-Won;Yun, Min-Seok;Kwan, Chul;Nam, Sang-Hee
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2007.06a
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    • pp.29-29
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    • 2007
  • TFT, LCD, OLED, PDP and FED를 비롯한 많은 디스플레이 장치가 개발, 연구되고 있으며, 이러한 디스플레이 장치에 대한 수 많은 application 연구 또한 진행되고 있다. TFT-LCD는 이미 방사선 검출기로서 연구가 오랜전에 연구되어 상용화가 되었으며, LCD는 XLV로서 적용을 위한 연구가 진행되고 있으며, 그 외 수 많은 디스플레이 장치에 대한 활발한 연구가 진행되고 있는 실정이다. PDP는 대면적, 낮은 제작 비용, 높은 contrast의 이점으로 디스플레이 장치로서 활발한 연구가 진행되고 있다. 본 논문에서는 PDP를 처음으로 방사선 검출기로 적용하기 위한 연구를 수행하였다. 제작된 7 인치 AC-PDP는 다양한 가스종류 및 압력을 가진 300um의 pixel pitch룰 가진 3 전극 구조로서, coplanar readout과 대항형 readout을 통해 신호량을 분석하였다. 결과 50-100Kvp의 진단 영역의 X-ray energy에서 줄은 민감도와 훌륭한 선형성을 보였으며, 가스 종류 및 압력, 신호 검출방식에 따라 각각 다른 특성을 보였다. 이는 PDP 내 X선과의 Interaction, R/O method. Material에 강하게 의존한다.

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Development of diagnostic kit(Test-MT) for the microplate latex agglutination test of toxoplasmosis in animal (Latex 응집반응을 이용한 동물의 톡소플라즈마병 진단용 kit 개발에 관한 연구)

  • Suh, Myung-deuk;Joo, Hoo-don;Maass, Daivd
    • Korean Journal of Veterinary Research
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    • v.35 no.3
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    • pp.583-593
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    • 1995
  • The present study was conducted to develop a toxoplasma latex agglutination test antigen(Test-MT) and evaluate the toxoplasma latex agglutination(LA) test using a newly-made "Test-MT kit" by comparing with the Toxo-MT kit(Eiken chemical co, Tokyo). Also, the specifity and sensitivity test were made by comparing with IFA test and IgG-ELISA. Tachyzoite suspensions of Toxoplasma gondii(RH strain) were ultracentrifuged for 30min at $60,000{\times}g(4^{\circ}C)$ and the supernatant was used as a water-lysate antigen. Polystyrene latex particles of $1.0{\mu}m$ in diameter(Polyscience co) were used for the preparation of sensitized latex-antigen supension(Test-MT). The frequency distribution of LA titers in Test-MT showed two peaks at <1:32 and 1:128. The borderline titer for positive test in Test-MT was determined to be 1:64. But the frequency distribution of LA tites in Toxo-MT showed two peaks at <1:16 and 1:64. The positive borderline was determined to be 1:32. Agreement of reactions between Test-MT and Toxo-MT kit by LA test was shown 92.5% in bovine sera and 97.0% in swine sera, respectively. From the results obtained here it was determined that the sensitized latex-antigen, Test-MT kit, for the microtiter agglutination test prepared as same as by the procedure described in the previous paper(Suh and Lee, 1993) was useful as a highly specific, sensitive and stable immunotiteration reagent for serodiagnosis of toxoplasma infection in animal sera.

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Analysis of Chloride Content in Aqueous Solution and Mortar using Laser Induced Breakdown Spectroscopy (LIBS를 활용한 수용액과 모르타르 내 염화물량 분석)

  • Ryu, Hwa-Sung;Park, Won-Jun
    • Journal of the Korea Institute of Building Construction
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    • v.21 no.3
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    • pp.189-194
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    • 2021
  • LIBS has been attracting attention as an analytical method capable of real-time measurement without sample preparation. In this study, a Lab. scale LIBS device was fabricated to examine the applicability and reproducibility of LIBS in the analysis of chloride contents in mortar. The existing analysis method and LIBS analysis were performed simultaneously on the mortar test specimen with the chloride content adjusted. Compared to the chloride content condition of the mortar, the XRF and Potentiometric Titration results also showed a similar trend. As a result of LIBS analysis, chlorine ions were detected at a wavelength of 837.59 nm according to the chloride content condition. In order to improve the precision in various concentration ranges, the LIBS signal amplification of about 50 times through the electric field enhancement was implemented. Through the verification of the aqueous solution-based reproducibility, a high correlation between the LIBS signal strength and the Cl concentration was confirmed, and the possibility of applying LIBS to the durability diagnosis of concrete damage by chloride was confirmed.

Changes in Pediatric Gastrointestinal Endoscopy: Review of a Recent Hospital Experience (일개 대학병원에서의 소아 위장관 내시경 시술의 최근 경험)

  • Park, Kyung-Heui;Park, Jae-Hong
    • Pediatric Gastroenterology, Hepatology & Nutrition
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    • v.10 no.1
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    • pp.20-27
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    • 2007
  • Purpose: This study was performed to review the recent experiences of pediatric gastrointestinal (GI) endoscopy done in one university hospital. Methods: A retrospective review of medical records was conducted of 1,040 pediatric cases who underwent GI endoscopy at the Pusan National University Hospital between January 2001 to June 2005. Results: A total of 1,040 endoscopies (upper 840 and lower 200) were performed. The male/female ratio was 1.25:1. Neonates and infants accounted for 6.0% and 16.5% respectively. Half of the children were below 5 years (mean age $8.5{\pm}2.1$ years). Upper and lower GI diagnostic endoscopies were performed in 634 and 163 children respectively. Abdominal pain (38.8%), vomiting (19.4%), foreign body (17.7%), and hematemesis (10.3%) were the main reasons for esophagogastroduodenoscopy. Hematochezia (56.0%), abdominal pain (27.5%) and diarrhea (3.0%) were the main reasons for colonoscopy. Upper GI therapeutic procedures included retrieval of foreign bodies, balloon dilatations of esophageal stricture, PEG, and variceal ligation in 148, 27, 15, and 3 children, respectively. Therapeutic lower GI endoscopies were performed in 37 children (polypectomy in 92%, argon lazer cauterization for angiodysplasia in 4%). Conclusion: GI endoscopy played an important role in the diagnosis and treatment of GI diseases in children. Procedures in younger aged children, cases evaluated by colonoscopy and therapeutic endoscopies are increasing in pediatric practice.

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