• Journal of the Korea Academia-Industrial cooperation Society
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• v.9 no.1
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• pp.16-22
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• 2008

We fabricated thermally-evaporated 10 nm-Ni/30 nm and 70 nm Poly-Si/200 nm-$SiO_2/Si$ structures to investigate the thermal stability of nickel silicides formed by rapid thermal annealing(RTA) of the temperature of $300{\sim}1100^{\circ}C$ for 40 seconds. We employed for a four-point tester, field emission scanning electron microscope(FE-SEM), transmission electron microscope(TEM), high resolution X-ray diffraction(HRIXRD), and scanning probe microscope(SPM) in order to examine the sheet resistance, in-plane microstructure, cross-sectional microstructure evolution, phase transformation, and surface roughness, respectively. The silicide on 30 nm polysilicon substrate was stable at temperature up to $900^{\circ}C$, while the one on 70 nm substrate showed the conventional $NiSi_2$ transformation temperature of $700^{\circ}C$. The HRXRD result also supported the existence of NiSi-phase up to $900^{\circ}C$ for the Ni silicide on the 30 nm polysilicon substrate. FE-SEM and TEM confirmed that 40 nm thick uniform silicide layer and island-like agglomerated silicide phase of $1{\mu}m$ pitch without residual polysilicon were formed on 30 nm polysilicon substrate at $700^{\circ}C\;and\;1000^{\circ}C$, respectively. All silicides were nonuniform and formed on top of the residual polysilicon for 70 nm polysilicon substrates. Through SPM analysis, we confirmed the surface roughness was below 17 nm, which implied the advantage on FUSI gate of CMOS process. Our results imply that we may tune the thermal stability of nickel monosilicide by reducing the height of polysilicon gate.

• Journal of radiological science and technology
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• v.39 no.4
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• pp.571-575
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• 2016

Monte Carlo simulations are widely used as the most accurate technique for dose calculation in radiation therapy. In this paper, the GATE6(Geant4 Application for Tomographic Emission ver.6) code was employed to calculate the dosimetric performance of the photon beams from a linear accelerator(LINAC). The treatment head of a Varian 21EX Clinac was modeled including the major geometric structures within the beam path such as a target, a primary collimator, a flattening filter, a ion chamber, and jaws. The 6 MV photon spectra were characterized in a standard $10{\times}10cm^2$ field at 100 cm source-to-surface distance(SSD) and subsequent dose estimations were made in a water phantom. The measurements of percentage depth dose and dose profiles were performed with 3D water phantom and the simulated data was compared to measured reference data. The simulated results agreed very well with the measured data. It has been found that the GATE6 code is an effective tool for dose optimization in radiotherapy applications.

• The Korean Journal of Quaternary Research
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• v.13 no.1
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• pp.35-43
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• 1999

Goryeri archaeological site is located in the upstream valley of the Danjang River. The basement rocks of the area are composed of the Cretaceous to Palaeogene biotite granite (KbGr), acidic dyke (Kad), Milyang Andesite (Kma) and Jyunggagsan Formation. Among them Milyang Andesite and Jyunggagsan Formation are prevailed in archaeological site and they are composed of reddish brown tuffaceous shale, sandstone and conglomerate, with intercalations of acidic tuffs and lapilli tuffs. The purpose of this research is not only to compare REE pattern of the soil-sedimentary deposits with those of surrounding rocks, but also to identify vitric tephra in the soil-sedimentary deposits derived from the andesite, acidic tuff and lapilii tuff, in order to illucidate the provenance of the vitric tephra. The rare earth element(REE) of the soils and sedimentary deposits results in the same REE pattern with those analyzed from the surrounding basement rocks. This indicates that the soils and sedimentary deposits are originated from the surrounding basement rocks, most probably from the andesite and lapilli tuff. In addition, vitric tephra were identified both in the Quaternary in-situ weathered soils and sedimentary deposits (PMU-13 and PMU-17), and in the weathered surrounding lapilli tuff. These vitric tephra are considered to be different from those of Japanese AT(Aira Tanzawa) -tephra. The latter is predominant with clean, platty, bubble-walled and Y-shaped vitrics, while the former is conspicuous with those shapes of large and diverse size and devitrified, as well as having secondarily bubbled-surfaces reflecting surface weathering. The size of vitric fragments in the Goryeri site is about 300${\mu}{\textrm}{m}$ and large in size in compasion to 150${\mu}{\textrm}{m}$ of Japanese AT-Tephra. The interim results of the research are contradictary to the explanations based on a series of AT-tephra researches carried by Japanese scholar. In short, the vitric materials of the Goryeri archaeological site are most probably originated from the weathering products of the surrounding basement rocks, and are different from the AT-tephra in their size, shape and devitrification properties. Thus it is highly recommended to have a further comprehensive research which is more emphasized the magmatic genesis of these vitric tephra in addition to the external shape and morphology.