• Title/Summary/Keyword: 표면피막

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Effect of Glycine Adsorption on Polishing of Silicon Nitride in Chemical Mechanical Planarization Process (CeO2 슬러리에서 Glycine의 흡착이 질화규소 박막의 연마특성에 미치는 영향)

  • 김태은;임건자;이종호;김주선;이해원;임대순
    • Journal of the Korean Ceramic Society
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    • v.40 no.1
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    • pp.77-80
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    • 2003
  • Adsorption of glycine on$Si_3N_4$powder surface has been investigated, which is supposed to enhance the formation of passive layer inhibiting oxidation in aqueous solution. In the basic solution, multinuclear surface complexing between Si and dissociated ligands was responsible for the saturated adsorption of glycine. In addition, $CeO_2$-based CMP slurry containing glycine was manufactured and then applied to planarize$SiO_2$and$Si_3N_4$thin film. Owing to the passivation by glycine, the removal rates, Rh, were decreased, however, the selectivities, RE(SiO$_2$)/RR($Si_3N_4$), increased and showed maximum at pH=12. The suppressed oxidation and dissolution by adsorbate were correlated with the dissociation behavior of glycine at different pH and subsequent chemical adsorption.

An Evaluation of Slip Coefficient in High Strength Bolt Joint using Zn/Al Metal Spray Corrosion Resistance Method (Zn/Al 금속용사 방식공법을 적용한 고력볼트 접합부의 미끄럼계수 평가)

  • Kim, Tae-Soo;Lee, Han-Seung;Tae, Sung-Ho;Ahn, Hyun-Jin;Oh, Sang-Hoon
    • Journal of the Korea institute for structural maintenance and inspection
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    • v.11 no.5
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    • pp.114-122
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    • 2007
  • In high strength bolted joints, the corrosion of base material causes the reduction of slip resistance of the joints. In this study, tensile tests on slip-critical joints utilizing Zn/Al metal spraying corrosion resistance method were carried out in order to prevent the corrosion and meet the required mechanical characteristics of joints. In addition, slip coefficient and surface roughness were calculated. The key parameters were surface finishing condition and thickness of coating with the identical geometry in all specimens. From the results, it is found that the slip coefficient of the joints with coated finish after sand blast treatment as well as those of non-coated joints with only sand blast treatment were similar or superior to 0.45, which is a specification criteria of slip coefficient in friction-typed joints.

Formation Behavior of Anodic Oxide Films on Al 6061 Alloy in Sulfuric Acid Solution (황산 용액에서 Al6061 합금의 아노다이징 피막 형성거동)

  • Moon, Sungmo;Jeong, Kihun;Lim, Sugun
    • Journal of the Korean institute of surface engineering
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    • v.51 no.6
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    • pp.393-399
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    • 2018
  • Formation behavior of aluminum anodic oxide (AAO) films on Al6061 alloy was studied in view of thickness, morphology and defects in the anodic films in 20 vol.% sulfuric acid solution at a constant current density of $40mA/cm^2$, using voltage-time curve, observation of anodized specimen colors and surface and cross-sectional morphologies of anodic films with anodization time. With increasing anodizing time, voltage for film formation increased exponentially after about 12 min and its increasing rate decreased after 25 min, followed by a rapid decrease of the voltage after about 28 min. Surface color of anodized specimen became darker with increasing anodizing time up to about 20 min, while it appeared to be brighter with increasing anodizing time after 20 min. The darkened and brightened surfaces with anodizing time are attributed to an increase in thickness of porous anodic oxide film and a chemical damage of the films due to heat generated by increased resistance of the film, respectively. Cross-sectional observation of AAO films revealed the formation of defects of crack shape at the metal/oxide interface after 15 min which prevents the growth of AAO films. Width and length of the crack-like defect increased with anodizing time up to 25 min of anodizing, and finally the outer part of AAO films was partly dissolved or detached after 30 min of anodizing, resulting in non-uniform surface structures of the AAO films.

Effect of AC Current Density on the PEO Film Formation of Al6061 Alloy (Al6061합금의 PEO 피막 형성에 미치는 AC 전류밀도의 영향)

  • Park, Cheolgi;Moon, Sungmo;Cheong, Inmo;Yun, Daesoo
    • Journal of the Korean institute of surface engineering
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    • v.52 no.3
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    • pp.138-144
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    • 2019
  • In this work, PEO (Plasma Electrolytic Oxidation) film formation behavior of Al6061 alloy was investigated as a function of applied current density of AC at 310 Hz in the range from $120mA/cm^2$ to $300mA/cm^2$ in 0.5 M $Na_2SiO_3$ solution. When applied current density is lower than a critical voltage of about $132mA/cm^2$, voltage reaches a steady-state values less than 120 V without generation of arcs and metallic color of the alloy surface remains. On the other hand, when applied current density exceeds about $132mA/cm^2$, voltage increases continuously with time and arcs are generated at more than 175 V, resulting in the formation of PEO films with grey colors. Two different types of arcs, large size and small number of arcs with orange color, and small size and large number of arcs with white color, were generated at the same time when the PEO film thickness exceeds about $50{\mu}m$, irrespective of applied current density. Formation efficiency of the PEO films was found to increase with increasing applied current density and the growth rate was obtained to be about $5{\mu}m/min$ at $300mA/cm^2$. It was also found that surface roughness of the PEO films with $70{\mu}m$ thickness is not dependent on the applied current density.

Human Lung Cancer Cell Xenografts Implanted under the Capsule of Kidney, Spleen and Liver (폐암 세포주를 사용한 신, 비장 및 간 피막하 분식법의 비교)

  • 김수현;김종인;이해영;조봉균;박성달;김송명
    • Journal of Chest Surgery
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    • v.36 no.10
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    • pp.711-720
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    • 2003
  • Bakground : Complete resection by the surgery has been selected as the treatment of choice in lung cancer patients, but in cases of recurrence after excision or inoperable cases, the importance of anticancer chemotherapy has been emphasized. If one can select a set of the sensitive chemotherapeutic agents before anticancer chemotherapy, it will give more favourable results. Subrenal capsular assay has been recognized as a useful in-vivo chemosensitivity test of thoracic and abdominal tumors and it can be done in a short time for a rapid interpretation of tumor responsiveness to anticancer chemotherapeutic drugs. It has been reported that various kinds of cancer cells can be implantable to the kidney, but so far there is no comparative study of xenogeneic cell implantation on liver, spleen and kidney. The author implanted the human lung cancer cells under the capsule of S.D rat's liver, spleen and kidney respectively and compared the pattern of growth and histology. Material and Method: After incubation of human lung cancer cell line (SW-900 G IV) in RPMI 1640 (Leibovitz L-15 medium) culture media, 3${\times}$3${\times}$3 mm size fibrin clots which contain 108 cancer cells were made. Thereafter the fibrin clots were implanted at subcapsule area of liver, spleen and kidney of S.D. female rat. For immune suppression, cyclosporin-A (80 mg/Kg) was injected subcutaneously daily from post-implantation first day to sixth day. The body weight was measured at pre and post implantation periods. The growth pattern and the size of tumor mass were observed and the pathologic examination and serum tumor marker tests were performed. Result: Body weight increased in both of control and experimental groups. Serum Cyfra 21-1 was not detected. Serum levels of CEA and NSE revealed no significant change. The SCC-Ag increased significantly in implanted group. The growth rate of human lung cancer cells which was implanted on spleen was higher than on liver or kidney. The surface area, thickness, and volume of tumor mass were predominant at spleen. The success rates of implantation were 80% on kidney, 76.7% on spleen and 43.3% on liver. Pathologic examination of implanted tumors showed characteristic findings according to different organs. Tumors that were implanted on kidney grew in a round shape, small and regular pattern. In the spleen, tumors grew well and microscopic neovascularization and tumor thrombi were also found, but the growth pattern was irregular representing frequent daughter mass. Human lung cancer cells that were implanted in the liver, invaded to the liver parenchyme, and had low success rate of implantation. Microscopically, coagulation necrosis and myxoid fibrous lesion were observed. Conclusion: The success rate of implantation was highest in the kidney. And the mass revealed regular growth that could be measured easily. The SCC-Ag was presented earlier than CEA or Cyfra21-1. The Cyfra21-1 was not detected at early time after implantation. The best model for tumor implantation experiment for chemosensitivity test was subrenal capsular analysis than liver and spleen and the useful serum tumor marker in early period of implantation was the SCC-Ag.

Mg-Al합금의 조성비율에 따른 발화온도특성

  • Han, U-Seop;Lee, Geun-Won
    • Proceedings of the Korea Institute of Fire Science and Engineering Conference
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    • 2013.04a
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    • pp.77-77
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    • 2013
  • 최근의 산업활동에서는 신규 원료 개발과 생산 효율성을 높이기 위하여 분체 공정이 증가하고 있는데, 미세 분진의 취급으로 분진운의 형성과 착화가 용이해지므로 분진폭발이나 화재 위험성이 증가하고 있다. 분진을 안전하게 사용하고 저장, 취급하기 위해서는 착화 전의 위험성 지표로서 최저발화온도(MIT ; Minimum Ignition Temperature)를 사전에 파악해 두는 것이 중요하다. 분진농도의 발화온도는 장치 내의 발화위험성이나 분진 취급 공정의 사고예방대책 관리를 위한 실용적 관점에서 중요하게 활용되는 폭발특성값이다. 또한 분진의 발화온도는 분진농도에 의존하며 농도변화에 따른 가장 낮은 온도를 MIT라고 한다. 본 연구에서는 화재폭발사고 빈도가 줄지 않고 있는 Mg 및 Mg-Al합금(60:40 wt%, 50:50 wt%, 40:60 wt%)을 대상으로 조성비율에 따른 최저발화온도를 실험적으로 조사하였다. Mg 및 Mg-Al(60:40 wt%), Mg-Al(50:50 wt%), Mg-Al(40:60 wt%) 시료의 평균입경은 142, 160, 151, $152{\mu}m$이다. MIT실험장치는 IEC 61241-2-1(Methods for Determining the Minimum Ignition Temperatures of Dust, 1994)에 준거하여 제작하여 사용하였다. 실험장치는 가열로, 분진운 시료홀더, 온도조절장치, 압축공기 제어장치 등으로 구성되어 있다. 구체적인 실험방법은 시험분진를 분진홀더에 장착하고 0.5 bar의 압축공기를 0.3 sec 동안 사용하여 일정 온도로 가열된 로의 내부로 분진운을 부유시킬 때에 분진운이 발화하여 가열로 하단부의 개방구에까지 화염이 전파하는지를 디지털비데오카메라로 기록, 평가하여 발화 유무를 판정하였다. Mg합금에 대한 MIT를 측정한 결과 $740^{\circ}C$가 얻어졌으며, Mg-Al(60:40 wt%)의 MIT는 $820^{\circ}C$로 조사되었다. 그러나 Mg-Al(50:50 wt%) 및 Mg-Al(40:60 wt%)에 대해서는 최대 가열로의 설정온도를 $890^{\circ}C$까지로 하여 농도를 변화시키면서 조사하였으나 발화가 일어나지 않았다. 문헌에 따르면 Mg입자 표면의 산화피막은 다공성으로 일정 온도에서 산화반응이 시간에 따라 직선적으로 증가하는데 반하여, Al의 산화피막은 보호 작용을 하여 일정 온도에서 산화반응속도가 표면과 내부의 농도 기울기에 의한 확산속도에 의존한다고 보고하고 있다. 본 연구결과를 토대로 Mg-Al합금의 발화특성을 고찰해 보면, Mg-Al합금에서 자기 전파성이 작은 Al성분의 증가는 착화지연이 증가하여 연소성이 감소하여 최저발화온도의 증가로 이어지는 것으로 추정되었다. 또한 발화온도는 주어진 조건의 온도장에서 분진이 존재하는 시간 길이에 따라 변화하므로, 발화온도를 실험적으로 측정하는 경우에는 측정장치나 방법에 따라 달라지므로 사업장의 현장에 발화온도를 적용하는 경우에는 장치 내의 분진의 존재시간을 고려할 필요가 있다.

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NDT of a Nickel Coated Inconel Specimen Using by the Complex Induced Current - Magnetic Flux Leakage Method and Linearly Integrated Hall Sensor Array (복합 유도전류-누설자속법과 고밀도 홀센서배열에 의한 니켈 코팅 인코넬 시험편의 비파괴검사)

  • Jun, Jong-Woo;Lee, Jin-Yi;Park, Duk-Keun
    • Journal of the Korean Society for Nondestructive Testing
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    • v.27 no.5
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    • pp.375-382
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    • 2007
  • Nondestructive testing (NDT) by using the electromagnetic methods are useful for detecting cracks on the surface and subsurface of the metal. However, when the material contains both ferromagnetic and paramagnetic materials, it is difficult for NDT to detect and analyze cracks using this method. In addition the existence of a partial ferromagnetic material can be incorrectly characterized as a crack in the several cases. On the other hand a large crack has sometimes been misunderstood as a partially magnetized region. Inconel 600 is an important material in atomic energy plant. A nickel film is coated when a crack a appears on an Inconel substrate. Cracks are difficult to detect on the combined material of an Inconel substrate with a nickel film, which are paramagnetic and ferromagnetic material respectively. In this paper, a scan type magnetic camera, which uses a complex induced current-magnetic flux leakage (CIC-MFL) method as a magnetic source and a linearly integrated Hall sensor array (LIHaS) on a wafer as the magnetic sensors, was examined for its ability to detect cracks on the combined material. The evaluation probability of a crack is discussed. In addition the detection probability of the minimum depth was reported.

Trend of Sn and Sn Alloy plating (주석과 주석합금도금)

  • Kim, Yu-Sang;Seol, Pil-Su
    • Proceedings of the Korean Institute of Surface Engineering Conference
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    • 2016.11a
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    • pp.175-175
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    • 2016
  • Sn도금액은 강산에서는 $Sn^{2+}$, 강알칼리에서는 $Sn^{4+}$석출이 안정하다. 중성영역은 도금액에 $Sn^{2+}$침전을 방지하기 위하여 착화제가 필요하다. 기록에 남아 있는 가장 오래된 Sn도금은 1856년 Gore가 4가의 주석산염을 사용한 알칼리성용액이다. 그 후 50~60년 사이에 2가의 염화주석($SnCl_2$)과 KOH에 Cyan 등의 착화제를 첨가한 도금액이 발표되었다. 최초의 실용적인 알칼리주석용액은 1931년 Oplinger의 4가 주석산 염으로서, $CH_3COONa$를 완충제로 사용하였고, $Sn^{2+}$을 산화시키기 위하여 과산화물이나 과 붕산염을 첨가하였다. 알칼리성 Sn용액은 Natrium용액과 Kalium용액이 있지만, Kalium염이 용해성이 좋고, Sn농도를 높여 전류밀도를 높일 수 있다. 알칼리성용액은 도금속도가 산성용액의 1/2로 되고, 음극효율도 80~90% 정도 낮아, 두꺼운 피막이나 생산성을 중시하는 부품에는 적합하지 않다. 초기의 산성용액은 Sn의 정련목적으로 사용되었고, Pb정련에 사용된 Fluor규산용액에 Gelatine을 첨가하였다. Mathers는 Cresol산을 첨가하여 미량의 Cresol포화용액을 사용하여 고속으로 두껍게 석출시킬 수 있었다. 독일의 Schloetter도 다양한 방향족 술폰산으로써 반 광택피막을 실현하였다. 산성Sn도금액은 첨가제에 어떠한 유기화합물을 사용하는가는 도금장치나 석출상태로써 결정할 수 있다. Hothersall과 Bradshaw는 Cresol술폰산을 첨가하여 도금액 안정성 향상을 발견했다. Cresol술폰산은 $Sn^{2+}$의 안정제이며, Gelatine은 분산제기능을 한다. 붕 불화용액은 Sn농도를 높일 수 있고, $2{\sim}12A/dm^2$의 고 전류밀도의 도금이 가능하다. 1937년 Schloetter가 개발하여 미국의 제철회사에서 사용되었다. Sn-Ni도금은 Ni도금보다도 뛰어난 내식성이 있기 때문에 자전거, 자동차부품에 사용되고 있다. 실용도금액은 1951년 Parkinson이 발표한 HBF/HCL용액이다. $SnCl_2$산성용액에서 표준전위는 -0.136V인데 비하여, Ni이온의 표준전위는 -0.25V이다. HF용액에서는 불화물이온이 $Sn^{2+}$의 석출전위를 (-)방향으로 이동시켜서 합금석출이 가능하다. Sn-Co도금은 Cr도금의 색조에 가깝고, 장식목적으로 사용된다. Cr도금 대체용으로 사용된다. 내마모성이나 내식성은 Cr도금보다도 떨어지기 때문에 장식목적에 한정된다. 1953년 Parkinson은 Sn-Ni도금연구에서 동일한 용액조성으로부터 Co 30%를 석출시켰다. Sn-Zn도금은 방식도금으로서 자동차부품에 많이 사용되고 있다. Sn과 Zn의 표준전위는 서로 멀리 떨어져 있기 때문에 산성용액에서는 공석될 수 없다. 1980년대에 들면서, 방식Cd(Cadmium)도금의 독성 때문에 Sn-Zn도금을 재인식 하게 되었다. 1957년 Vaid 등이 No Cyan도금액을 발표했다. 그 후 러시아의 연구자가 안정한 도금액을 연구하였고, Srivastava와 Muckergee가 1976년에 종합하였다.

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Effect of process conditions on crystal structure of Al PEO coating. II. Bipolar and electrolyte (알루미늄 PEO 코팅의 결정상에 미치는 공정 조건에 대한 연구 II. Bipolar 펄스와 전해액)

  • Kim, Bae-Yeon;Ham, Jae-Ho;Lee, Deuk Yong;Kim, Yong-Nam;Jeon, Min-Seok;Kim, Kiyoon;Choi, Ji-Won;Kim, Sung Youp;Kim, Kwang Youp
    • Journal of the Korean Crystal Growth and Crystal Technology
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    • v.24 no.2
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    • pp.65-69
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    • 2014
  • Crystallographic phases of Plasma electrolytic oxidized Al alloy, A1100, A5052, A6061, A6063, A7075, were investigated. Two types of electrolyte $Na_2Si_2O_3$ and Na2P2O7 were also compared. Bipolar pulse, $2000{\mu}sec$ with $400{\mu}sec+420V$ impulse and $300{\mu}sec$ - impulse were applied for 20 min. ${\alpha}-alumina$, ${\gamma}-alumina$, ${\eta}-alumina$, $Al_{4.95}Si_{1.05}O_{9.52}$, and $(Al_{0.9}Cr_{0.1})_2O_3$ were mainly observed. Si, component of electrolyte, were moved into the PEO layer by bipolar pulse. Glassy phase was also observed at the surface of $Na_2Si_2O_3$ electrolyte treated PEO layer, and increased with the Mg content of Al alloy. It is concluded that at first glassy phase was formed by the micro plasma, and the high temperature of plasma turns glassy phase to several crystalline phases. And we could expect that many other crystalline phase could be formed by PEO process.

A Study on the Properties of $Al_2$ $O_3$ and $Al_2$ $O_3$/( $Ti_{0.5}$ $Al_{0.5}$)N Coatings Produced by Plasma Enhanced Chemical Vapor Deposition (플라즈마 화학 증착법에 의한 $Al_2$ $O_3$ 단층피막과 $Al_2$ $O_3$/( $Ti_{0.5}$ $Al_{0.5}$)N 이중피막의 제조 및 특성에 관한 연구)

  • 손경석;이승훈;이동각;임주완;이후철;이정중
    • Journal of the Korean institute of surface engineering
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    • v.34 no.2
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    • pp.105-114
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    • 2001
  • $Al_2$$O_3$ coatings were deposited on M2 high speed steels by the plasma enhanced chemical vapor deposition (PECVD) process, using a gas mixture of AlC1$_3$, $H_2$, $CO_2$ and Ar $Al_2$$O_3$ coatings had interference color and showed amorphous phase. $A1_2$X$A1_3$/($Ti_{0.5}$ /$Al_{0.5}$ )N double layer coatings were produced in the sequence of substrate $NH_3$ plasma pretreatment, ($Ti_{0.5}$$Al_{0.5}$)N depoition process, $Al_2$$O_3$ deposition process. $Al_2$ $O_3$/( $Ti_{0.5}$A $l_{0.5}$)N double layer coatings showed NaCl structure in ( $Ti_{0.5}$A $l_{0.5}$)N layer and amorphous phase in A1$_2$ $O_3$ layer. It was shown that $Al_2$ $O_3$ columns continuously grew onto ( $Ti_{0.5}$A $l_{0.5}$)N columns. ( $Ti_{0.5}$A $l_{0.5}$)N single coating and $Al_2$ $O_3$/( $Ti_{0.5}$A $l_{0.5}$)N double layer coating were oxidized at $700^{\circ}C$, 80$0^{\circ}C$, 90$0^{\circ}C$ for 1hr, 3hr in atmosphere. At 80$0^{\circ}C$, single layer coatings were oxidized, which were examined substrate oxide particle. But $Al_2$ $O_3$/ ( $Ti_{0.5}$A $l_{0.5}$)N double layer coatings maintained the asdeposited state. Therefore, $Al_2$ $O_3$/ ( $Ti_{0.5}$A $l_{0.5}$)N double layer coatings have moreexcellent oxidation resistance than ( $Ti_{0.5}$A $l_{0.5}$)N single layer coatings.X> 0.5/)N single layer coatings.s.

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