• 한국정밀공학회지
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• 제11권5호
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• pp.180-188
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• 1994

Error assessment and evaluation for machine for machine tool slides have been considered as essential tools for improving accuracy. In this paper, a computer aided measurement technique is proposed using photo pin diodes of quadrant type and laser source. In thedeveloped system, three photo diodes are mounted on a sensor mounting table, and the sensored signal is processed by specially designed signal conditioner to give fine resolution with minimum noise. A micro computer inputs the processed signal, and the geometric errors of five degree of freedoms are successfully evaluated. Pitch, roll, yaw, vertical and horizontal straightness errors are thus assessed simultaneously for a machine tool slide. Calibration techniques such as optics calibration, photo diode calibration are proposed and implemented, giving precise calibration for the measurement system. The developed system has been applied to a practical machine tool slide, and has been found as one of efficient and precise technique for machine tool slide.