• Transactions of the Korean Society of Mechanical Engineers A
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• v.35 no.1
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• pp.53-58
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• 2011

Ultra-precision miniaturized machine tools essential for manufacturing accurate machine components in micro/meso-scale have been developed. To realize high accuracy using mMTs, geometric errors, which are considered as the main sources of inaccuracy should be identified and compensated. The conventional systems for measuring geometric errors, such as a laser interferometer, can measure only one geometric error in a single setup and they involve complicated measurement procedures. A measurement system using PSDs is a promising alternative but the measurable range of such systems is limited to the active range of the PSDs. The proposed measurement system using PSDs can overcome the limit of small measurable range. Further, the mounting errors that could occur during set-up process can be avoided. In this paper, an algorithm corresponding to the system was analyzed and experiments were carried out.