• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2000년도 추계학술대회 논문집
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• pp.31-35
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• 2000

A cantilever deflection measurement system for AFM(atomic force microscope) was constructed by the laser deflection method using LEP type PSD. Design process including sensitivity analysis was presented and the performance of the system was demonstrated by several experiments using a sample specimen with 50nm-step on the surface. The measured displacement-amplification-factor showed good agreement with the expected one with about 8% deviation. The step height measurement data were compared to what were acquired by commercial AFM, and the result showed that there were about 5nm-deviation between the two data. These results satisfies our expectation in the stage of system design.