• Korean Journal of Optics and Photonics
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• v.24 no.5
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• pp.251-255
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• 2013

In this paper, the characteristics of a humidity sensor implemented by Mach Zehnder Interferometer (MZI) in a Planar Lightwave Circuit (PLC) have been designed and demonstrated. The humidity outside is detected with polyvinylpyrrolidone (PVP) coated on the etched arm of the MZI. The length of the etched arm is 10 mm and the PVP was coated by dip-coating into the etched region. As the refractive index of the PVP changes with the surrounding humidity, the PVP-coated humidity sensor presented changes in the interferogram depending on RH (Relative Humidity) around the PLC. The measured results show that the proposed humidity sensor works successfully in the range of 30% to 80% of RH.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2005.07a
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• pp.381-383
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• 2005

바이오센서 응용을 위한 대칭 및 비대칭 마하젠더 간섭계 광도파로 소자의 설계, 제작 및 광학적 응답특성을 평가하였다. 설계 제작된 광도파로 소자의 압력광원은 각각 1550nm와 632.8nm이고, 코어와 클래딩의 굴절률차는 0.45 $\Delta$%로 설계 제작하였다. 센서부(상위 클래드)의 금 박막의 미소 굴절률 변화에 따른 TE, TM모드의 특성을 분석하였다. 센서의 보다 높은 감도 개선을 위한 나노-광자결정 구조가 주목받고 있는데, 광자결정 구조의 구현를 위한 리소그래피 공정은 높은 분해능과 신뢰성 있는 나노스케일의 공정이 요구된다. 광-바이오센서의 감도 개선을 위해 센서부 표면에 2차원 나노-광자결정 배열을 제안하고 이를 구현하기 위한 Dip-Pen Nanolithography 공정에 대해 고찰하였다.

• Journal of the Microelectronics and Packaging Society
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• v.22 no.3
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• pp.73-77
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• 2015

This paper presents integrated polymeric spectrometer module which offers compact size, easily-fabricated structure and low cost. The proposed spectrometer module includes the nano diffraction grating with non-uniform pitch and planar optical waveguide with concave mirror to be fabricated by UV imprint lithography. To increase the reflection efficiency, we designed the nano diffraction grating with triangular profiles. The polymeric planar spectrometer includes a spectral bandwidth of 700 nm, resolution of 10 nm and precision below 5 nm. This polymeric planar spectrometer is well-suited for sensor system.

• Journal of the Korean Institute of Telematics and Electronics
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• v.19 no.5
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• pp.5-11
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• 1982

The dielectric slab waveguide is fabricated on the slide glass or oxidized silicon wafer, by spin coating polyurethane, epoxy or photoresist, and the phenomenon of dielectric waveguiding is oboerved. Using the fact that the refractive index of K.P.R. is larger than that of polyurethane, thin film prism with two layered structure is fabricated, and the refraction of light is observed.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2006.06a
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• pp.465-466
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• 2006

서로 다른 굴절률을 갖는 유전재료를 주기적으로 배열함으로써 광자금지대(PBG)를 형성시킬 수 있는 2 차원(2D)광자결정배열에 선결함(line defects)을 줌으로써 기존의 평판형광도파로(PLC)와는 다른 개념의 광자결정도파로를 제작할 수 있다. 특히, 광자결정도파로는 급격한 굽힘(bending)에도 저손실의 효과를 갖도록 할 수 있기 때문에 광집적회로에 효과적으로 적용된다. 본 연구에서는 정방형 격자구조의 2차원 광자결정에 대한 광자밴드구조를 구하고 이로부터 추출된 구조매개변수를 이용하여 광자결정도파로를 설계하고 그의 특성을 평가하였다. 특히, 광자결정도파로와 PLC형도파로 특성을 비교하였다. 설계된 광자결정 도파로를 전자빔 및 홀로그래픽 리소그라피를 이용하여 제작, 평가할 것이다.

• Proceedings of the Optical Society of Korea Conference
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• 2003.07a
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• pp.214-215
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• 2003

평면광도파로 브래그격자는 광도파로 내부의 코어의 굴절률을 주기적으로 또는 비주기적으로 변화시켜 특정 파장의 빛을 반사시키거나 투과손실로 작용하게하는 광소자이다. 이러한 광소자는 광가감다중화기, 분산보상기, 파장선택형 반사거울, 파장제거필터, 증폭기의 이득평탄화, 광스위치등 여러분야의 소자 개발의 핵심적인 기능을 부여한다. UV 엑시머레이저의 출력을 게르마늄이 첨가된 실리카 유리에 조사하여 격자구조를 형성시키는 방법이 Hill 등에 의해 발표되었고 이후, 홀로그래피 방법, 위상마스크 방법등 여러 가지의 광섬유 격자 형성방법을 활용하여 여러종류의 광통신소자들이 연구되었다. (중략)

• Journal of the Institute of Electronics and Information Engineers
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• v.49 no.10
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• pp.128-134
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• 2012

The performance evaluation and fabrication of integrated-optic electric-field sensor utilizing $Ti:LiNbO_3$ asymmetric Mach-Zehnder intensity modulator with a push-pull lumped electrode and a plate-type probe antenna to measure an electric field strength is described. The modulator has a small device size of $46{\times}7{\times}1\;mm$ and operates at a wavelength $1.3{\mu}m$. The devices are simulated based on the BPM software and fabricated utilizing Ti-diffused $LiNbO_3$ channel optical waveguides. The minimum detectable electric field is 1.02 V/m and 6.91 V/m, corresponding to a dynamic range of ~35 dB and ~10 dB at the frequencies of 500 KHz and 5 MHz, respectively.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2009.06a
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• pp.223-223
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• 2009

In this paper, designed and simulated Power Splitter (PS) integrated Mach-Zehnder interferometer (MZI) based planar type optical waveguide devices (which is called here a PS-MZI). The PS-MZI optical waveguide sensor was preceded by a Y-junction, which splits the input power between the sensor, and a reference branch, to minimize the effect of optical power variations. The PS-MZI optical waveguide sensor induced changing phases of the incident beam, which had fallen upon the waveguide through computer simulation, according to the small changes in the index of refraction, thus beam intensity was changed. The waveguide were optimized at a wavelength of 1550 nm and fabricated according to the design rule of 0.45 delta%, which is the difference of refractive index between the core and clad. The fabrication of PS-MZI optical waveguide sensor was performed by a conventional planar lightwave circuit (PLC) fabrication process. The PS-MZI optical waveguide that was fabricated to be applied as a biosensor revealed a low insertion loss and a low polarization-dependent loss. After having etched the over-clad at the sensor part in the MZI optical waveguide that was fabricated, Ti deposition was made on the adhesion layer, and then Au thin-film deposition was carried out thereon. In addition, its optical properties were measured by having changed the index of refraction oil at the sensing part of the MZI. To apply the planar type PS-MZI optical waveguide as a biosensor, a detection test for Staphylococcus aureus was conducted according to changes in concentration, having adopted Ti-alkoxide as ligand. The detection result of the S. aureus by the PS-MZI optical waveguide sensor was possible to the level of $10^1$ CFU/ml.