• Title/Summary/Keyword: 평면패턴

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New lithography technology to fabricate arbitrary shapes of patterns in nanometer scale (나노미터 크기의 임의 형상을 제작하기 위한 새로운 리소그래피 기술)

  • 홍진수;김창교
    • Journal of the Korea Academia-Industrial cooperation Society
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    • v.5 no.3
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    • pp.197-203
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    • 2004
  • New lithography techniques are employed for the patterning of arbitrary shapes in nanometer scale. When, in the photolithography, the electromagnetic waves such as UV and X-ray are incident on the mask patterned in nanometer scale, the diffraction effect is unavoidable and degrades images of the mask imprinted on wafer. Only a convex lens is well-known Fourier transformer. It is possible to make the mask Fourier-transformed with the convex lens, even though the size of pattern on the mask is very large compared to the wavelength of electromagnetic wave. If the mask, modified according to new technique described in this paper, was placed at the front of the lens and was illuminated with laser beam, the nanometer-size patterns are only formed on the plane called Fourier transform plane. The new method presented here is quite simple setup and comparable with present and next generation lithographies such as UV/EUV photolithograpy and electron projection lithography when compared in attainable minimum linewidth. In this paper, we showed our theoretical research work in the field of Fourier optics, . In the near future, we are going to verify this theoretical work by experiments.

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Calculation of Diffraction Patterns for Incidence of Planewave on Both Sides of a Dielectric Wedge by Using Multipole Expansion (쇄기형 유전체의 양면에 평면파 입사시 다극전개를 이용한 회절패턴 계산)

  • Kim, Se-Yun;Ra, Jung-Woong;Shin Sang-Yung
    • Journal of the Korean Institute of Telematics and Electronics
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    • v.26 no.4
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    • pp.16-26
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    • 1989
  • Diffraction patterns of electromagnetic fields for the incidence of E-polarized plane wave on both interfaces of an arbitrary-angle dielect wedge are obtained by sum of geometric optics term and the edge diffracted fields. The diffraction coefficients of the edge diffracted fields are evaluated by employing the physical optics approximation and then correcting its error with the multipole line source at the dielectric edge. For the wedge angle $120^{circ}$, the incident angle $60^{circ}$, the relative dielectric constant of the dielectric wedge, 2, 5, and 10, and the observation distance from the tip of the wedge, 5 and 10 wavelength, the diffraction coefficients and the diffraction patterns corresponding to geometric optics, physical optics, and the solution corrected by the multipole line source are plotted, respectively. While the corrected solutions presented in this paper are valid only in the far-field region, these asymptotic solutions show to satisfy the boundary condition on the dielectric interfaces.

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Pattern Synthesis of Rotated-type Conformal Array Antenna Using Enhanced Adaptive Genetic Algorithm (향상된 적응형 유전 알고리즘을 이용한 회전체형 컨포멀 배열 안테나의 패턴 합성)

  • Seong, Cheol-Min;Kwon, Oh-Hyeok;Park, Dong-Chul
    • The Journal of Korean Institute of Electromagnetic Engineering and Science
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    • v.26 no.8
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    • pp.758-764
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    • 2015
  • This paper describes the pattern synthesis of array antenna which conforms to a metallic curved surface formed by the rotation of a quadratic function by using EAGA(Enhanced Adaptive Genetic Algorithm). Three rotated-type conformal surfaces are realized by changing the coefficient of the quadratic function and the pattern of each conformal array antenna is synthesized. In order to reduce the overall time of pattern synthesis, the transformed active element pattern obtained by the active element pattern of the 2-dimensional planar array using Euler angles rotation is utilized instead of the active element pattern of the 3-dimensional conformal array antenna itself. To verify validity of the proposed synthesis procedure, the synthesized patterns using EAGA are compared with those obtained by MWS.

Study on Pattern Synthesis of Conformal Phased Array Antenna (컨포멀 위상 배열 안테나의 패턴 합성에 대한 고찰)

  • Park, Dong-Chul;Kwon, Oh-Hyuk;Ryu, Hong-Kyun;Lee, Kyu-Song
    • The Journal of Korean Institute of Electromagnetic Engineering and Science
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    • v.26 no.12
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    • pp.1031-1043
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    • 2015
  • This paper describes the pattern synthesis method of two kinds of conformal array antenna using the Enhanced Adaptive Genetic Algorithm (EAGA). One is the $1{\times}16$ conformal array antenna on a curved cylindrical metallic surface with quadratic function, and the other is the 18-element conformal arrary antenna on a metallic surface obtained by the rotation of a quadratic function curve around the axis. The active element pattern is utilized in the pattern synthesis. Especially for the case of the rotated-type conformal array antenna the transformed active element pattern obtained from the Euler's angle rotation of the active element pattern of the planar concentric array is utilized, which reduces the synthesis time a lot. To verify the validity of the proposed synthesis method the MATLAB results are compared with the MWS results. Furthermore, for the case of $1{\times}16$ conformal array antenna the measured results are compared with the MATLAB synthesized results.

Spatial Distribution Pattern of Parking Lots in Cheongju City, Korea (청주시 주차장의 공간적 분포 패턴)

  • 손선미;한주성
    • Journal of the Korean Geographical Society
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    • v.37 no.4
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    • pp.337-356
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    • 2002
  • It was proven that the spatial distribution pattern of the parking lots in Cheongju city was clarified through the concentric expansion of the parking lots, which started out from the center for commercial and business function, into the periphery regions. First of ail, in terms of the spatial distribution pattern of the parking lot according to the operational subject, the parking lot is distributed through private, public, and parking lots attached to buildings in the center, and in its adjacent regions, public and parking lots attached to buildings are distributed. And public parking lot, private and parking lots attached to buildings are distributed in sector pattern. And in terms of facility structure, more than half of the parking lots attached to buildings in Cheongju city are composed of Parking lots of self-driver type. In the case of the center, regional structure of self-Parking type of parking lots attacked to buildings, self-parking type lots on plane street parking, mechanical parking types attached to buildings, self-parking type of plane non-street diversely appear to be combined types, its spatial facility distribution patterns appear to be concentric patterns. Also, in terms of the spatial distribution pattern of the parking lots according to the contact types, with the centralizing of a center, southwestern regions show hourly and monthly charged parking lots; northeastern regions show free parking lots. The spatial distribution pattern of the parking lots as above, reflects the regional distribution change of the establishment and residential location.

The Design of a Wideband E-plane Phased Array Antenna using W/G Simulator (도파관 시뮬레이터를 이용한 광대역 E-평면 넛치 위상 배열 안테나 설계)

  • 김준연;소준호;임중수
    • The Journal of Korean Institute of Electromagnetic Engineering and Science
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    • v.14 no.2
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    • pp.111-118
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    • 2003
  • Notch Antenna is a travelling wave type antenna and can provide multioctave operation in phased arrays that scan over wide angle. In this paper, we designed a wideband E-plane phased array antenna using E-plane waveguide simulator which has a bandwidth of 3 : 1 and a scan volume of $\pm$45$^{\circ}$ in E-plane. We compared impedance of single antenna and infinite array antenna using equivalent circuit modeling. We analyzed full structure of 1$\times$9 phased array antenna and we evaluated active reflection coefficient with variation of beam scan angle through mutual coupling coefficient acquired from simulation and investigated the variation of antenna gain with variation of active element pattern as beam scan angle is varied.

Contemporary Planning Trends of Rural Houses in So-yang Munhwa Village- Analysis of Floor Plan Shapes and Space Relations & Elements - (소양 문화마을 주택의 평면적 특성을 통해 본 농촌 주거공간의 현시대적 패턴)

  • Choi, Byung-Sook;Park, Sun-Hee
    • Proceeding of Spring/Autumn Annual Conference of KHA
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    • 2005.11a
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    • pp.103-106
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    • 2005
  • This study was to find out contemporary planning trends of rural houses in So-yang Munhwa village by analyzing their floor plan shapes and space relations & elements. There were built 71 houses in that village, but it were possible to collect housing data, floor plans & general building records of 45 houses, from house register. By analyzing those data, findings were as follows : 1) Floor plan shapes of rural houses had a tendency to various type than simple types. 2) Room-Living-Room, 3 bay arrangement were very strong trends in those plans. 2) Public spaces, L.D.K(living dining kitchen) spaces, were centered in the floor plan of them. 3) Living space had an openness from entrance and DK(dining kitchen)spaces were separated from L.D.K. 4) Anbang(master bedroom) and living space were important, so two spaces were set to the south of floor plan and Anbang with a bathroom were often showed. 5) Utility and balcony/veranda spaces as a support space of kitchen were planned in rural houses.

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An Optical Asynchronous Transfer Mode(ATM) Switching System Using Free Space Optics and an Output Buffer Memory (자유공간 광학과 출력 버퍼 메모리를 이용한 광 Asynchronous Transfer Mode(ATM) 교환방식)

  • 지윤규;이상신
    • The Journal of Korean Institute of Communications and Information Sciences
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    • v.16 no.4
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    • pp.326-334
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    • 1991
  • We propose an optical Asynchronous Transfer Mode(ATM) switching system using free-space optics and an output buffer memory. The distributor system in the switching fabric was analyzed using the Huygens-Fresnel principle and lens transformation. For monochromatic illumination, a pattern similar to the Fourier transform of the input distribution was observed across the output plane. A spatially broadened intensity distribution across the the output plane can be expected when the system is illminated with a partially coherent, quasimonochromatic beam. Spatially coherent pulses as short as 100fs can propagate through the distributor without severe spatial broadening.

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A Compact Folded Patch Antenna for Omni-Directional Radiation Patterns (전방향성 복사 패턴을 갖는 소형 평면 패치 안테나)

  • 서영훈;김태영;김명기;박익모;서용교;송기무
    • The Journal of Korean Institute of Electromagnetic Engineering and Science
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    • v.12 no.7
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    • pp.1094-1101
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    • 2001
  • The design of a compact folded patch antenna with moderately broad bandwidth is presented in this paper. The proposed antenna has radiation characteristics that are similar to the conventional monopole antenna. However, since this antenna is designed in a planar form, it has smaller size than that of a conventional monopole antenna. We have investigated the resonance frequency and bandwidth characteristics of the proposed antenna by changing the antenna design parameters. The proposed planar form of a monopole antenna in this paper has 1.17 GHz bandwidth with a matching circuit at the center frequency of 6.05 GHz.

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Implementation of the holographic diffuser for beam expending in the output plane (출력 평면에서 빔 확산을 위한 홀로그래픽 디퓨저의 구현)

  • Choi, Kyung-Sik;Yoon, Jin-Sun;Kim, Nam;Choi, Yoon-Sun;Choi, Byung-So
    • Proceedings of the Optical Society of Korea Conference
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    • 2000.08a
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    • pp.238-239
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    • 2000
  • 페이지 지향 데이터의 고밀도 홀로그래픽 데이터 저장 시스템이나 홀로그래피 현상에서 필름에 기록되는 스펙트럼을 평탄화하기 위해 확산 광원의 사용은 필수적이다. 또한, 출력 평면에서 균일한 분포를 갖는 회절 빔의 세기 분포와 회절 격자로서의 높은 회절 효율, 홀로그램 손상 시 재생 가능한 용장성 (redundancy)의 증가를 위해 간유리나 특정 패턴들로 인코딩된 유사 랜덤 디퓨저가 이용되고 있으나, 이들은 무한한 공간 대역폭을 갖기 때문에 공간적으로 유한한 데이터 마스크만이 이용되거나 기록 매질이 임의의 크기로 제한된다면, 입사 광원의 전력 낭비와 균일도 측면에서 비효율적이고, 여러 단계의 제작과정이 필요한 단점을 가지고 있다.$^{(1-3)}$ (중략)

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