• Title/Summary/Keyword: 펄스 fp이저 증착법

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Thickness Effect on the Structural and Electrical Properties of YBCO Thin Films Grown by Pulsed Laser Deposition (PLD로 증착된 YBCO 박막의 두께에 따른 배향성과 전기적 특성 변화)

  • 허창회;한경보;이상렬
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2001.07a
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    • pp.617-619
    • /
    • 2001

  • The effect of the superconducting film thickness on the substrate temperature has been investigated. Superconducting YBCO thin films have been grown on MgO substrates by pulsed laser deposition. The dependence of the orientation of YBCO film on thickness has been investigated by X-ray diffraction technique. X-ray diffraction indicated that the film orientation was changed by increasing the film thickness and by changing the substrate temperature.

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