• 제목/요약/키워드: 펄스 fp이저 증착법

검색결과 1건 처리시간 0.015초

PLD로 증착된 YBCO 박막의 두께에 따른 배향성과 전기적 특성 변화 (Thickness Effect on the Structural and Electrical Properties of YBCO Thin Films Grown by Pulsed Laser Deposition)

  • 허창회;한경보;이상렬
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2001년도 하계학술대회 논문집
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    • pp.617-619
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    • 2001
  • The effect of the superconducting film thickness on the substrate temperature has been investigated. Superconducting YBCO thin films have been grown on MgO substrates by pulsed laser deposition. The dependence of the orientation of YBCO film on thickness has been investigated by X-ray diffraction technique. X-ray diffraction indicated that the film orientation was changed by increasing the film thickness and by changing the substrate temperature.

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