• Title/Summary/Keyword: 파라미터연구

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진공공정 실시간 측정 기술 개발 동향

  • Sin, Yong-Hyeon;Hong, Seung-Su;Im, In-Tae;Seong, Dae-Jin;Im, Jong-Yeon;Kim, Jin-Tae;Kim, Jeong-Hyeong;Gang, Sang-U;Yun, Ju-Yeong;Yu, Sin-Jae
    • Proceedings of the Korean Vacuum Society Conference
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    • 2011.02a
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    • pp.28-28
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    • 2011
  • 우리나라의 주력산업인 반도체 및 디스플레이의 경우 그 생산 설비의 1/3이상이 진공 장비이며 진공 공정을 통해 만들어진다. 이들 산업 분야에서는 우리나라가 세계 최고의 생산 기술을 가지고 있으므로 자체적인 기술 개발 확보가 중요하다. 최근에는 기존에 개발되어 있는 장비의 성능을 뛰어넘어야 하는 공정 기술력이 요구되면서, 진공 공정 기술 개발이 매우 중요한 이슈가 되었다. 반도체나 디스플레이 산업 등 기존 주력산업의 전후방 산업의 경쟁력 강화 측면에서뿐 아니라 태양전지, LED 등 진공기술을 이용한 신성장 동력 산업의 생산 시스템 경쟁력 확보 측면에서도 진공 공정 기술 개발 중요성은 매우 크다. 지금까지 양산에 적용되는 증착, 식각, 확산 등 진공 공정 운영은, 사전 시험을 통해 얻은 최적 공정의 입력 파라미터들을 정해 놓고 그대로 공정을 진행한 뒤, 생산되어 나오는 제품의 상태를 사후 측정하여 공정 이상 여부를 점검하고 미세 조정하는 형태로 진행되고 있다. 실질적으로 현재 진행 중인 진공 공정에 대한 직접적인 정보가 없으므로 공정 중 발생되는 문제들에 대한 대처는 그 공정이 끝난 후에 이루어지는 상황이다. 공정 미세화 및 대구경화에 따라 기존의 wafer to wafer 제어 개념 보다 발전된 개념으로 센서 기반 실시간 공정 진단 제어 기술의 필요성이 대두되었으며 이를 위한 오류 인식 및 예지기술 (Fault Detection & Classification, FDC) 그리고 이 정보를 이용한 첨단 제어 기술(Advanced Process Control, APC)을 개발하는 노력들이 시작되었다. 한국표준과학연구원에서는 수요기업인 대기업과 장비업체, 센서 개발 중소기업 및 학교 연구소와 공동으로 진공 공정 실시간 측정 진단 제어와 관련된 연구를 하고 있다. 진공 공정 환경측정 기술, 플라즈마 상태 측정 기술, 진공 공정 중 발생하는 오염입자 측정 원천 기술 개발과 이를 구현하기 위한 센서 개발, 화학 증착 소스 및 진공 공정 부품용 소재에 대한 평가 플랫폼 구축, 배기 시스템 진단기술 개발 등 현재 진행되고 있는 기술 개발 내용과 동향을 소개한다. 진공 공정 실시간 측정 기술이 확보되면 차세대 반도체 제작에 필요한 정밀 공정 제어가 가능해지고, 공정 이상에 바로 대응 혹은 예방 할 수 있으며, 여유분으로 필요 이상으로 투입되던 자원(대기시간, 투입 재료, 대체용 장비)을 절감하는 등 생산성을 향상을 기대할 수 있다. 또한 진공 환경에서 이루어지는 박막 증착, 식각 공정 과정에 대한 이해가 높아지고, 공정을 개발하고 최적화하는데 유용한 정보를 제공할 수 있으므로, 기존 장비와 차별화된 경쟁력을 가진 고품위 진공 장비 및 부품 개발에 기여할 수 있을 것으로 기대하고 있다.

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Potential Welfare Loss from Using Imperfect Environmental Taxes (불완전한 환경세 사용에 따른 잠재적 후생 손실)

  • Hong, Inkee
    • Environmental and Resource Economics Review
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    • v.24 no.1
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    • pp.1-53
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    • 2015
  • In environmental policy areas, a greater use of economic instruments (EIs) has recently been observed in many countries. However, EIs are heterogeneous policy tools. The textbook case of a Pigouvian tax is far from widely used, mainly due to the information requirements and other structural and institutional constraints. The successful implementation of EIs might heavily depend on pre-existing structural and institutional conditions. Moreover, these institutional conditions are particularly unfavorable in developing countries. Using a simple analytical general equilibrium model, this paper examines how these constraints affect the welfare gain from the introduction of environmental taxes in developing countries. First, this paper solves for the second-best optimal Pigouvian tax and output tax in the presence of a distortionary tax on market use of labor. The result confirms that an environmental output tax achieves a socially-efficient level of emissions in the least-cost manner only if the nature of the linkage between the tax base and the environmental damage is fixed. Second, incorporating structural and institutional constraints into the model through a set of parameter values from China and the US, this paper calculates the net welfare effects of either using the ideal Pigouvian tax or instead using an output tax. The numerical simulation results show that the net welfare gain from the use of an ideal Pigouvian tax could be more than six times larger than that of an output tax in developing countries. On the other hand, the welfare gain is only 50 percent in developed countries. This means that the potential welfare disadvantage from using output taxes instead emissions tax for environmental purposes could be much greater in the case of developing countries.

Classification of Apparel Fabrics according to Rustling Sounds and Their Transformed Colors

  • Park, Kye-Youn;Kim, Chun-Jeong;Chung, Hye-Jin;Cho, Gil-Soo
    • Science of Emotion and Sensibility
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    • v.5 no.2
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    • pp.23-28
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    • 2002
  • The purpose of this study was to classify apparel fabrics according to rustling rounds and to analyze their transformed colors and mechanical properties. The rustling sounds of apparel fabrics were recorded and then transformed into colors using Mori's color-transforming program. The specimens were clustered into five groups according to sound properties, and each group was named as ‘Silky’,‘Crispy’,‘Paper-like’,‘Worsted’, and ‘Flaxy’, respectively. The Silky consisted of smooth and soft silk fabrics had the lowest value of LPT, $\Delta$f, ARC , loudness(B) and sharpness(z). Their transformed colors showed lots of red portion and color counts. The Crispy with crepe fabrics showed relatively low loudness(z) and sharpness(B), but diverse colors and color counts were appeared. The Paper-like showed the highest value of LPT, $\Delta$f and loudness(z). The Worsted composed of wool and wool-Like fabrics showed high values of LPT, $\Delta$f, loudness(z) and sharpness(B). The transformed rotors of the Paper-like and Worsted showed the blue mostly but color counts were less than the others. The Flaxy with rugged flax fabric had the highest fluctuation strength, and their transformed colors showed diversity.

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Electronegativity and CMC Characteristics of Hydrophilic and Hydrophobic Group for Surfactants (계면활성제의 친수·소수성 그룹의 전기음성도와 CMC 특성)

  • Ha, Youn-Shick;Paek, U-Hyon;Chang, Yoon-Ho
    • Applied Chemistry for Engineering
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    • v.8 no.6
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    • pp.914-919
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    • 1997
  • On the basis of theory of Bratsch's electronegativity equalization, the electronegativity equalization, the group electronegativities and the group partial charges for anionic and nonionic surfactants could be calculated by using Pauling's electronegativity parameters. From calculated results, we have investigated how CMC, hydrophilic and hydrophobic groups, group partial charge, electronegativity of hydrophilic and hydrophobic groups, structural stability of micelle for anionic and nonionic surfactants are related. It was fround that CMC depends upon group partial charge and group electronegativity of hydrophilic and hydrophobic groups of surfactants. For the anionic surfactants, negative partial charge in hydrophobic group is delocalized as the carbon number in hydrophobic group increase. So negative partial charge of hydrophilic group has very large electronegativity that is decreased. And CMC decreases as hydration ability of hydrophilic groups which decreases relatively. For the nonionic surfactant, partial charge and electronegativity in hydrophobic group increases with the increment of carbon number in hydrophobic group. And CMC decreases because electronegativity of hydrophilic group is decreased with the increment of electronegativity of hydrophilic group. However, with the increase of repeating units in hydrophilic group, the negative partial charge of hydrophilic group increases. So CMC increases because surfactants hydrate rather than form micelles in aqueous solution by the increase of hydration ability.

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Construction of CORBA Object-Group Platform for Distributed Real-Time Service (분산 실시간 서비스를 위한 CORBA 객체그룹 플랫폼의 구축)

  • Kim, Myung-Hee;Joo, Su-Chong
    • Journal of KIISE:Computing Practices and Letters
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    • v.7 no.6
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    • pp.602-613
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    • 2001
  • Recently, the computing has developing in distributed object computing environment for supporting a programming paradigm of distributed application requiring interoperability between heterogeneous clients and servers. It involves the complex networking and the object-oriented technologies for various multimedia application service. In this paper, we construct the real-time object group platform for solving the difficulties of managements of distributed objects and the real-time constraints by requiring for real-time service supporting of applications in distributed computing environment. The existing researches are being tried to only improving the performance of systems by using real-time CORBA itself, or modifying the part of CORBA compliance. Hence, we design a new model of real-time object group platform that can support the real-time requirement without modifying the ORB. The structure of our real-time object group analyzed and defined the requirement about object management and real-time application service sides. And the role of the components of real-time object group is divided into 2 classes for reducing the side effect of interoperability between management and service. Also, we considered how to transparently express the parameters of real-time properties for clients and developers of server's service objects. If the expression of real-time parameters is transparent, then the developer can easily extend the real-time parameters simply and flexibly. Therefore, in this paper we defined the role of components of platform and described functions of each component and designed and then implemented the real-time object group platform. Finally, we showed the execution procedures of implemented our platform for verifying the functionality.

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A Combined Call Control Algorithm based on Moving Speed and Bandwidth in Hierarchical Cellular Systems (계층셀 구조에서 이동 속도와 대역폭을 고려한 복합 호 처리 알고리즘)

  • Park, Jeong-Eun;Chae, Ki-Joon
    • Journal of KIISE:Information Networking
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    • v.29 no.3
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    • pp.299-313
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    • 2002
  • Recently, the demand for mobile communications and multimedia services has rapidly increased so that conventional cellular system cannot fulfill the requirement of users (capacity and QoS) any more. Therefore, the hierarchical cellular system has been suggested in order to guarantee the QoS and to admit large population of users. IMT-2000 adopts the hierarchical cellular structure, which requires a call control algorithm capable of manipulating and utilizing the complicated structure of hierarchical cellular structure with handiness and efficiency. In this thesis, as an improvement of conventional combined algorithm, a new call control algorithm considering the moving speed of terminal and bandwidth is suggested. This algorithm employs buffers and guard channels to reduce the failure rate. Also, this algorithm considers the moving speed of terminal and bandwidth to elevate the efficiency. Furthermore, calls are handled separately according to the moving speeds of terminal and bandwidths to improve the QoS and reduce the handover rate. As an evaluation of the suggested algorithm, a model hierarchical cellular system is constructed and simulations are conducted with various types of traffic. As the result of the simulations, such indices as block rate, drop rate, channel utilization, and the number of inter layer handovers are examined to demonstrate the excellency fo the suggested algorithm.

Design of a Holter Monitoring System with Flash Memory Card (플레쉬 메모리 카드를 이용한 홀터 심전계의 설계)

  • 송근국;이경중
    • Journal of Biomedical Engineering Research
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    • v.19 no.3
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    • pp.251-260
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    • 1998
  • The Holter monitoring system is a widely used noninvasive diagnostic tool for ambulatory patient who may be at risk from latent life-threatening cardiac abnormalities. In this paper, we design a high performance intelligent holter monitoring system which is characterized by the small-sized and the low-power consumption. The system hardware consists of one-chip microcontroller(68HC11E9), ECG preprocessing circuit, and flash memory card. ECG preprocessing circuit is made of ECG preamplifier with gain of 250, 500 and 1000, the bandpass filter with bandwidth of 0.05-100Hz, the auto-balancing circuit and the saturation-calibrating circuit to eliminate baseline wandering, ECG signal sampled at 240 samples/sec is converted to the digital signal. We use a linear recursive filter and preprocessing algorithm to detect the ECG parameters which are QRS complex, and Q-R-T points, ST-level, HR, QT interval. The long-term acquired ECG signals and diagnostic parameters are compressed by the MFan(Modified Fan) and the delta modulation method. To easily interface with the PC based analyzer program which is operated in DOS and Windows, the compressed data, that are compatible to FFS(flash file system) format, are stored at the flash memory card with SBF(symmetric block format).

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Design of video encoder using Multi-dimensional DCT (다차원 DCT를 이용한 비디오 부호화기 설계)

  • Jeon, S.Y.;Choi, W.J.;Oh, S.J.;Jeong, S.Y.;Choi, J.S.;Moon, K.A.;Hong, J.W.;Ahn, C.B.
    • Journal of Broadcast Engineering
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    • v.13 no.5
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    • pp.732-743
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    • 2008
  • In H.264/AVC, 4$\times$4 block transform is used for intra and inter prediction instead of 8$\times$8 block transform. Using small block size coding, H.264/AVC obtains high temporal prediction efficiency, however, it has limitation in utilizing spatial redundancy. Motivated on these points, we propose a multi-dimensional transform which achieves both the accuracy of temporal prediction as well as effective use of spatial redundancy. From preliminary experiments, the proposed multi-dimensional transform achieves higher energy compaction than 2-D DCT used in H.264. We designed an integer-based transform and quantization coder for multi-dimensional coder. Moreover, several additional methods for multi-dimensional coder are proposed, which are cube forming, scan order, mode decision and updating parameters. The Context-based Adaptive Variable-Length Coding (CAVLC) used in H.264 was employed for the entropy coder. Simulation results show that the performance of the multi-dimensional codec appears similar to that of H.264 in lower bit rates although the rate-distortion curves of the multi-dimensional DCT measured by entropy and the number of non-zero coefficients show remarkably higher performance than those of H.264/AVC. This implies that more efficient entropy coder optimized to the statistics of multi-dimensional DCT coefficients and rate-distortion operation are needed to take full advantage of the multi-dimensional DCT. There remains many issues and future works about multi-dimensional coder to improve coding efficiency over H.264/AVC.

Implementation and Evaluation of Electroglottograph System (전기성문전도(EGG) 시스템의 개발 및 평가)

  • 김기련;김광년;왕수건;허승덕;이승훈;전계록;최병철;정동근
    • Journal of Biomedical Engineering Research
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    • v.25 no.5
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    • pp.343-349
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    • 2004
  • Electroglottograph(EGG) is a signal recorded from the vocal cord vibration by measuring electrical impedance across the vocal folds through the neck skin. The purpose of this study was to develop EGG system and to evaluate possibility for the application on speech analysis and laryngeal disease diagnosis. EGG system was composed of two pairs of ring electrodes, tuned amplifier, phase sensitive detector, low pass filter, and auto-gain controller. It was designed to extract electric impedance after detecting by amplitude modulation method with 2.7MHz carrier signal. Extracted signals were transmitted through line-in of PC sound card, sampled and quantized. Closed Quotient(CQ), Speed Quotient(SQ), Speed Index(SI), fundamental frequency of vocal cord vibration(F0), pitch variability of vocal fold vibration (Jitter), and peak-to-peak amplitude variability of vocal fold vibration(Shimmer) were analyzed as EGG parameters. Experimental results were as follows: the faster vocal fold vibration, the higher values in CQ parameter and the lower values in SQ and SI parameters. EGG and speech signals had the same fundamental frequency. CQ, SQ, and SI were significantly different between normal subjects and patients with laryngeal cancer. These results suggest that it is possible to implement portable EGG system to monitor the function of vocal cord and to test functional changes of the glottis.

Adsorption Characteristics of Dimetridazole Antibiotics on Activated Carbon Prepared from Agricultural Waste Citrus Peel (폐감귤박 활성탄을 이용한 항생제 Dimetridazole의 흡착특성)

  • Lee, Chang-Han;Kam, Sang-Kyu;Lee, Min-Gyu
    • Korean Chemical Engineering Research
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    • v.55 no.6
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    • pp.798-806
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    • 2017
  • A activated carbon (WCAC, waste citrus activated carbon) prepared from an agricultural waste citrus peel material generated in Jeju was utilized for the removal of dimetridazole (DMZ) antibiotics in aqueous solution. The adsorption of DMZ on WCAC was investigated with the change of various parameters such as contact time, dosage of WCAC, particle size of WCAC, temperature, pH, and DMZ concentration. The DMZ adsorption capacity increased with increasing temperature and decreasing particle size. Also it was decreased at less than pH 4 but sustained almost constantly at pH 4 or greater. Isotherm parameters were determined from the Langmuir, Freundlich, Redlich-Peterson and Duinin-Radushkevich (D-R) isotherm models. The isotherm data were best described by the Redlich-Peterson isotherm model. And the adsorption kinetics can be successfully fitted to the pseudo-second-order kinetic model. The results of the intra-particle diffusion model suggested that film diffusion and intra-particle diffusion were occurred simultaneously during the adsorption process. Meanwhile, the thermodynamic parameters indicated that the adsorption reaction of DMZ on WCAC was an endothermic and spontaneous process. The experimental results showed that WCAC is a promising and cheap adsorbent for the removal of DMZ antibiotics.