• Proceedings of the Korean Vacuum Society Conference
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• 2013.08a
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• pp.223.2-223.2
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• 2013

비정질 실리콘은 태양전지, 트랜지스터, 이미지 센서 등 다양한 분야에서 응용되고 있으며 새로운 박막 소자 개발을 위한 소재로서 많은 연구가 진행되고 있다. 하지만 소자개발에 있어 공정상에서 발생하는 비정질 실리콘 박막의 높은 응력(stress)은 소자의 특성을 떨어뜨리는 문제점을 갖는다. 따라서 우수한 특성의 소자 개발을 위해서는 보다 낮은 응력을 갖는 비정질 실리콘 박막 증착 및 공정 조건에 따른 응력 조절이 필요하다. 저응력의 비정질 실리콘 박막 증착은 보다 낮은 반응온도에서 증착속도를 최소로 하여 성장되어야 하는데 이는 플라즈마기상증착(Plasma enhanced chemical vapor deposition, PECVD) 시스템에 의해 가능하다. 따라서 본 연구에서는 PECVD 시스템을 사용하여 비정질 실리콘 박막을 증착하였고 그 특성을 분석하였다. 이 때 증착 온도, rf 파워, 공정 압력은 실험결과로부터 얻어진 낮은 박막 증착속도 하에서 안정적으로 증착이 가능한 조건으로 일정하게 유지하여 실험하였다. 공정 가스는 SiH4/He/N2의 혼합가스를 사용하였고 응력 조절을 위해 SiH4/He 가스비를 일정한 비율로 변화하여 비정질 실리콘 박막을 증착하였다. 증착된 박막의 두께 및 표면 특성은 field emission scanning electron microscopy 및 atomic force microscopy를 이용하여 분석하였고, energy dispersive X-ray 분석을 통하여 정량 및 정성적 분석을 수행하였다. 그리고 stress measurement system을 이용하여 박막의 응력을 측정하였고 X-ray diffraction 측정 및 ellipsometry 측정으로부터 증착된 박막의 결정성, 굴절률 및 oiptical bandgap을 분석하였다.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.35 no.2
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• pp.129-133
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• 2022

This paper describes why we must use graphene materials for solar cells and biosensors. It has been superior in several properties such as super-thin film, higher tensile strength, high current density, high thermal conductivity, and high mobility. Therefore, graphene is one of the emerging advanced materials because of its applicability in various electronic device applications. We investigated the requirements of graphene materials for the application of solar cells and biosensors. In addition, we discussed the research trends such as transducers in biosensors and transparent electrodes in solar cells. The research on graphene materials and their application will be beneficial and helpful for the near future.

• Journal of the Korean Society of Radiology
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• v.3 no.3
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• pp.27-35
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• 2009

In this study, the basic research verifying possibility of applications as radiology image sensor in Digital Radiography was performed, the radiology image sensor was fabricated using double layer technique tio decrease dark current. High efficiency material in substitution for a-Se have been studied as a direct method of imaging detector in Digital Radiography to decrease dark current by using Hetero junction already used as solar cell, semiconductor. Particle-In-Binder method is used to fabricate radiology image sensor because it has a lot of advantages such as fabrication convenient, high yield, suitability for large area sensor. But high leakage current is one of main problem in PIB method. To make up for the weak points, double layer technique is used, and it is considered that high efficient digital radiation sensor can be fabricated with easy and convenient process. In this study, electrical properties such as leakage current, sensitivity is measured to evaluate double layer radiation sensor material.

• The Journal of the Korea institute of electronic communication sciences
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• v.9 no.2
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• pp.231-242
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• 2014

It is throwing the spotlight on the cultivation crops about high quality crops and productivity improvement per unit area because of rapid climate change caused by global warming. Therefore, we propose a water culture management of circulation nutrient method control system applies to solar tracking method not using traditional method of deep flow technique and artificial light source. We design it in the form of the circulation nutrient method in waterway of a certain amount of nutrient solution and water flowed into the way of circular. In addition, we design a multistage structure in pyramid shape which be possible continuous photosynthesis action to crops of water culture bottom part. Also, solar tracking method is designed five sensor method of center hole sensor method for tracking shadow of solar light not using traditional two hole, four hole sensor method. Finally, through the water culture device applies to solar light tracking method was not introduced in existing study yet, we can reduce growth speed of crops which be possible continuous photosynthesis action to crops. Moreover, We can expect high productivity of per unit area which be possible all crops can be offered growth environment of same type by using form of pyramid shape of multistage structure without top or bottom part.

• Journal of the Korea Academia-Industrial cooperation Society
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• v.18 no.3
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• pp.437-446
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• 2017

70 percent of Korea's territory is covered with mountains, whose difficult conditions can cause damage to facilities. Recently, the demand for facilities related to outdoor activities including monorails has been on the rise, and such facilities are much more likely to become damaged. For this reason, a monitoring system applying IoT to mountainous areas was developed and its applicability is evaluated in this study. The current status of the existing mountainous facilities and monitoring systems were reviewed, and the current wired monitoring technology was analyzed. A scenario for IoT-based monitoring was developed, and then sensor nodes were developed, which include an RF-communication module and interface, power-supply and solar-cell. A testbed was set up at K University. The same data was collected by the wireless system as had been collected by the wired one. The study findings are as follows. Firstly, by using the wireless system, it is estimated that the construction duration can be reduced by about 25 percent, while the construction costs can be reduced by about 3~52 percent. Secondly, the safety of the construction workers can be improved by making the working conditions less dangerous, such as by eliminating the need to transport cables.

• Proceedings of the Korean Vacuum Society Conference
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• 2011.02a
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• pp.28-28
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• 2011

우리나라의 주력산업인 반도체 및 디스플레이의 경우 그 생산 설비의 1/3이상이 진공 장비이며 진공 공정을 통해 만들어진다. 이들 산업 분야에서는 우리나라가 세계 최고의 생산 기술을 가지고 있으므로 자체적인 기술 개발 확보가 중요하다. 최근에는 기존에 개발되어 있는 장비의 성능을 뛰어넘어야 하는 공정 기술력이 요구되면서, 진공 공정 기술 개발이 매우 중요한 이슈가 되었다. 반도체나 디스플레이 산업 등 기존 주력산업의 전후방 산업의 경쟁력 강화 측면에서뿐 아니라 태양전지, LED 등 진공기술을 이용한 신성장 동력 산업의 생산 시스템 경쟁력 확보 측면에서도 진공 공정 기술 개발 중요성은 매우 크다. 지금까지 양산에 적용되는 증착, 식각, 확산 등 진공 공정 운영은, 사전 시험을 통해 얻은 최적 공정의 입력 파라미터들을 정해 놓고 그대로 공정을 진행한 뒤, 생산되어 나오는 제품의 상태를 사후 측정하여 공정 이상 여부를 점검하고 미세 조정하는 형태로 진행되고 있다. 실질적으로 현재 진행 중인 진공 공정에 대한 직접적인 정보가 없으므로 공정 중 발생되는 문제들에 대한 대처는 그 공정이 끝난 후에 이루어지는 상황이다. 공정 미세화 및 대구경화에 따라 기존의 wafer to wafer 제어 개념 보다 발전된 개념으로 센서 기반 실시간 공정 진단 제어 기술의 필요성이 대두되었으며 이를 위한 오류 인식 및 예지기술 (Fault Detection & Classification, FDC) 그리고 이 정보를 이용한 첨단 제어 기술(Advanced Process Control, APC)을 개발하는 노력들이 시작되었다. 한국표준과학연구원에서는 수요기업인 대기업과 장비업체, 센서 개발 중소기업 및 학교 연구소와 공동으로 진공 공정 실시간 측정 진단 제어와 관련된 연구를 하고 있다. 진공 공정 환경측정 기술, 플라즈마 상태 측정 기술, 진공 공정 중 발생하는 오염입자 측정 원천 기술 개발과 이를 구현하기 위한 센서 개발, 화학 증착 소스 및 진공 공정 부품용 소재에 대한 평가 플랫폼 구축, 배기 시스템 진단기술 개발 등 현재 진행되고 있는 기술 개발 내용과 동향을 소개한다. 진공 공정 실시간 측정 기술이 확보되면 차세대 반도체 제작에 필요한 정밀 공정 제어가 가능해지고, 공정 이상에 바로 대응 혹은 예방 할 수 있으며, 여유분으로 필요 이상으로 투입되던 자원(대기시간, 투입 재료, 대체용 장비)을 절감하는 등 생산성을 향상을 기대할 수 있다. 또한 진공 환경에서 이루어지는 박막 증착, 식각 공정 과정에 대한 이해가 높아지고, 공정을 개발하고 최적화하는데 유용한 정보를 제공할 수 있으므로, 기존 장비와 차별화된 경쟁력을 가진 고품위 진공 장비 및 부품 개발에 기여할 수 있을 것으로 기대하고 있다.

• Korean Journal of Remote Sensing
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• v.23 no.4
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• pp.311-321
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• 2007

The diffuse attenuation coefficient for down-welling irradiance $K_d({\lambda})$, which is the propagation of down-welling irradiance at wavelength ${\lambda}$ from surface to a depth (z) in the ocean, and underwater visibility are important optical parameters for ocean studies. There have been several studies on $K_d({\lambda})$ and underwater visibility around the world, but only a few studies have focused on these properties in the Korean sea. Therefore, in the present study, we studied $K_d({\lambda})$ and underwater visibility around the coastal area of the Yellow Sea, and developed $K_d({\lambda})$ and underwater visibility algorithms for ocean color satellite sensor. For this research we conducted a field campaign around the Yellow Sea from $19{\sim}22$ September, 2006 and there we obtained a set of ocean optical and environmental data. From these datasets the $K_d({\lambda})$ and underwater visibility algorithms were empirically derived and compared with the existing NASA SeaWiFS $K_d({\lambda})$ algorithm and NRL (Naval Research Laboratory) underwater visibility algorithm. Such comparisons over a turbid area showed small difference in the $K_d({\lambda})$ algorithm and constants of our result for underwater visibility algorithm showed slightly higher values.

• Journal of the Korean Society of Radiology
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• v.17 no.3
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• pp.367-373
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• 2023

Aircrews and passengers are exposed to radiation from cosmic rays and secondary scattered rays generated by reactions with air or aircraft. For aircrews, radiation safety management is based on the exposure dose calculated using a space-weather environment simulation. However, the exposure dose varies depending on solar activity, altitude, flight path, etc., so measuring by route is more suggestive than the calculation. In this study, we developed an instrument to measure the cosmic radiation dose using a general-purpose Si sensor and a multichannel analyzer. The dose calculation applied the algorithm of CRaTER (Cosmic Ray Telescope for the Effects of Radiation), a space radiation measuring device of NASA. Energy and dose calibration was performed with Cs-137 662 keV gamma rays at a standard calibration facility, and good dose rate dependence was confirmed in the experimental range. Using the instrument, the dose was directly measured on the international line between Dubai and Incheon in May 2023, and it was similar to the result calculated by KREAM (Korean Radiation Exposure Assessment Model for Aviation Route Dose) within 12%. It was confirmed that the dose increased as the altitude and latitude increased, consistent with the calculation results by KREAM. Some limitations require more verification experiments. However, we confirmed it has sufficient utilization potential as a cost-effective measuring instrument for monitoring exposure dose inside or on personal aircraft.

• Korean Journal of Remote Sensing
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• v.36 no.5_2
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• pp.989-1006
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• 2020

Building change monitoring based on building detection is one of the most important fields in terms of monitoring artificial structures using high-resolution multi-temporal images such as CAS500-1 and 2, which are scheduled to be launched. However, not only the various shapes and sizes of buildings located on the surface of the Earth, but also the shadows or trees around them make it difficult to detect the buildings accurately. Also, a large number of misdetection are caused by relief displacement according to the azimuth and elevation angles of the platform. In this study, object-based building detection was performed using the azimuth angle of the Sun and the corresponding main direction of shadows to improve the results of building change detection. After that, the platform's azimuth and elevation angles were used to detect changed buildings. The object-based segmentation was performed on a high-resolution imagery, and then shadow objects were classified through the shadow intensity, and feature information such as rectangular fit, Gray-Level Co-occurrence Matrix (GLCM) homogeneity and area of each object were calculated for building candidate detection. Then, the final buildings were detected using the direction and distance relationship between the center of building candidate object and its shadow according to the azimuth angle of the Sun. A total of three methods were proposed for the building change detection between building objects detected in each image: simple overlay between objects, comparison of the object sizes according to the elevation angle of the platform, and consideration of direction between objects according to the azimuth angle of the platform. In this study, residential area was selected as study area using high-resolution imagery acquired from KOMPSAT-3 and Unmanned Aerial Vehicle (UAV). Experimental results have shown that F1-scores of building detection results detected using feature information were 0.488 and 0.696 respectively in KOMPSAT-3 image and UAV image, whereas F1-scores of building detection results considering shadows were 0.876 and 0.867, respectively, indicating that the accuracy of building detection method considering shadows is higher. Also among the three proposed building change detection methods, the F1-score of the consideration of direction between objects according to the azimuth angles was the highest at 0.891.

• Korean Journal of Remote Sensing
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• v.21 no.6
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• pp.445-456
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• 2005

The land surface parameters should be determined with sufficient accuracy, because these play an important role in climate change near the ground. As the surface reflectance presents strong anisotropy, off-nadir viewing results a strong dependency of observations on the Sun - target - sensor geometry. They contribute to the random noise which is produced by surface angular effects. The principal objective of the study is to provide a database of accurate surface reflectance eliminated the angular effects from MODIS 250m reflective channel data over Korea. The MODIS (Moderate Resolution Imaging Spectroradiometer) sensor has provided visible and near infrared channel reflectance at 250m resolution on a daily basis. The successive analytic processing steps were firstly performed on a per-pixel basis to remove cloudy pixels. And for the geometric distortion, the correction process were performed by the nearest neighbor resampling using 2nd-order polynomial obtained from the geolocation information of MODIS Data set. In order to correct the surface anisotropy effects, this paper attempted the semiempirical kernel-driven Bi- directional Reflectance Distribution Function(BRDF) model. The algorithm yields an inversion of the kernel-driven model to the angular components, such as viewing zenith angle, solar zenith angle, viewing azimuth angle, solar azimuth angle from reflectance observed by satellite. First we consider sets of the model observations comprised with a 31-day period to perform the BRDF model. In the next step, Nadir view reflectance normalization is carried out through the modification of the angular components, separated by BRDF model for each spectral band and each pixel. Modeled reflectance values show a good agreement with measured reflectance values and their RMSE(Root Mean Square Error) was totally about 0.01(maximum=0.03). Finally, we provide a normalized surface reflectance database consisted of 36 images for 2001 over Korea.