• Title/Summary/Keyword: 타면적비

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Measurement of Width and Step-Height of Photolithographic Product Patterns by Using Digital Holography (디지털 홀로그래피를 이용한 포토리소그래피 공정 제품 패터닝의 폭과 단차 측정)

  • Shin, Ju Yeop;Kang, Sung Hoon;Ma, Hye Joon;Kwon, Ik Hwan;Yang, Seung Pil;Jung, Hyun Chul;Hong, Chung Ki;Kim, Kyeong Suk
    • Journal of the Korean Society for Nondestructive Testing
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    • v.36 no.1
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    • pp.18-26
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    • 2016
  • The semiconductor industry is one of the key industries of Korea, which has continued growing at a steady annual growth rate. Important technology for the semiconductor industry is high integration of devices. This is to increase the memory capacity for unit area, of which key is photolithography. The photolithography refers to a technique for printing the shadow of light lit on the mask surface on to wafer, which is the most important process in a semiconductor manufacturing process. In this study, the width and step-height of wafers patterned through this process were measured to ensure uniformity. The widths and inter-plate heights of the specimens patterned using photolithography were measured using transmissive digital holography. A transmissive digital holographic interferometer was configured, and nine arbitrary points were set on the specimens as measured points. The measurement of each point was compared with the measurements performed using a commercial device called scanning electron microscope (SEM) and Alpha Step. Transmission digital holography requires a short measurement time, which is an advantage compared to other techniques. Furthermore, it uses magnification lenses, allowing the flexibility of changing between high and low magnifications. The test results confirmed that transmissive digital holography is a useful technique for measuring patterns printed using photolithography.

Study on the Optimum Condition of Mechanical Sowing of a Garlic (마늘 기계 파종을 위한 최적조건 구명)

  • Kang, Tae Gyoung;Lee, Sang Hee;Choi, Yong;Kwon, Youg Suk;Kim, Tae Hyeong
    • Journal of the Korea Academia-Industrial cooperation Society
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    • v.22 no.4
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    • pp.360-366
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    • 2021
  • Garlic is an important crop, accounting for 1.1 trillion won out of 3.7 trillion won for the total production of seasoned vegetables in Korea. On the other hand, the cultivation area and production volume are decreasing continuously due to the shortage of an agricultural labor force, aging, and insufficient mechanization. In particular, the mechanization of garlic sowing is barely performed, resulting in large amounts of labor. Therefore, it is necessary to study the mechanization of planting garlic. Therefore, in this study, to determine the optimal working conditions for mechanical sowing of garlic, an experiment was conducted to compare the yield according to the sowing angle and depth of garlic during sowing. After sowing using a seeding machine set under optimal conditions, the conventional work and yield were compared. The results showed that it is most appropriate to sow garlic with a sowing angle of 45° or 90° and a depth of 2 cm to 4 cm, and there is no difference in the yield between sowing with a sowing machine and conventional work.

A Research of the Width of Passage in the Elementary School Classroom - Centered on Elementary Schools in Northen Gyeonggi Province - (초등학교 일반교실의 통로폭에 관한 조사 연구 - 경기 북부지역 초등학교를 중심으로 -)

  • Yoon, Hee-Cheol
    • The Journal of Sustainable Design and Educational Environment Research
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    • v.17 no.3
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    • pp.26-34
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    • 2018
  • This research is a pre-research to find out profit module of 20 students in a classroom. I researched the widths of passages in the 30 classrooms of 5 elementary schools in Nothern Kyeonggi-do. I found the conclusions as follows. 1st, the area of 1 student's unit is $650(W){\times}950(D)$ 2nd, most of classrooms' students table placements are one-way types(77%). U-types are 13%. group study-types are 7% 3rd, The width between blackboard and front student's table is 2.08m. The width of passage between back seat and backboard is 1.12m. The width of passage between side wall and near student's table is 0.89m. The width of passage between window and near student's table is 0.74m. The width of vertical passage(A) between student's tables is 0.68m. The width of vertical passage(B) between student's tables is 0.7m. 4th, The area of teachers' is $2.1m{\sim}2.25m{\times}2.1m=4.41{\sim}4.73m^2$

A Study on the Preparation of Ternary Transition Metal Coated-Dimensionally Stable Anode for Electrochemical Oxidation (전기화학적 산화를 위한 삼원 전이 금속 코팅 불용성 산화 전극 제조에 관한 연구)

  • Park, Jong-Hyeok;Choi, Jang-Uk;Park, Jin-Soo
    • Applied Chemistry for Engineering
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    • v.32 no.4
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    • pp.409-416
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    • 2021
  • Dimensionally stable electrodes are one of the important components in electrochemical water treatment processes. In the manufacturing of the dimensionally stable electrodes, the type of metal catalyst coated on the surface of the metal substrate, the coating and sintering methods substantially influence their performance and durability. In this study, using Ir-Ru-Ta ternary metal coating, various electrodes were prepared depending on the coating method under the same pre-treatment and sintering conditions, and its performance and durability were studied. As a coating method, brush and spray coating were used. As a result, the reduction in the amount of catalyst ink was achieved because more amount of metal could be coated for the electrode using spraying with the same amount of catalyst ink. In addition, the spray_2.0_3.0 electrode prepared by a specific spray coating method shows the phenomenon of cracking and the uniform coating of the ternary metal on the surface of the coating layer, and results in a high electrochemically active specific surface area, and the decomposition performance of 4-chlorophenol was superior to the other electrodes. However, it was found that there was no significant difference in durability depending on the coating method.

A Research of the Width of Passage in the Namyangju Elementary School Classroom (남양주 초등학교 일반교실의 통로 폭에 관한 조사 연구)

  • Yoon, Hee-Cheol
    • The Journal of Sustainable Design and Educational Environment Research
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    • v.19 no.4
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    • pp.60-69
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    • 2020
  • This research is a preliminary study to find out the module of 20 students in a classroom. This research investigated the widths of passages in the 30 classrooms of 5 elementary schools in Namyangju City, Korea. The conclusions were as follows: First, the area of unit for 1 student was 650 (W) × 950 (D). Second, the desk placements for most classrooms were one-way types (87%), and group-study types constituted 13%. Third, the width between the blackboard and the very front desk was 2.17 m. The width of passage between the very back seat and the backside lockers was 1.32 m. The width of passage between the sidewall and the nearby desk was 0.8 m. The width of passage between the window and the nearby desk was 0.8 m. The average widths of 2 vertical passages between the desks were respectively 0.67 m and 0.68 m. Fourth, the area of the teacher was 2.1-2.25 m × 2.16 m = 4.5-4.8 ㎡.

Investigations on the Adsorption Characteristics of $SO_2$ Gas on Fixed Bed Manganese Nodule Column (고정(固定) 흡착층(吸着層)에서 망간단괴(團塊)의 $SO_2$ 가스 흡착(吸着) 특성(特性)에 관한 연구(硏究))

  • Baek, Mi-Hwa;Kim, Dong-Su;Jung, Sun-Hee;Park, Kyoung-Ho
    • Resources Recycling
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    • v.15 no.4 s.72
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    • pp.3-12
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    • 2006
  • The feasibility for the employment of manganese nodule as an adsorbent for $SO_{2}$ gas has been investigated. The specific surface area of manganese nodule particle, which used in the experiments, was ca. $221.5m^{2}/g$ and the content of sulfur in manganese nodule was observed to significantly increase after $SO_{2}$ was adsorbed on it. The EPMA for the distilled water-washed and methanol-washed manganese nodule particle after $SO_{2}$ adsorption showed that its sulfur content was slightly decreased to 14.7% and 13.1% respectively, from 15.4% before washing. The XRD analysis of manganese nodule showed that todorokite and birnessite, which are manganese oxides, and quartz and anorthite were the major mineralogical components and weak $MnSO_{4}$ peaks were detected after $SO_{2}$ was adsorbed on manganese nodule. For an comparative investigation, limestone was also tested as an adsorbent for $SO_{2}$, however, no peaks for $CaSO_{4}$ were found by XRD analysis after the adsorption of $SO_{2}$. As the size of adsorbent increased, time for breakthrough was decreased and the adsorbed amount of $SO_{2}$ was also diminished. The $SO_{2}$ adsorption was hindered when its flow rate became high and the adsorption capacity of manganese nodule was observed to be superior to that of limestone. In addition, the mixture of manganese nodule and limestone did not show an increase in the adsorption of $SO_{2}$. Finally, as the temperature was raised, the adsorbed amount of adsorbate on manganese nodule was found to be decreased.

Stand Composition of the Broad-leaved Forests in Korea by Use of Aerial Photographs (항공사진(航空寫眞)을 이용(利用)한 우리나라 활엽수림(闊葉樹林)의 임분구조(林分構造)에 관(關)한 硏究(연구))

  • Park, Kil Hong
    • Journal of Korean Society of Forest Science
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    • v.74 no.1
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    • pp.67-81
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    • 1986
  • To investigate the stand structure of the stocked broad-leaved forests in Korea, 1,000 plots, allocated by systematic sampling method, were interpreted on the aerial photographs accompanied with ground survey. Total area of the stocked broad-leaved forests except Jeju island was 818,286ha and the percentage to total forest area was 12.7%. Total stock volume of the stocked broad-leaved forests was $38,890,779m^3$ and the percentage to total stocked forest volume was 27.4%. Mean number of trees per ha was 947 trees/ha, basal area was $11.17m^3/ha$, DBH was 11.30cm, tree height was 7.65m, stock volume was $44.96m^3/ha$, and current annual volume increment was $3.64m^3/ha$ in total land. The 64.7, 79.8 and 52.7 percent of the stocked broad-leaved forest area were distributed at elevations of 300-900m, in slope degree of above 25, and in northern aspect, respectively. Standfactors were apt to get better with the increase of distance from the car road way and the village, and with the increase of elevation belt.

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Determination of Flood Reduction Alternatives for responding to climate change in Gyeongan Watershed (기후변화 대응을 위한 경안천 유역의 홍수저감 대안 선정)

  • Han, Daegun;Choi, Changhyun;Kim, Duckhwan;Jung, Jaewon;Kim, Jungwook;Kim, Soo Jun
    • Journal of Wetlands Research
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    • v.18 no.2
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    • pp.154-165
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    • 2016
  • Recently, the frequency of extreme rainfall event has increased due to climate change and impermeable area also has increased due to rapid urbanization. Therefore, we ought to prepare countermeasures for flood reduction to reduce the damage. To consider climate change, the frequency based rainfall was calculated according to the aimed period(reference : 1971~2010, Target period I : 2011~2040, Target period II : 2041~2070, Target period III : 2071~2100) and the flood discharge was also calculated by climate change using HEC-HMS model. Also, the flood elevation was calculated by each alternative through HEC-RAS model, setting 5 sizes of drainage pumps and reservoirs respectively. The flood map was constructed using topographical data and flood elevation, and the economic analysis was conducted for reduction of flood damage using Multi dimension - Flood Damage Analysis, MD-FDA. As a result of the analysis on the flood control effect, a head of drainage pump was reduced by 0.06m up to 0.44m while it was reduced by 0.01m up to 1.86m in the case of a detention pond. The flooded area shrunk by up to 32.64% from 0.3% and inundation depth also dropped. As a result of a comparison of the Benefit/Cost index estimated by the economic analysis, detention pond E in period I and pump D in period II and III were deemed appropriate as an alternative for climate change. The results are expected to be used as good practices when implementing the flood control works considering climate change.

Gamma Irradiation Effects on Conchospores of Porphyra Species 2. The Effects of High Gamma Irradiation on Germination and Growth of Conchospores of Two Varieties (김의 각포자에 대한 r-선의 조사효과 2. 두 품종의 각포자의 발아생장에 미치는 고선량 r-선의 조사효과)

  • KIM Joong-Rae
    • Korean Journal of Fisheries and Aquatic Sciences
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    • v.18 no.1
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    • pp.52-56
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    • 1985
  • For the fundamental studies of radiation breeding in edible marine algae, the biological effects on conchospores of Porphyra species by gamma-irradiation were examined. Two varieties, Keun-cham-gim (Porphyra tenera Kjell. form tamatsuensis Miura) and Saga No.5, were chosen for this study, and their conchospores after r-irradiation($5.0{\sim}20.0$ KR) were cultured for 50 days. The results obtained were summarized as follows. 1. Gamma-irradiation in less than the dose of 20KR did not affect germination of conchospores, and almost all spores grew into two cells germ in 24 hours after irradiation, but withering germs were gradually increased in number according to higher exposure within 5 days old culture. 2. High irradiation caused the induction of giant cells, abnormal useless growth of hold-fast, lumpish thalli and callus-like lumpy tissues. 3. The liberation of neutral spores from young germs and carpospores from mature thalli were observed on the frond exposed at $10{\sim}20$ KR irradiation. All spores were normal in division and its size. 4. The best irradiation effect on growth of Keun-cham-gim was observed at 10 KR dose, whose growth-rates were $140\%$ in wet weight and $108\%$ in mean frond area, but only $48\%$ was recorded in wet weight at 20 KR exposure. Saga No.5 were in contrast with Keun-cham-gim, and their most growth-rate was $400\%$ in wet weight ($258\%$ in frond area) at 10 KR irradiation and the worst was $20\%$ at the dose of 20 KR. 5. The withering phenomenon to death by treatment of gamma-ray presented substantial difference between two varieties. Survival rate compared with control in Keun-cham-gim was $70.7\%$ at 20 KR, but that in Saga No.5 recorded $47.0\%$ at same dose. 6. Synthesizing the results of high and low r-irradiation, it was suggested tat high r-irradiation in more than 5.0 KR inhibited conspicuously the growth of germs derived from conchospores, and about half of them withered at 15.0 KR dose or more.

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Home Range Size and Habitat Environment Related to the Parturition of Roe Deer at Warm-Temperate Forest in Jeju Island Using GPS-CDMA Based Wildlife Tracking System (GPS와 CDMA를 이용한 난대림의 출산 전후 암노루 행동권 및 서식환경 조사)

  • Kim, Eun-Mi;Kwon, Jin-O;Kang, Chang-Wan;Song, Kuk-Man;Min, Dong-Won
    • Journal of the Korean Association of Geographic Information Studies
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    • v.16 no.2
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    • pp.65-74
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    • 2013
  • A research program for the roe deer (Capreolus pygargus) has been set up at the Jeju Experimental Forest of Warm-temperate and Subtropical Forest Research Center in Jeju Island. To explore the home range size and habitat environment, 3 males and 3 females have been captured and released with GPS-CDMA based telemetry since 24th April 2012. Among them 2 females were captured at Hannam Forest of Seoguipo, were pregnant and monitored by the tracking system. There are significantly different patterns in behavior around the parturition. After parturition they show recurrence behavior toward one point in the forest, while they have irregular patterns in moving before. To calculate the home range size, the MCP (minimum convex polygon) and Kernel Method are applied through the extension of ESRI ArcView GIS 3.2a. The pregnant female captured 9th May 2012 has the size of MCP=67ha and Kernel 95%=0.5ha and the pregnant female captured 12th July 2012 has the size of MCP=82ha and Kernel 95%=0.9ha. Although a fawn could move immediately just after the birth likely others to avoid any risks, they stay at very narrow space significantly, and the size become wider when more time goes by. Furthermore, they mainly have a home range away from human activity area such as forest tracking roads. The habitat environment for the parturition is summarized as 40years old cryptomeria forests with new sprouting shrubs for foods, which are the controlled forest through the thinning and removing shrubs 2 years ago. This means that forest works could cause positive results for the parturition and survival of young. The period of parturition is earlier than highland in Jeju Island, the size of home range is narrower than other countries, and the habitat environment of the shelter for a fawn is similar to previous research in other countries.