• Title/Summary/Keyword: 측정 유효화

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Oxide Films Formed on Hot-Dip Aluminized Steel by Plasma Electrolytic Oxidation and Their Films Growth Stages (플라즈마 전해 산화법에 의해 용융알루미늄도금 강판 상 형성한 산화층과 그 성장 과정)

  • Choe, In-Hye;Kim, Chang-Min;Park, Jun-Mu;Park, Jae-Hyeok;Hwang, Seong-Hwa;Lee, Myeong-Hun
    • Proceedings of the Korean Institute of Surface Engineering Conference
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    • 2017.05a
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    • pp.165-165
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    • 2017
  • 지난 수 십 년 동안, 전 세계적으로 자원의 소비가 급격히 증가하게 되면서 최근 자원 고갈은 물론 환경오염이 커다란 이슈로 문제가 되고 있다. 이에 따라 재료 관련 분야에 있어서는 보다 효율적이고 친환경적인 방법으로 자원을 활용해야 된다는 필요성이 대두되었고 이와 같은 관점에서 목적하는 성분이 우수하고 환경 친화적인 표면처리 재료 개발연구가 활발하게 진행되고 있는 실정이다. 그 중 플라즈마 전해 산화(Plasma Electrolytic Oxidation, PEO)는 알루미늄, 마그네슘 등의 경금속의 경도를 향상시키고 높은 내마모성, 내식성을 갖게 하는 표면처리로써 그 관심이 증가하고 있다. 이 플라즈마 전해 산화는 일반적으로 공정비용 대비 효과적이고 환경 친화적이며 코팅 성능 면에서 우수하다고 알려져 있다. 이러한 고유한 특성으로 인해 플라즈마 전해 산화 코팅은 최근 몇 년 동안 기계, 자동차, 우주항공, 의학 및 전기 산업 등의 분야에서 그 적용이 점차 증가하고 있는 상황이다. 한편, 플라즈마 전해 산화 코팅을 하는 모재들의 경우 부동태 산화피막을 용이하게 형성할 수 있는 특성의 모재에 한정되고 있어서 그 응용확대에 한계가 있는 것이 사실이다. 따라서 본 연구에서는 플라즈마 전해 산화법을 사용하여 용융알루미늄도금 강판 상에 산화피막 형성을 시도하였다. 전원공급 장치의 양극은 전해질 속에 잠겨있는 작동전극에 연결하고 음극은 대전극 역할을 하는 스테인레스강 전해질 용기에 연결되었다. 전해질은 Sodium Aluminate 및 기타 첨가제를 함유한 것을 사용하였고 온도는 열교환기를 사용하여 $30^{\circ}C$ 이하로 유지되었다. 또한 여기서 전류밀도는 $5{\sim}10A/dm^2$, 실험 주파수는 700Hz, Duty cycle은 30 및 90%의 각 조건에서 공정처리 시간을 각각 30분 및 60분 동안 진행하였다. 이와 같은 조건에서 형성한 막들에 대해서는 주사형전자현미경(SEM)을 이용하여 코팅 막의 표면 및 단면의 모폴로지를 관찰하였음은 물론 EDS 및 XRD 측정을 통하여 원소조성분포 및 결정구조를 각각 분석하였다. 또한 이 코팅 막들에 대한 내식성은 5% 염수분무 환경 중 노출시험(Salt spray test), 3% NaCl 용액에서의 침지 시험 및 전기화학적 동전위 양극분극(Potentiodynamic Polarization) 시험을 진행하여 평가하였다. 이상의 실험결과에 의하면, 제작조건별 플라즈마 전해 산화 코팅 막의 모폴로지 및 결정구조가 상이하게 나타나는 것을 알 수 있었다. 코팅 막의 모폴로지 관찰 결과, 공정 시간에 비례하여 표면에 존재하는 원형 기공의 수는 감소하였으나 그 크기가 커지고 크레이터의 직경 또한 커진 것이 확인되었다. 이 기공은 마이크로 방전에 의해 형성된다고 알려져 있는데 공정 시간이 증가함에 따라 코팅 두께가 점차 증가하여 마이크로 방전의 빈도수가 줄어들고 그 강도는 증가하게 되어 기공 크기가 증가한 것으로 사료된다. 또한 공정시간이 긴 시편에서 표면에 크랙이 다수 존재하는 것으로 확인되었다. 이것은 방전에 의해 고온이 된 소재가 차가운 전해질과 만나게 되어 생긴 큰 온도구배로 인해 강한 열응력이 발생하여 균열을 초래한 것으로 보인다. 조성원소 분석 결과 원형 기공 주변의 크레이터 영역에는 알루미늄이 풍부하였으며 그 주변에 결절상을 갖는 구조에서는 전해질 성분의 원소가 포함되어 있는 것이 확인되었다. 이러한 코팅 막의 표면 특성은 내식성에 영향을 주게 된 원인으로 사료된다. 동전위 분극측정 결과에 의하면 플라즈마 전해 산화 공정 시간이 길어질수록 부식전류밀도가 증가하였다. 이것은 공정시간이 길어짐에 따라 강한 방전이 발생하여 기공의 크기가 증가하고 크랙이 발생하게 되면서 내식성이 저하된 것으로 판단된다. 종합적으로 재료특성 분석 및 내식성 평가를 분석한 결과, 플라즈마 전해 산화의 공정 시간이 너무 길게 되면 오히려 내식성은 저하되는 것이 확인되었다. 이상의 연구를 통하여 고내식 특성을 갖는 플라즈마 전해 산화 막의 유효성을 확인하였으며 용융알루미늄강판 상에 실시한 플라즈마 전해 산화 처리에 대한 기초적인 응용 지침을 제시할 수 있을 것으로 사료된다.

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The Effect of the Chang in Forest Environment on physico-chemical Properhes of Soil Located in Seoul Royal Tomb (서울 왕릉지역의 산림환경변화가 토양 이.화학성에 미치는 영향)

  • Nam, Yi;Yee, Sun;Bae, Sang-Won
    • Journal of Soil and Groundwater Environment
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    • v.10 no.3
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    • pp.32-37
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    • 2005
  • The soil properties of the royal tombs (managed by cultural properties administration) located in Seoul and suburban Gyonggi area were investigated to see the influence of the change in soil environment on the royal tomb s이I. To compare the soil chemical properties of four royal tombs soil of Changdeokgung, Jongmyo, Seooneung, and Dongguneung, pH, organic content, available phosphate, extractable calcium, extractable potassium, extractable magnesium, cation exchange capacity, degree of base saturation, and total nitrogen content were measured. The concentrations of Cd, Pb, and Cu measured as the degree of heavy metal contamination can be an indication of atmospheric pollution in the soil environment. To estimate the degree of soil compaction, soil hardness, pore space, porosity, bulk density, and soil atmosphere were analyzed. Through these studies, following conclusions were made: 1. The soil hardness and pore space which can be used as indexes of soil compaction, were worse in the soil of Seooneung than in those of Changdeokgung and Dongguneury. These phenomena seem to be the result of increase in visitors in Seooneung and Dongguneung better and soil management in Changdeokgung and Dongguneung. When three different regions of forest area, prohibited area, and soil compaction area in Seooneung soil were compared, the degree of compaction in the forest area was less than compaction area, indicating the need for the employment of soil resting period in the compaction area. 2. The pH measurements of all four royal tombs soil were higher in top soil than sub soil. The higher soil pH values in Jongmyo and Seooneung seem to result from the application of soil conditioner. In the case of Seooneung, the values for soil pH and organic content were higher in the forest area than those in compaction area. It is thought that active soil management was employed in the forest area through application of organic matters and soil conditioners. 3. The heavy metal contents from soil of Changdeokgung and Jongmyo were higher than that from soil of Dongguneung. Since Changdeokgung and Jongmyo are located inside Seoul, it is thought that the high level of heavy metal concentrations in these royal tomb soil is the result of accumulation of pollutants from the city.

Protective Effects of Enzymatic Oyster Hydrolysate on Acetaminophen-induced HepG-2 Cell Damage (아세트아미노펜 유도 HepG-2 세포주 손상에 대한 굴 효소 가수분해물의 보호 효과)

  • Park, Si-Hyang;Moon, Sung-Sil;Xie, Cheng-Liang;Choung, Se-Young;Choi, Yeung-Joon
    • Journal of the Korean Society of Food Science and Nutrition
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    • v.43 no.8
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    • pp.1166-1173
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    • 2014
  • This study investigated the detoxification effects of enzymatic hydrolysate from oyster on acetaminophen-induced toxicity using HepG-2 cells. Oyster hydrolysate was made with 1% Protamex and 1% Neutrase after treatment with transglutaminase (TGPN) or without (PN). Two types of oyster hydrolysate were added to human-derived HepG-2 hepatocytes damaged by acetaminophen, after which the survival rate of HepG-2 cell was measured. In addition, glutamic oxaloacetic transaminase (GOT) and glutamic pyruvic transaminase (GPT) activities in the culture media were evaluated. The survival rates of HepG-2 cells were $136.2{\pm}1.4%$ at $100{\mu}g/mL$ of TGPN and $179.6{\pm}3.8%$ at $200{\mu}g/mL$ of TGPN. These cell survival rates were higher compared to that of the negative control group ($60.7{\pm}3.2%$) treated only with acetaminophen. GOT activity was $38.3{\pm}0.2$ Karmen/mL in the negative control group, whereas it was $19.9{\pm}0.5$ for TGPN ($200{\mu}g/mL$) and $22.0{\pm}2.4$ Karmen/mL for PN ($200{\mu}g/mL$). GOT and GTP activities were shown to be dependent on TGPN concentration, and significant reduction in activities could be conformed. The detoxification efficacy of TGPN was higher compared to that of PN. These results suggest that oyster hydrolysate has potential as a healthy food or pro-drug for liver protection.

Determination of shear wave velocity profiles in soil deposit from seismic piezo-cone penetration test (탄성파 피에조콘 관입 시험을 통한 국내 퇴적 지반의 전단파 속도 결정)

  • Sun Chung Guk;Jung Gyungja;Jung Jong Hong;Kim Hong-Jong;Cho Sung-Min
    • 한국지구물리탐사학회:학술대회논문집
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    • 2005.09a
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    • pp.125-153
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    • 2005
  • It has been widely known that the seismic piezo-cone penetration test (SCPTU) is one of the most useful techniques for investigating the geotechnical characteristics including dynamic soil properties. As the practical applications in Korea, SCPTU was carried out at two sites in Busan and four sites in Incheon, which are mainly composed of alluvial or marine soil deposits. From the SCPTU waveform data obtained from the testing sites, the first arrival times of shear waves were and the corresponding time differences with depth were determined using the cross-over method, and the shear wave velocity profiles (VS) were derived based on the refracted ray path method based on Snell's law and similar to the trend of cone tip resistance (qt) profiles. In Incheon area, the testing depths of SCPTU were deeper than those of conventional down-hole seismic tests. Moreover, for the application of the conventional CPTU to earthquake engineering practices, the correlations between VS and CPTU data were deduced based on the SCPTU results. For the empirical evaluation of VS for all soils together with clays and sands which are classified unambiguously in this study by the soil behavior type classification Index (IC), the authors suggested the VS-CPTU data correlations expressed as a function of four parameters, qt, fs, $\sigma$, v0 and Bq, determined by multiple statistical regression modeling. Despite the incompatible strain levels of the down-hole seismic test during SCPTU and the conventional CPTU, it is shown that the VS-CPTU data correlations for all soils clays and sands suggested in this study is applicable to the preliminary estimation of VS for the Korean deposits and is more reliable than the previous correlations proposed by other researchers.

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Studies on the Processings of Sterilized Salt-Fermented Anchovy Sauces (멸치액젓의 레토르트 식품화에 관한 연구)

  • Oh, Kwang-Soo
    • Korean Journal of Food Science and Technology
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    • v.28 no.6
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    • pp.1038-1044
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    • 1996
  • The salt-fermented anchovy sauce (AS) was packed in round No. 307-1 can, and thermally processed at $121.1^{\circ}C$ to obtain Fo values of 3, 5 and 10. The changes of food components and qualifies by thermal processing of sterilized AS (RAS) were examined. The compositions of AS were as followed; pH 6.81, VBN 394.7 mg/100g, total nitrogen 2,195.5 mg%, amino-nitrogen 1,010.5 mg%, and acidity 10.5 ml. Viable cell counts of AS on 0%, 5%, 20% NaCl-medium were $2.9{\times}10^3,\;9.1{\times}10^3$ and not detected, respectively. And viable cell counts of RAS were not detected. Acidity, total nitrogen and amino nitrogen contents of AS decreased slightly with the severeness of heat treatments, whereas pH and VBN content were increased. Total free amino acid contents of raw AS and RAS were 12,802.5 mg% and $11,212.6{\sim}12,105.4\;mg%$, and major amino acids were alanine, glutamic acid, leucine, isoleucine, valine and lysine. Also contents of IMP, hypoxanthine, TMAO and TMA in AS and RAS were 42.1 mg% and $35.5{\sim}40.9\;mg%$, 103.7 mg% and $103.1{\sim}105.5\;mg%$, 78.8 mg% and $58.2{\sim}71.6\;mg%$, 55.8 mg% and $58.9{\sim}68.5\;mg%$ respectively. And a little changes were observed in whole volatile components of AS with severeness of heat treatments by GC chromatogram patterns. Judging from the chemical and sensory evaluations, the Fo 3 heat treatment sample was not inferior to raw AS, and maintained good quality for 1 year storage.

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Economics and Ground Cover Growth Characteristics of a New Method of Shallow Soil Artificial Foundation Planting (저토심 인공지반 녹화공법의 경제성 및 도입 가능한 지피식물의 생육특성)

  • Choi, Jin-Woo;Kim, Hag-Kee;Lee, Kyong-Jae;Kang, Hyun-Kyung
    • Journal of the Korean Institute of Landscape Architecture
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    • v.37 no.5
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    • pp.98-108
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    • 2009
  • The purpose of this study is to analyze the characteristics of limited methods, economics and breeding appropriateness of native and imported ground cover plants in the methodology of a shallow soil rooftop garden. The new shallow soil rooftop gardening method uses a total of 13cm in soil thickness, including 4.5cm of top soil on a 7.5cm rock-wool-mat stacked onto a 1cm roll-type-draining plate. The total construction cost for each method of soil level within the design price standard for SEDUM BLOCK is 89,433won/$m^2$, and for DAKU is 92,550won/$m^2$. By comparing those two methods, the construction cost of the shallow soil artificial foundation methodology is 45,000won/$m^2$; this shows the new method is 50% less expensive than the existing method of shallow soil rooftop gardening. The experiment was executed on the rooftop of the Korean National Housing Corporation to ensure validity of the shallow soil artificial foundation planting, and the sample plants which were imported and grown now in native covering. A list investigating the growing plants was made of the cover rate in each plant class, both while alive and the dry plant weight. The native ground cover plants, Sedum kamtschaticum, Sedum middendorffianum, Allium senescens, Sedum sarmentosum, Aquilegia buergariana, and Caryopteris incana increased the cover rate, live weight and dry weight in the shallow soil artificial foundation method. Among the imported cover plants, Sedum sprium and Sedum reflexum, the cover rate increased and growth conditions improved. However, some species needed weed maintenance. After examination with the less expensive shallow soil artificial foundation method and growth analysis, it was found that rooftop gardens are a low-cost option and the growth of plants is great. This result shows the new method can contribute to the proliferation of rooftop gardens in urban settings.

A Study on Effect of B/L's Exemption Clauses Relating to the Governing Law of English Law (영국법의 준거법과 관련한 선하증권 면책약관의 효력에 관한 연구)

  • Han, Nak-Hyun;Jung, Jun-Sik
    • Journal of Korea Port Economic Association
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    • v.22 no.4
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    • pp.1-17
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    • 2006
  • In the Bill of Lading of The Irbenskiy Proliv is not subject to the Hague-Visby Rules in accordance with paragraphs (A) and/or (E) of cl.1 or to the Hague Rules in accordance with paragraphs (B) and/or (D) of cl.1. The Irbenskiy Proliv is very rare case that is effective to exempt the carrier as literal words of Bill of Lading. The action concerns cargoes of perishable goods shipped from Brazil to Japan, under Bills of Lading each of which contained an extensive carrier's exemption clause. A preliminary issue was ordered to be determined on the question whether c1.4 is effective to exempt the ralliers from any potential liability for the claims in this case. The court held that there is no reason to reject c1.4 as part of each of the contracts contained in or evidenced by the bills of lading; and it protects the carrier where damage to the goods shipped results from such causes. It is therefore effective to exempt the carriers from any potential liability for those claims.

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Evaluation of Internal Phosphorus Loading through the Dynamic Monitoring of Dissolved Oxygen in a Shallow Reservoir (수심이 얕은 저수지에서 용존산소 동적 모니터링을 통한 인 내부부하 평가)

  • Park, Hyungseok;Choi, Sunhwa;Chung, Sewoong;Ji, Hyunseo;Oh, Jungkuk;Jun, Hangbae
    • Journal of Environmental Impact Assessment
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    • v.26 no.6
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    • pp.553-562
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    • 2017
  • In these days, agricultural reservoirs are considered as a useful resource for recreational purposes, tour and cultural amenity for vicinity communities as well as irrigation water supply. However, many of the agricultural reservoirs are showing a eutrophic or hyper-eutrophic state and high level of organic contamination. In particular, about 44.7% of the aged agricultural reservoirs that constructed before 1945 exceed the water quality criteria for irrigational water use. In addition to external loading, internal nutrient loading from bottom sediment may play an important role in the nutrient budget of the aged reservoirs. The objectives of this study were to characterize variations of thermal structure of a shallow M reservoir (mean depth 1.7 m) and examine the potential of internal nutrient loading by continuous monitoring of vertical water temperature and dissolved oxygen (DO) concentration profiles in 2015 and 2016. The effect of internal loading on the total loading of the reservoir was evaluated by mass balance analysis. Results showed that a weak thermal stratification and a strong DO stratification were developed in the shallow M Reservoir. And, dynamic temporal variation in DO was observed at the bottom of the reservoir. Persistent hypoxic conditions (DO concentrations less than 2 mg/L) were established for 87 days and 98 days in 2015 and 2016, respectively, during the no-rainy summer periods. The DO concentrations intermittently increased during several events of atmospheric temperature drop and rainfall. According to the mass balance analysis, the amount of internal $PO_4-P$ loading from sediment to the overlying water were 37.9% and 39.7% of total loading during no-rainy season in 2015 and 2016, respectively on August when algae growth is enhanced with increasing water temperature. Consequently, supply of DO to the lower layer of the reservoir could be effective countermeasure to reduce nutrient release under the condition of persistent DO depletion in the bottom of the reservoir.

Effects of Supplemental Lighting of High Pressure Sodium and Lighting Emitting Plasma on Growth and Productivity of Paprika during Low Radiation Period of Winter Season (겨울철 약광기 파프리카의 생육 및 생산성에 대한 고압나트륨 및 Lighting Emitting Plasma 램프의 보광 효과)

  • Lee, Jong-Won;Kim, Ho Cheol;Jeong, Pyeong Hwa;Ku, Yang-Gyu;Bae, Jong Hyang
    • Horticultural Science & Technology
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    • v.32 no.3
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    • pp.346-352
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    • 2014
  • This research was carried out to investigate the effect of supplemental lighting on stable productivity of paprika (Capsicum annuum L.) during low radiation period of winter season. The supplemental lighting sources used in this research were high pressure sodium (HPS) and lighting emitting plasma (LEP). Photosynthetic photon flux density (PPFD) emitted from both lamps decreased as vertical distance from lamp increased. The PPFD of LEP lamps were twice more than that of the HPS lamp per unit distance, but the rate of decreased PPFD of t he LEP per unit distance was higher than that of HPS lamp. And different degrees of PPFD between HPS and LEP lamps by horizontal distance had a smaller degree of difference than by vertical distance at the 100 cm away point. As daily average PPFD measured at the top of the plant under the supplemental lighting during January, the supplemental lighting significantly increased radiation. Radiation of HPS and LEP lighting was 137% and 315% higher than control (without supplemental lighting = sunlight). Air temperature in the top of the plant was not significant different among treatments. HPS and LEP lighting had no effect on increase of flower settings. Leaf length and width with LEP lighting was the longest, photosynthetic was higher than those of other treatments. Supplemental lighting treatments significant increased fruit length and diameter. Especially LEP lighting treatment had a greater effect on fruit length and diameter. In conclusion, LEP lighting treatment during low radiation period greatly affected growth and production of paprika. Further research will be required for the suitable application of LEP lighting in paprika production.

Properties of the interfacial oxide and high-k dielectrics in $HfO_2/Si$ system ($HfO_2/Si$시스템의 계면산화막 및 고유전박막의 특성연구)

  • 남서은;남석우;유정호;고대홍
    • Proceedings of the Korea Crystallographic Association Conference
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    • 2002.11a
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    • pp.45-47
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    • 2002
  • 반도체 소자의 고집적화 및 고속화가 요구됨에 따라 MOSFET 구조의 게이트 절연막으로 사용되고 있는 SiO₂ 박막의 두께를 감소시키려는 노력이 이루어지고 있다. 0.1㎛ 이하의 소자를 위해서는 15Å 이하의 두께를 갖는 SiO₂가 요구된다. 하지만 두께감소는 절연체의 두께와 지수적인 관계가 있는 누설전류를 증가시킨다[1-3]. 따라서 같은 게이트 개패시턴스를 유지하면서 누설전류를 감소시키기 위해서는 높은 유전상수를 갖는 두꺼운 박막이 요구되는 것이다. 그러므로 약 25정도의 높은 유전상수를 갖고 5.2~7.8 eV 정도의 비교적 높은 bandgap을 갖으며, 실리콘과 열역학적으로 안정한 물질로 알려진 HfO2[4-5]가 최근 큰 관심을 끌고 있다. 본 연구에서는 HfO₂ 박막을 실제 소자에 적용하기 위하여 전극 및 열처리에 따른 HfO₂ 박막의 미세구조 및 전기적 특성에 관한 연구를 수행하였다. 이를 위해, HfO₂ 박막을 reactive DC magnetron sputtering 방법으로 증착하고, XRD, TEM, XPS를 사용하여 ZrO₂ 박막의 미세구조를 관찰하였으며, MOS 캐패시터 구조의 C-V 및 I-V 특성을 측정하여 HfO₂ 박막의 전기적 특성을 관찰하였다. HfO₂ 타겟을 스퍼터링하면 Ar 스퍼터링에 의해 에너지를 가진 산소가 기판에 스퍼터링되어 Si 기판과 반응하기 때문에 HfO₂ 박막 형성과 더불어 Si 기판이 산화된다[6]. 그래서 HfO₂같은 금속 산화물 타겟 대신에 순수 금속인 Hf 타겟을 사용하고 반응성 기체로 O₂를 유입시켜 타겟이나 시편위에서 high-k 산화물을 만들면 SiO/sub X/ 계면층을 제어할 수 있다. 이때 저유전율을 갖는 계면층은 증착과 열처리 과정에서 형성되고 특히 500℃ 이상에서 high-k/Si를 열처리하면 계면 SiO₂층은 증가하는 데, 이것은 산소가 HfO₂의 high-k 박막층을 뚫고 확산하여 Si 기판을 급속히 산화시키기 때문이다. 본 방법은 증착에 앞서 Si 표면을 희석된 HF를 이용해 자연 산화막과 오염원을 제거한 후 Hf 금속층과 HfO₂ 박막을 직류 스퍼터링으로 증착하였다. 우선 Hf 긍속층이 Ar 가스 만의 분위기에서 증착되고 난 후 공기중에 노출되지 않고 연속으로 Ar/O₂ 가스 혼합 분위기에서 반응 스퍼터링 방법으로 HfO₂를 형성하였다. 일반적으로 Si 기판의 표면 위에 자연적으로 생기는 비정질 자연 산화막의 두께는 10~15Å이다. 그러나 Hf을 증착한 후 단면 TEM으로 HfO₂/Si 계면을 관찰하면 자연 산화막이 Hf 환원으로 제거되기 때문에 비정질 SiO₂ 층은 관찰되지 않았다. 본 실험에서는 HfO2의 두께를 고정하고 Hf층의 두께를 변수로 한 게이트 stack의 물리적 특성을 살펴보았다. 선증착되는 Hf 금속층을 0, 10, 25Å의 두께 (TEM 기준으로 한 실제 물리적 두께) 로 증착시키고 미세구조를 관찰하였다. Fig. 1(a)에서 볼 수 있듯이 Hf 금속층의 두께가 0Å일때 13Å의 HfO₂를 반응성 스퍼터링 방법으로 증착하면 HfO₂와 Si 기판 사이에는 25Å의 계면층이 생기며, 이것은 Ar/O₂의 혼합 분위기에서의 스퍼터링으로 인한 Si-rich 산화막 또는 SiO₂ 박막일 것이다. Hf 금속층의 두께를 증가시키면 계면층의 성장은 억제되는데 25Å의 Hf 금속을 증착시키면 HfO₂ 계면층은 10Å미만으로 관찰된다. 그러므로 Hf 금속층이 충분히 얇으면 플라즈마내 산소 라디칼, 이온, 그리고 분자가 HfO₂ 층을 뚫고 Si 기판으로 확산되어 SiO₂의 계면층을 성장시키고 Hf 금속층이 두꺼우면 SiO/sub X/ 계면층을 환원시키면서 Si 기판으로의 산소의 확산은 막기 때문에 계면층의 성장은 억제된다. 따라서 HfO₂/Hf(Variable)/Si 계에서 HfO₂ 박막이 Si 기판위에 직접 증착되면, 순수 HfO₂ 박막의 두께보다 높은 CET값을 보이고 Hf 금속층의 두께를 증가시키면 CET는 급격하게 감소한다. 그러므로 HfO₂/Hf 박막의 유효 유전율은 단순 반응성 스퍼터링에 의해 형성된 HfO₂ 박막의 유전율보다 크다. Fig. 2에서 볼 수 있듯이 Hf 금속층이 너무 얇으면 계면층의 두께가 두꺼워 지고 Hf 금속층이 두꺼우면 HfO₂층의 물리적 두께가 두꺼워지므로 CET나 EOT 곡선은 U자 형태를 그린다. Fig. 3에서 Hf 10초 (THf=25Å) 에서 정전 용량이 최대가 되고 CET가 20Å 이상일 때는 high-k 두께를 제어해야 하지만 20Å 미만의 두께를 유지하려면 계면층의 두께를 제어해야 한다.

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