• Title/Summary/Keyword: 충진탑형 열분해 반응기

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Recovery of Gallium from GaAs Scraps by Thermal Decomposition (GaAs Scrap으로부터 熱分解法에 의한 갈륨 回收)

  • Choi, Young-Yoon;Nam, Chul-Woo;Yu, Yeon-Tae;Kim, Wan-Young
    • Resources Recycling
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    • v.14 no.2
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    • pp.28-32
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    • 2005
  • By using thermal decomposition method, the preliminary experiments for recovery of metallic Ga from GaAs scraps produced in the manufacturing of compound semiconductors were carried out in laboratory(200 g/batch) scales. From these results, decomposition appratus with packed tower was constructed in commercial scale(30 kg/batch). The decomposition rate of GaAs increased with raising decomposition temperature, but the yield of Ga decreased over 1000$^{\circ}C. As a result, the optimum decomposition temperature was 1000~1050$^{\circ}C when the pressure of decomposition reactor was 2~2.5${\times}10^{-2} mmHg, and the yield of Ga was about 89 wt.%. The commercial decomposition apparatus was designed with packed tower because the partial pressure of As in vapor state was not reduced even if the temperature of As vapor was decreased. The recovery yield of Ga from GaAs scraps in large scale experiment showed 99%.