• Transactions of the Korean Society of Mechanical Engineers
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• v.13 no.5
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• pp.991-998
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• 1989

This investigation was carried out for the purpose of studying the turbulent flow and mixing characteristics after collision of two jets depending upon the cross angle variations. For effectuating this experimental study, a subsonic wind tunnel and a constant temperature type two channel hot-wire anemometer system have been utilized. The jets issuing from two nozzles have same Reynolds numbers and their cross angle was variable. After collision of two jets, the cross section of the mixing flow, mean and fluctuating velocities and Reynolds stresses have been measured, and analyzed comparing them with semi-empirical equations. It was found that the nondirectional contour of the cross section agreed well with an elliptic formula and the mean velocities along the centerline had a good similarity independent of cross angle variations. The distributions of U over bar-components measured in the Y direction have a good similarity and agree well with semi-empirical equations of Hinze and Gortler. The Reynolds stresses of u'v' over bar on the Y axis show a similar distributions and their agreement with the theoretical curve is remarkable but those of u'w' over bar measured along the Z axis are randomly scattered.

• Journal of the Korean Society of Propulsion Engineers
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• v.17 no.2
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• pp.1-8
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• 2013

This study presents relations between the time lag and interaction index of the impinging-jet injectors using the time lag model in a model chamber. The response of the flame is analyzed to artificial perturbation with 5% amplitude of oxidizer speed at a resonance frequency. At the mixing point of fuel and oxidizer, which determines the characteristic length, the relationship between velocity perturbation and heat release rate is quantified by combustion parameters of interaction index and time lag. In this method, time lag or delay is calculated by the characteristic length and the average velocity obtained from numerical results. The tendency that the time delay decreases with axial jet velocity has been observed.

• Journal of the Korean Society of Propulsion Engineers
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• v.14 no.5
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• pp.24-31
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• 2010

Combustion-stability rating of impinging-jet injector is conducted numerically using hot-fire simulation in a subscale chamber with the five-element injector head. A sample F(fuel)-O(dxidizer)-O-F impinging-jet injector is adopted. In this work, instantaneous chemical reaction is adopted for hot-fire simulation based on the assumption that mixing process of fuel and oxidizer streams is controlling. The model chamber was designed based on the methodologies proposed in the previous work regarding geometrical dimensions and operating conditions. The present stability boundaries are in a good agreement with air-injection and hot-fire experimental data. The proposed numerical method can be applied cost-effectively to stability rating of jet injectors when mixing of fuel and oxidizer jets is the dominant process in instability triggering.

• Journal of the Korean Society for Aeronautical & Space Sciences
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• v.33 no.1
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• pp.62-68
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• 2005

An injector for fuel rich gas generator was designed and experimentally investigated. Five variations of F-O-F triplet impinging type injector were tested to evaluate spray characteristics with kerosene/water simulant propellant. Test was focused to find the effect of design variables of impinging angle, and impinging distance, on the atomization performance. A mixing efficiency is used to compare droplet distribution and local O/F ratio of each injector in the range of momentum ratio of 0.2~1.3. Test results shows the max value of mixing efficiency locates about the 0.8 in momentum ratio. And the injector with an impinging angle of 45 degree and impinging distance of 6mm shows the very good performance result suitable for fuel rich gas generator. A combustion test will be also conducted with selected injector to verify the spray pattern and mixing efficiency.

• Proceedings of the Korean Vacuum Society Conference
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• 2011.02a
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• pp.238-239
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• 2011

최근 반도체 산업은 더 높은 성능의 회로 제작을 통해 초고집적화를 추구하고 있다. 이를 위해서 회로 설계의 최소 선폭과 소자 크기는 지속적으로 감소하고 있고 이를 위한 배선 기술들은 플라즈마 공정을 이용한 식각공정에 크게 의존하고 있다. 식각공정에 있어서 반응가스의 조성은 식각 속도와 선택도를 결정하는 중요한 요소이다. 본 연구에서는 CIS QMS (closed ion source quadrupole mass spectrometer)를 이용하여 CF4+Ar를 이용한 실리콘 산화막의 플라즈마 식각 공정 시 생성되는 라디칼과 이온 종들을 측정하였다. Ar 이온이 기판표면과 충돌하여 기판물질간의 결합을 깨놓으면, 반응성 기체 및 라디칼과의 반응성이 커져서 식각 속도를 향상 시키게 된다. 본 실험에서는 2 MHz의 RPS (remote plasma source)를 이용하여 플라즈마를 발생시키고 13.56 MHz의 rf 전력을 기판에 인가하여 식각할 웨이퍼에 바이어스 전압을 유도하였다. CF4/(CF4+Ar)의 가스 혼합비가 커질수록 식각 부산물인 SiF3의 양은 증가 하였으며, CF4 혼합비가 0일 때(Ar 100%) 비하여 1일 때(CF4 100%) SiF3의 QMS 이온 전류는 106배 증가하였다. 이때의 Si와 결합하여 SiF3를 형성하는 F라디칼의 소모는 0.5배로 감소하였다. 또한 RPS power가 800 W일 때 플라즈마에 의해서 CF4는 CF3, CF2, CF로 해리 되며 SiO2 식각 시 라디칼의 직접적인 식각과 Si_F2의 흡착에 관여되는 F라디칼의 양은 CF3 대비 7%로 검출되었고, 식각 부산물인 SiF3는 13%로 측정되었다. Ar의 혼합비를 0 %에서 100%까지 증가시켜 가면서 측정한 결과 F/CF3는 $1.0{\times}105$에서 $2.8{\times}102$로 변화하였다. SiF3/CF3는 1.8에서 6.3으로 증가하여 Ar을 25% 이상 혼합하는 것은 이온 충돌 효과에 의한 식각 속도의 증진 기대와는 반대로 작용하는 것으로 판단된다.

• Electrical & Electronic Materials
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• v.6 no.3
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• pp.233-240
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• 1993

더블히트파이프장치를 이용하여 순수 Ar, Hg 및 Ar-Hg 혼합증기의 전자이동속도를 온도는 순수 Ar의 경우 293[.deg.K], Hg의 경우 453-540[.deg.K]. Ar-Hg 혼합증기의 경우 320[.deg.K], E/N은 0.4~10[Td], 기체압력은 10~100[Torr]범위에서 유도전류법에 의해 측정하였다. 한편 볼츠만 방정식의 Backward Prolongation계산법으로 전자에너지분포함수를 구하고 그 값으로부터 전자수송특성을 산출하여 실험치와 비교하고 탄성 및 비탄성 충돌 단면적을 결정하였다. 그리고 Ar기체에 Hg증기를 0.5%, 1%, 5%, 10% 혼합하였을 때의 전자에너지분포함수와 전자이동속도를 산출하고 그에 미치는 영향을 고찰하였다.

• The Journal of Korean Institute of Communications and Information Sciences
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• v.32 no.4A
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• pp.358-364
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• 2007

RFID, Radio Frequency Identification, technology is a contactless automatic identification technology using radio frequency. For this RFID technology to be widely spread, the problem of multiple tag identification, which a reader identifies a multiple number of tags in a very short time, has to be solved. Up to the present, many anti-collision algorithms have been developed in order to solve this problem, and those can be largely divided into ALOHA based algorithm and tree based algorithm. In this paper, two new anti-collision algorithms combining the characteristics of these two categories are presented. And the performances of the two algorithms are compared and evaluated in comparison with those of typical anti-collision algorithms: 18000-6 Type A, Type B, Type C, and query tree algorithm.

• Transactions of the Korean Society of Mechanical Engineers
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• v.12 no.4
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• pp.876-891
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• 1988

This study was carried out to investigate the mixing flow of a turbulent cross jet in a cylindrical chamber. A study on the turbulent mixing flow of a cross jet at 45.deg. with respect to each other in the free atmospheric condition was conducted before this study and has given us some fundamental experimental results. Present data have been analyzed and compared with semi-empirical equations for a round and a plane jets. Interests on this kind of cross jets (flows) have been increasing during the past several years for the purpose of the analysis of mixing flows and their applications. In this study, a turbulent cross jet of air in a cylindrical chamber has been conducted and the turbulent characteristics in the mixing region have been analyzed experimentally. The experimental data were discussed by comparing with the semi-empirical equations of Hinze and Gortler. From the experimental curve, the semi-empirical equations of mean velocities and Reynolds stresses have been derived. Three dimensional data acquisitions and the statistical treatments of turbulence characteristics were carried out by on-line computer measurement system connected with the constant temperature type 2-channel hot-wire anemometer system.

• Journal of the Korean Society of Propulsion Engineers
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• v.22 no.4
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• pp.44-54
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• 2018

In a spray experiment using a venturi mounted on a lean premixed LPP injector, droplets appear to have non-uniform distributions. To solve this problem, the exit angle of the venturi was changed to form a dump surface on the nozzle neck. The dump surface improved the atomization performance and minimized droplet loss while forming recirculation zone in the venturi exit. In order to solve the non-uniform spray of the injector, the flow characteristics inside the venturi and SMD of the spray are compared. Finally, an optimum venturi shape is selected to minimize the spray loss and improve the spray performance.

• Proceedings of the KIEE Conference
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• 2006.07c
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• pp.1374-1375
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• 2006

Ar/$Cl_2$ 유도결합 플라즈마 (ICP)의 가스 혼합비에 따른 $(Bi_{4-x}La_x)Ti_{3}O_{12}$ 박막의 식각 메커니즘과 식각면에서의 플라즈마 손상을 조사하였다. BLT 박막의 최대식각률은 Ar/$Cl_2$ 플라즈마에서의 Ar 가스 혼합비가 80%일 때 50.8 nm의 값을 보였다. 정전 탐침을 통해 Ar 가스의 혼합비에 따른 전자온도와 전자밀도를 관측하였다. 박막 표면의 X-ray photoemission spectroscopy 분석과 박막의 이력곡선을 통해 BLT 박막의 식각 손상은 Cl 원자와의 반응에 의한 화학적 식각 손상이 BLT 박막 표면에서의 Ar 이온충돌에 의한 물리적 손상보다 더 크다는 것을 확인 할 수 있었다.