• Proceedings of the Korean Vacuum Society Conference
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• 2013.02a
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• pp.303-303
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• 2013

표면에 부착된 나노/마이크로 입자는 다양한 분야에서 오염물질로 작용한다. 특히 형상이 미세하고 공정 단계가 복잡한 반도체 및 디스플레이 등의 전자 소자 공정에서 미치는 영향이 크다. 따라서 입자상 오염물질의 제거에 관하여 상용화된 습식 세정 방법이 다양하게 존재하지만 표면 손상, 화학 반응, 부산물, 세정 효율 등 여러 가지 문제점이 있어 새로운 세정 방법이 요구된다. 이에 건식 세정 방법, 그 중에서도 입자의 충돌을 통해 제거하는 방법인 에어로졸 세정, 필렛 세정 등이 개발되었으나 마이크로 크기로 생성되는 입자로 인하여 형상의 손상이 크다. 따라서 본 연구에서는 나노 단위로 기체/고체 혼합물만 생성하여 세정하는 가스 클러스터 세정 방법을 이용하여 이러한 문제점을 해결하고자 하였다. 클러스터 세정 장비를 이용한 표면 처리는 충돌에 의한 제거에 기반한다. 따라서 생성 및 가속되는 클러스터로부터 대상으로 전달되는 운동량의 정도가 세정 특성에 영향을 미치며 이는 생성되는 클러스터의 크기에 종속적이다. 생성 클러스터의 크기 분포는 분사 거리, 유량, 분사 각도, 노즐 냉각 온도 등의 변수에 관한 함수이다. 따라서 본 연구에서는 $CO_2$ 클러스터를 이용한 세정 특성을 정의 및 제어하기 위하여 생성되는 클러스터 특성에 관하여 이론적, 수치 해석적, 실험적 연구를 수행하였다. 먼저, $CO_2$의 물리적 특성 및 이를 이용한 특정 크기 오염 물질을 제거하는데 요구되는 임계 클러스터 크기 계산을 이론적으로 구하였다. 이는 오염물질의 부착력과 클러스터의 운동량 전달에 의한 제거력의 비교를 통해 이루어졌다. 두 번째로 클러스터 크기분포를 수치 해석적으로 예측하기 위하여 각 조건에 대하여 유동해석을 수행하고 이를 통해 구해진 노즐 내 기체의 냉각 속도를 GDE (General Dynamic Equation) 계산에 대입하여 구하였다. 마지막으로 PBMS(Particle Beam Mass Spectrometer)를 이용하여 실험적으로 클러스터 크기분포를 각 조건에 대하여 구할 수 있었다. 또한 크기 분포 경향에 대한 간접적 확인을 위하여 포토레지스트가 코팅된 웨이퍼에 클러스터의 충격으로 생성된 크레이터 크기의 경향을 분석하였다. 이와 같은 방법에 의하여 생성되는 클러스터는 노즐의 유량 증가, 온도 상승에 각각 비례하여 작아지는 것을 확인할 수 있었다.

• Transactions of the Korean Society of Mechanical Engineers B
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• v.41 no.3
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• pp.161-169
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• 2017

The present study investigated the effect of the rib arrangement and a guide vane for enhancing internal cooling of the blade. Two types of rib arrangements were used in the first and second passage in parallel. Aspect ratio of the channel was 5 and a fixed Reynolds number based on hydraulic diameter was 10,000. The attack angle of rib was $60^{\circ}$, rib pitch-to-height ratio (p/e) was 10, and the rib height-to-hydraulic-diameter ratio ($e/D_h$) was 0.075. The effect of an interaction between Dean vortices and the secondary vortices from the first passage was observed. Overall, the attack angle of rib in the first passage was dominant factor to heat transfer and flow patterns in turning region. Also, the channel with a guide vane showed enhanced heat transfer at the tip surface with reducing flow separation and recirculation.

• 한국전산유체공학회:학술대회논문집
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• 2010.05a
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• pp.530-533
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• 2010

This paper presents numerical analysis and design optimization of various turbine blade cooling techniques with three-dimensional Reynolds-averaged Navier-Stokes(RANS) analysis. The fluid flow and heat transfer have been performed using ANSYS-CFX 11.0. A fan-shaped hole for film-cooling has been carried out to improve film-cooling effectiveness with the radial basis neural network method. The injection angle of hole, lateral expansion angle of hole and ratio of length-to-diameter of the hole are chosen as design variables and spatially averaged film-cooling effectiveness is considered as an objective function which is to be maximized. The impingement jet cooling has been performed to investigate heat transfer characteristic with geometry variables. Distance between jet nozzle exit and impingement plate, inclination of nozzle and aspect ratio of nozzle hole are considered as geometry variables. The area averaged Nusselt number is evaluated each geometry variables. A rotating rectangular channel with staggered array pin-fins has been investigated to increase heat transfer performance ad to decrease friction loss using KRG modeling. Two non-dimensional variables, the ratio of the eight diameter of the pin-fins and ratio of the spacing between the pin-fins to diameter of the pin-fins selected as design variables. A rotating rectangular channel with staggered dimples on opposite walls are formulated numerically to enhance heat transfer performance. The ratio of the dimple depth and dimple diameter are selected as geometry variables.

• The KSFM Journal of Fluid Machinery
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• v.18 no.2
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• pp.60-66
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• 2015

Conjugate heat transfer analysis was performed to investigate the flow and cooling performance of the high pressure turbine nozzle of gas turbine engine. The CHT code was verified by comparison between CFD results and experimental results of C3X vane. The combination of k-${\omega}$ based SST turbulence model and transition model was used to solve the flow and thermal field of the fluid zone and the material property of CMSX-4 was applied to the solid zone. The turbine nozzle has two internal cooling channels and each channel has a complex cooling configurations, such as the film cooling, jet impingement, pedestal and rib turbulator. The parabolic temperature profile was given to the inlet condition of the nozzle to simulate the combustor exit condition. The flow characteristics were analyzed by comparing with uncooled nozzle vane. The Mach number around the vane increased due to the increase of coolant mass flow flowed in the main flow passage. The maximum cooling effectiveness (91 %) at the vane surface is located in the middle of pressure side which is effected by the film cooling and the rib turbulrator. The region of the minimum cooling effectiveness (44.8 %) was positioned at the leading edge. And the results show that the TBC layer increases the average cooling effectiveness up to 18 %.

• Journal of the Korean Society for Aeronautical & Space Sciences
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• v.33 no.6
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• pp.64-70
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• 2005

The overall results of hot firing tests of fuel-rich gas generator with impinging injector at design and off-design points are described. The gas generator consists of an injector head with impinging injector, a water cooled combustor wall, a turbulence ring to enhance mixing, an instrument ring measuring temperature and pressure and a nozzle. The combustion tests were successfully performed without damage of gas generator. Test results show that the outlet temperature is not dependent on residence time of hot gas within 4～6msec but dependent on chamber pressure. The relation between outlet temperature and combustion efficiency resulting from measured pressure, mass flow rate and area of nozzle throat is shown. The overall O/F ratio is the critical parameter to determine the outlet temperature and the linear correlation between two parameters is established.

• Aerospace Engineering and Technology
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• v.4 no.2
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• pp.135-141
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• 2005

The procedure of conceptual and detailed design of sub-scale combustor using bipropellant swirl or impinging injector with external or internal mixing for a liquid rocket engine are described in this paper. The sub-scale combustor uses liquid oxygen(LOx) and kerosene as propellants and has a injector head, an ablative material combustor wall and a water cooled nozzle. The injector head has LOx manifold, fuel manifold, fire face plate, one center swirl or impinging injector and 18 main swirl or impinging injectors.

• Journal of computational fluids engineering
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• v.7 no.3
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• pp.9-16
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• 2002

Most of modem aerospace gas turbines must be operated at a gas temperature which is several hundreds of degrees higher than the melting temperatures of the materials used in their construction. Complicated cooling schemes need to be employed in the combustor walls and in the high pressure turbine stages. Internal passages are cast or machined into the hot sections of aero-gas turbine engines and air from the compressor is used for cooling. In many cases, the cooling system is engineered to utilize jets of high velocity air, which impinge on the internal surfaces of the components. They are categorized as 'Impinging Cooling Method' and 'Vortex Cooling Method'. Specially, research of new cooling system(Vortex Cooling Method) that overcomes inefficiency of film cooling and limitation of space. The focus of new cooling system that improves greatly cooling efficiency using less amount of cooling air on surface heat transfer elevation. Therefore, in this study, a numerical analysis has been peformed for characteristics of flow and heat transfer in the swirl chamber and compared with the flow measurements by LDV. Especially, for understanding high heat transfer efficiency in the vicinity of wall, we considered flow structure, vortex mechanism and heat transfer characteristics with variation of the Reynolds number.

• Transactions of the Korean Society of Mechanical Engineers B
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• v.27 no.1
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• pp.1-8
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• 2003

The heat transfer and flow measurements on a cylindrical pedestal mounted on a flat surface with a turbulent impinging jet were made. The experiments were made for the jet Reynolds number of Re = 23,000, the dimensionless nozzle-to-surface distance of L/d = 2~10, the dimensionless pedestal height of H/D = 0~1.5. Measurements of the surface temperature and the Nusselt number distributions on the plate surface were made using liquid crystal and shroud-transient technique. Flow measurements involve smoke flow visualization and the wall pressure coefficient. The results show that the wall pressure coefficient sharply decreases along the upper surface of the pedestal. However, the pressure increases when the fluid escapes from the pedestal and then collides on the plate surface. The secondary maxima in the Nusselt numbers occur in the region of 1.0 $\leq$ r/d $\leq$ 1.9. Their values for the case of H/D = 0.5 are maximum 80% higher than those for other cases. The formation of the secondary maxima may be attributed to the reattachment of flow on the plate surface which was separated at the edge of the pedestal.

• Proceedings of the Korean Institute of Surface Engineering Conference
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• 2018.06a
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• pp.46-46
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• 2018

메모리 소자의 수요가 데스크톱 컴퓨터의 정체와 모바일 기기의 폭발적인 증가로 NAND flash 메모리의 고집적화로 이어져서 3차원 집적 기술의 고도화가 중요한 요소가 되고 있다. 1 mm 정도의 얇은 웨이퍼 상에 만들어지는 메모리 소자는 실제 두께는 몇 마이크로미터 되지 않는다. 수직방향으로 여러 장의 웨이퍼를 연결하면 폭 방향으로 이미 거의 한계에 도달해있는 크기 축소(shrinking) 기술에 의지 하지 않고서도 메모리 소자의 용량을 증대 시킬 수 있다. CPU, AP등의 논리 연산 소자의 경우에는 발열 문제로 3D stacking 기술의 구현이 쉽지 않지만 메모리 소자의 경우에는 저 전력화를 통해서 실용화가 시작되었다. 스마트폰, 휴대용 보조 저장 매체(USB memory, SSD)등에 수 십 GB의 용량이 보편적인 현재, FEOL, BEOL 기술을 모두 가지고 있는 국내의 반도체 소자 업체들은 자연스럽게 TSV 기술과 이에 필요한 장비의 개발에 관심을 가지게 되었다. 특히 이 중 TSV용 스퍼터링 장치는 transistor의 main contact 공정에 전 세계 시장의 90% 이상을 점유하고 있는 글로벌 업체의 경우에도 완전히 만족스러운 장비를 공급하지는 못하고 있는 상태여서 연구 개발의 적절한 시기이다. 기본 개념은 일반적인 마그네트론 스퍼터링이 중성 입자를 타겟 표면에서 발생시키는데 이를 다시 추가적인 전력 공급으로 전자 - 중성 충돌로 인한 이온화 과정을 추가하고 여기서 발생된 타겟 이온들을 웨이퍼의 표면에 최대한 수직 방향으로 입사시키려는 노력이 핵심이다. 본 발표에서는 고전력 이온화 스퍼터링 시스템의 자기장 해석, 냉각 효율 해석, 멀티 모듈 회전 자석 음극에 대한 동역학적 분석 결과를 발표한다. 그림1에는 이중 회전 모듈에 대한 다물체 동역학 해석을 Adams s/w package로 해석하기 위하여 작성한 모델이고 그림2는 180도 회전한 서브 모듈의 위상이 음극 냉각에 미치는 효과를 CFD-ACE+로 유동 해석한 결과를 나타내고 있다.

• The KSFM Journal of Fluid Machinery
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• v.11 no.6
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• pp.24-30
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• 2008

In order to enhance the heat/mass transfer, a turbulator has been installed at the exit of injection hole for the impingement/effusion cooling system. The local heat/mass transfer coefficients have been obtained by a naphthalene sublimation method. Experiments have been carried out at the fixed jet Reynolds number of 10,000. Two turbulators with different diameter have been used in the current study. The result presents that the turbulator leads to the increase in flow mixing and jet velocity, consequently enhancing the heat/mass transfer at a stagnation region. Further, the stagnation region is divided into four small areas with peak value. In the existence of initial crossflow, the stagnation regions move downstream and low heat/mass transfer regions are formed regardless of the installation of turbulator. However, the increased jet velocity by turbulator reduces the crossflow effect against the jet, resulting in decrease of low heat/mass transfer regions. Compared to the case without turbulator, the installation of turbulator yields $5{\sim}10%$ augmentation in averaged Sh value.