• Proceedings of the Korean Vacuum Society Conference
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• 2013.08a
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• pp.230-230
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• 2013

플라즈마를 활용한 미세 패턴의 건식 식각은 반도체 소자 공정에 있어서 가장 중요한 기술 중 하나이다. 한편, 매년 발행되는 ITRS Roadmap 에 따르면 DRAM 의 1/2 pitch 는 감소하는 동시에 Contact A/R (Aspect Ratio) 는 증가하고 있다. 이러한 추세 속에서 기존의 공정을 그대로 활용할 경우 식각물의 프로파일 왜곡 혹은 휨 현상이 발생하고 식각 속도가 저하되며 이러한 특성들이 결과적으로는 생산성의 저하로 이어질 수 있다. 이러한 현상을 최소화하기 위해서는 무엇보다 독립된 plasma parameter 들이 식각물의 프로파일 혹은 식각 속도 등에 어떠한 영향을 주는 지에 대한 학문적 이해가 필요하다. 본 논문에서는 최소 CD (Critical Dimenstion) 100nm, 최대 A/R 30 인 HARC (High Aspect Ration Contact hole) 의 식각 특성이 plasma parameter 에 따라 어떻게 변하는지 확인해 보고자 한다. 산화물의 식각은 대표적인 high density plasma source 중의 하나인 ICP에서 진행하였으며 기존에 알려진 plasma parameter 에 더하여 자장의 인가가 산화물의 식각 특성에 어떠한 영향을 주는지 살펴보고자 전자석을 ICP 에 추가로 설치하여 실험을 진행하였다. 결과적으로, plasma parameter 에 따른 혹은 자장의 세기 변화에 따른 산화물의 식각 실험을 플라즈마 진단 실험과 병행하여 진행함으로써 다양한 인자에 따른 산화물의 식각 메커니즘을 정확하게 이해하고자 하였다. 실험 내용을 요약하면 다음과 같다. 먼저, 전자석의 전류 인가 조건에 따라 축 방향 혹은 반경 방향으로의 자장의 분포가 달라질 수 있음을 확인하였고 플라즈마 진단 결과 축 방향 혹은 반경 방향으로의 자장이 증가하였을 때 고밀도의 플라즈마가 형성될 수 있음은 물론 반경 방향으로의 플라즈마 밀도의 균일도가 향상됨을 확인할 수 있었다. 또한 ICP 조건에서 바이어스 주파수, 압력, 바이어스 파워, 소스 파워, 가스 유량 등의 plasma parameter 가 산화물의 식각 특성에 미치는 영향 및 메커니즘을 규명하였고 이 과정을 통해 최적화된 프로파일을 바탕으로 축 방향 혹은 반경 방향으로 증가하는 자장을 인가하였을 때 (M-ICP 혹은 자화 유도 결합 플라즈마) ICP 대비 산화물의 식각 속도가 증가함은 물론 PR-to-oxide 의 선택비가 개선될 수 있음을 확인할 수 있었다. 자장의 인가에 따른 산화물의 정확한 식각 메커니즘은 향후의 실험 진행을 통해 이해하고 이를 통해 궁극적으로는 산화물의 식각 공정이 나아가야 할 올바른 방향을 제시하고자 한다.

• Tribology and Lubricants
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• v.23 no.5
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• pp.187-194
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• 2007

The profile of the roller in the axial direction is the main design factor in order to increase endurance life against the contact fatigue due to the stress concentration along the edge of the roller. Even under the elas-tohydrodynamic lubrication (ehl) conditions, the stress concentration along the edge of the roller greatly worsens the fatigue life both for the roller and contacting body. In this study, roller contacts of finite axial length are studied for the film thickness and pressure of ehl. For the real contact behaviors under the ehl conditions, multigrid and multi-level method is applied so that much higher loading conditions can be investigated. Several axial profiles of roller are investigated to verify how both ehl film and pressure are generated and some of them are recommended for the ehl contact condition.

• Journal of the Korea Academia-Industrial cooperation Society
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• v.20 no.12
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• pp.53-59
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• 2019

To reduce the vibrations and shocks during the cargo transportation of high value-added goods, the vibration history was measured on the truck transportation section (Asan-Uiwang) and the freight train transportation section (Uiwang-Pusan). The internal vibrations of the container were obtained by attaching acceleration sensors in three axis directions (longitudinal, lateral. and vertical directions) on the front and rear bogies. The rail vibration profile (0.29Grms) proposed in ASTM D-4169 was approximately 50% higher than the truck vibration profile (0.54Grms). The overall vibration was 16% and 33 % lower in the longitudinal and transverse directions, respectively, compared to the ASTM truck transport vibration profile. On the other hand, the vertical vibration measurement history partially exceeded the ASTM truck transport vibration profile over the range, 4 - 15Hz, and over 60Hz. The vibration measurement history of the cargo train was similar to that of the road. The longitudinal and lateral vibration history was lower than the ASTM D-4169 rail vibration profile, while the vertical history was over 30Hz.

• Journal of Convergence for Information Technology
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• v.11 no.10
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• pp.20-26
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• 2021

In this paper, we studied the rotation angle estimation methods required for image alignment in an image recognition environment. In particular, a rotation angle estimation method applicable to a low specification embedded-based environment was proposed and compared with the existing method using complex moment. The proposed method estimates the rotation angle through similarity mathcing of the 1D projection profile along the radial axis after converting an image into polar coordinates. In addition, it is also possible to select a method of using vector sum of the projection profile, which more simplifies the calculation. Through experiments conducted on binary pattern images and gray-scale images, it was shown that the estimation error of the proposed method is not significantly different from that of complex moment-based method and requires less computation and system resources. For future expansion, a study on how to match the rotation center in gray-scale images will be needed.

• The Transactions of the Korean Institute of Power Electronics
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• v.9 no.2
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• pp.142-149
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• 2004

PMLSM(Permanent Magnet linear Synchronous Motor) has widely applied to industrial automations, machine tools and semiconductor equipments due to the merit on the reduction of noise, vibration and the superior dynamic characteristics in comparison to the conventional method, which uses mechanical transfer equipments. Especially, in the case of applying to Z-axis operation structure, control system needs the method of an initial angle setting and the improvement of up/down operation characteristics. This paper proposes an initial angle setting algorithm and a variable gain schedule using real speed and moving direction to improve up/down operation characteristics. The effectiveness of proposed algorithms Is demonstrated by comparing to a conventional gain system via 4-point absolute positions profile with each velocity, acceleration and deceleration.

• Progress in Medical Physics
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• v.25 no.4
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• pp.233-241
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• 2014

The aim of this study is to develop a new software tool for 3D dose verification using $PRESAGE^{REU}$ Gel dosimeter. The tool included following functions: importing 3D doses from treatment planning systems (TPS), importing 3D optical density (OD), converting ODs to doses, 3D registration between two volumetric data by translational and rotational transformations, and evaluation with 3D gamma index. To acquire correlation between ODs and doses, CT images of a $PRESAGE^{REU}$ Gel with cylindrical shape was acquired, and a volumetric modulated arc therapy (VMAT) plan was designed to give radiation doses from 1 Gy to 6 Gy to six disk-shaped virtual targets along z-axis. After the VMAT plan was delivered to the targets, 3D OD data were reconstructed from 512 projection data from $Vista^{TM}$ optical CT scanner (Modus Medical Devices Inc, Canada) per every 2 hours after irradiation. A curve for converting ODs to doses was derived by comparing TPS dose profile to OD profile along z-axis, and the 3D OD data were converted to the absorbed doses using the curve. Supra-linearity was observed between doses and ODs, and the ODs were decayed about 60% per 24 hours depending on their magnitudes. Measured doses from the $PRESAGE^{REU}$ Gel were well agreed with the TPS doses at central region, but large under-doses were observed at peripheral region at the cylindrical geometry. Gamma passing rate for 3D doses was 70.36% under the gamma criteria of 3% of dose difference and 3 mm of distance to agreement. The low passing rate was resulted from the mismatching of the refractive index between the PRESAGE gel and oil bath in the optical CT scanner. In conclusion, the developed software was useful for 3D dose verification from PRESAGE gel dosimetry, but further improvement of the Gel dosimetry system were required.

• The Journal of Korean Society for Radiation Therapy
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• v.23 no.1
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• pp.13-19
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• 2011

Purpose: It's essential to minimize the tumor motion and identify the exact location of the lesions to achieve the improvement in radiation therapy efficiency during SBRT. In this study, we made the established compression belt to reduce respiratory motion and evaluated the usefulness of clinical application in SBRT. Materials and Methods: We analyzed the merits and demerits of the established compression belt to reduce the respiratory motion and improved the reproducibility and precision in use. To evaluate the usefulness of improved compression belt for respiratory motion reduction in SBRT, firstly, we reviewed the spiral CT images acquired in inspiration and expiration states of 8 lung cancer cases, respectively, and analyzed the three dimensional tumor motion related to respiration. To evaluate isodose distribution, secondly, we also made the special phantom using EBT2 film (Gafchronic, ISP, USA) and we prepared the robot (Cartesian Robot-2 Axis, FARARCM4H, Samsung Mechatronics, Korea) to reproduce three dimensional tumor motion. And analysis was made for isodose curves and two dimensional isodose profiles with reproducibility of respiratory motion on the basis of CT images. Results: A respiratory motion reduction compression belt (Velcro type) that has convenient use and good reproducibility was developed. The moving differences of three dimensional tumor motion of lung cancer cases analyzed by CT images were mean 3.2 mm, 4.3 mm and 13 mm each in LR, AP and CC directions. The result of characteristic change in dose distribution using the phantom and rectangular coordinates robot showed that the distortion of isodose has great differences, mean length was 4.2 mm; the differences were 8.0% and 16.8% each for cranio-caudal and 8.1% and 10.9% each for left-right directions in underdose below the prescribed dose. Conclusion: In this study, we could develop the convenient and efficient compression belt that can make the organs' motion minimize. With this compression belt, we confirmed that underdose due to respiration can be coped with when CTV-PTV margins of mean 6 mm would be used. And we conclude that the respiratory motion reduction compression belt we developed can be used for clinical effective aids along with the gating system.